A radio frequency output lock detection system for a radio frequency power supply

Abstract

The utility model relates to a radio frequency output locking detection system for radio frequency power supply, contain radiator (1), PCB detection board (5), joint adapter (7) and output limiting mechanism, PCB detection board (5) install on the surface of radiator (1), and output limiting mechanism installs on radiator (1), and the connector of output limiting mechanism is connected with PCB detection board (5) through joint adapter (7). The utility model relates to a radio frequency output locking detection system for radio frequency power supply, and it can reliably and effectively lock the detection of the radio frequency output end of radio frequency power supply.

Description

Technical Field

[0001] This utility model relates to a system for locking detection of the RF output terminal of an RF power supply, belonging to the field of power supply technology. Background Technology

[0002] Radio frequency (RF) power supplies are driving power sources in plasma industrial equipment and are widely used in semiconductor, LED, wafer, and photovoltaic semiconductor fields. The advantage of RF power supplies over high-frequency power supplies is that the discharge voltage can be changed flexibly by adjusting the matching angle. Ensuring reliable output locking of the RF power supply is crucial for its stable operation, thus requiring a stable and reliable output locking detection system. Summary of the Invention

[0003] The purpose of this invention is to overcome the above-mentioned shortcomings and provide an RF output locking detection system for RF power supplies, which can reliably and effectively perform locking detection on the RF output terminal of the RF power supply.

[0004] The purpose of this utility model is achieved as follows:

[0005] A radio frequency output locking detection system for radio frequency power supplies includes a heat sink, a PCB detection board, a connector adapter, and an output limiting mechanism. The PCB detection board is mounted on the surface of the heat sink, the output limiting mechanism is mounted on the heat sink, and the connector of the output limiting mechanism is connected to the PCB detection board through the connector adapter.

[0006] The output limiting mechanism includes an output bracket mounted on a heat sink. A limiting fixing member is mounted on the top of the output bracket. A limit switch is fixedly mounted on the limiting fixing member. The limiting member and the output bracket are movably connected. A trigger bar horizontally arranged on the top of the limiting member slides in contact with the limit switch.

[0007] Preferably, multiple single-ended studs are horizontally arranged on the end face of the output bracket, and the single-ended studs are movably inserted into the guide holes on the limiting member. Among them, the two middle single-ended studs are fitted with compression springs, which are located between the output bracket and the limiting member.

[0008] Preferably, the trigger bar horizontally arranged at the top of the limiting member slides into contact with the limiting switch after being limited by the rotating boss.

[0009] Preferably, the boss rotating component is formed by two boss rotating components and one boss rotating component together to form an "I" shaped structure. The second boss rotating component is located above the trigger bar of the limiting component, and the first boss rotating component is located below the trigger bar of the limiting component. The connecting part between the second boss rotating component and the first boss rotating component passes through the elongated hole on the trigger bar of the limiting component, and the middle part of the second boss rotating component passes through the middle part of the first boss rotating component and is connected to the limiting fixing component.

[0010] Preferably, one end of the radiator is provided with an installation groove for the installation of the output limiting mechanism, and the two sides of the groove are provided with installation strips. The output bracket is provided with two connecting ear plates on the end facing the radiator, and the connecting groove formed between the two connecting ear plates is for the installation strips on both sides of the radiator groove wall to be inserted.

[0011] Preferably, the radiator is made of metal and has an embedded heat dissipation pipe structure.

[0012] Preferably, the connector base is mounted on the output bracket, the connector head passes through the perforation on the limiting member, one end of the connector adapter is fixedly connected to the PCB test board, and the other end passes through the output bracket and is connected to the connector.

[0013] Preferably, the connector is an L29 connector.

[0014] Preferably, the connector adapter is made of copper. One end of the connector adapter, which is in the shape of a regular block, is connected to the PCB test board by bolts, and the other end, which is in the shape of a regular cylinder, is soldered to the L29 connector.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] This invention enables rapid locking detection via an output limiting mechanism. Specifically, the RF output terminal of the RF power supply influences the forward and backward movement of the limiting component of the output limiting mechanism, thereby controlling the limit switch. Only when locking is complete can the limiting component contact the limit switch under the limiting action of the rotating boss, thus triggering the limit switch to send a locking signal to the control system. This allows for efficient and rapid detection of the locking status of the RF output terminal. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of an RF output locking detection system for an RF power supply according to the present invention.

[0018] Figure 2 This is a schematic diagram illustrating the assembly effect of an RF output locking detection system for an RF power supply according to this utility model.

[0019] Figures 3-14 These are schematic diagrams of the heat sink, limiting fixing component, output bracket, limiting component, PCB detection board, L29 connector, connector adapter, single-head stud, limit switch, boss rotating component two, boss rotating component one, and compression spring in this utility model.

[0020] in:

[0021] 1. Heat sink, 2. Limiting and fixing component, 3. Output bracket, 4. Limiting component, 5. PCB detection board, 6. L29 connector, 7. Connector adapter, 8. Single-head stud (9), 10. Limit switch, 11. Boss rotating component 2, 12. Boss rotating component 1, 13. Compression spring. Detailed Implementation

[0022] See Figures 1-12 This utility model relates to an RF output locking detection system for RF power supplies, comprising a heat sink 1, a PCB detection board 5, a connector adapter 7, and an output limiting mechanism. The PCB detection board 5 is bolted to the surface of the heat sink 1, and the heat sink 1 is made of aluminum alloy and has an embedded copper heat dissipation pipe structure. One end of the heat sink 1 is provided with a mounting groove for the output limiting mechanism to be installed, and mounting strips are provided on both sides of the mounting groove.

[0023] The output limiting mechanism includes an output bracket 3 that is fixedly installed on the radiator 1 by bolts. That is, the output bracket 3 has two connecting ear plates on one end facing the radiator 1, and the connecting groove formed between the two connecting ear plates allows the mounting strips on both sides of the groove wall of the radiator 1 to be inserted, and then the bolts are screwed in to achieve connection.

[0024] A limiting fixing member 2 is installed on the top of the output bracket 3, and a limit switch 10 is fixedly installed on the limiting fixing member 2. Multiple single-ended studs (8, 9) are horizontally arranged on the end face of the output bracket 3. The single-ended studs 8 are movably inserted through the guide holes on the limiting member 4. A compression spring 13 is fitted on the single-ended stud 9, and the compression spring 13 is located between the output bracket 3 and the limiting member 4. At the same time, a trigger bar horizontally arranged on the top of the limiting member 4 is driven and connected to the rotating boss, and then slides with the limit switch 10. Contact; specifically, after the two rotating bosses 11 and 12 are engaged, they form an "I"-shaped structure. The two rotating bosses 11 are located above the trigger bar of the limiting member 4, and the one rotating bosses 12 are located below the trigger bar of the limiting member 4. The connecting part between the two rotating bosses 11 and 12 passes through the elongated hole on the trigger bar of the limiting member 4, and the middle part of the two rotating bosses 11 passes through the middle part of the one rotating bosses 12 and then connects with the limiting fixing member 2. Specifically, the middle parts of both the second rotating boss 11 and the first rotating boss 12 are cylindrical structures. The outer diameter of the middle part of the cylindrical structure of the second rotating boss 11 is equal to the inner diameter of the middle part of the cylindrical structure of the first rotating boss 12. After the middle part of the cylindrical structure of the first rotating boss 12 is inserted upward into the elongated hole on the trigger bar of the limiting member 4, the middle part of the cylindrical structure of the second rotating boss 11 is inserted downward into the middle part of the cylindrical structure of the first rotating boss 12. The inner wall of the middle part of the cylindrical structure of the second rotating boss 11 is provided with screw holes, and it is fixed to the limiting member 2 by screwing in bolts.

[0025] The L29 connector 6 is located between the output bracket 3 and the limiting member 4. The base of the L29 connector 6 is fixedly connected to the output bracket 3 by bolts, and the head of the L29 connector 6 passes through the through hole on the limiting member 4.

[0026] One end of the connector adapter 7 is fixedly connected to the PCB test board 5, and the other end passes through the output bracket 3 and is connected to the L29 connector 6. Specifically, the connector adapter 7 is made of copper. One end of the connector adapter 7, which is a regular block shape, is connected to the PCB test board 5 by bolts, and the other end, which is a regular cylindrical shape, is soldered to the L29 connector 6.

[0027] The working principle of this locking detection system is as follows:

[0028] During testing, the RF output terminal of the RF power supply is locked and connected to the L29 connector 6 of this locking test system. During the connection process, the limiting member 4 is pressed and moves towards the output bracket 3 against the spring force of the compression spring 13. This causes the trigger bar on the limiting member 4 to move under the limiting and guidance of the boss rotating part in its elongated hole and trigger the limit switch 10. Triggering the limit switch 10 indicates that the locking connection between the RF output terminal of the RF power supply and the L29 connector 6 has been completed. Subsequently, the PCB test board 5 can simulate the working environment and perform various tests on the RF power supply through the connector adapter 7 and the L29 connector 6.

[0029] Additionally, it should be noted that the above-described specific implementation is merely an optimized solution of this patent, and any modifications or improvements made by those skilled in the art based on the above concept are within the scope of protection of this patent.

Claims

1. A radio frequency output locking detection system for radio frequency power supplies, characterized in that: It includes a heat sink (1), a PCB test board (5), a connector adapter (7) and an output limiting mechanism. The PCB test board (5) is mounted on the surface of the heat sink (1), the output limiting mechanism is mounted on the heat sink (1), and the connector of the output limiting mechanism is connected to the PCB test board (5) through the connector adapter (7).

2. The RF output locking detection system for RF power supply according to claim 1, characterized in that: The output limiting mechanism includes an output bracket (3) installed on the heat sink (1). A limiting fixing member (2) is installed on the top of the output bracket (3). The limiting switch (10) is fixedly installed on the limiting fixing member (2). The limiting member (4) is movably connected to the output bracket (3), and the trigger bar horizontally arranged on the top of the limiting member (4) slides in contact with the limiting switch (10).

3. The RF output locking detection system for RF power supply according to claim 2, characterized in that: Multiple single-ended studs are horizontally arranged on the end face of the output bracket (3), and the single-ended studs are movably inserted into the guide holes on the limiting member (4). Among them, the two middle single-ended studs are fitted with compression springs (13), and the compression springs (13) are located between the output bracket (3) and the limiting member (4).

4. The RF output locking detection system for RF power supply according to claim 3, characterized in that: The trigger bar, which is horizontally arranged on the top of the limiting member (4), slides into contact with the limiting switch (10) after being limited by the rotating boss.

5. The RF output locking detection system for an RF power supply according to claim 4, characterized in that: The rotating boss is formed by rotating boss two (11) and rotating boss one (12) together to form an "I" shaped structure. Rotating boss two (11) is located above the trigger bar of the limiting member (4), and rotating boss one (12) is located below the trigger bar of the limiting member (4). The connecting part between rotating boss two (11) and rotating boss one (12) passes through the elongated hole on the trigger bar of the limiting member, and the middle part of rotating boss two (11) passes through the middle part of rotating boss one (12) and then connects with the limiting fixing member (2).

6. The RF output locking detection system for RF power supply according to claim 2, characterized in that: One end of the radiator (1) is provided with an installation groove for the installation of the output limiting mechanism, and the two sides of the groove wall are provided with installation strips. The output bracket (3) is provided with two connecting ear plates on one end facing the radiator (1), and the connecting groove formed between the two connecting ear plates is for the installation strips on both sides of the groove wall of the radiator (1) to be inserted.

7. The RF output locking detection system for RF power supply according to claim 1, characterized in that: The radiator (1) is made of metal and has an embedded heat dissipation pipe structure.

8. The RF output locking detection system for an RF power supply according to claim 3, characterized in that: The connector base is mounted on the output bracket (3), the connector head passes through the through hole on the limiting member (4), one end of the connector adapter (7) is fixedly connected to the PCB test board (5), and the other end passes through the output bracket (3) and is connected to the connector.

9. The RF output locking detection system for an RF power supply according to claim 8, characterized in that: The connector is an L29 connector (6).

10. The RF output locking detection system for an RF power supply according to claim 8, characterized in that: The connector adapter (7) is made of copper. One end of the connector adapter (7) is in the shape of a regular block and is connected to the PCB test board (5) by bolts. The other end, which is in the shape of a regular cylinder, is welded to the L29 connector (6).

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