Adsorption positioning type packaging cutting jig

Abstract

The utility model discloses a kind of adsorption positioning type packaging cutting jigs, comprising: jig base, positioning groove is arranged on it, vacuum cavity is arranged on the bottom surface of positioning groove, several parallelly arranged partitions are arranged in vacuum cavity, several cavity units are formed by several partitions being separated by vacuum cavity, several first vacuum holes are arranged on the bottom surface of cavity unit, and first vacuum hole is connected vacuum generating device by air pipe;Suction panel, several arrayed vacuum suction holes are arranged on it, wafer is placed on the surface of suction panel, and suction panel is arranged in positioning groove;Among them, the plug-in slot extending from top surface downward is arranged on partition, and the plug-in strip corresponding to plug-in slot is arranged on the back of suction panel.The utility model compared with prior art, solve the problem that the poor grain adsorption positioning effect caused by the negative pressure suction force generated in the same cavity by several vacuum suction holes on packaging cutting jig.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to an adsorption positioning packaging and cutting fixture. Background Technology

[0002] In the semiconductor packaging process, the wafer is usually cut longitudinally and laterally according to the size of the chip to form separate dies for subsequent processes such as die bonding, wire bonding, and packaging.

[0003] When existing packaging and cutting fixtures adsorb and position wafers, several vacuum adsorption holes on the surface of the packaging and cutting fixture used to adsorb the wafers generate negative pressure suction through the same cavity. This can easily lead to differences in adsorption capacity between the vacuum adsorption holes in the central area and the vacuum adsorption holes in the edge area. Furthermore, if the cavity sealing is compromised, overall adsorption failure can easily occur, resulting in poor wafer adsorption and positioning performance. Utility Model Content

[0004] The purpose of this invention is to provide an adsorption positioning packaging and cutting fixture to solve the problem of poor grain adsorption and positioning effect caused by the negative pressure suction generated in the same cavity through several vacuum adsorption holes on the packaging and cutting fixture.

[0005] To achieve the above objectives, this utility model adopts the following technical solution: an adsorption positioning type packaging and cutting fixture, comprising:

[0006] A fixture base is provided with a positioning groove. A vacuum chamber is provided on the bottom surface of the positioning groove. Several parallel partitions are provided in the vacuum chamber. The vacuum chamber is divided into several chamber units by the partitions. Several first vacuum holes are provided on the bottom surface of the chamber unit. The first vacuum holes are connected to a vacuum generator through a gas pipe.

[0007] The adsorption panel has several arrayed vacuum adsorption holes. The wafer is placed on the surface of the adsorption panel, which is set in a positioning groove.

[0008] The partition has a slot extending downwards from the top, and the back of the adsorption panel has a strip corresponding to the slot.

[0009] As a further description of the above technical solution:

[0010] The jig base has a storage slot on the back corresponding to the cavity unit, and a notch on the side wall corresponding to the storage slot.

[0011] As a further description of the above technical solution:

[0012] A first rubber washer is provided on the bottom surface of the positioning groove. The first rubber washer is located between the fixture seat and the adsorption panel, and the edge of the adsorption panel contacts the first rubber washer.

[0013] As a further description of the above technical solution:

[0014] An installation groove with a shape matching the first rubber washer is provided on the bottom surface of the positioning groove, and the thickness of the first rubber washer is greater than the depth of the installation groove.

[0015] As a further description of the above technical solution:

[0016] The length of the insertion slot is greater than the length of the partition.

[0017] As a further description of the above technical solution:

[0018] The fixture base is provided with a first threaded hole, and the adsorption panel is provided with a second through hole corresponding to the first threaded hole. The second through hole is a countersunk hole, and the bolt thread passes through the second through hole and is threaded to the first threaded hole.

[0019] As a further description of the above technical solution:

[0020] The fixture base has grooves on one of its opposite outer walls.

[0021] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0022] 1. In this utility model, the vacuum chamber in the packaging and cutting fixture is connected to a vacuum generating device through a first vacuum hole to generate negative pressure. At the same time, several chamber units are separated by partitions and arranged independently, so that when the wafer is placed on the adsorption panel and adsorbed by the vacuum adsorption holes, the suction force of the vacuum adsorption holes in each area is more uniform, and the packaging and cutting fixture is less likely to experience overall adsorption failure, effectively ensuring the wafer adsorption effect.

[0023] 2. In this utility model, a storage groove corresponding to the cavity unit is provided on the back of the fixture base, and a notch corresponding to the storage groove is provided on the side wall of the fixture base. The storage groove is used to store the air tube, and the air tube can be easily led out from the notch on the side wall of the fixture base, so that the air tube will not protrude and affect the installation of the packaging and cutting fixture. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of an adsorption positioning packaging and cutting fixture.

[0026] Figure 2 This is a cross-sectional view of an adsorption positioning packaging and cutting fixture.

[0027] Figure 3 for Figure 2 A magnified view of a portion of point A in the middle.

[0028] Figure 4 A structural breakdown diagram of an adsorption positioning packaging and cutting fixture. Figure 1 .

[0029] Figure 5 A structural breakdown diagram of an adsorption positioning packaging and cutting fixture. Figure 2 .

[0030] Legend:

[0031] 1. Fixture base; 11. Positioning groove; 111. First rubber gasket; 12. Partition plate; 121. Insertion groove; 13. Cavity unit; 131. First vacuum hole; 14. Storage groove; 15. First threaded hole; 19. Groove; 2. Adsorption panel; 21. Vacuum adsorption hole; 22. Second through hole; 29. ​​Insertion strip. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0033] Example 1

[0034] Please see Figure 1-5 This utility model provides a technical solution: an adsorption positioning packaging and cutting fixture, comprising:

[0035] The fixture base 1 has a positioning groove 11 on it. A vacuum chamber is provided on the bottom surface of the positioning groove 11. Several parallel partitions 12 are provided in the vacuum chamber. The vacuum chamber is divided into several chamber units 13 by the partitions 12. Several first vacuum holes 131 are provided on the bottom surface of the chamber unit 13. The first vacuum holes 131 are connected to a vacuum generator through an air pipe.

[0036] The adsorption panel 2 has a number of arrayed vacuum adsorption holes 21. The wafer is placed on the surface of the adsorption panel 2, and the adsorption panel 2 is set in the positioning groove 11.

[0037] The partition 12 is provided with a plug groove 121 extending downward from the top, and the back of the adsorption panel 2 is provided with a plug strip 29 whose position corresponds to the plug groove 121.

[0038] The length of the insertion groove 121 is greater than the length of the partition 12, and the end of the insertion groove 121 extends toward the side wall of the cavity unit 13, which improves the sealing effect of the cavity unit 13 when the adsorption panel 2 and the fixture seat 1 are assembled together.

[0039] The fixture base 1 is provided with a first threaded hole 15, and the adsorption panel 2 is provided with a second through hole 22 corresponding to the first threaded hole 15. The second through hole 22 is a countersunk hole. The bolt thread passes through the second through hole 22 and is threaded to the first threaded hole 15 to fix the fixture base 1 and the adsorption panel 2.

[0040] A groove 19 is provided on one of the opposite outer walls of the fixture base 1 to facilitate the overall handling and packaging of the cutting fixture.

[0041] Working principle: The vacuum chamber in the packaging and dicing fixture is connected to a vacuum generator through the first vacuum hole 131, generating negative pressure. Simultaneously, several chamber units 13 are separated and independently arranged by partitions 12, ensuring more uniform suction force across the vacuum suction holes 21 when the wafer is placed on the adsorption panel 2 and adsorbed by them. This also reduces the likelihood of overall adsorption failure in the packaging and dicing fixture, effectively guaranteeing the wafer adsorption effect. The surface of the adsorption panel 2 is also provided with mutually perpendicular horizontal and vertical positioning lines to facilitate positioning the wafer on the adsorption panel 2.

[0042] Example 2

[0043] Based on the above embodiments, this embodiment further improves upon the following technical solutions: the back of the fixture base 1 is provided with a storage groove 14 corresponding to the cavity unit 13, and the side wall of the fixture base 1 is provided with a notch corresponding to the storage groove 14.

[0044] The storage slot 14 is used to store the air tube, which can be easily led out from the notch on the side wall of the fixture seat 1, so that the air tube will not protrude and affect the installation of the packaging and cutting fixture.

[0045] Example 3

[0046] This embodiment further improves upon the above embodiment by providing the following technical solution: a first rubber gasket 111 is provided on the bottom surface of the positioning groove 11, and the first rubber gasket 111 is disposed between the fixture seat 1 and the adsorption panel 2, with the edge of the adsorption panel 2 contacting the first rubber gasket 111. The first rubber gasket 111 can improve the sealing effect between the fixture seat 1 and the adsorption panel 2.

[0047] A mounting groove matching the shape of the first rubber gasket 111 is provided on the bottom surface of the positioning groove 11. The thickness of the first rubber gasket 111 is greater than the depth of the mounting groove. The mounting groove positions the first rubber gasket 111 to prevent the shape of the first rubber gasket 111 from changing. At the same time, the first rubber gasket 111 in the mounting groove extends out of the bottom surface of the positioning groove 11, effectively ensuring the sealing effect between the fixture seat 1 and the adsorption panel 2.

[0048] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An adsorption-positioning packaging and cutting fixture, characterized in that, include: A fixture base is provided with a positioning groove. A vacuum chamber is provided on the bottom surface of the positioning groove. A number of parallel partitions are provided in the vacuum chamber. The vacuum chamber is divided into a number of chamber units by the partitions. A number of first vacuum holes are provided on the bottom surface of the chamber unit. The first vacuum holes are connected to a vacuum generator through an air pipe. An adsorption panel has several arrayed vacuum adsorption holes on it. A wafer is placed on the surface of the adsorption panel, and the adsorption panel is set in the positioning groove. The partition is provided with a slot extending downward from the top, and the back of the adsorption panel is provided with a strip corresponding to the slot.

2. The adsorption positioning packaging and cutting fixture according to claim 1, characterized in that, The jig base has a storage slot on its back corresponding to the cavity unit, and a notch on its side wall corresponding to the storage slot.

3. The adsorption positioning packaging and cutting fixture according to claim 1, characterized in that, A first rubber gasket is provided on the bottom surface of the positioning groove. The first rubber gasket is disposed between the fixture seat and the adsorption panel, and the edge of the adsorption panel contacts the first rubber gasket.

4. The adsorption positioning packaging and cutting fixture according to claim 3, characterized in that, The bottom surface of the positioning groove is provided with an installation groove that matches the shape of the first rubber gasket, and the thickness of the first rubber gasket is greater than the depth of the installation groove.

5. The adsorption positioning packaging and cutting fixture according to claim 1, characterized in that, The length of the insertion slot is greater than the length of the partition.

6. The adsorption positioning packaging and cutting fixture according to claim 1, characterized in that, The fixture base is provided with a first threaded hole, and the adsorption panel is provided with a second through hole corresponding to the first threaded hole. The second through hole is a countersunk hole, and the bolt thread passes through the second through hole and is threaded to the first threaded hole.

7. The adsorption positioning packaging and cutting fixture according to claim 1, characterized in that, The fixture base has grooves provided on one of its opposite outer side walls.

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