Ejector pin auxiliary positioning member
The ejector pin auxiliary positioning component simplifies the ejector pin calibration process, solves the problem of cumbersome ejector pin position correction, prevents the generation of micro-dust particles, and ensures the environmental quality inside the reaction chamber.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SIEN (QINGDAO) INTEGRATED CIRCUITS CO LTD
- Filing Date
- 2025-04-24
- Publication Date
- 2026-06-05
Smart Images
Figure CN224329879U_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the field of semiconductor equipment technology, and more specifically, relates to a pin auxiliary positioning component. Background Technology
[0002] In the field of semiconductor technology, dry etching is a common etching process. Dry etching involves introducing a specific etching gas into the wafer surface within a reaction chamber. Under specific conditions, the etching gas reacts chemically with the material on the wafer surface, thereby achieving the etching purpose.
[0003] The entry and exit of the wafer into the reaction chamber is accomplished by the raising and lowering of the ejector pins on the electrostatic chuck. If the ejector pins are misaligned during their movement relative to the chuck, friction will occur between them and the ejector pin holes on the chuck, resulting in the generation of micro-dust particles. If these particles land on the wafer surface, they can easily cause defects. Therefore, the ejector pins require regular maintenance during daily production.
[0004] During the installation of an electrostatic chuck, it is essential to ensure that there is no friction between the ejector pin and the ejector pin hole, meaning the ejector pin must be centered within the ejector pin hole. However, current jigs used for installing and removing electrostatic chucks often fail to guarantee the ejector pin's position within the ejector pin hole. After installation, if the ejector pin is misaligned, the offset must be recorded. Then, based on this offset, the positions of the electrostatic chuck and the Diverge plate, as well as the ejector pin holder and the Diverge plate, must be repeatedly adjusted until the ejector pin is centered within the ejector pin hole. The problem with this approach is that the ejector pin alignment process is cumbersome and prone to generating particulate matter, leading to a deterioration of the environment within the reaction chamber. Utility Model Content
[0005] The purpose of this application is to provide an auxiliary positioning component for a ejector pin, so as to solve the technical problem that the position correction process of the ejector pin in the prior art is relatively cumbersome.
[0006] To achieve the above objectives, the technical solution adopted in this application is to provide an ejector pin auxiliary positioning component, comprising:
[0007] A positioning rod is provided with a positioning hole, which penetrates the positioning rod along the axial direction and is coaxial with the positioning rod;
[0008] A positioning ring protrudes from the outer wall of the positioning rod;
[0009] The positioning rod is used to be inserted into the pin hole on the target electrostatic chuck, and the positioning rod is coaxially arranged with the pin hole; the positioning ring is used to abut against one side wall of the target electrostatic chuck in the axial direction to limit the depth of the positioning rod inserted into the pin hole.
[0010] Optionally, the positioning ring is disposed at one end of the positioning rod along its axial direction.
[0011] Optionally, the positioning ring and the positioning rod are integrally formed.
[0012] Optionally, the positioning ring is provided with an abutment surface that extends radially along the positioning rod and is used to abut against one sidewall of the target electrostatic chuck in the axial direction.
[0013] Optionally, the length between the abutting surface and the end of the positioning rod away from the positioning ring is set as a first length dimension, and the length of the pin hole along its axial direction is set as a second length dimension, wherein the first length dimension is greater than the second length dimension.
[0014] Optionally, along the axial direction of the positioning rod, the positioning rod has a first end and a second end opposite to each other, and the positioning ring is located at the first end;
[0015] The positioning rod is provided with an annular guide portion, which is located on the side of the positioning ring facing the second end;
[0016] The diameter of the guide portion near the first end is defined as the first diameter, and the diameter of the guide portion near the second end is defined as the second diameter;
[0017] The first diameter is greater than the diameter of the positioning rod, and the first diameter is less than the diameter of the positioning ring, and the second diameter is equal to the diameter of the positioning rod.
[0018] Optionally, a first chamfer is provided on the inner wall of the end of the positioning rod away from the positioning ring.
[0019] Optionally, a second chamfer is provided on the outer wall of the end of the positioning rod away from the positioning ring.
[0020] Optionally, the diameter of the positioning hole is greater than or equal to the diameter of the target ejector pin.
[0021] Optionally, the diameter of the positioning rod is 3.6 mm, and the diameter of the positioning hole is 3.2 mm.
[0022] The beneficial effects of the ejector pin auxiliary positioning component provided in this application are as follows: Compared with the prior art, the ejector pin auxiliary positioning component of this application includes a positioning rod and a positioning ring. The positioning rod has a positioning hole that penetrates the positioning rod along its axial direction and is coaxially arranged with the positioning rod. The positioning ring protrudes from the outer wall of the positioning rod and is used to abut against one side wall of the target electrostatic chuck along its axial direction to limit the depth of the positioning rod insertion into the ejector pin hole. The positioning rod is used to insert into the ejector pin hole on the target electrostatic chuck, and the positioning rod is coaxially arranged with the ejector pin hole, thereby making the target ejector pin coaxial with the ejector pin hole, preventing the target ejector pin from being misaligned, and thus preventing the generation of micro-dust particles due to friction between the ejector pin and the side wall of the ejector pin hole during the correction process, thereby ensuring the environmental quality within the reaction chamber. Attached Figure Description
[0023] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0024] Figure 1 This is a schematic diagram of the structure for calibrating the ejector pin in the prior art of this application;
[0025] Figure 2 This is a schematic diagram of the structure of the ejector pin when it is biased in the prior art of this application;
[0026] Figure 3 This is a schematic diagram of the structure of the ejector pin auxiliary positioning component provided in the embodiments of this application during ejector pin calibration;
[0027] Figure 4 This is a schematic diagram of the structure of the ejector pin auxiliary positioning component provided in the embodiments of this application;
[0028] Figure 5 This is a schematic diagram of the structure of an ejector pin auxiliary positioning component provided in another embodiment of this application.
[0029] The following are the labeling elements in the figure:
[0030] 10. Positioning rod; 11. Positioning hole; 12. Guide part; 13. First chamfer; 14. Second chamfer; 20. Positioning ring; 21. Abutting surface; 30. Electrostatic chuck; 31. Ejector pin hole; 40. Ejector pin; 50. Ejector pin seat; 60. Diverging plate; S1. First end; S2. Second end. Detailed Implementation
[0031] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.
[0032] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.
[0033] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.
[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.
[0035] Please refer to the following: Figures 1 to 5 The pin auxiliary positioning component provided in the embodiments of this application will now be described.
[0036] like Figure 1 and Figure 2 As shown, during the installation of the electrostatic chuck 30, it is necessary to ensure that there is no friction between the ejector pin 40 and the ejector pin hole 31 on the electrostatic chuck 30, that is, the ejector pin 40 is located at the center of the ejector pin hole 31. Therefore, the position of the ejector pin 40 needs to be calibrated during the installation of the electrostatic chuck 30. Currently, it is difficult to ensure the position of the ejector pin 40 within the ejector pin hole 31 when installing the electrostatic chuck 30. After the electrostatic chuck 30 is installed, the ejector pin 40 is prone to offset within the ejector pin hole 31. When calibrating the ejector pin 40, it is necessary to record the direction of the offset of the ejector pin 40, and then adjust the position between the electrostatic chuck 30 and the diverging plate 60, as well as the position between the ejector pin seat 50 and the diverging plate 60, multiple times according to the offset of the ejector pin 40 until the ejector pin 40 is located at the center of the ejector pin hole 31. This process is quite cumbersome.
[0037] Based on this, the technical solution adopted in this application is to provide an auxiliary positioning component for ejector pin 40 to simplify the calibration process of ejector pin 40. The auxiliary positioning component for ejector pin includes a positioning rod 10 and a positioning ring 20.
[0038] Please see Figure 3 and Figure 4 The positioning rod 10 is a cylindrical rod body with a positioning hole 11. The positioning hole 11 penetrates the positioning rod 10 along its axial direction and is coaxial with the positioning rod 10. The positioning ring 20 protrudes from the outer wall of the positioning rod 10. The diameter of the positioning ring 20 is larger than the diameter of the positioning rod 10, and the positioning ring 20 is coaxial with the positioning rod 10.
[0039] The positioning rod 10 is used to insert into the pin hole 31 on the target electrostatic chuck 30, and the positioning rod 10 and the pin hole 31 are coaxially arranged. After the target pin 40 is located in the positioning hole 11, since the positioning hole 11 and the positioning rod 10 are coaxially arranged, and the positioning rod 10 is inserted into the pin hole 31 and is coaxially arranged with the pin hole 31, the target pin 40 and the pin hole 31 are also coaxially arranged, thereby ensuring that the target pin 40 is quickly calibrated to the preset position. The positioning ring 20 is used to abut against one side wall of the target electrostatic chuck 30 in the axial direction, such as the upper side wall of the target electrostatic chuck 30, to limit the depth of the positioning rod 10 inserted into the pin hole 31.
[0040] Compared with the prior art, the ejector pin auxiliary positioning component of this application includes a positioning rod 10 and a positioning ring 20. The positioning rod 10 is provided with a positioning hole 11, which penetrates the positioning rod 10 along its axial direction and is coaxial with the positioning rod 10. The positioning ring 20 protrudes from the outer wall of the positioning rod 10 and is used to abut against one side wall of the target electrostatic chuck 30 along its axial direction to limit the depth of the positioning rod 10 inserted into the ejector pin hole 31. The positioning rod 10 is used to insert into the ejector pin hole 31 on the target electrostatic chuck 30, and the positioning rod 10 and the ejector pin hole 31 are coaxially arranged, so that the target ejector pin 40 is coaxial with the ejector pin hole 31, preventing the target ejector pin 40 from being skewed, and thus preventing the generation of micro-dust particles due to friction between the ejector pin 40 and the side wall of the ejector pin hole during the correction process, thereby ensuring the environmental quality inside the reaction chamber.
[0041] In this application, both the positioning rod 10 and the positioning ring 20 are made of Teflon material to give them good mechanical toughness, wear resistance and lubricity.
[0042] In one embodiment of this application, please refer to Figure 4 The positioning ring 20 is located at one end of the positioning rod 10 along the axis. After the target ejector pin 40 is calibrated, the operator removes the ejector pin auxiliary positioning component from the ejector pin hole 31 through the positioning ring 20.
[0043] In some other embodiments of this application, the positioning ring 20 is disposed at the middle part of the positioning rod 10.
[0044] In this application, the positioning ring 20 and the positioning rod 10 are integrally formed.
[0045] Please see Figure 3 and Figure 4 The positioning ring 20 is provided with an abutment surface 21, which extends radially along the positioning rod 10. The abutment surface 21 is used to abut against one side wall of the target electrostatic chuck 30 in the axial direction, such as the abutment surface 21 abutting against the top wall of the target electrostatic chuck 30.
[0046] In one embodiment of the application, the length between the abutment surface 21 and the end of the positioning rod 10 away from the positioning ring 20 is defined as a first length dimension, and the length of the pin hole 31 along its axial direction is defined as a second length dimension, wherein the first length dimension is greater than the second length dimension.
[0047] Specifically, by setting the length between the abutment surface 21 and the end of the positioning rod 10 away from the positioning ring 20 to be greater than the axial length of the ejector pin hole 31, after the positioning rod 10 is inserted into the ejector pin hole 31, part of the rod body of the positioning rod 10 can be inserted into the through hole on the ejector pin seat 50, thereby realizing the adjustment of the position of the ejector pin seat 50.
[0048] In some other embodiments of this application, the length between the abutment surface 21 and the end of the positioning rod 10 away from the positioning ring 20 is less than or equal to the length of the pin hole 31.
[0049] In one embodiment of this application, please refer to Figure 5 Along the axial direction of the positioning rod 10, the positioning rod 10 has a first end S1 and a second end S2, with the positioning ring 20 located at the first end S1. The positioning rod 10 is provided with an annular guide portion 12, which is located on the side of the positioning ring 20 facing the second end S2.
[0050] The diameter of the guide portion 12 near the first end S1 is defined as the first diameter, and the diameter of the guide portion 12 near the second end S2 is defined as the second diameter. The first diameter is larger than the diameter of the positioning rod 10 and smaller than the diameter of the positioning ring 20. The second diameter is equal to the diameter of the positioning rod 10. That is, along the direction from the first end S1 to the second end S2, the diameter of the guide portion 12 is gradually decreasing.
[0051] Specifically, an annular guide portion 12 is provided between the side of the positioning ring 20 facing the second end S2 and the side wall of the positioning rod 10, and the guide portion 12 is arranged with a gradually decreasing diameter along the direction from the first end S1 to the second end S2. The guide portion 12 can cooperate with the ejector pin hole 31 of different diameters, so that the ejector pin auxiliary positioning component can adapt to ejector pin holes 31 of different diameters.
[0052] In one embodiment of this application, a first chamfer 13 is provided on the inner wall of the end of the positioning rod 10 away from the positioning ring 20.
[0053] For details, please refer to Figure 5 A first chamfer 13 is provided on the inner wall of the end of the positioning rod 10 away from the positioning ring 20. The first chamfer 13 is used to guide the target ejector pin 40 so that the target ejector pin 40 can enter the positioning hole 11.
[0054] In one embodiment of this application, a second chamfer 14 is provided on the outer wall of the end of the positioning rod 10 away from the positioning ring 20.
[0055] For details, please refer to Figure 5 By providing a second chamfer 14 on the outer wall of the end of the positioning rod 10 away from the positioning ring 20, the second chamfer 14 is used to guide the positioning rod 10 when the guide rod enters the through hole on the ejector pin hole 31 or the ejector pin seat 50, so that the positioning rod 10 can enter the through hole on the ejector pin hole 31 or the ejector pin seat 50.
[0056] In one embodiment of this application, the diameter of the positioning hole 11 is greater than or equal to the diameter of the target ejector pin 40, so that the target ejector pin 40 can enter the positioning hole 11.
[0057] In this application, as a preferred embodiment, the diameter of the positioning rod 10 is 3.6 mm and the diameter of the positioning hole 11 is 3.2 mm.
[0058] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A pin auxiliary positioning component, characterized in that, include: A positioning rod is provided with a positioning hole, which penetrates the positioning rod along the axial direction and is coaxial with the positioning rod; A positioning ring protrudes from the outer wall of the positioning rod; The positioning rod is used to be inserted into the pin hole on the target electrostatic chuck, and the positioning rod is coaxially arranged with the pin hole; the positioning ring is used to abut against one side wall of the target electrostatic chuck in the axial direction to limit the depth of the positioning rod inserted into the pin hole.
2. The ejector pin auxiliary positioning component as described in claim 1, characterized in that, The positioning ring is located at one end of the positioning rod along its axial direction.
3. The ejector pin auxiliary positioning component as described in claim 2, characterized in that, The positioning ring and the positioning rod are integrally formed.
4. The ejector pin auxiliary positioning component as described in claim 3, characterized in that, The positioning ring is provided with an abutment surface, which extends radially along the positioning rod and is used to abut against one side wall of the target electrostatic chuck in the axial direction.
5. The ejector pin auxiliary positioning component as described in claim 4, characterized in that, The length between the abutting surface and the end of the positioning rod away from the positioning ring is defined as the first length dimension, and the length of the pin hole along its axial direction is defined as the second length dimension, wherein the first length dimension is greater than the second length dimension.
6. The ejector pin auxiliary positioning component as described in claim 3, characterized in that, Along the axial direction of the positioning rod, the positioning rod has a first end and a second end opposite to each other, and the positioning ring is located at the first end; The positioning rod is provided with an annular guide portion, which is located on the side of the positioning ring facing the second end; The diameter of the guide portion near the first end is defined as the first diameter, and the diameter of the guide portion near the second end is defined as the second diameter; The first diameter is greater than the diameter of the positioning rod, and the first diameter is less than the diameter of the positioning ring, and the second diameter is equal to the diameter of the positioning rod.
7. The ejector pin auxiliary positioning component as described in claim 5 or 6, characterized in that, The inner wall of the end of the positioning rod away from the positioning ring is provided with a first chamfer.
8. The ejector pin auxiliary positioning component as described in claim 7, characterized in that, The outer wall of the positioning rod at the end away from the positioning ring has a second chamfer.
9. The ejector pin auxiliary positioning component as described in claim 1, characterized in that, The diameter of the positioning hole is greater than or equal to the diameter of the target pin.
10. The ejector pin auxiliary positioning component as described in claim 1, characterized in that, The diameter of the positioning rod is 3.6 mm, and the diameter of the positioning hole is 3.2 mm.