Furnace tube thermocouple assembly and silicon wafer processing apparatus

Abstract

This utility model discloses a furnace tube thermocouple assembly and silicon wafer processing equipment, including a furnace tube with a mounting through hole at its top; the thermocouple assembly includes: a connecting component with a second limiting groove axially provided at one end; a sealing component that is fitted into the mounting through hole to form a seal; and a sleeve located inside the furnace tube, with one open end of the sleeve passing through the sealing component and forming a detachable connection with the second limiting groove. This utility model achieves the purpose of installing or removing the sleeve from the bottom of the furnace tube by sequentially inserting the sleeve into the mounting through hole, the sealing component, and then forming a detachable connection with the connecting component, thus making the installation or removal of the thermocouple assembly very convenient and saving installation time.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic device technology, and in particular to a furnace tube thermocouple assembly and silicon wafer processing equipment. Background Technology

[0002] With the continuous development of the photovoltaic industry, current photovoltaic processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD are produced using two types of furnaces: vertical furnaces and horizontal furnaces. Both types of furnaces require the cells (silicon wafers or crystals) to be loaded into a specific boat (carrier) and fed into the furnace's reaction chamber for processing. By heating the reaction chamber and introducing specific reaction gases, specific processes such as coating, diffusion, oxidation, and thin film deposition are achieved on the silicon wafers or crystals. As the photovoltaic industry continues to develop, the requirements for equipment are constantly increasing, and the process routes are continuously being updated.

[0003] In the existing technology, the vertical furnace tube is very tall. The thermocouple tube assembly installed at the top of the vertical furnace tube needs to be installed from the top of the vertical furnace tube. The subsequent cleaning and maintenance of the thermocouple tube assembly also need to be disassembled from the top of the vertical furnace tube, which makes the installation and maintenance of the thermocouple tube assembly very inconvenient and increases the installation time and labor cost of the thermocouple tube assembly at the top of the vertical furnace tube.

[0004] Therefore, improving the ease of installation or disassembly of thermocouple assemblies in vertical furnace tubes is a technical problem that urgently needs to be solved. Utility Model Content

[0005] This utility model provides a furnace tube thermocouple assembly and silicon wafer processing equipment to solve the problem of low ease of installation or disassembly of thermocouple assemblies in existing vertical furnace tubes.

[0006] The technical solution of this utility model is a furnace tube thermocouple assembly, including a furnace tube with a mounting through hole at the top; the thermocouple assembly includes:

[0007] The connecting component has a second limiting groove axially provided at one end;

[0008] A sealing assembly that fits into a mounting through-hole to form a seal;

[0009] The sleeve is located inside the furnace tube. One end of the sleeve with an opening passes through the sealing assembly and forms a detachable connection with the second limiting groove.

[0010] Furthermore, the connecting components include a fixed body and a lower fixing member;

[0011] The bottom end of the fixed body is recessed inward to form a second limiting groove, and the bottom end of the fixed body is detachably connected to the lower fixing member.

[0012] One end of the sleeve with an opening passes through the lower fixing member and extends into the second limiting groove. When the lower fixing member moves toward the bottom end of the fixing body, the groove wall of the second limiting groove is radially expanded by axial compression, so as to form an interference fit with the outer wall of the sleeve to restrict its axial movement.

[0013] Furthermore, the thermocouple assembly also includes a heating assembly;

[0014] The connecting component is provided with a first limiting groove on the other end opposite to the sealing component, and the first limiting groove communicates with the second limiting groove;

[0015] The heating component extends into the sleeve after passing through the first limiting groove; and the first limiting groove is connected to the upper part of the heating component.

[0016] Furthermore, the upper part of the heating component is provided with a fixing part that is adapted to the first limiting groove, and the fixing part is matched and engaged with the corresponding first limiting groove.

[0017] Furthermore, a through channel is provided between the first limiting groove and the second limiting groove. The inner diameter of the through channel gradually decreases from one end toward the first limiting groove to the other end to form an inverted cone shape.

[0018] Furthermore, the sleeve has a double-layer structure, with the outer layer being a protective layer and the inner layer being a heat-conducting layer.

[0019] Furthermore, the sealing assembly includes: a sealing body and a gasket;

[0020] A gasket is provided on the side of the sealing body facing the connecting assembly, and the gasket is connected to the sealing body by a connector arranged circumferentially along its edge.

[0021] Furthermore, an insulation component is provided on the side of the sealing component away from the connecting component and around the outer wall of the sleeve, and the insulation component can form an interference fit with the inner wall of the mounting through hole;

[0022] The insulation component is used to keep the heat from the heating components inside the sleeve.

[0023] Furthermore, the outer wall of the sleeve is provided with a matching insulating fixing block in the circumferential direction corresponding to the insulation component, and the insulating fixing block is connected to the sleeve through an insulating connector;

[0024] Insulating fixing blocks are used to support the thermal insulation components.

[0025] This utility model also proposes a silicon wafer processing equipment, which includes the above-mentioned furnace tube thermocouple assembly.

[0026] Compared with the prior art, the present invention has at least the following beneficial effects:

[0027] This invention achieves the purpose of installing or removing the sleeve from the bottom of the furnace tube by sequentially extending the sleeve into the installation through hole and sealing component, and then forming a detachable connection with the connecting component. This eliminates the need to install or remove the sleeve outside the heating component from the top of the furnace tube, making the installation or removal of the thermocouple assembly very convenient and saving installation time. Furthermore, when cleaning or maintaining the thermocouple assembly, the sleeve can be directly removed from the bottom of the furnace tube, without having to remove it from the top of the furnace tube, which is very convenient. Attached Figure Description

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this invention are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this invention are used to distinguish different objects and not to describe a particular order.

[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a partial cross-sectional view of the thermocouple assembly proposed in this utility model;

[0031] Figure 2 This is a cross-sectional view of the connecting component proposed in this utility model;

[0032] Figure 3 This is a partial structural schematic diagram of the heating assembly proposed in this utility model;

[0033] Figure 4 This is a schematic diagram of the structure of the thermocouple assembly proposed in this utility model;

[0034] Figure 5 for Figure 4 An enlarged schematic diagram of reference numeral A in the attached figure;

[0035] Figure 6 This is a cross-sectional view of the furnace tube proposed in this utility model.

[0036] Figure label:

[0037] 10. Furnace tube; 101. Mounting through hole;

[0038] 20. Connecting component; 201. First limiting groove; 202. Second limiting groove; 203. Fixing body; 204. Lower fixing member; 2041. First through hole; 2042. Annular groove; 2043. Inclined part; 205. Upper fixing member; 2051. Second through hole; 206. Through channel;

[0039] 30. Sealing assembly; 301. Sealing body; 302. Washer; 303. Connector; 304. Flat spring washer;

[0040] 40. Sleeve; 401. Limiting element;

[0041] 50. Heating assembly; 501. Fixing part;

[0042] 60. Thermal insulation components;

[0043] 70. Insulating fixing block; 701. Insulating connector. Detailed Implementation

[0044] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model. Therefore, a feature pointed out in this specification is used to describe one feature of one embodiment of the present utility model, and does not imply that every embodiment of the present utility model must have the described feature. Furthermore, it should be noted that this specification describes many features. Although certain features may be combined to illustrate possible system designs, these features may also be used in other combinations not explicitly stated. Therefore, unless otherwise stated, the described combinations are not intended to be limiting.

[0045] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0046] In the existing technology, because the vertical furnace tube is very tall, the thermocouple tube assembly installed at the top of the vertical furnace tube needs to be installed from the top of the vertical furnace tube. The subsequent cleaning and maintenance of the thermocouple tube assembly also need to be disassembled from the top of the vertical furnace tube, which makes the installation and maintenance of the thermocouple tube assembly very inconvenient and increases the installation time and labor cost of the thermocouple tube assembly at the top of the vertical furnace tube.

[0047] Therefore, in some embodiments, to allow the thermocouple assembly to be installed or removed from the bottom of the vertical furnace tube, such as... Figure 1 , Figure 2 and Figure 6As shown, this utility model proposes a furnace tube thermocouple assembly, including a furnace tube 10, the top of which is provided with an axially penetrating mounting hole 101; the thermocouple assembly includes:

[0048] The connecting component 20 has a second limiting groove 202 axially provided at one end;

[0049] The sealing assembly 30 is fitted into the mounting through hole 101 to form a radial seal; the sealing assembly 30 is used to prevent the heat generated by the heating assembly 50 from being dissipated from the sleeve 40 to the outside of the furnace tube 10, thereby reducing heat loss.

[0050] The sleeve 40 is located inside the furnace tube 10. One end of the sleeve 40 with an opening passes through the sealing assembly 30 and forms a detachable connection with the second limiting groove 202.

[0051] It should be noted that the furnace tube 10 proposed in this embodiment is preferably a vertical furnace tube. Furthermore, both the connecting component 20 and the sealing component 30 are preferably cylindrical in shape; and the connecting component 20 and the sealing component 30 are spaced apart axially. The end of the sleeve 40 furthest from the opening is a sealed structure.

[0052] Thus, when it is necessary to disassemble the furnace tube thermocouple assembly proposed in this embodiment, the operator needs to first climb to the top of the furnace tube 10, and then use tools or hands to loosen the connecting assembly 20 so that the sleeve 40 can be disengaged from the connecting assembly 20. Then another operator holds the sleeve 40 at the bottom of the furnace tube 10 so that the sleeve 40 can be completely inserted into the furnace tube 10 after passing the sealing assembly 30, so as to achieve the purpose of disassembling the sleeve 40 from the bottom of the furnace tube 10. At this time, the operator at the top of the furnace tube 10 holds the connecting assembly 20 to prevent it from falling and being lost.

[0053] Similarly, when it is necessary to install the furnace tube thermocouple assembly proposed in this embodiment, an operator needs to first climb to the top of the furnace tube 10, and then another operator inserts the sleeve 40 from the bottom of the furnace tube 10 into the installation through hole 101, and then through the sealing assembly 30. The operator located at the top of the furnace tube 10 holds the sleeve 40 extending out of the furnace tube 10 and fixes it on the connecting assembly 20 to achieve the purpose of installing the sleeve 40 from the bottom of the furnace tube 10.

[0054] Therefore, this utility model achieves the purpose of installing or removing the sleeve 40 from the bottom of the furnace tube 10 by sequentially extending the sleeve 40 into the mounting through hole 101 and the sealing component 30 and then forming a detachable connection with the connecting component 20. This eliminates the need to install or remove the sleeve 40 from the top of the furnace tube 10, making the installation or removal of the thermocouple assembly proposed in this embodiment very convenient and saving the installation time of the thermocouple assembly. Furthermore, when cleaning or maintaining the thermocouple assembly in the future, the sleeve 40 can be directly removed from the bottom of the furnace tube 10 without having to remove the sleeve 40 from the very high top of the furnace tube 10, which is very convenient.

[0055] In some embodiments, such as Figure 2 As shown, this embodiment proposes a detachable connection between the connecting assembly 20 and the sleeve 40:

[0056] The connecting component 20 includes a fixed body 203 and a lower fixing member 204;

[0057] The bottom end of the fixed body 203 is recessed inward to form a second limiting groove 202, and the bottom end of the fixed body 203 is detachably connected to the lower fixing member 204.

[0058] One end of the sleeve 40 with an opening passes through the lower fixing member 204 and extends into the second limiting groove 202. When the lower fixing member 204 moves toward the bottom end of the fixing body 203, the groove wall of the second limiting groove 202 is radially expanded by axial compression, so as to form an interference fit with the outer wall of the sleeve 40 to restrict its axial movement.

[0059] In this way, when the open end of the sleeve 40 is inserted into the second limiting groove 202, the operator can use tools or hands to move the lower fixing member 204 toward the bottom end of the fixing body 203 to compress the space in the second limiting groove 202, so that the groove wall of the second limiting groove 202 expands radially and forms an interference fit with the outer wall of the sleeve 40, so as to fix the sleeve 40 in the second limiting groove 202 and restrict the axial movement of the sleeve 40.

[0060] Specifically, the lower fixing member 204 is provided with a first through hole 2041 through which the sleeve 40 passes. The side of the lower fixing member 204 facing the bottom end of the fixing body 203 and surrounding the first through hole 2041 forms an annular groove 2042. The top of the annular groove 2042 near the inner wall of the first through hole 2041 and facing the bottom end of the fixing body 203 is an inclined portion 2043. The inclined direction of the inclined portion 2043 is radial and inclined from the inside to the outside. When the bottom end of the fixing body 203 is inserted into the annular groove 2042, as the insertion depth of the bottom end of the fixing body 203 increases, the space in the second limiting groove 202 is continuously squeezed and reduced. This causes the groove wall of the second limiting groove 202 to form an interference fit with the outer wall of the sleeve 40, so as to fix the sleeve 40 in the second limiting groove 202 and restrict the axial movement of the sleeve 40, thus avoiding the problem of shaking and damaging other components during the use of the thermocouple assembly.

[0061] In other embodiments (not shown in the figure), this embodiment may have an internal thread on the outer wall of the annular groove 2042 away from the first through hole 2041, and an external thread adapted to the internal thread on the outer wall of the bottom end of the fixing body 203. In this way, when the fixing member 204 is bolted to the bottom end of the fixing body 203, as the spiral depth increases, the space in the second limiting groove 202 is continuously squeezed and reduced, thereby making the groove wall of the second limiting groove 202 form an interference fit with the outer wall of the sleeve 40, so as to fix the sleeve 40 in the second limiting groove 202 and restrict the axial movement of the sleeve 40.

[0062] In some embodiments, such as Figure 2 As shown, the thermocouple assembly also includes a heating component 50;

[0063] The other end of the connecting component 20 facing away from the sealing component 30 is provided with a first limiting groove 201 in the axial direction, and the first limiting groove 201 communicates with the second limiting groove 202;

[0064] The heating component 50 extends into the sleeve 40 after passing through the first limiting groove 201; and the first limiting groove 201 is connected to the upper part of the heating component 50.

[0065] Multiple first limiting grooves 201 can be provided, and each first limiting groove 201 can be matched to place a heating component 50. In this way, multiple heating components 50 pass through the corresponding first limiting grooves 201, then converge in the second limiting groove 202 and extend into the sleeve 40. The first limiting grooves 201 are used to limit the axial displacement of the heating components 50.

[0066] In some embodiments, to ensure that the heating component 50 can be detachably connected to the connecting component 20 for subsequent maintenance, such as... Figure 1 and Figure 3 As shown, the top of the fixed body 203 is recessed inward to form at least one first limiting groove 201; the upper part of the heating component 50 is provided with a fixing part 501 that is adapted to the first limiting groove 201, and the fixing part 501 passes through the upper fixing member 205 and matches and engages with the corresponding first limiting groove 201.

[0067] It should be noted that, as Figure 2As shown, the connecting assembly 20 also includes an upper fixing member 205 adapted to and connected to the top end of the fixing body 203. The upper fixing member 205 has a second through hole 2051 through which the heating assembly 50 passes, and the area covered by the second through hole 2051 corresponding to the top end of the fixing body 203 is provided with all the first limiting grooves 201. When the upper fixing member 205 is matched and connected to the top end of the fixing body 203, as the depth of the fixing body 203 embedded in the upper fixing member 205 increases, the first limiting grooves 201 will be squeezed and become smaller, thereby forming an interference fit between the groove wall of the first limiting groove 201 and the outer wall of the fixing part 501, restricting the axial movement of the fixing part 501, and avoiding the problem of shaking and damaging other components during the use of the thermocouple assembly. Of course, the connection between the upper fixing member 205 and the top end of the fixing body 203 includes bolt connection, snap-fit, etc., which are not limited here.

[0068] Furthermore, the fixing body 203 can be integrally formed with the upper fixing member 205, which is not limited here.

[0069] In some embodiments, such as Figure 2 As shown, a through channel 206 is also provided between the first limiting groove 201 and the second limiting groove 202. The inner diameter of the through channel 206 gradually decreases from one end toward the first limiting groove 201 to the other end to form an inverted cone shape.

[0070] In this way, when multiple heating components 50 are inserted into the corresponding first limiting groove 201, they are gradually positioned and guided by the gradient change of the inner diameter of the through channel 206, and then converge in the second limiting groove 202 to prevent multiple heating components 50 from getting tangled; and the bending stress of the heating component 50 decreases linearly along the axial direction of the through channel 206 to avoid the risk of stress concentration causing the heating component 50 to break.

[0071] In some embodiments, to improve the structural stability of the sleeve 40 and avoid the sleeve 40 being fragile, the sleeve 40 has a double-layer structure, with the outer layer of the sleeve 40 being a protective layer and the inner layer of the sleeve 40 being a heat-conducting layer.

[0072] It should be noted that the protective layer is made of metal or other materials that are resistant to high temperatures, have good insulation, good thermal conductivity, strong impact resistance, and good deformation resistance. The protective layer is used to prevent external mechanical stress from damaging the internal heat-conducting layer and heating component 50. The heat-conducting layer is made of high-temperature resistant heat-conducting material to reduce heat loss from the heating component 50. This facilitates cleaning and maintenance of the thermocouple assembly after long-term use without damaging the thermocouple assembly, thus extending its service life.

[0073] Specifically, the thermocouple assembly can be used to provide heat for silicon wafer processing in the furnace tube 10. The heat emitted by the heating component 50 is transferred to the sleeve 40, and then transferred to the furnace tube 10 for processing. Similarly, the thermocouple assembly can also be used to detect the temperature in the furnace tube 10. The temperature inside the furnace tube 10 is sequentially transferred to the sleeve 40 and the heating component 50. By detecting the temperature of the heating component 50, the temperature inside the furnace tube 10 can be determined.

[0074] In some embodiments, to prevent heat generated by the heating assembly 50 from dissipating from the sleeve 40 to the outside of the furnace tube 10 and to reduce heat loss, such as Figure 5 As shown, the sealing assembly 30 includes: a sealing body 301 and a gasket 302;

[0075] A gasket 302 is provided on the side of the sealing body 301 facing the connecting assembly 20. The gasket 302 is connected to the sealing body 301 by a connector 303 arranged circumferentially along its edge.

[0076] It should be noted that the sealing body 301 can be fitted into the mounting through hole 101 to prevent heat generated by the heating component 50 from dissipating from the sleeve 40 to the outside of the furnace tube 10, thereby reducing heat loss of the heating component 50. Both the sealing body 301 and the gasket 302 are preferably cylindrical, and the gasket 302 is less than or equal to the outer diameter of the sealing body 301. The material of the connector 303 is preferably a metal, such as stainless steel or aluminum, and is not limited thereto.

[0077] Furthermore, the connector 303 is preferably a bolt and a matching nut. The bolt passes through the sealing body 301 and the washer 302 in sequence and is connected to the nut, so that the nut and the washer 302 are tightly attached to the side facing away from the sealing body 301, thereby ensuring the sealing performance of the sealing assembly 30.

[0078] In some embodiments, such as Figure 5 As shown, a flat spring pad 304 is fitted between the side of the gasket 302 facing away from the sealing body 301 and the connector 303.

[0079] It should be noted that the flat spring washer 304 is located between the nut and the washer 302 on the side facing away from the sealing body 301.

[0080] The flat spring washer 304 continuously provides axial elastic force to the nut through its own elasticity. When the nut tends to loosen, the elastic force of the flat spring washer 304 can counteract this tendency, maintaining a tight connection between the bolt and the nut and preventing loosening due to vibration or load changes. Furthermore, the flat spring washer 304 absorbs vibration energy through elasticity, reducing displacement or noise caused by vibration in the bolt connection and ensuring the stability of the sealing assembly 30 and the thermocouple assembly. Moreover, the continuous elastic force generated after the flat spring washer 304 is flattened can increase the friction between the nut and the bolt, forming a resistance torque and further preventing loosening.

[0081] In some embodiments, to further enhance the sealing effect and prevent heat generated by the heating assembly 50 from dissipating from the sleeve 40 to the outside of the furnace tube 10, and to further reduce heat loss, such as... Figure 1 and Figure 5 As shown, a heat insulation component 60 is provided on the side of the sealing component 30 away from the connecting component 20 and around the outer side wall of the sleeve 40. The heat insulation component 60 can form an interference fit with the inner side wall of the mounting through hole 101.

[0082] The insulation component 60 is used to keep the heat from the heating component 50 inside the sleeve 40.

[0083] It should be noted that the insulation component 60 is cylindrical, and its outer diameter is smaller than that of the sealing body 301. The material of the insulation component 60 can be insulation cotton, insulation ceramic, etc., and is not limited here.

[0084] Among them, the thermal insulation component 60 can undergo a certain elastic deformation. When the thermal insulation component 60 is matched and embedded in the designated position of the mounting through hole 101, the thermal insulation component 60 will deform and press against the inner sidewall of the mounting through hole 101 according to its own elasticity, thereby forming an interference fit.

[0085] In other embodiments (not shown in the figures), the insulation component 60 proposed in this embodiment is provided with a two-stage interference fit section. The first interference fit section is located at the front end of the insulation component 60 in the installation direction, with an interference amount of 0.05-0.1mm; the second interference fit section is located at the end of the insulation component 60, with an interference amount of 0.15-0.2mm, forming a progressive compression gradient. Furthermore, a limiting protrusion is provided at a designated position on the inner wall of the mounting through hole 101. The inner diameter of the limiting protrusion is 0.3-0.5mm smaller than the outer diameter of the insulation component 60, forming a mechanical stop surface. In this way, the insulation component 60 achieves axial bidirectional constraint through the two-stage interference fit and the mechanical stop, thereby ensuring the stability of the insulation component 60 and preventing the insulation component 60 from falling into the furnace tube 10 from the mounting through hole 101.

[0086] In some embodiments, in order to stably support the insulation component 60 under the sealing component 30, such as Figure 5 As shown, the outer wall of the sleeve 40 is provided with an appropriate insulating fixing block 70 corresponding to the circumference of the insulation component 60. The insulating fixing block 70 is connected to the sleeve 40 through the insulating connector 701.

[0087] The insulating fixing block 70 is used to support the thermal insulation component 60.

[0088] It should be noted that the insulating fixing block 70 is preferably cylindrical, and the outer diameter of the insulating fixing block 70 is less than or equal to the outer diameter of the thermal insulation component 60. Furthermore, the insulating fixing blocks 70 can be continuous or discontinuous along the outer wall of the sleeve 40 corresponding to the thermal insulation component 60; this is not limited here. The material of the insulating connector 701 is preferably thermal insulation ceramic, thermal insulation glass, thermal insulation tiles, or other materials capable of achieving thermal insulation effects; this is not limited here.

[0089] In this way, when the staff removes the sleeve 40 from the bottom of the furnace tube 10, the insulation component 60 will be removed along with the sleeve 40 or fall directly into the furnace tube 10; when the staff installs the sleeve 40 from the bottom of the furnace tube 10, the insulation component 60 needs to be passed through the end of the sleeve 40 with the opening and placed on the insulating fixing block 70 before the sleeve 40 is installed.

[0090] Of course, the insulating fixing block 70 can be integrally formed with the thermal insulation component 60, which is not limited here.

[0091] In some embodiments, such as Figure 4 As shown, in order to ensure that the sleeve 40 can be placed stably inside the furnace tube 10 and avoid shaking, at least one limiting member 401 is provided on the outer side wall of the sleeve 40. The limiting member 401 is used to fix it to the inner side wall of the furnace tube 10.

[0092] In some embodiments, the present invention also provides a silicon wafer processing apparatus, including the furnace tube thermocouple assembly described above.

[0093] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A furnace tube thermocouple assembly, comprising a furnace tube (10) having a mounting through hole (101) at its top; characterized in that, Thermocouple assembly includes: The connecting component (20) has a second limiting groove (202) axially provided at one end; A sealing assembly (30) is fitted into the mounting through hole (101) to form a seal; The sleeve (40) is located inside the furnace tube (10). One end of the sleeve (40) with an opening passes through the sealing assembly (30) and forms a detachable connection with the second limiting groove (202).

2. The furnace tube thermocouple assembly according to claim 1, characterized in that, The connecting assembly (20) includes a fixed body (203) and a lower fixing member (204); The bottom end of the fixed body (203) is recessed inward to form a second limiting groove (202), and the bottom end of the fixed body (203) is detachably connected to the lower fixing member (204). One end of the sleeve (40) with an opening passes through the lower fixing member (204) and extends into the second limiting groove (202). When the lower fixing member (204) moves toward the bottom end of the fixing body (203), the groove wall of the second limiting groove (202) is radially expanded by axial compression to form an interference fit with the outer wall of the sleeve (40) to restrict its axial movement.

3. The furnace tube thermocouple assembly according to claim 1, characterized in that, The thermocouple assembly also includes a heating assembly (50); The connecting component (20) is provided with a first limiting groove (201) on the other end opposite to the sealing component (30), and the first limiting groove (201) communicates with the second limiting groove (202); The heating component (50) extends into the sleeve (40) after passing through the first limiting groove (201); and the first limiting groove (201) is connected to the upper part of the heating component (50).

4. The furnace tube thermocouple assembly according to claim 3, characterized in that, The upper part of the heating component (50) is provided with a fixing part (501) that is adapted to the first limiting groove (201), and the fixing part (501) is matched and engaged with the corresponding first limiting groove (201).

5. The furnace tube thermocouple assembly according to claim 3, characterized in that, A through channel (206) is also provided between the first limiting groove (201) and the second limiting groove (202). The inner diameter of the through channel (206) gradually decreases from one end toward the first limiting groove (201) to the other end to form an inverted cone shape.

6. The furnace tube thermocouple assembly according to any one of claims 1 to 5, characterized in that, The sleeve (40) has a double-layer structure, with the outer layer of the sleeve (40) being a protective layer and the inner layer of the sleeve (40) being a heat-conducting layer.

7. The furnace tube thermocouple assembly according to claim 1, characterized in that, The sealing assembly (30) includes: a sealing body (301) and a gasket (302); The sealing body (301) has a gasket (302) on the side facing the connecting assembly (20), and the gasket (302) is connected to the sealing body (301) by a connector (303) arranged circumferentially along its edge.

8. The furnace tube thermocouple assembly according to claim 1, characterized in that, The sealing component (30) is located away from the connecting component (20) and is provided with a heat insulation component (60) around the outer side wall of the sleeve (40). The heat insulation component (60) can form an interference fit with the inner side wall of the mounting through hole (101). The heat insulation component (60) is used to keep the heat of the heating component (50) inside the sleeve (40) warm.

9. The furnace tube thermocouple assembly according to claim 8, characterized in that, The outer wall of the sleeve (40) is provided with an insulating fixing block (70) in the circumferential direction corresponding to the heat insulation component (60), and the insulating fixing block (70) is connected to the sleeve (40) through an insulating connector (701); The insulating fixing block (70) is used to support the thermal insulation component (60).

10. A silicon wafer processing equipment, characterized in that, The silicon wafer processing equipment includes the furnace tube thermocouple assembly as described in any one of claims 1 to 9.

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