A kind of film disintegrating ring guide correction device and film disintegrating ring guide correction mechanism
By cooperating with the guide wheel and rotating block of the film-breaking ring guiding and correction device, the position of the film-breaking ring is automatically adjusted, which solves the problem of the film-breaking ring being out of position when it enters the track under the drive of the robotic arm, and realizes the efficient and automated operation of the equipment and the reduction of labor intensity.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HUNAN YUEMO ADVANCED SEMICON CO LTD
- Filing Date
- 2025-04-24
- Publication Date
- 2026-06-12
Smart Images
Figure CN224356598U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a guiding correction device, and more particularly to a chipping ring guiding correction device and a chipping ring guiding correction mechanism, belonging to the technical field of wafer dicing post-processing systems. Background Technology
[0002] A wafer dicing post-processing system is an automated set of equipment used in semiconductor manufacturing after the wafer dicing (cutting) process. Its main function is to perform subsequent processing on the cut wafers, including operations such as transfer, positioning, cleaning, drying, inspection and sorting, to ensure the quality of the wafers and chips and to prepare them for subsequent packaging and testing processes.
[0003] like Figure 1 and Figure 2 As shown, the wafer dicing post-processing system mainly includes a basket lifting mechanism 1 and a tray-stacking mechanism 2 disposed on one side of the basket lifting mechanism 1. The wafer dicing post-processing system also includes a robotic arm (not shown in the figure). A delamination ring 3 is loaded in the basket lifting mechanism 1. The delamination ring 3 includes a ring body 311, a UV film disposed at the middle position of the ring body 311, and a diced wafer 313 disposed on the UV film. The opposite two sides of the ring body 311 are set as straight edges 314. A track is provided on the tray-stacking mechanism 2 to carry the delamination ring 3. The track includes a left track 211 and a right track 212. Let the distance between the left track 211 and the right track 212 be H1, and let the width of the delamination ring 3 (i.e., the distance between the opposite straight edges 314 of the ring body) be H2, then H1=H2.
[0004] like Figure 1 , Figure 3 and Figure 4 As shown, during operation, a robotic arm (not shown in the figure) is needed to grasp the delamination ring 3 and pull it along a straight line (as indicated by the arrow in the figure, where F is the force applied by the robotic arm to the delamination ring) into the track of the tray mechanism 2. This facilitates subsequent equipment (such as ejector pins or vacuum picks) to remove the wafers from the delamination ring 3 on the tray mechanism 2 one by one. However, during operation, because the placement position of the delamination ring 3 in the basket mechanism 1 is uncertain and may deviate, there is a risk of misalignment after the robotic arm grasps the delamination ring 3 and it enters the track. This can cause it to become stuck at the track entrance, preventing the equipment from operating properly, triggering an alarm, and requiring manual withdrawal and re-grabbing. This results in inefficient operation, wasted manpower, and prevents the equipment from operating automatically. Figure 5As shown, both the left track 211 and the right track 212 are L-shaped tracks. The distance between them is actually the distance H1 between the vertical planes of the left track 211 and the right track 212. When the central axis of the width H2 of the membrane ring 3 in the basket lifting mechanism coincides with the central axis of the distance H1 between the left track 211 and the right track 212, the membrane ring 3 can be smoothly pulled from the basket lifting mechanism 1 into the track of the swivel mechanism 2 by the robotic arm; otherwise, if... Figure 6 As shown, when the central axis of the width H2 of the membrane ring 3 in the basket lifting mechanism does not coincide with the central axis of the distance H1 between the left track 211 and the right track 212, one side of the membrane ring 3 will collide with the entrance of the track during the process of the membrane ring 3 being pulled in by the robotic arm, thus causing the above-mentioned problem.
[0005] After searching, no patent documents with the same or similar technical solutions as this application were found.
[0006] In summary, designing a guide and correction device and mechanism for the broken film ring, which can guide and correct the broken film ring as it moves into the track of the swivel mechanism driven by the robotic arm, ensures that the broken film ring can smoothly enter the track of the swivel mechanism, avoids the problem of the broken film ring getting stuck at the track entrance, causing the equipment to stop operating, reduces the labor intensity of operators, and improves the efficiency of automated operation of the equipment, are urgent technical problems that need to be solved. Utility Model Content
[0007] The technical problem this utility model aims to solve is to provide a film-breaking ring guiding and correcting device and mechanism to address the deficiencies in the existing technology. This device guides and corrects the film-breaking ring as it is moved by the robotic arm into the track of the swivel mechanism, ensuring that the ring can smoothly enter the track and preventing it from getting stuck at the track entrance, which would cause the equipment to stop operating. This reduces the labor intensity of operators and improves the efficiency of automated operation.
[0008] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a delaminated ring guiding and correcting device, comprising a plate, a rotating block, and a tension spring. A plate cavity is formed in the plate, and the rotating block is disposed in the plate cavity and rotatably connected to the plate. A guide wheel is disposed on one side of the rotating block and rotatably connected to the side of the rotating block. The tension spring is disposed between the other side of the rotating block and the plate, with one end of the tension spring connected to the other side of the rotating block and the other end connected to the plate. Thus, under the tension force of the tension spring, the guide wheel on one side of the rotating block is tilted, and the circumferential surface of the tilted guide wheel contacts the plate located at the top position on one side of the plate cavity at point A. The top surface of the plate near point A is the support surface B. When the delaminated ring moves to the support surface B, the circumferential surface of the guide wheel contacts the top of the straight edge of the ring on one side of the delaminated ring at point C. The horizontal position of point C is higher than the horizontal position of point A.
[0009] Preferably, the plate body includes a flat plate and a support plate disposed on one side of the flat plate, the plate body cavity is disposed on the flat plate, and the rotating block is rotatably connected to the support plate through a rotating shaft; when the rotatable connection is completed, the rotating block is located in the plate body cavity.
[0010] Preferably, the plate is also provided with mounting holes.
[0011] Preferably, the rotating block includes a U-shaped plate and a vertical plate disposed on the bottom of the U-shaped plate. A guide wheel is rotatably connected to the bottom of the U-shaped plate, and the guide wheel and the vertical plate are respectively located on opposite sides of the bottom of the U-shaped plate. A tension spring connecting rod one is also disposed on the vertical plate, and the tension spring connecting rod one is disposed perpendicular to the vertical plate. A tension spring connecting rod two is also disposed on the flat plate, and the tension spring connecting rod two is disposed perpendicular to the flat plate. One end of the tension spring is connected to the tension spring connecting rod one, and the other end of the tension spring is connected to the tension spring connecting rod two.
[0012] Preferably, both the first tension spring connecting rod and the second tension spring connecting rod include a screw rod and a locking nut that cooperates with the screw rod. The first tension spring connecting rod is connected and fixed to the vertical plate by the screw rod and the locking nut of the first tension spring connecting rod, and the second tension spring connecting rod is connected to the flat plate by the screw rod and the locking nut of the second tension spring connecting rod.
[0013] Preferably, an arc-shaped groove is provided on the flat plate located near the cavity of the plate body, which is in contact with the circumferential surface of the guide wheel, and the arc-shaped groove is provided in a one-to-one correspondence with the guide wheel.
[0014] This utility model also discloses a membrane ring guiding and correction mechanism, which includes two membrane ring guiding and correction devices as described above. The two membrane ring guiding and correction devices are arranged opposite to each other between the basket lifting mechanism and the swivel plate mechanism. The length of the horizontal line segment between points C of the guide wheels in the two membrane ring guiding and correction mechanisms is set as H3, the width of the membrane ring is set as H2, and the distance between the left track and the right track of the swivel plate mechanism is set as H1. Then H1=H2=H3.
[0015] The beneficial effects of this utility model are as follows: This utility model can correct the position of the film-breaking ring during the movement of the film-breaking ring, so that the central axis of the width H2 of the film-breaking ring coincides with the central axis of the distance H1 between the left and right tracks, thereby ensuring that the film-breaking ring can smoothly enter the track of the swivel mechanism, avoiding the problem of the film-breaking ring getting stuck at the track entrance, causing the equipment to stop running, reducing the labor intensity of the operators, and improving the efficiency of automated operation of the equipment. Attached Figure Description
[0016] Figure 1 A top-view schematic diagram of the structural principle of a wafer dicing post-processing system as the delamination ring moves from the basket mechanism to the tray mechanism under the action of a robotic arm. Figure 1 ;
[0017] Figure 2 A top view of the delamination ring structure in a wafer dicing post-processing system;
[0018] Figure 3 A top-view schematic diagram of the structural principle of a wafer dicing post-processing system as the delamination ring moves from the basket mechanism to the tray mechanism under the action of a robotic arm. Figure 2 ;
[0019] Figure 4 A top-view schematic diagram of the structural principle of a wafer dicing post-processing system as the delamination ring moves from the basket mechanism to the tray mechanism under the action of a robotic arm. Figure 3 ;
[0020] Figure 5 This is a schematic diagram of the main view principle structure when the central axis of the width H2 of the membrane ring in the basket lifting mechanism coincides with the central axis of the distance H1 between the left and right tracks of the swivel plate mechanism during the movement of the membrane ring.
[0021] Figure 6 This is a schematic diagram of the main view principle structure when the central axis of the width H2 of the membrane ring in the basket lifting mechanism does not coincide with the central axis of the distance H1 between the left and right tracks of the swivel plate mechanism during the movement of the membrane ring.
[0022] Figure 7A top-view schematic diagram illustrating the principle of the broken film ring moving from the basket lifting mechanism to the tilting plate mechanism under the drive of the robotic arm after the broken film ring guidance and correction mechanism of this utility model is installed. Figure 1 ;
[0023] Figure 8 A top-view schematic diagram illustrating the principle of the broken film ring moving from the basket lifting mechanism to the tilting plate mechanism under the drive of the robotic arm after the broken film ring guidance and correction mechanism of this utility model is installed. Figure 2 ;
[0024] Figure 9 A top-view schematic diagram illustrating the principle of the broken film ring moving from the basket lifting mechanism to the tilting plate mechanism under the drive of the robotic arm after the broken film ring guidance and correction mechanism of this utility model is installed. Figure 3 ;
[0025] Figure 10 This is a schematic diagram of the main structural principle of the membrane collapse ring guiding and correction device in this utility model;
[0026] Figure 11 This is a schematic diagram of the main structural principle of the membrane ring when it passes through the membrane ring guiding and correcting mechanism in this utility model during the movement of the membrane ring. The central axis of the width H2 of the membrane ring in the basket lifting mechanism coincides with the central axis of the distance H1 between the left and right tracks of the swing plate mechanism.
[0027] Figure 12 for Figure 11 A partial front view schematic diagram of the principle structure located at a guide wheel;
[0028] Figure 13 In the process of the rupture ring moving, when the central axis of the width H2 of the rupture ring in the basket lifting mechanism does not coincide with the central axis of the distance H1 between the left and right tracks of the swivel plate mechanism, the rupture ring guiding and correcting device in this utility model guides and corrects the moving rupture ring. (Schematic diagram of the main structural principle of the device) Figure 1 ;
[0029] Figure 14 In the process of the rupture ring moving, when the central axis of the width H2 of the rupture ring in the basket lifting mechanism does not coincide with the central axis of the distance H1 between the left and right tracks of the swivel plate mechanism, the rupture ring guiding and correcting device in this utility model guides and corrects the moving rupture ring. (Schematic diagram of the main structural principle of the device) Figure 2 ;
[0030] Figure 15 This is a top view of the membrane collapse ring guiding and correcting device in Embodiment 1 of this utility model;
[0031] Figure 16 This is a three-dimensional structural diagram of the membrane collapse ring guiding and correction device in Embodiment 1 of this utility model;
[0032] Figure 17 This is a three-dimensional structural diagram of the plate body in Embodiment 1 of this utility model;
[0033] Figure 18 This is a three-dimensional structural diagram of the rotating block in Embodiment 1 of this utility model;
[0034] Figure 19 for Figure 16 Enlarged structural diagram of section D in the middle;
[0035] Figure 20 This is a three-dimensional structural diagram of the plate in Embodiment 2 of this utility model;
[0036] In the diagram: 1. Basket lifting mechanism; 2. Plate swivel mechanism; 211. Left track; 212. Right track; 3. Demolding ring; 311. Ring body; 312. UV film; 313. Wafer; 314. Straight edge of ring body; 4. Demolding ring guide and correction device; 411. Plate body; 412. Rotating block; 413. Tension spring; 414. Plate body cavity; 415. Flat plate; 416. Support plate; 417. U-shaped plate; 418. Vertical plate; 419. Mounting hole; 5. Guide wheel; 6. Rotating shaft; 7. Tension spring connecting rod one; 8. Tension spring connecting rod two; 9. Screw rod; 10. Locking nut; 11. Arc-shaped groove. Detailed Implementation
[0037] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0038] like Figures 7 to 9 As shown, in this embodiment, a rupture ring guiding and correction mechanism is added between the basket lifting mechanism 1 and the plate-swinging mechanism 2. The rupture ring guiding and correction mechanism includes two rupture ring guiding and correction devices. During the process of the robotic arm (not shown in the figure) moving the rupture ring 3 from the basket lifting mechanism 1 to the track of the plate-swinging mechanism 2, the two rupture ring guiding and correction devices 4 respectively contact the straight edges 314 of the ring body on the opposite two sides of the rupture ring 3, thereby guiding and correcting the rupture ring 3 during the movement, so that the central axis of the width H2 of the rupture ring 3 coincides with the central axis of the distance H1 between the left track 211 and the right track 212, thereby ensuring that the rupture ring 3 moves smoothly to the track of the plate-swinging mechanism 2.
[0039] like Figure 10As shown, the membrane collapse ring guiding and correcting device 4 includes a plate 411, a rotating block 412, and a tension spring 413. A plate cavity 414 is formed in the plate 411. The rotating block 412 is disposed in the plate cavity 414 and is rotatably connected to the plate 411. A guide wheel 5 is disposed on one side of the rotating block 412 and is rotatably connected to one side of the rotating block 412. The tension spring 413 is disposed on the other side of the rotating block 412 and is connected to the plate. Between 411, one end of the tension spring 413 is connected to the other side of the rotating block 412, and the other end of the tension spring 413 is connected to the plate 411. Thus, under the tension force of the tension spring 413, the guide wheel 5 on one side of the rotating block 412 is tilted and the circumferential surface of the tilted guide wheel 5 contacts the plate 411 located at the top of one side of the plate cavity 414 at point A. The top surface of the plate 411 near point A is the support surface B that contacts the ruptured membrane ring.
[0040] like Figure 11 and Figure 12 As shown, the two membrane ring guiding and correcting devices 4 are installed with two guide wheels 5 facing each other. During operation, when the central axis of the width H2 of the membrane ring 3 in the basket lifting mechanism coincides with the central axis of the distance H1 between the left track 211 and the right track 212, the supporting surfaces B of the two membrane ring guiding and correcting devices 4 contact the bottom surfaces of opposite sides of the membrane ring 3 when the robotic arm moves the membrane ring 3, thus providing support for the membrane ring 3. At this time, the circumferential surface of the guide wheel 5 in the membrane ring guiding and correcting mechanism 4 contacts the top of the straight edge 314 of the ring body on one side of the membrane ring 3 at point C, and the horizontal position of point C is higher than the horizontal position of point A. Let the length of the horizontal line segment between points C of the guide wheels 5 in the two membrane ring guiding and correcting mechanisms 4 be H3, then H3=H1=H2. Figure 13 As shown, during operation, when the central axis of the width H2 of the membrane ring 3 in the basket lifting mechanism does not coincide with the central axis of the distance H1 between the left track 211 and the right track 212, as shown in the figure, when the membrane ring 3 shifts towards the left membrane ring guide correction device 4, during the movement of the membrane ring 3 driven by the robotic arm, the straight edge 314 of one side of the membrane ring 3 will first contact the circumferential surface of the guide wheel 5 of the left membrane ring guide correction device 4. At this time, a gap will appear between the straight edge 314 of the membrane ring 3 on the other side and the guide wheel 5 of the right membrane ring guide correction device 4. Under the continued driving of the robotic arm, the membrane ring 3 will squeeze the guide wheel 5, thereby causing the rotating block 412 with the guide wheel 5 installed to rotate counterclockwise (as shown by the arrow in the figure), the tension spring 413 is stretched, point A disappears, as shown in the figure. Figure 14As shown, after the rotating block 412 rotates to its position, under the restoring force of the tension spring 413, the rotating block 412 rotates clockwise (as shown by the solid arrow in the figure), causing the film-breaking ring 3 mounted on the rotating block 412 to move to the right (as shown by the hollow arrow in the figure), as... Figure 12 As shown, the guide wheel 5, which is tilted, re-contacts the plate 411 located at the top of one side of the plate cavity 414 at point A, thus limiting the rotation of the rotating block 412. At this time, the gap between the straight edge 314 of the ring body on the other side of the rupture ring 3 and the guide wheel 5 of the rupture ring guide correction device 4 on the right side disappears. The straight edges 314 of the ring body on both sides of the rupture ring 3 contact the guide wheels 5 of the two rupture ring guide correction devices 4 at point C. Thus, the position of the rupture ring 3 is corrected during the movement, so that the central axis of the width H2 of the rupture ring 3 coincides with the central axis of the distance H1 between the left track 211 and the right track 212. This ensures that the rupture ring can smoothly enter the track of the swivel mechanism, avoiding the problem of the rupture ring getting stuck at the track entrance, causing the equipment to stop running. This reduces the labor intensity of the operators and improves the efficiency of the automated operation of the equipment. When the ruptured membrane ring 3 shifts to the right side of the ruptured membrane ring guide correction device 4, its guide correction principle is similar to the principle described above, and will not be repeated here.
[0041] Example 1: As Figures 15 to 17 As shown, the plate 411 includes a flat plate 415 and a support plate 416 disposed on one side of the flat plate 415. In this embodiment, the support plate 416 is U-shaped, and the plate cavity 414 is disposed on the flat plate 415. The rotating block 412 is rotatably connected to the support plate 416 via a rotating shaft 6. Here, the rotating block 412 can be fixedly connected to the rotating shaft 6, and then the rotating shaft 6 can be connected to the support plate 416 via a bearing, thereby making the rotating block 412 rotatably connected to the support plate 416. Alternatively, the rotating shaft 6 can be fixedly connected to the support plate 416, and then the rotating block 412 can be rotatably connected to the rotating shaft 6 via a bearing. When rotatably connected, the rotating block 412 is located in the plate cavity 414. A mounting hole 419 is also provided on the flat plate 415, through which the film-breaking ring guide correction device can be installed between the basket mechanism 1 and the swivel plate mechanism 2.
[0042] like Figure 18As shown, the rotating block 412 includes a U-shaped plate 417 and a vertical plate 418 disposed on the bottom of the U-shaped plate 417. The U-shaped plate 417 and the vertical plate 418 can be configured as an integral structure. A guide wheel 5 is rotatably connected to the bottom of the U-shaped plate 417. The guide wheel 5 and the vertical plate 418 are respectively located on opposite sides of the bottom of the U-shaped plate 417. One or more guide wheels 5 can be provided. In this embodiment, multiple guide wheels are provided, such as the three guide wheels shown in the figure. By setting the guide wheel 5 to contact the delaminated ring 3, it is possible to further ensure that the delaminated ring can be better guided and corrected during movement. A tension spring connecting rod 7 is also provided on the vertical plate 418. The tension spring connecting rod 7 is disposed perpendicular to the vertical plate 418, as shown in the figure. Figure 15 and Figure 17 As shown, a tension spring connecting rod 2 8 is also provided on the plate 415. The tension spring connecting rod 2 8 is arranged perpendicular to the plate 415, as shown in the figure. Figure 16 As shown, one end of the tension spring 413 is connected to the tension spring connecting rod 7, and the other end of the tension spring 413 is connected to the tension spring connecting rod 8.
[0043] like Figure 19 As shown, both the first tension spring connecting rod 7 and the second tension spring connecting rod 8 include a screw rod 9 and a locking nut 10 that cooperates with the screw rod 9. The first tension spring connecting rod 7 is connected and fixed to the vertical plate 418 by the screw rod 9 and the locking nut 10, and the second tension spring connecting rod 8 is connected to the flat plate 415 by the screw rod 9 and the locking nut 10. Through the above structural design, the position of the screw rod 9 can be adjusted according to the actual working conditions, thereby flexibly adjusting the state of the tension spring.
[0044] Example 2: Compared with Example 1, the difference is that, as Figure 20 As shown, an arc-shaped groove 11 is provided on the flat plate 415 located near the cavity 414 of the plate body, which contacts the circumferential surface of the guide wheel 5. The arc-shaped grooves 11 are provided one-to-one with the guide wheels 5, and their number is the same as the number of guide wheels 5. This arrangement can reduce the wear of the guide wheels 5 during operation and further improve the service life of the guiding and correcting mechanism.
[0045] In summary, this invention can correct the position of the film-breaking ring during its movement, ensuring that the central axis of the width H2 of the film-breaking ring coincides with the central axis of the distance H1 between the left and right tracks. This guarantees that the film-breaking ring can smoothly enter the track of the swivel mechanism, avoiding the problem of the film-breaking ring getting stuck at the track entrance, which would cause the equipment to stop operating. It also reduces the labor intensity of the operators and improves the efficiency of automated operation of the equipment.
[0046] In the embodiments, "multiple" refers to "two or more". The above embodiments are for illustrative purposes only and are not intended to limit the present invention. Those skilled in the art can make various changes or modifications without departing from the spirit and scope of the present invention. Therefore, all equivalent technical solutions should also fall within the protection scope of the present invention, which should be defined by the claims.
Claims
1. A device for guiding and correcting membrane collapse rings, characterized in that: The device includes a plate, a rotating block, and a tension spring. A cavity is formed in the plate. The rotating block is disposed within the cavity and rotatably connected to the plate. A guide wheel is mounted on one side of the rotating block and rotatably connected to it. The tension spring is positioned between the other side of the rotating block and the plate, with one end connected to the other side of the rotating block and the other end connected to the plate. Under the tension of the spring, the guide wheel on one side of the rotating block is tilted, and the circumferential surface of the tilted guide wheel contacts the plate located at the top of the cavity side at point A. The top surface of the plate near point A serves as a support surface B. When the ruptured ring moves onto support surface B, the circumferential surface of the guide wheel contacts the top of the straight edge of the ruptured ring at point C. The horizontal position of point C is higher than that of point A.
2. The membrane collapse ring guiding and correction device according to claim 1, characterized in that: The plate includes a flat plate and a support plate disposed on one side of the flat plate. The plate cavity is disposed on the flat plate, and the rotating block is rotatably connected to the support plate via a rotating shaft. After the rotatable connection is completed, the rotating block is located in the plate cavity.
3. The membrane collapse ring guiding and correction device according to claim 2, characterized in that: The plate is also provided with mounting holes.
4. The membrane collapse ring guiding and correction device according to claim 2, characterized in that: The rotating block includes a U-shaped plate and a vertical plate disposed on the bottom of the U-shaped plate. A guide wheel is rotatably connected to the bottom of the U-shaped plate. The guide wheel and the vertical plate are located on opposite sides of the bottom of the U-shaped plate. A tension spring connecting rod one is also disposed on the vertical plate. The tension spring connecting rod one is disposed perpendicular to the vertical plate. A tension spring connecting rod two is also disposed on the flat plate. The tension spring connecting rod two is disposed perpendicular to the flat plate. One end of the tension spring is connected to the tension spring connecting rod one, and the other end of the tension spring is connected to the tension spring connecting rod two.
5. The membrane collapse ring guiding and correction device according to claim 4, characterized in that: Both the tension spring connecting rod one and the tension spring connecting rod two include a screw rod and a locking nut that cooperates with the screw rod. The tension spring connecting rod one is connected and fixed to the vertical plate by the screw rod and the locking nut of the tension spring connecting rod one, and the tension spring connecting rod two is connected to the flat plate by the screw rod and the locking nut of the tension spring connecting rod two.
6. The membrane collapse ring guiding and correcting device according to any one of claims 2 to 5, characterized in that: An arc-shaped groove is provided on the flat plate located near the cavity of the plate body, which is in contact with the circumferential surface of the guide wheel. The arc-shaped groove is provided one-to-one with the guide wheel.
7. A membrane collapse ring guiding and correction mechanism, characterized in that: It includes two membrane ring guiding and correcting devices according to any one of claims 1 to 6, the two membrane ring guiding and correcting devices are arranged opposite each other between the basket lifting mechanism and the swivel plate mechanism; the length of the horizontal line segment between the C points of the guide wheels in the two membrane ring guiding and correcting devices is set as H3, the width of the membrane ring is set as H2, and the distance between the left track and the right track of the swivel plate mechanism is set as H1, then H1=H2=H3.