A variable pitch claw detection mechanism
By designing a variable-pitch claw detection mechanism, the problem of inconvenient detection of the variable-pitch claw spacing was solved, the accuracy of wafer clamping was achieved, and the high-precision transmission of wafers was ensured.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI FORTREND TECH CO LTD
- Filing Date
- 2025-05-19
- Publication Date
- 2026-06-09
AI Technical Summary
In existing technologies, the spacing detection of variable-pitch claws is inconvenient, resulting in insufficient wafer gripping accuracy.
A variable-pitch claw detection mechanism is designed, including a base, a first gripper, a second gripper, a gap detection component, and an adjustment component. The base is moved by a drive mechanism to facilitate the gap detection component in measuring the gap width, and the gap width is adjusted by the adjustment component to meet actual needs.
It enables accurate determination of the gap width of the variable pitch claw, ensuring the precision of wafer gripping and improving the accuracy of wafer gripping.
Smart Images
Figure CN224340898U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor technology, and in particular to a variable pitch claw detection mechanism. Background Technology
[0002] A wafer refers to a silicon wafer used in the manufacturing of silicon semiconductor integrated circuits. Its raw material is silicon, and it is called a wafer because it is typically circular after processing. In the semiconductor manufacturing process, the Equipment Front End Module (EFEM) is the most frequently used and crucial piece of equipment. The EFEM transports wafers from the wafer cassette to different processing stations and inspection modules. The EFEM mainly consists of three core components: a wafer loading system, a wafer transport robot, and a wafer aligner. A standard wafer cassette contains multiple wafers. After the cassette is placed on the wafer loading system, the robot's fingers reach into the cassette to remove wafers or set wafers off the fingers. The fingers are the mechanical parts that directly contact and transport individual wafers.
[0003] To accommodate the storage of non-uniformly spaced wafers, variable-pitch claws are used to pick up and place the wafers. However, it is not easy to detect the distance between adjacent fingers on the variable-pitch claws, which makes it difficult to determine the actual distance between the fingers and affects the wafer gripping accuracy. Utility Model Content
[0004] This invention addresses the shortcomings of existing technologies by providing a variable-pitch claw detection mechanism that accurately determines the gap width, thereby determining the actual distance between the fingers and ensuring wafer gripping accuracy.
[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:
[0006] This utility model provides a variable-pitch claw detection mechanism, including a base, a first gripping claw mounted on the base, at least two second gripping claws parallel to the sides of the first gripping claw, and a gap detection component. An adjustment component is connected between the second gripping claws and the base, and there is an adjustment space between two adjacent gripping claws. The adjustment component is used to control the gap width of the adjustment space, and the gap detection component is used to measure the gap width.
[0007] It also includes a drive mechanism, which is connected to the base and is used to drive the base to move in a direction perpendicular to the first gripper.
[0008] When it is necessary to measure the gap width, the drive mechanism moves the base to the required position, and the gap detection component is aligned with one of the adjustment spaces so that the gap detection component can measure the corresponding gap width.
[0009] When it is necessary to change the adjustment space to be measured, the drive mechanism moves the base so that the gap detection component is aligned with another adjustment space, so that the gap detection component can measure another gap width.
[0010] The gap detection assembly includes a detection transmitter and a detection receiver that are located at opposite ends of the adjustment space.
[0011] The adjustment assembly includes an adjustment frame connected to the base, a power unit mounted on the adjustment frame, a guide rod mounted on the adjustment frame, and a lead screw rotatably connected to the adjustment frame. The lead screw is threadedly connected to a slider, the slider is slidably connected to the guide rod, the lead screw is driven by the power unit, and the slider is connected to the second gripper.
[0012] When the gap width needs to be adjusted, the power unit drives the lead screw to rotate, which in turn moves the slider and the second gripper along the guide rod, thereby increasing or decreasing the gap width.
[0013] The beneficial effects of this utility model are:
[0014] An external device drives the adjustment space to correspond with the gap detection component, so that the gap detection component measures the gap width. When the gap width does not meet the required data range, the adjustment component fine-tunes the gap width. The gap detection component measures the gap width in real time until the gap width meets the actual requirements, which helps to accurately determine the gap width and thus determine the actual distance between the fingers, ensuring the wafer gripping accuracy. Attached Figure Description
[0015] Figure 1 This is a 3D view of the variable pitch claw detection mechanism when it lacks a drive mechanism.
[0016] Figure 2 This is a side view of the variable pitch claw detection mechanism.
[0017] Figure 3 This is a schematic diagram of the arrangement structure of the gap detection component.
[0018] Figure 4 This is a schematic diagram showing two second grippers located on either side of the first gripper.
[0019] Figure 5 This is a structural diagram of the first gripper when the number of second grippers exceeds two.
[0020] 1. Base; 2. First gripper; 3. Second gripper;
[0021] 4. Gap detection component;
[0022] 41. Detect the transmitter; 42. Detect the receiver;
[0023] 5. Adjustment components;
[0024] 51. Adjusting frame; 52. Power unit; 53. Guide rod; 54. Lead screw;
[0025] 55. Slider;
[0026] a. Adjustable space;
[0027] 6. Drive mechanism. Detailed Implementation
[0028] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description, this specification cannot provide a detailed description of all features of the actual embodiments.
[0029] refer to Figures 1 to 5 As shown, this utility model provides a variable-pitch claw detection mechanism, including a base 1, a first gripping claw 2 installed on the base 1, at least two second gripping claws 3 parallel to both sides of the first gripping claw 2, and a gap detection component 4. An adjustment component 5 is connected between the second gripping claw 3 and the base 1. There is an adjustment space a between two adjacent gripping claws. The adjustment component 5 is used to control the gap width of the adjustment space a, and the gap detection component 4 is used to measure the gap width.
[0030] refer to Figure 2 As shown, in practical applications, the external device is connected to the base 1 via a drive connection, and the base 1 is moved by the external device. The external device can be a robotic arm or a three-axis motion module; the adjustment space 'a' is the distance between two adjacent grippers, as shown in the reference diagram. Figure 5 As shown, specifically, the adjustment space a can be located between the first gripper 2 and the second gripper 3, or it can be located between two adjacent second grippers 3. After the adjustment component 5 adjusts the gap width, the external device drives the adjustment space a to correspond with the gap detection component 4, so that the gap detection component 4 measures the gap width. When the gap width does not meet the required data range, the adjustment component 5 fine-tunes the gap width, and the gap detection component 4 measures the gap width in real time until the gap width meets the actual requirements, which is conducive to accurately determining the gap width, thereby determining the actual distance between the fingers and ensuring the wafer gripping accuracy. Specifically, the adjustment component 5 adopts a lead screw 54 motor module, electric cylinder, or hydraulic cylinder to smoothly adjust the distance between the second gripper 3 and the first gripper 2. There are multiple second grippers 3, and the gap width between each second gripper 3 and the first gripper 2 is adjusted by its own adjustment component 5, indirectly and precisely controlling the distance between adjacent fingers, improving the wafer gripping accuracy, and meeting the precise gripping of multiple wafers.
[0031] refer to Figure 2 As shown, in this embodiment, a drive mechanism 6 is also included. The drive mechanism 6 is driven to connect with the base 1. The drive mechanism 6 is used to drive the base 1 to move in a direction perpendicular to the first gripper 2.
[0032] refer to Figure 1 , 2 As shown, in practical applications, the drive mechanism 6 uses a lead screw 54 motor module, hydraulic cylinder, or electric cylinder to facilitate precise control of the movement position of the base 1. When it is necessary to measure the gap width, the drive mechanism 6 moves the base 1 to the required position, and the gap detection component 4 is aligned with one of the adjustment spaces a, so that the gap detection component 4 can measure the corresponding gap width. When it is necessary to change the adjustment space a to be measured, the drive mechanism 6 moves the base 1, so that the gap detection component 4 is aligned with another adjustment space a, so that the gap detection component 4 can measure another gap width. By moving the base 1 in a straight line, different adjustment spaces a can be switched, quickly realizing the measurement of different gap widths and improving the measurement efficiency of gap width.
[0033] refer to Figure 2 , 3 As shown, in this embodiment, the gap detection component 4 includes a detection transmitter 41 and a detection receiver 42 that correspond to each other. The detection transmitter 41 and the detection receiver 42 are located at opposite ends of the adjustment space a. When measuring the gap width, the detection transmitter 41 emits parallel light towards the adjacent gripper claws, as a reference. Figure 4 As shown, when there are two second grippers 3, the emitted parallel light passes through the connection between the second gripper 3 and the first gripper 2. The detection receiver 42 measures the width of the gap between the second gripper 3 and the first gripper 2 through which the light passes, as shown in the attached figure. Figure 3 As shown, the width of the parallel light emitted by the transmitter 41 is M. After adjustment of space a, the actual gap width received by the receiver 42 is L, thus accurately measuring the gap width; Reference Figure 5 As shown, when the number of second grippers 3 exceeds two, the emitted parallel light passes through the adjustment space a between two adjacent second grippers 3, and the detection receiver 42 measures the width of the gap between the two adjacent second grippers 3 through which the light passes, thereby increasing the measurement range of the gap detection component 4 and thus successfully measuring the finger spacing at multiple positions.
[0034] refer to Figure 1As shown, in this embodiment, the adjustment component 5 includes an adjustment frame 51 connected to the base 1, a power unit 52 mounted on the adjustment frame 51, a guide rod 53 mounted on the adjustment frame 51, and a lead screw 54 rotatably connected to the adjustment frame 51. The lead screw 54 is threadedly connected to a slider 55, which is slidably connected to the guide rod 53. The lead screw 54 is driven by the power unit 52, and the slider 55 is connected to the second gripper 3. In practical applications, the power unit 52 uses a servo motor or a drive motor, and the slider 55 is slidably connected to the adjustment frame 51. When it is necessary to adjust the gap width, the power unit 52 drives the lead screw 54 to rotate, which in turn drives the slider 55 and the second gripper 3 to move along the guide rod 53, thereby increasing or decreasing the gap width and smoothly achieving the adjustment of the gap width, ensuring that the finger spacing meets the positioning accuracy.
[0035] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.
Claims
1. A variable-pitch claw detection mechanism, characterized in that, The device includes a base (1), a first gripper (2) mounted on the base (1), at least two second grippers (3) parallel to the sides of the first gripper (2), and a gap detection component (4). An adjustment component (5) is connected between the second gripper (3) and the base (1). There is an adjustment space (a) between two adjacent grippers. The adjustment component (5) is used to control the gap width of the adjustment space (a), and the gap detection component (4) is used to measure the gap width.
2. The variable-pitch claw detection mechanism according to claim 1, characterized in that, It also includes a drive mechanism (6), which is drivenly connected to the base (1). The drive mechanism (6) is used to drive the base (1) to move in a direction perpendicular to the first gripper (2). When it is necessary to measure the gap width, the drive mechanism (6) drives the base (1) to move to the required position, and the gap detection component (4) is aligned with one of the adjustment spaces (a) so that the gap detection component (4) measures the corresponding gap width. When it is necessary to change the adjustment space (a) to be measured, the drive mechanism (6) drives the base (1) to move, so that the gap detection component (4) is aligned with another adjustment space (a) so that the gap detection component (4) measures another gap width.
3. The variable-pitch claw detection mechanism according to claim 1, characterized in that, The gap detection assembly (4) includes a detection transmitter (41) and a detection receiver (42) that are corresponding to each other, and the corresponding detection transmitter (41) and detection receiver (42) are located at both ends of the adjustment space (a).
4. The variable-pitch claw detection mechanism according to claim 1, characterized in that, The adjustment assembly (5) includes an adjustment frame (51) connected to the base (1), a power unit (52) installed on the adjustment frame (51), a guide rod (53) installed on the adjustment frame (51), and a lead screw (54) rotatably connected to the adjustment frame (51). The lead screw (54) is threadedly connected to a slider (55), the slider (55) is slidably connected to the guide rod (53), the lead screw (54) is driven by the power unit (52), and the slider (55) is connected to the second gripper (3). When the gap width needs to be adjusted, the power unit (52) drives the lead screw (54) to rotate, which in turn drives the slider (55) and the second gripper (3) to move along the guide rod (53) so that the gap width increases or decreases.