Annealing device and flow equalization assembly for an annealing device

Abstract

The utility model discloses an annealing device with flow equalizing assembly and annealing device, wherein, flow equalizing assembly is used to flow equalizing to gas, flow equalizing assembly includes the first flow equalizing part and the second flow equalizing part of interval setting along the gas flow direction, first flow equalizing part is provided with a plurality of uniform distribution and is used for the first flow equalizing hole of gas flow, second flow equalizing part is provided with a plurality of uniform distribution and is used for the second flow equalizing hole of gas flow, gas respectively passes first flow equalizing part and second flow equalizing part to be first flow equalizing part and second flow equalizing part flow equalizing, wherein, the aperture of first flow equalizing hole is greater than the aperture of second flow equalizing hole, and the density of first flow equalizing hole on first flow equalizing part is less than the density of second flow equalizing hole on second flow equalizing part. The utility model discloses an annealing device with flow equalizing assembly and annealing device is used to flow equalizing to the gas in annealing device, reduces the influence of the annealing quality due to the gas uneven.

Description

Technical Field

[0001] This utility model relates to the technical field of annealing equipment, and in particular to a flow equalization component for an annealing device and an annealing device. Background Technology

[0002] An annealing apparatus is a device used to anneal target materials, such as substrates coated with thin films. During annealing, the existing gases within the apparatus may affect the thin film on the substrate, thus adversely impacting the annealing quality. Furthermore, if the gases within the apparatus are not circulating, the vaporization and accumulation of the thin film will also negatively affect the annealing quality.

[0003] To improve annealing quality, annealing apparatuses typically circulate gas during annealing. This involves continuously supplying and evacuating gas to reduce its impact on the annealing quality of the target material. However, uneven gas flow within the annealing apparatus, leading to turbulent airflow, can also negatively affect the annealing quality of the target component. Therefore, there is a pressing need for a component that can uniformly distribute the gas flow within the annealing apparatus. Utility Model Content

[0004] The purpose of this invention is to provide a flow equalization component and an annealing device for annealing apparatus, which are used to equalize the gas flow in the annealing apparatus and reduce the impact of gas unevenness on the annealing quality.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] An annealing apparatus has a flow equalization component for equalizing gas flow. The flow equalization component includes a first flow equalization section and a second flow equalization section spaced apart along the gas flow direction. The first flow equalization section has a plurality of uniformly distributed first flow equalization holes for gas flow, and the second flow equalization section has a plurality of uniformly distributed second flow equalization holes for gas flow. Gas passes through the first flow equalization section and the second flow equalization section respectively to be evenly flowed by the first flow equalization section and the second flow equalization section.

[0007] Wherein, the diameter of the first flow equalization hole is larger than the diameter of the second flow equalization hole, and the density of the first flow equalization hole on the first flow equalization section is less than the density of the second flow equalization hole on the second flow equalization section.

[0008] Preferably, the second flow equalization section is located on the side of the first flow equalization section closer to the interior of the annealing device along the gas flow direction;

[0009] And / or, a plurality of first flow equalization orifices on the first flow equalization section are distributed in a rectangular array; a plurality of second flow equalization orifices on the second flow equalization section are distributed in a rectangular array.

[0010] Preferably, the radius of the second flow equalization orifice is 1 / 14 to 1 / 10 of the radius of the first flow equalization orifice;

[0011] And / or, the distance between the first flow equalization section and the second flow equalization section is 1 / 2 to 5 / 6 of the radius of the first flow equalization orifice.

[0012] Preferably, on the first flow equalization section, the first row spacing of adjacent first flow equalization holes in the same row is H1, the first column spacing of adjacent first flow equalization holes in the same column is D1, the radius of the first flow equalization hole is R1, and H1:D1:R1 is (2.5~3.5):(1.5~2.5):1;

[0013] And / or, on the second flow equalization section, the second row spacing of adjacent second flow equalization holes in the same row is H2, the second column spacing of adjacent second flow equalization holes in the same column is D2, the radius of the second flow equalization hole is R2, and H2:D2:R2 is (8~12):(8~12):1.

[0014] Preferably, the second row spacing H2 is the same as the second column spacing D2.

[0015] Preferably, the projection of the rectangular outline formed by the plurality of second flow equalization holes on the second flow equalization section onto the first flow equalization section completely covers all the first flow equalization holes.

[0016] Preferably, the second flow equalization section is connected to a connecting section, the connecting section extends along the gas flow direction, and the connecting section is located on the side of the second flow equalization section facing the first flow equalization section. The connecting section is provided with a mounting groove for cooperating with the first flow equalization section, and a portion of the first flow equalization section is accommodated in the mounting groove to maintain relative fixation with the connecting section.

[0017] Preferably, the two opposite ends of the second flow equalization section are respectively connected to the connecting section, and each of the connecting sections is provided with a mounting groove, and the two opposite ends of the first flow equalization section are respectively accommodated in the corresponding mounting groove;

[0018] The first flow equalization section is detachably connected to the connecting section.

[0019] An annealing apparatus, comprising:

[0020] Installation space for accommodating the target component to be annealed;

[0021] The air intake end is connected to the installation space, and the air intake end is provided with any of the above-mentioned flow equalization components, wherein the second flow equalization part of the flow equalization component at the air intake end is adjacent to the installation space.

[0022] The air outlet is connected to the installation space, and the air inlet and the air outlet are located on opposite sides of the installation space. The air outlet is provided with any of the above-mentioned flow equalization components, and the second flow equalization part of the flow equalization component at the air outlet is adjacent to the installation space.

[0023] Preferably, it further includes an intake pipe connected to the intake end and an exhaust pipe connected to the outlet end; the intake pipe is located on the side of the flow equalization component at the intake end facing away from the installation space, and the intake pipe is used to supply airflow to the corresponding flow equalization component; the exhaust pipe is located on the side of the flow equalization component at the outlet end facing away from the installation space, and the exhaust pipe is used to extract gas flowing out from the corresponding flow equalization component;

[0024] The intake pipe is equipped with an intake flow meter, and the exhaust pipe is equipped with a negative pressure detection device.

[0025] Compared with the prior art, the beneficial effects of this utility model include at least the following:

[0026] By allowing the gas to pass through the first and second flow equalization sections separately, two-stage flow equalization can be achieved, thereby improving the flow equalization effect of the flow equalization assembly. Furthermore, by differentiating the density and diameter of the flow equalization orifices on the first and second flow equalization sections, their flow equalization effects can differ. The cooperation of these different flow equalization sections enhances the overall flow equalization effect of the flow equalization assembly. Moreover, adjusting the flow equalization orifices on the first and second flow equalization sections optimizes the flow equalization effect, further improving the flow equalization effect of the flow equalization assembly. By employing a flow equalization assembly for gas equalization, the impact of gas inhomogeneity on annealing quality can be effectively reduced. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the flow equalization component according to an embodiment of the present invention;

[0028] Figure 2 This is a structural schematic diagram of the flow equalization component from another perspective of this utility model embodiment;

[0029] Figure 3 This is a partial structural schematic diagram of the flow equalization component from another perspective according to an embodiment of the present utility model;

[0030] Figure 4 This is a perspective view of the flow equalization component according to an embodiment of the present utility model;

[0031] Figure 5 This is a partial structural schematic diagram of the annealing apparatus according to an embodiment of the present invention;

[0032] Figure 6 This is a partial structural schematic diagram of the annealing apparatus from another perspective of an embodiment of this utility model.

[0033] In the figure: 100, flow equalization component; 1, first flow equalization section; 11, first flow equalization hole; 2, second flow equalization section; 21, second flow equalization hole; 3, connecting part; 31, mounting groove; 201, installation space; 202, air inlet end; 203, air outlet end; 204, air inlet pipe; 205, exhaust pipe; 206, air inlet flow meter; 207, negative pressure detection element. Detailed Implementation

[0034] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0035] The terms used to describe position and direction in this utility model are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this utility model.

[0036] like Figures 1 to 2 As shown, this utility model provides a flow equalization component 100 for an annealing apparatus. The flow equalization component 100 is used to equalize the airflow within the annealing apparatus to improve the uniformity of the airflow. The flow equalization component 100 includes a first flow equalization section 1 and a second flow equalization section 2 spaced apart along the gas flow direction, and may also include a connecting section 3.

[0037] The first flow equalization section 1 is provided with a plurality of uniformly distributed first flow equalization holes 11. When gas flows through the first flow equalization section 1, the gas will pass through the first flow equalization section 1 through the plurality of first flow equalization holes 11, so that the plurality of uniformly distributed first flow equalization holes 11 rectify the airflow, thereby improving the uniformity of the gas passing through the first flow equalization section 1.

[0038] Among them, reference Figure 4The multiple first flow equalization holes 11 on the first flow equalization section 1 can be distributed in a rectangular array. On the first flow equalization section 1, the first row spacing of adjacent first flow equalization holes 11 in the same row is set to H1, the first column spacing of adjacent first flow equalization holes 11 in the same column is set to D1, and the radius of the first flow equalization hole 11 is set to R1. The ratio of the first row spacing H1, the first column spacing D1, and the radius R1 of the first flow equalization hole 11 can be (2.5~3.5):(1.5~2.5):1; preferably, the ratio of the first row spacing H1, the first column spacing D1, and the radius R1 of the first flow equalization hole 11 is 3:2:1. By reasonably controlling the ratio between the first row spacing H1, the first column spacing D1, and the radius R1 of the first flow equalization hole 11, the flow equalization effect of the first flow equalization section 1 on the gas can be improved.

[0039] The second flow equalization section 2 is provided with a plurality of uniformly distributed second flow equalization holes 21. When gas flows through the second flow equalization section 2, the gas passes through the second flow equalization section 2 through the plurality of second flow equalization holes 21, so that the plurality of uniformly distributed second flow equalization holes 21 rectify the airflow, thereby improving the uniformity of the gas passing through the second flow equalization section 2. The plurality of second flow equalization holes 21 on the second flow equalization section 2 can be distributed in a rectangular array. On the second flow equalization section 2, the second row spacing of adjacent second flow equalization holes 21 in the same row is set to H2, the second column spacing of adjacent second flow equalization holes 21 in the same column is set to D2, and the radius of the second flow equalization hole 21 is set to R2. The ratio of the second row spacing H2, the second column spacing D2 and the radius R2 of the second flow equalization hole 21 can be (8~12):(8~12):1; preferably, the ratio of the second row spacing H2, the second column spacing D2 and the radius R2 of the second flow equalization hole 21 is 10:10:1. By rationally controlling the ratio between the second row spacing H2, the second column spacing D2, and the radius R2 of the second flow equalization orifice 21, the flow equalization effect of the second flow equalization section 2 on the gas can be improved. The radius R2 of the second flow equalization orifice 21 can be 1 / 14 to 1 / 10 of the radius R1 of the first flow equalization orifice 11; preferably, the radius R2 of the second flow equalization orifice 21 is 1 / 12 of the radius R1 of the first flow equalization orifice 11.

[0040] In the first flow equalization section 1 and the second flow equalization section 2, the row direction of the flow equalization holes can be parallel to the width direction of the annealing apparatus, and the column direction of the flow equalization holes can be parallel to the height direction of the annealing apparatus. The first flow equalization section 1 and the second flow equalization section 2 can each have a rectangular plate structure.

[0041] The number of second flow equalization holes 21 on the second flow equalization section 2 can be greater than the number of first flow equalization holes 11 on the first flow equalization section 1, and the diameter of the second flow equalization holes 21 is smaller than the diameter of the first flow equalization holes 11; the density of the second flow equalization holes 21 on the second flow equalization section 2 can be greater than the density of the first flow equalization holes 11 on the first flow equalization section 1. When gas passes through the flow equalization assembly 100, the gas will pass through the first flow equalization section 1 and the second flow equalization section 2 respectively, so that the gas is evenly distributed by the first flow equalization section 1 and the second flow equalization section 2 respectively.

[0042] By allowing the gas to pass through the first flow equalization section 1 and the second flow equalization section 2 respectively, the gas can be uniformly flowed in two stages, thereby improving the flow equalization effect of the flow equalization component 100 on the gas. Furthermore, by making the density and aperture of the flow equalization holes on the first flow equalization section 1 and the second flow equalization section 2 different, the flow equalization effect of the first flow equalization section 1 and the second flow equalization section 2 on the gas can be different. The flow equalization sections with different flow equalization effects cooperate with each other to improve the flow equalization effect of the flow equalization component on the gas. In addition, by adjusting the flow equalization holes on the first flow equalization section 1 and the second flow equalization section 2, the flow equalization effect can be optimized, further improving the flow equalization effect of the flow equalization component 100 on the gas.

[0043] In the flow equalization assembly 100, the second flow equalization section 2 can be located on the side of the first flow equalization section 1 closer to the interior of the annealing apparatus along the gas flow direction. Therefore, after the gas is equalized by the second flow equalization section 2, it flows into the interior space of the annealing apparatus, or the gas inside the annealing apparatus is equalized by the second flow equalization section 2 and then discharged from the annealing apparatus. By making the second flow equalization section 2 closer to the interior of the annealing apparatus than the first flow equalization section 1, the second flow equalization section 2 has a larger number and denser number of second flow equalization holes 21, resulting in a better flow equalization effect. This ensures that both the gas flowing into and out of the annealing apparatus forms a uniform airflow after being equalized by the second flow equalization section 2, thereby ensuring the uniformity of the airflow within the annealing apparatus, reducing the impact of uneven airflow on the annealing quality of the annealing apparatus, and improving the annealing quality of the annealing apparatus.

[0044] Furthermore, the overall outline of the plurality of second flow equalization holes 21 on the second flow equalization section 2 can be a rectangular outline, and the overall outline of the plurality of first flow equalization holes 11 on the first flow equalization section 1 can also be a rectangular outline. The projection of the rectangular outline formed by the plurality of second flow equalization holes 21 on the second flow equalization section 2 onto the first flow equalization section 1 can completely cover all the first flow equalization holes 11 on the first flow equalization section 1. Specifically, the rectangular outline formed by the plurality of second flow equalization holes 21 is projected onto the first flow equalization section 1 in the opposite direction to the gas flow direction. The projection formed by the plurality of second flow equalization holes 21 can cover the rectangular outline formed by the plurality of first flow equalization holes 11.

[0045] By ensuring that the projection of the rectangular outline formed by the multiple second flow equalization holes 21 onto the first flow equalization section 1 completely covers all the first flow equalization holes 11, when gas flows through the first flow equalization section 1 to the second flow equalization section 2, it can be ensured that the gas passing through the first flow equalization holes 11 of the first flow equalization section 1 can flow stably to the second flow equalization holes 21 and be evenly distributed through the second flow equalization holes 21; when gas flows through the second flow equalization section 2 to the first flow equalization section 1, it can be ensured that the gas passing through the second flow equalization holes 21 of the second flow equalization section 2 is located around the first flow equalization holes 11 and converges toward the first flow equalization holes 11, thus ensuring the uniformity of the gas at the first flow equalization holes 11.

[0046] The connecting part 3 is connected to the second flow equalization part 2 so that the connecting part 3 and the second flow equalization part 2 remain fixed. For example, the connecting part 3 can be integrally connected to the second flow equalization part 2. The connecting part 3 can also be connected to the first flow equalization part 1. By connecting the connecting part 3 to the first flow equalization part 1 and the second flow equalization part 2 respectively, the first flow equalization part 1 and the second flow equalization part 2 can remain relatively fixed, and the first flow equalization part 1, the second flow equalization part 2 and the connecting part 3 can be assembled into an integral structure.

[0047] The connecting portion 3 can extend along the gas flow direction, and is located on the side of the second flow equalization portion 2 facing the first flow equalization portion 1. The connecting portion 3 can be provided with a mounting groove 31 that mates with the first flow equalization portion 1, and a portion of the first flow equalization portion 1 is accommodated within the mounting groove 31 to maintain relative fixation with the connecting portion 3. The installation position of the first flow equalization portion 1 on the connecting portion 3 can be controlled by controlling the position of the mounting groove 31, thereby controlling the distance between the first flow equalization portion 1 and the second flow equalization portion 2. (Refer to...) Figure 3 and Figure 4 The distance L between the first flow equalization section 1 and the second flow equalization section 2 can be 1 / 2 to 5 / 6 of the radius R1 of the first flow equalization hole 11. Preferably, the distance L between the first flow equalization section 1 and the second flow equalization section 2 is 2 / 3 of the radius R1 of the first flow equalization hole 11.

[0048] Two connecting parts 3 can be provided, each connecting part 3 being connected to one end of the second flow equalization part 2, and the two connecting parts 3 being located at opposite ends of the second connecting part 3. Each connecting part 3 is provided with a mounting groove 31, and each mounting groove 31 can be used to cooperate with the first flow equalization part 1. When the first flow equalization part 1 is connected to the connecting part 3, the opposite ends of the first flow equalization part 1 can be respectively accommodated in the corresponding mounting groove 31. The first flow equalization part 1 can be fixedly connected to the connecting part 3. For example, the first flow equalization part 1 and the mounting groove 31 of the connecting part 3 are interference-fitted, and the connecting part 3 is pressed into the mounting groove 31 by a large external force. Alternatively, the first flow equalization part 1 can be detachably connected to the connecting part 3. For example, the first flow equalization part 1 can slide in the mounting groove 31 of the connecting part 3. When the flow equalization assembly 100 is in use, there may be a small gap between the first flow equalization part 1 and the connecting part 3. The end of the first flow equalization part 1 along the direction of movement can abut against an external component to restrict the movement of the first flow equalization part 1. Alternatively, the first flow equalization part 1 can be fixed to the connecting part 3 by a detachable fastener such as a screw. Alternatively, the first flow equalization part 1 abuts against the wall forming the mounting groove 31 and has a certain friction. This friction can keep the first flow equalization part 1 and the connecting part 3 relatively fixed when there is no external force intervention. And when a force is applied manually, the friction can be overcome, so that the first flow equalization part 1 can move in the mounting groove 31.

[0049] When the first flow equalization part 1 and the connecting part 3 are detachably connected, different first flow equalization parts 1 can be selected. The density and radius of the flow equalization holes on different first flow equalization parts 1 can be different. Different flow equalization effects can be achieved by using different first flow equalization parts 1 in conjunction with the second flow equalization part 2.

[0050] Reference Figure 5 and Figure 6 This utility model also provides an annealing apparatus, which has an internal mounting space 201 for accommodating the target component to be annealed, and an inlet end 202 and an outlet end 203 communicating with the mounting space 201; the annealing apparatus may also include an inlet pipe 204 and an exhaust pipe 205. Gas can enter the mounting space 201 inside the annealing apparatus from the inlet end 202 to flow through the target component located in the mounting space 201. The outlet end 203 is used to discharge the gas in the mounting space 201, specifically to discharge the gas flowing through the target component in the mounting space 201.

[0051] The inlet end 202 and the outlet end 203 can be respectively provided with flow equalization components 100, so that the gas flows into the installation space 201 after being evenly distributed by the flow equalization component 100 of the inlet end 202, ensuring the uniformity of the gas flowing to the target component; and the gas is discharged after being evenly distributed by the flow equalization component 100 of the outlet end 203, ensuring the uniformity of the gas near the outlet end 203 of the target component.

[0052] At the air inlet 202, the second flow equalization section 2 of the flow equalization assembly 100 is adjacent to the installation space 201, and the first flow equalization section 1 is located at the end of the second flow equalization section 2 away from the installation space 201. Gas flows into the installation space 201 by passing through the first flow equalization section 1 and the second flow equalization section 2 in sequence. At the air outlet 203, the second flow equalization section 2 of the flow equalization assembly 100 is adjacent to the installation space 201, and the first flow equalization section 1 is located at the end of the second flow equalization section 2 away from the installation space 201. Gas flows out of the installation space 201 by passing through the second flow equalization section 2 and the first flow equalization section 1 in sequence.

[0053] The intake pipe 204 is connected to the intake end 202 and can be connected to a gas source so that the gas source can supply gas into the annealing device through the intake pipe 204. The gas can be an inert gas such as nitrogen or CDA (Clean Dry Air). The intake pipe 204 is located on the side of the flow equalization component 100 of the intake end 202 away from the installation space 201 so that the gas in the intake pipe 204 flows into the installation space 201 after passing through the flow equalization component 100. The exhaust pipe 205 is connected to the outlet end 203, and the exhaust pipe 205 can be connected to a negative pressure supply component. The negative pressure supply component can generate suction to extract the gas inside the annealing device through the exhaust pipe 205. The negative pressure supply component can be a vacuum pump. The exhaust pipe 205 is located on the side of the flow equalization component 100 of the outlet end 203 away from the installation space 201, so that the gas in the installation space 201 flows into the exhaust pipe 205 after passing through the flow equalization component 100.

[0054] When gas is supplied into the installation space 201 through the intake pipe 204, the gas first passes through the first flow equalization section 1 with a larger aperture first flow equalization hole 11, and then through the second flow equalization section 2 with a smaller aperture second flow equalization hole 21. The gas in the intake pipe 204 is first dispersed by the larger aperture first flow equalization hole 11, which can reduce the resistance when the gas passes through the first flow equalization section 1, thereby reducing the degree of turbulence generated by the gas. Then the gas passes through the second flow equalization section 2 for flow equalization to achieve a higher uniformity.

[0055] When gas is discharged through the exhaust pipe 205, it first passes through the smaller-diameter second flow equalization hole 21 on the second flow equalization section 2, and then through the larger-diameter first flow equalization hole 11 on the first flow equalization section 1. The gas in the installation space 201 first passes through the second flow equalization section 2 to ensure gas uniformity, and then passes through the first flow equalization section 1 so that the gas initially converges at the first flow equalization hole 11 and the uniformity of the converged airflow is ensured by the first flow equalization section 1. After that, the gas at the multiple first flow equalization holes 11 flows to the exhaust pipe 205 and converges again before being discharged.

[0056] To facilitate the detection and control of the gas within the installation space 201 of the annealing apparatus, an intake flow meter 206 is installed in the intake pipe 204. The intake flow meter 206 is used to detect the flow rate of gas entering the installation space 201 from the intake pipe 204. A negative pressure detection element 207 is installed in the exhaust pipe 205. The negative pressure detection element 207 is used to detect the negative pressure at the outlet end 203; for example, the negative pressure detection element 207 is a negative pressure gauge. This allows for the assessment of the gas extraction effect within the installation space 201. By detecting the intake flow rate and the extraction effect, the gas flow state within the installation space 201 can be easily determined, ensuring a balance between intake and extraction.

[0057] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and alterations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A flow equalization component for an annealing apparatus, characterized in that, The flow equalization component is used to equalize the flow of gas. The flow equalization component includes a first flow equalization section (1) and a second flow equalization section (2) spaced apart along the gas flow direction. The first flow equalization section (1) is provided with a plurality of uniformly distributed first flow equalization holes (11) for gas flow. The second flow equalization section (2) is provided with a plurality of uniformly distributed second flow equalization holes (21) for gas flow. The gas passes through the first flow equalization section (1) and the second flow equalization section (2) respectively to be equalized by the first flow equalization section (1) and the second flow equalization section (2). The diameter of the first flow equalization hole (11) is larger than the diameter of the second flow equalization hole (21), and the density of the first flow equalization hole (11) on the first flow equalization section (1) is smaller than the density of the second flow equalization hole (21) on the second flow equalization section (2).

2. The flow equalization assembly for the annealing apparatus according to claim 1, characterized in that, The second flow equalization section (2) is located on the side of the first flow equalization section (1) near the interior of the annealing device along the gas flow direction; And / or, a plurality of first flow equalization holes (11) on the first flow equalization section (1) are arranged in a rectangular array; a plurality of second flow equalization holes (21) on the second flow equalization section (2) are arranged in a rectangular array.

3. The flow equalization assembly for the annealing apparatus according to claim 2, characterized in that, The radius of the second flow equalization orifice (21) is 1 / 14 to 1 / 10 of the radius of the first flow equalization orifice (11); And / or, the distance between the first flow equalization section (1) and the second flow equalization section (2) is 1 / 2 to 5 / 6 of the radius of the first flow equalization hole (11).

4. The flow equalization assembly for the annealing apparatus according to claim 2, characterized in that, On the first flow equalization section (1), the first row spacing of adjacent first flow equalization holes (11) in the same row is H1, the first column spacing of adjacent first flow equalization holes (11) in the same column is D1, the radius of the first flow equalization hole (11) is R1, and H1:D1:R1 is (2.5~3.5):(1.5~2.5):1; And / or, on the second flow equalization section (2), the second row spacing of adjacent second flow equalization holes (21) in the same row is H2, the second column spacing of adjacent second flow equalization holes (21) in the same column is D2, the radius of the second flow equalization hole (21) is R2, and H2:D2:R2 is (8~12):(8~12):

1.

5. The flow equalization assembly for the annealing apparatus according to claim 4, characterized in that, The second row spacing H2 is the same as the second column spacing D2.

6. The flow equalization assembly for the annealing apparatus according to claim 2, characterized in that, The projection of the rectangular outline formed by the multiple second flow equalization holes (21) on the second flow equalization section (2) onto the first flow equalization section (1) completely covers all the first flow equalization holes (11).

7. The flow equalization assembly for the annealing apparatus according to claim 1, characterized in that, The second flow equalization section (2) is connected to a connecting section (3), which extends along the gas flow direction and is located on the side of the second flow equalization section (2) facing the first flow equalization section (1). The connecting section (3) is provided with a mounting groove (31) for cooperating with the first flow equalization section (1). A portion of the first flow equalization section (1) is accommodated in the mounting groove (31) to remain relatively fixed with the connecting section (3).

8. The flow equalization assembly for the annealing apparatus according to claim 7, characterized in that, The two ends of the second flow equalization section (2) are respectively connected to the connecting section (3), and each connecting section (3) is provided with a mounting groove (31). The two ends of the first flow equalization section (1) are respectively accommodated in the corresponding mounting groove (31). The first flow equalization section (1) is detachably connected to the connecting section (3).

9. An annealing apparatus, characterized in that, include: Installation space (201) for accommodating the target component to be annealed; An air intake end (202) is connected to the installation space (201), and the air intake end (202) is provided with a flow equalization component (100) as described in any one of claims 1 to 8, wherein the second flow equalization part (2) in the flow equalization component (100) at the air intake end (202) is adjacent to the installation space (201); An air outlet (203) is connected to the installation space (201), and the air inlet (202) and the air outlet (203) are located on opposite sides of the installation space (201). The air outlet (203) is provided with a flow equalization component (100) as described in any one of claims 1 to 8. The second flow equalization part (2) in the flow equalization component (100) at the air outlet (203) is adjacent to the installation space (201).

10. The annealing apparatus according to claim 9, characterized in that, It also includes an intake pipe (204) connected to the intake end (202) and an exhaust pipe (205) connected to the outlet end (203); the intake pipe (204) is located on the side of the flow equalization assembly (100) at the intake end (202) facing away from the installation space (201), and the intake pipe (204) is used to supply airflow to the corresponding flow equalization assembly (100); the exhaust pipe (205) is located on the side of the flow equalization assembly (100) at the outlet end (203) facing away from the installation space (201), and the exhaust pipe (205) is used to extract gas flowing out from the corresponding flow equalization assembly (100); The intake pipe (204) is equipped with an intake flow meter (206), and the exhaust pipe (205) is equipped with a negative pressure detection element (207).

Images