A silicon carbide thin film deposition chamber inner liner fixture

Abstract

The utility model discloses a kind of deposition silicon carbide film chamber inner lining fixing device, including reaction chamber and the inner lining placed in the reaction chamber, the reaction chamber includes multiple surrounding connected arm plate, at least one the arm plate is provided with mounting slot hole, the mounting slot hole is equipped with fixed component, for the inner lining and the arm plate are fixed. By the above mode, the utility model can make the inner surface of reaction chamber relatively flat, the inner lining and reaction chamber are fixed firmly, disassembly is easy to operate, avoid the damage to the reaction chamber of graphite.

Description

Technical Field

[0001] This utility model relates to the field of cavity lining fixing. Background Technology

[0002] In advanced semiconductor manufacturing processes, silicon carbide (SiC) components are used in some process equipment due to its excellent performance. Chemical vapor deposition (CVD) is a commonly used method, such as silicon carbide fabricated using full CVD or silicon carbide on graphite or silicon substrates.

[0003] Currently, silicon carbide produced using the CVD method uses methyltrichlorosilane (MTS) as the main raw material, followed by the introduction of hydrogen (H2) and argon (Ar). H2 serves as both the reactant and carrier gas, while Ar is introduced for dilution to reduce safety risks and control the deposition rate. CVD deposition is performed at high temperatures, such as around 1500°C.

[0004] Other methods for preparing SiC, such as chemical vapor deposition (CVR), embedding, brushing, plasma spraying, liquid phase epitaxy (LPE), and molecular beam epitaxy (MBE), can produce SiC coatings, but they all have certain disadvantages in preparing high-thickness SiC coatings. Therefore, the mainstream method currently is CVD (CVD) for SiC deposition. SiC prepared by CVD has advantages such as high purity, high density, and fast deposition rate. Because the reaction temperature is high, reaching 1200~1500℃, the reaction chamber of the CVD equipment generally needs to be made of graphite and covered with graphite paper. Only the graphite paper needs to be replaced after each reaction. In existing methods, SiC is more likely to deposit on the nut surface, and due to the unevenness of the nut surface, the SiC deposited on the nut surface is thicker and has different shapes. For CVD SiC, due to the long reaction time, the SiC on the nut surface is also thicker. Furthermore, SiC has high hardness and density, making the nuts very difficult to remove when disassembling the graphite paper. If the operation is not careful, it will damage the graphite cavity, which will not only lengthen the maintenance cycle but also increase the cost. Utility Model Content

[0005] The main technical problem solved by this utility model is to provide a device for fixing the liner of a silicon carbide thin film deposition chamber, which can make the inner surface of the reaction chamber relatively flat, the liner and the reaction chamber firmly fixed, and easy to disassemble, thus avoiding damage to the graphite reaction chamber.

[0006] To solve the above-mentioned technical problems, the present invention provides a technical solution: a silicon carbide thin film deposition chamber liner fixing device, including a reaction chamber and a liner placed in the reaction chamber. The reaction chamber includes a plurality of arm plates connected around each other. At least one of the arm plates is provided with a mounting slot. A fixing component is installed in the mounting slot for fixing the liner and the arm plate.

[0007] The fixing assembly includes bolts and nuts. After the bolts and nuts fix the liner to the arm plate, the inner ends of the nuts and bolts are completely located within the mounting slot.

[0008] The mounting slot includes an internal hexagonal hole and a through hole communicating with the internal hexagonal hole.

[0009] The depth of the internal hexagonal hole is not less than the thickness of the nut.

[0010] The lining has holes, the diameter of which is the same as the diameter of the bolt.

[0011] The outer ring of the hole is provided with a hexagonal folded edge corresponding to the outer edge of the inner hexagonal hole. The hole and the folded edge are cut to form a flange. The hole and flange facilitate the fixing of the nut to the side area. The nut can fix the liner and ensure that the edge of the liner that is pressed down is flat, avoiding the deposition and thickening of the liner at the fixing point of the nut.

[0012] The outer end of the bolt is spaced out from the outer side of the arm plate. When it is necessary to disassemble and replace the liner, rotate the bolt and use the force of the bolt to push out the nut, separating the bolt and nut to replace the liner without damaging the arm plate.

[0013] The fixing assembly also includes a cap body, which is installed by fitting into the internal hexagonal hole. The outer surface of the cap body is curved to ensure that no deposits will form on the surface of the internal hexagonal hole and the nut, ensuring that the nut can be easily removed when the liner is removed, thus avoiding damage to the inner wall of the arm plate, extending the maintenance cycle and reducing costs.

[0014] The arm plate, bolts, nuts, and cap are made of graphite.

[0015] Multiple mounting slots and fixing components are provided in conjunction with each other, arranged horizontally or vertically on multiple arm plates. The beneficial effects of this invention are: the silicon carbide thin film deposition chamber liner fixing device of this invention enables a relatively flat inner surface of the reaction chamber, ensures a secure fixation between the liner and the reaction chamber, facilitates easy disassembly, and avoids damage to the graphite reaction chamber. Attached Figure Description

[0016] Figure 1This is a longitudinal sectional view of a silicon carbide thin film deposition chamber according to the present invention;

[0017] Figure 2 This is a schematic diagram of the structure of a silicon carbide thin film chamber fixing assembly according to the present invention;

[0018] Figure 3 This is a schematic diagram of the structure of a silicon carbide thin film chamber fixing assembly according to the present invention;

[0019] Figure 4 This is a schematic diagram of the structure of a cavity liner for depositing silicon carbide thin films according to this utility model. Detailed Implementation

[0020] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0021] Please see Figures 1-4 The embodiments of this utility model include:

[0022] This invention discloses a cavity liner fixing device for silicon carbide thin film deposition, comprising a reaction chamber 101 and a liner 104 placed within the reaction chamber 101. The reaction chamber 101 includes a plurality of interconnected arm plates 103, at least one of which has a mounting slot. A fixing component 105 is installed in the mounting slot to fix the liner 104 and the arm plate 103. In a specific implementation, a reactive substrate 102 is placed in the reaction chamber for SiC deposition. During installation, the fixing component ensures that the liner 104 and the arm plate 103 can fit tightly together at high temperatures, resulting in a relatively flat surface for the liner 104.

[0023] The fixing assembly 105 includes a bolt 107 and a nut 106. After the bolt 107 and the nut 106 fix the liner 104 to the arm plate 103, the inner ends of the nut 106 and the bolt 107 are completely located within the mounting slot. After the deposition reaction is completed, the liner can be removed by simply separating the nut 106 and the bolt 107, which is convenient and will not damage the graphite cavity.

[0024] The mounting slot includes an internal hexagonal hole and a through hole communicating with the internal hexagonal hole.

[0025] The depth of the internal hexagonal hole is not less than the thickness of the nut 106. After the nut 106 and bolt 107 are installed, the nut 106 can be located inside the internal hexagonal hole, ensuring that the inner liner surface is flat and that SiC will not be deposited on the surface of the nut 106 during the deposition reaction in the reaction chamber.

[0026] The liner 104 is provided with a hole 1041, the diameter of which is the same as the diameter of the bolt 107.

[0027] The outer ring of the hole 1041 is provided with a hexagonal folded position corresponding to the outer edge of the inner hexagonal hole. A flange 1042 is formed by cutting between the hole 1041 and the fold point of the hexagonal folded position. The hole and flange are designed to facilitate the fixing of the nut 106 to the side area. The nut 106 can fix the inner liner 104 and ensure that the edge of the inner liner 104 is flat when it is pressed down, thus avoiding the deposition and thickening at the fixing point between the inner liner 104 and the nut 106.

[0028] The outer end of the bolt 107 is provided with a push-out distance from the outer side of the arm plate 103. When it is necessary to disassemble and replace the inner liner 104, rotate the bolt 107 and use the force of the bolt 107 to push out the nut 106, and separate the bolt 107 and the nut 106 to replace the inner liner 104 without causing damage to the arm plate 103.

[0029] The fixing component 105 also includes a cap 108, which is installed in conjunction with the internal hexagonal hole. The outer surface of the cap 108 is curved to ensure that no deposits are generated on the surface of the internal hexagonal hole and the nut 106, and to ensure that the nut 106 can be easily removed when the inner liner 104 is removed, that is, without damaging the inner wall of the arm plate 103, thus extending the maintenance cycle and reducing costs.

[0030] The arm plate 103, bolt 107, nut 106 and cap 108 are made of graphite.

[0031] Multiple mounting slots and fixing components 105 are provided in cooperation, and are arranged horizontally or vertically on multiple arm plates 103. The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A device for fixing the liner of a cavity for depositing silicon carbide thin films, characterized in that, The device includes a reaction chamber and a liner placed inside the reaction chamber. The reaction chamber includes a plurality of interconnected arm plates, at least one of which has a mounting slot. A fixing component is installed in the mounting slot for fixing the liner and the arm plate.

2. The cavity liner fixing device for depositing silicon carbide thin films according to claim 1, characterized in that: The fixing assembly includes bolts and nuts. After the bolts and nuts fix the liner to the arm plate, the inner ends of the nuts and bolts are completely located within the mounting slot.

3. The cavity liner fixing device for depositing silicon carbide thin films according to claim 2, characterized in that: The mounting slot includes an internal hexagonal hole and a through hole communicating with the internal hexagonal hole.

4. The cavity liner fixing device for depositing silicon carbide thin films according to claim 3, characterized in that: The depth of the internal hexagonal hole is not less than the thickness of the nut.

5. The cavity liner fixing device for depositing silicon carbide thin films according to claim 4, characterized in that: The lining has holes, the diameter of which is the same as the diameter of the bolt.

6. The cavity liner fixing device for depositing silicon carbide thin films according to claim 5, characterized in that: The outer ring of the hole is provided with a hexagonal folding position corresponding to the outer edge of the inner hexagonal hole, and the hole is cut between the folding point of the hexagonal folding position to form a folded edge.

7. The cavity liner fixing device for depositing silicon carbide thin films according to claim 2, characterized in that: The outer end of the bolt is left with a protrusion distance from the outer side of the arm plate.

8. The cavity liner fixing device for depositing silicon carbide thin films according to claim 3, characterized in that: The fixing component also includes a cap body, which is installed in conjunction with the internal hexagonal hole.

9. The cavity liner fixing device for depositing silicon carbide thin films according to claim 8, characterized in that: The arm plate, bolts, nuts, and cap are made of graphite.

10. The cavity liner fixing device for depositing silicon carbide thin films according to claim 1, characterized in that: Multiple mounting slots and fixing components are provided in conjunction with each other, and are arranged horizontally or vertically on multiple arm plates.

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