A quick laser shutter device suitable for shielding laser of wafer detection equipment

Abstract

The utility model provides a kind of quick laser shutter device suitable for wafer detection equipment shielding laser, including quick laser shutter, the quick laser shutter includes support frame, laser baffle and solenoid, the support frame includes first support plate and second support plate, the second support plate is fixed in first support plate one side, first through -hole is equipped in the first support plate middle, solenoid fixed end is inserted into first through -hole from first support plate other side and is fixed on second support plate, the laser baffle is fixed in solenoid movable end.The utility model drives laser baffle to shield light hole by solenoid, play the role of guiding laser beam and protecting wafer.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer inspection equipment technology, and in particular to a fast laser shutter device suitable for blocking lasers in wafer inspection equipment. Background Technology

[0002] In the wafer inspection process, the laser beam needs to be switched on and off using a laser shutter. Under a specific operating voltage, the laser shutter is electrically driven to block the laser beam. Traditional laser shutters have a short service life, low light-blocking efficiency, and incomplete light blocking. Summary of the Invention

[0003] To address the aforementioned problems, this invention provides a fast laser shutter device suitable for blocking laser light in wafer inspection equipment.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a fast laser shutter device suitable for blocking lasers in wafer inspection equipment, comprising a fast laser shutter, wherein the fast laser shutter includes a support frame, a laser baffle and a solenoid, the support frame includes a first support plate and a second support plate, the second support plate is fixed to one side of the first support plate, the first support plate has a first through hole in the middle, the fixed end of the solenoid extends from the other side of the first support plate into the first through hole and is fixed on the second support plate, and the laser baffle is fixed to the movable end of the solenoid.

[0005] Preferably, the laser baffle includes a first baffle, a disk, and a second baffle. The first baffle and the second baffle are both fixed to the upper semicircular sidewall of the disk. The included angle between the first baffle and the second baffle is 90°-180°. The length of the first baffle is greater than that of the second baffle.

[0006] Preferably, the first support plate has at least three elongated fixing holes around its first through hole, and the second support plate has a second through hole corresponding to the position of the elongated fixing holes, the diameter of the second through hole being equal to the width of the elongated fixing holes.

[0007] Preferably, the front end of the first baffle is a stepped platform, and light-blocking mirrors are provided on the top and side surfaces of the stepped platform, and a groove is provided at the front end of the first baffle.

[0008] Preferably, a circuit board is fixed on the side of the second support plate near the second baffle. At least two photosensitive sensors are provided on the side of the circuit board facing the second baffle. The photosensitive sensors are arranged vertically. A groove-shaped gap parallel to the second baffle is provided on the side of the photosensitive sensors near the second baffle. The head end of the second baffle is located in the groove-shaped gap.

[0009] Preferably, the fast laser shutter is fixed on the base, a counterweight placement chamber is fixed on one top surface of the base, and a fixing plate is fixed on the other top surface. The counterweight placement chamber contains a counterweight. The side wall of the counterweight placement chamber near the fixing plate has several movable holes. The movable holes are square and their tops are located at the top of the counterweight placement chamber. The head end of the first baffle passes through the movable holes and is located inside the counterweight placement chamber. The front and rear walls of the counterweight placement chamber are provided with light-transmitting holes. The light-blocking mirror corresponds to the position of the light-transmitting hole. The fixing plate is C-shaped.

[0010] Preferably, the lowest point of the photosensitive sensor described above is higher than the highest point of the second baffle when the head of the first baffle completely blocks the light-transmitting hole driven by the solenoid, and the highest point of the photosensitive sensor described below is lower than the lowest point of the second baffle when the solenoid is in its original position.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows: This utility model uses a solenoid to drive a laser baffle to block the light-passing hole. When the solenoid is energized, it drives the laser baffle to move. The photosensitive sensor senses the change in the light-blocking position, thereby converting the optical signal into an electrical signal and transmitting it to the host computer. The host computer then controls the opening and closing of the laser baffle, which serves to guide the laser beam and protect the wafer. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of the fast laser shutter device for blocking laser light in wafer inspection equipment according to this utility model.

[0013] Figure 2 This is a front view of the fast laser shutter device for blocking laser light in wafer inspection equipment according to this invention.

[0014] Figure 3 This is a rear view of the fast laser shutter device for blocking laser light in wafer inspection equipment according to this invention.

[0015] Figure 4 This is a top view of the fast laser shutter device for blocking laser light in wafer inspection equipment according to this utility model.

[0016] Figure 5 This is a schematic diagram of the base and fast laser shutter structure of the fast laser shutter device for blocking laser light in wafer inspection equipment according to this utility model.

[0017] Figure descriptions: 1. First support plate, 11. First through hole, 12. Long strip fixing hole, 2. Second support plate, 21. Second through hole, 3. Laser baffle, 31. Light blocking mirror, 32. First baffle, 33. Disc, 34. Second baffle, 35. Groove, 4. Solenoid, 5. Base, 51. Counterweight placement compartment, 52. Light transmission hole, 53. Fixing plate, 54. Movable hole, 6. Circuit board, 7. Photosensitive sensor, 71. Groove gap, 8. Support frame, 9. High-speed laser shutter. Detailed Implementation

[0018] To provide a better understanding of the purpose, structure, features, and functions of this utility model, detailed descriptions are provided below with reference to specific embodiments.

[0019] Please refer to the reference. Figure 1 , Figure 2 , Figure 3 and Figure 4 An embodiment of this utility model provides a fast laser shutter device for blocking laser light in wafer inspection equipment, comprising a fast laser shutter 9. The fast laser shutter 9 includes a support frame 8, a laser baffle 3, and a solenoid 4. The support frame 8 includes a first support plate 1 and a second support plate 2. The second support plate 2 is fixed to one side of the first support plate 1. The first support plate 1 has a first through hole 11 in the middle. The fixed end of the solenoid 4 extends from the other side of the first support plate 1 into the first through hole 11 and is fixed on the second support plate 2. The laser baffle 3 is fixed to the movable end of the solenoid 4.

[0020] The solenoid 4 drives the laser baffle to rotate and blocks the light-transmitting hole. The laser baffle 3 guides the laser beam and protects the wafer. The first support plate 1 supports the second support plate 2 and the solenoid 4.

[0021] In one embodiment, such as Figure 1 and Figure 2 As shown, the laser baffle 3 includes a first baffle 32, a disk 33, and a second baffle 34. The first baffle 32 and the second baffle 34 are both fixed to the upper semicircular sidewall of the disk 33. The included angle between the first baffle 32 and the second baffle 34 is 90°-180°. The length of the first baffle 32 is greater than that of the second baffle 34. The second baffle 36 serves to shield the photosensitive sensor 7 and to balance the system, preventing excessive gravity on one side due to the first baffle 34, which could lead to malfunction of the equipment.

[0022] In one embodiment, such as Figure 2 and Figure 3As shown, the first support plate 1 has at least three elongated fixing holes 12 around its first through hole 11. The second support plate 2 has a second through hole 21 corresponding to the position of the elongated fixing holes 12. The diameter of the second through hole 21 is equal to the width of the elongated fixing holes 12. The elongated fixing holes 12 facilitate the adjustment of the second support plate 2. The second support plate 2 can be rotated at a certain angle to change the position of the photosensitive sensor 7, so as to achieve the effect that the second baffle 34 just blocks one side of the photosensitive sensor 7 without blocking the other side of the sensor.

[0023] In one embodiment, such as Figure 1 and Figure 3 As shown, the front end of the first baffle 32 is a stepped platform. The top and side surfaces of the stepped platform are equipped with light-blocking mirrors 31. The front end of the first baffle 32 is equipped with a groove 35. The light-blocking mirrors 31 are used to block the laser without causing significant damage to the components. The groove 35 is used to reduce the overall weight and reduce the working pressure of the solenoid 4, making the structure more stable.

[0024] In one embodiment, such as Figure 1 and Figure 4 As shown, the second support plate 2 has a circuit board 6 fixed on the side near the second baffle 34. The circuit board 6 has at least two photosensitive sensors 7 on the side facing the second baffle 34. The photosensitive sensors 7 are arranged vertically. The side of the photosensitive sensors 7 near the second baffle 34 has a slot-shaped gap 71 parallel to the second baffle 34. The head end of the second baffle 34 is located in the slot-shaped gap 71. The second support plate 2 is used to fix the circuit board 6. The photosensitive sensors 7 are used to sense changes in the light blocking position, thereby converting the light signal into an electrical signal and transmitting it to the host computer, and then controlling the opening and closing of the laser baffle 3 from the host computer.

[0025] In one embodiment, such as Figure 5 As shown, the fast laser shutter 9 is fixed on the base 5. A counterweight placement chamber 51 is fixed on the top surface of one side of the base 5, and a fixing plate 53 is fixed on the top surface of the other side. The counterweight placement chamber 51 contains a counterweight. The side wall of the counterweight placement chamber 51 near the fixing plate 53 has several movable holes 54. The movable holes 54 are square and their tops are located at the top of the counterweight placement chamber 51. The head end of the first baffle 32 passes through the movable holes 54 and is located inside the counterweight placement chamber 51. The front and rear walls of the counterweight placement chamber 51 are provided with light-transmitting holes 52. The light-blocking mirror 31 is positioned corresponding to the light-transmitting holes 52. The fixing plate 53 is C-shaped and is used to fix other equipment. The counterweight placement chamber 51 is used to place the counterweight and play a balancing role. The laser is emitted through the light-transmitting holes 52. The movable holes 54 are used to limit the range of motion of the head end of the first baffle 34.

[0026] In one embodiment, such as Figure 2 and Figure 5As shown, the lowest point of the photosensitive sensor 7 above is higher than the highest point of the second baffle 34 when the head of the first baffle 32 driven by the solenoid 4 completely blocks the light-transmitting hole 52. The highest point of the photosensitive sensor 7 below is lower than the lowest point of the second baffle 34 when the solenoid 4 is in its original position, ensuring that the second baffle 34 just blocks one side of the photosensitive sensor 7 without blocking the other side of the photosensitive sensor 7.

[0027] Usage: Combine Figures 1-5 As shown, the solenoid 4 is energized to drive the laser baffle 3 to move. The light-blocking mirror 31 blocks the light-passing hole 52, and the second baffle 34 blocks the photosensitive sensor 7 below. The photosensitive sensor 7 senses the change in the light-blocking position, thereby converting the light signal into an electrical signal and transmitting it to the host computer. The host computer then controls the opening and closing of the laser baffle 3, which serves to guide the laser beam and protect the wafer.

[0028] This utility model has been described by the above-described embodiments; however, these embodiments are merely examples for implementing this utility model. It must be noted that the disclosed embodiments do not limit the scope of this utility model. Conversely, any modifications and refinements made without departing from the spirit and scope of this utility model are within the scope of patent protection of this utility model.

Claims

1. A fast laser shutter device suitable for blocking laser light in wafer inspection equipment, characterized in that: The device includes a fast laser shutter (9), which includes a support frame (8), a laser baffle (3), and a solenoid (4). The support frame (8) includes a first support plate (1) and a second support plate (2). The second support plate (2) is fixed to one side of the first support plate (1). The first support plate (1) has a first through hole (11) in the middle. The fixed end of the solenoid (4) extends from the other side of the first support plate (1) into the first through hole (11) and is fixed on the second support plate (2). The laser baffle (3) is fixed to the movable end of the solenoid (4).

2. The fast laser shutter device for blocking laser light in wafer inspection equipment as described in claim 1, characterized in that: The laser baffle (3) includes a first baffle (32), a disk (33), and a second baffle (34). The first baffle (32) and the second baffle (34) are both fixed on the upper semicircular sidewall of the disk (33). The included angle between the first baffle (32) and the second baffle (34) is 90°-180°. The length of the first baffle (32) is greater than that of the second baffle (34).

3. The fast laser shutter device for blocking laser light in wafer inspection equipment as described in claim 1, characterized in that: The first support plate (1) has at least three elongated fixing holes (12) around its first through hole (11), and the second support plate (2) has a second through hole (21) corresponding to the position of the elongated fixing hole (12). The diameter of the second through hole (21) is equal to the width of the elongated fixing hole (12).

4. The fast laser shutter device for blocking laser light in wafer inspection equipment as described in claim 2, characterized in that: The front end of the first baffle (32) is a stepped platform, and the top and side surfaces of the stepped platform are equipped with light-blocking mirrors (31). The front end of the first baffle (32) is equipped with a groove (35).

5. The fast laser shutter device for blocking laser light in wafer inspection equipment as described in claim 1, characterized in that: The second support plate (2) has a circuit board (6) fixed on the side near the second baffle (34). The circuit board (6) has at least two photosensitive sensors (7) on the side facing the second baffle (34). The photosensitive sensors (7) are distributed vertically. The side of the photosensitive sensor (7) near the second baffle (34) has a groove-shaped gap (71) parallel to the second baffle (34). The head end of the second baffle (34) is located in the groove-shaped gap (71).

6. The fast laser shutter device for blocking laser light in wafer inspection equipment as described in claim 4, characterized in that: The fast laser shutter (9) is fixed on the base (5). The top surface of one side of the base (5) is fixed with a counterweight storage compartment (51), and the top surface of the other side is fixed with a fixing plate (53). The counterweight storage compartment (51) is provided with a counterweight. The side wall of the counterweight storage compartment (51) near the fixing plate (53) is provided with several movable holes (54). The movable holes (54) are square and the top is located at the top of the counterweight storage compartment (51). The head end of the first baffle (32) passes through the movable hole (54) and is located inside the counterweight storage compartment (51). The front and rear walls of the counterweight storage compartment (51) are provided with light-transmitting holes (52). The position of the light-blocking mirror (31) corresponds to the position of the light-transmitting hole (52). The fixing plate (53) is C-shaped.

7. The fast laser shutter device for blocking laser light in wafer inspection equipment as described in claim 5, characterized in that: The height of the lowest point of the photosensitive sensor (7) above is higher than the height of the highest point of the second baffle (34) when the head end of the first baffle (32) driven by the solenoid (4) completely blocks the light-transmitting hole (52). The height of the highest point of the photosensitive sensor (7) below is lower than the height of the lowest point of the second baffle (34) when the solenoid (4) is in its original position.

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