An ultra-high purity hydrogen gas purification device

Abstract

The utility model discloses a kind of ultra-high purity hydrogen gas purification devices in gas purification technical field, including base, purification main body, detection control mechanism and sliding mechanism, detection control mechanism includes electromagnetic valve and flowmeter, purification main body one end is provided with air inlet pipeline, purification main body one end is provided with air outlet pipeline, air inlet pipeline one side is provided with flange, flange one side is sequentially connected with metal bellows expansion joint, flowmeter and electromagnetic valve by bolt and nut, the device is detected control to purified gas by flowmeter and electromagnetic valve in detection control mechanism, install gap is adjusted by metal bellows expansion joint, it is convenient to install, it is convenient to move purification device by the cooperation of sliding groove and sliding block in sliding mechanism, move limit by hydraulic telescopic link to device sliding platform, purified main body is fixed limit by pressing block.

Description

Technical Field

[0001] This utility model relates to the field of gas purification technology, specifically to an ultra-high purity hydrogen purification device. Background Technology

[0002] Hydrogen, as a clean energy source and an important industrial raw material, has wide applications in electronics, semiconductors, metallurgy, petroleum, and chemical industries. With the advancement of technology, these industries have increasingly higher requirements for the purity of hydrogen, especially in the electronics and semiconductor industries, where ultra-high purity hydrogen (purity of 99.9999% or higher) is a necessary condition for manufacturing high-performance chips and electronic components.

[0003] If the catalyst activity decreases in existing purification technologies, peroxides may be generated and remain in hydrogen gas, affecting applications in high-end fields such as semiconductors. After multiple adsorption-desorption cycles, the adsorption capacity of molecular sieves and metal getters gradually decreases, requiring periodic replacement or high-temperature regeneration, which increases energy consumption and downtime.

[0004] Based on this, the present invention designs an ultra-high purity hydrogen purification device to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide an ultra-high purity hydrogen purification device to solve the problems mentioned in the background art, such as the decline in catalyst activity, the potential generation of peroxides that remain in hydrogen and affect applications in high-end fields such as semiconductors, and the gradual decrease in adsorption capacity of molecular sieves and metal getters after multiple adsorption-desorption cycles, requiring periodic replacement or high-temperature regeneration, which increases energy consumption and downtime.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an ultra-high purity hydrogen purification device, comprising a base, a purification body, a detection and control mechanism, and a sliding mechanism. The detection and control mechanism includes an electromagnetic valve and a flow meter. An inlet pipe is provided at one end of the purification body, and an outlet pipe is provided at the other end. A flange is provided on one side of the inlet pipe, and a metal bellows expansion joint, a flow meter, and an electromagnetic valve are sequentially connected to one side of the flange by bolts and nuts.

[0007] Preferably, the sliding mechanism includes a sliding platform and a hydraulic telescopic rod. A sliding groove is provided above the base, and a sliding block is slidably fitted in the sliding groove. A sliding platform is fixedly connected above the sliding block. A limiting groove is provided above the sliding platform, and a purification body is fitted in the limiting groove. A hydraulic telescopic rod is provided on one side of the base, and the moving end of the hydraulic telescopic rod is fixedly connected to the sliding platform.

[0008] Preferably, multiple sets of sliding grooves are provided, multiple sets of hydraulic telescopic rods are provided, and two limiting grooves are provided, with a spare purification body provided in one of the limiting grooves.

[0009] Preferably, the backup purification body has a sealing cap that slides into the openings at both ends.

[0010] Preferably, a clamping groove is provided on one side of the sliding platform, and the clamping groove is engaged with the clamping block by bolts.

[0011] Preferably, the purification body has a purification chamber, and a porous catalyst block, a primary adsorption block, a secondary adsorption block and a tertiary adsorption block are arranged sequentially from one side of the air inlet pipe in the purification chamber.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: This utility model detects and controls the purified gas through the flow meter and electromagnetic valve in the detection and control mechanism, adjusts the installation gap through the metal bellows expansion joint to facilitate installation, facilitates the movement of the purification device through the cooperation of the sliding groove and sliding block in the sliding mechanism, limits the movement of the device sliding platform through the hydraulic telescopic rod, and fixes and limits the purification body through the clamping block. Attached Figure Description

[0013] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the main view structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the front view structure of this utility model;

[0016] Figure 3 This is a schematic diagram of the front-view cross-sectional structure of part of this utility model;

[0017] Figure 4 This is a schematic diagram of the main view structure of this utility model.

[0018] The attached diagram lists the components represented by each number as follows:

[0019] 1-Base, 2-Purification body, 3-Detection and control mechanism, 4-Sliding mechanism, 5-Solenoid valve, 6-Flow meter, 7-Metal bellows expansion joint, 8-Inlet pipe, 9-Outlet pipe, 10-Flange, 11-Sliding platform, 12-Hydraulic telescopic rod, 13-Sliding groove, 14-Sliding block, 15-Limiting groove, 16-Spare purification body, 17-Sealing cover, 18-Pressure groove, 19-Pressure block, 20-Purification chamber, 21-Porous catalyst block, 22-First-stage adsorption block, 23-Second-stage adsorption block, 24-Third-stage adsorption block. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0021] Please see Figure 1-4 This utility model provides a technical solution: an ultra-high purity hydrogen purification device, including a base 1, a purification body 2, a detection and control mechanism 3 and a sliding mechanism 4. The detection and control mechanism 3 includes an electromagnetic valve 5 and a flow meter 6. An inlet pipe 8 is provided at one end of the purification body 2, and an outlet pipe 9 is provided at the other end of the purification body 2. A flange 10 is provided on one side of the inlet pipe 8. A metal bellows expansion joint 7, a flow meter 6 and an electromagnetic valve 5 are sequentially connected to one side of the flange 10 by bolts and nuts.

[0022] The sliding mechanism 4 includes a sliding platform 11 and a hydraulic telescopic rod 12. A sliding groove 13 is provided above the base 1, and a sliding block 14 is slidably fitted in the sliding groove 13. The sliding platform 11 is fixedly connected above the sliding block 14. A limit groove 15 is provided above the sliding platform 11, and a purification body 2 is fitted in the limit groove 15. A hydraulic telescopic rod 12 is provided on one side of the base 1, and the moving end of the hydraulic telescopic rod 12 is fixedly connected to the sliding platform 11. A pressing groove 18 is provided on one side of the sliding platform 11, and the pressing groove 18 is fitted with a pressing block 19 by bolts.

[0023] Multiple sets of sliding grooves 13 and multiple sets of hydraulic telescopic rods 12 are provided. Two limit grooves 15 are provided. A spare purification body 16 is provided in one limit groove 15. A sealing cap 17 is slidably fitted in the openings at both ends of the spare purification body 16.

[0024] The purification body 2 has a purification chamber 20. The purification chamber 20 is arranged in sequence from one side of the air inlet pipe, including a porous catalyst block 21, a primary adsorption block 22, a secondary adsorption block 23, and a tertiary adsorption block 24. The porous catalyst block 21 catalyzes oxygen, the primary adsorption block 22 adsorbs impurities and dust, the secondary adsorption block 23 adsorbs impurities and gases, and the tertiary adsorption block 24 dries the purified gas.

[0025] A specific application of this embodiment is as follows: This utility model controls the amount of purified gas entering the system by detecting the optimal catalytic activity of the porous catalyst block 21, the optimal absorption of the primary adsorption block 22, the secondary adsorption block 23, and the tertiary adsorption block 24, and the impurity content of the purified gas, ensuring stable hydrogen purification. The amount of purified gas entering the system is detected by the flow meter 6. When the entering gas is about to reach the optimal catalytic activity or the optimal absorption, an alarm is triggered for the operator. The solenoid valve 5 is closed to prevent gas from entering or leaving the system. The device is separated by removing the bolts and nuts between the metal bellows expansion joint 7 and the flow meter 6. Adjusting the two metal bellows expansion joints 7 to contract creates a movable gap, facilitating the movement of the purification device for replacement. The hydraulic telescopic rod 12 is activated by opening the sealing cover 17 to move the spare purification unit 16 to the connection position. After adjusting the metal bellows expansion joint 7 to the installation position, connect the metal bellows expansion joint 7 and the flow meter 6 on the spare purification body 16 with bolts and nuts. Then, open the solenoid valve 5 to start the purification operation. Remove the clamping block 19 by unscrewing the bolts to facilitate the removal of the purification body 2. After removal, place the new purification body 2 in the limiting groove 15 and fix the purification body 2 in place by bolting the clamping block 19. This device detects and controls the purified gas through the flow meter 6 and solenoid valve 5 in the detection and control mechanism 3. The installation gap is adjusted by the metal bellows expansion joint 7 to facilitate installation. The sliding groove 13 and the sliding block in the sliding mechanism 4 facilitate the movement of the purification device. The sliding platform 11 of the device is limited by the hydraulic telescopic rod 12, and the purification body 2 is fixed by the clamping block 19.

[0026] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0027] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. An ultra-high purity hydrogen purification device, comprising a base (1), a purification body (2), a detection and control mechanism (3), and a sliding mechanism (4), characterized in that: The detection and control mechanism (3) includes an electromagnetic valve (5) and a flow meter (6). One end of the purification body (2) is provided with an air inlet pipe (8) and the other end of the purification body (2) is provided with an air outlet pipe (9). A flange (10) is provided on one side of the air inlet pipe (8). A metal bellows expansion joint (7), a flow meter (6) and an electromagnetic valve (5) are sequentially connected to one side of the flange (10) by bolts and nuts.

2. The ultra-high purity hydrogen purification device according to claim 1, characterized in that: The sliding mechanism (4) includes a sliding platform (11) and a hydraulic telescopic rod (12). A sliding groove (13) is provided above the base (1). A sliding block (14) is slidably fitted in the sliding groove (13). The sliding platform (11) is fixedly connected above the sliding block (14). A limiting groove (15) is provided above the sliding platform (11). A purification body (2) is fitted in the limiting groove (15). A hydraulic telescopic rod (12) is provided on one side of the base (1). The moving end of the hydraulic telescopic rod (12) is fixedly connected to the sliding platform (11).

3. The ultra-high purity hydrogen gas purification device according to claim 2, characterized by: Multiple sets of sliding grooves (13) are provided, multiple sets of hydraulic telescopic rods (12) are provided, and two limiting grooves (15) are provided, with a spare purification body (16) provided in one of the limiting grooves (15).

4. The ultra-high purity hydrogen gas purifying device according to claim 3, characterized in that: The spare purification body (16) has a sealing cap (17) that slides inside the openings at both ends.

5. The ultra-high purity hydrogen gas purification device according to claim 2, characterized by: A clamping groove (18) is provided on one side of the sliding platform (11), and the clamping groove (18) is engaged with the clamping block (19) by bolts.

6. The ultra-high purity hydrogen gas purification device according to claim 1, characterized by: The purification body (2) has a purification chamber (20) inside, and a porous catalyst block (21), a primary adsorption block (22), a secondary adsorption block (23) and a tertiary adsorption block (24) are arranged sequentially from one side of the air inlet pipe inside the purification chamber (20).

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