Ozone water preparation mixing device

Abstract

This utility model discloses an ozone water production and mixing device, comprising: a mixing container for gas-liquid mixing to generate ozone water, the mixing container having an air inlet, an exhaust outlet, a water inlet, and a liquid outlet; the air inlet for ozone gas to enter, the exhaust outlet for discharging excess ozone gas, the water inlet connected to a water source, and the liquid outlet for discharging ozone water; and a liquid level measuring device for continuously measuring the liquid level in the mixing container, the liquid level measuring device including a liquid level measuring tube, a liquid level detection capacitor electrode, and a liquid level detection circuit board; the upper and lower ends of the liquid level measuring tube are respectively connected to the interior of the mixing container, the liquid level detection capacitor electrode is connected to the liquid level measuring tube, and the liquid level detection circuit board is connected to the liquid level detection capacitor electrode, the liquid level detection circuit board being used to calculate the liquid level height in the liquid level measuring tube. This utility model can produce high-concentration, high-stability ozone water.

Description

Technical Field

[0001] This utility model belongs to the field of ozone water preparation technology, and in particular relates to an ozone water preparation and mixing device. Background Technology

[0002] The semiconductor industry demands ozone water with high purity, high concentration, and high stability. Therefore, most ozone water used in the semiconductor industry is produced using a pressurized mixing container method. The pressurized mixing container method works as follows: according to Henry's Law for gas-liquid mixing, the higher the pressure, the higher the solubility achievable through gas-liquid mixing. Therefore, controlling the internal pressure of the ozone gas-liquid mixing container to maintain a high pressure allows for the production of ozone water with a high concentration.

[0003] In existing technologies, the mixing container is mostly connected to a defoaming container at the rear end. The pressure in the mixer is controlled by high and low liquid level sensors installed on the side wall of the defoaming container. To effectively remove bubbles, the high and low liquid levels are usually significantly different, which causes large pressure fluctuations in the mixer. According to Henry's Law, at a given temperature, the solubility of a gas in a known volume of liquid is directly proportional to the partial pressure of the gas acting on the liquid. Therefore, large pressure fluctuations in the mixer will cause large fluctuations in the concentration of the ozone water formed, affecting the stability of the ozone water concentration, increasing the difficulty of control, and thus affecting the application effect of ozone water in the semiconductor industry.

[0004] Therefore, the technical problem to be solved by this invention is how to design a technology with a simple structure that improves the stability of ozone water-soluble concentration. Utility Model Content

[0005] This invention provides an ozone water preparation and mixing device to improve the stability of ozone water concentration.

[0006] To achieve the above-mentioned technical objectives, the present invention adopts the following technical solution:

[0007] This utility model provides an ozone water production mixing device, comprising:

[0008] A mixing container for mixing gas and liquid to generate ozone water. The mixing container is provided with an air inlet, an exhaust outlet, a water inlet, and a liquid outlet. The air inlet is used for ozone gas to enter, the exhaust outlet is used for discharging excess ozone gas, and the water inlet is connected to a water source. The liquid outlet is used for discharging ozone water.

[0009] A liquid level measuring device is used to continuously measure the liquid level in the mixing container. The liquid level measuring device includes a liquid level measuring tube, a liquid level detection capacitor electrode, and a liquid level detection circuit board. The upper and lower ends of the liquid level measuring tube are respectively connected to the inside of the mixing container. The liquid level detection capacitor electrode is connected to the liquid level measuring tube. The liquid level detection circuit board is connected to the liquid level detection capacitor electrode. The liquid level detection circuit board is used to calculate the liquid level height in the liquid level measuring tube.

[0010] In some embodiments of this application, a sealing ring is provided at the connection between the liquid level measuring tube and the mixing container.

[0011] In some embodiments of this application, the liquid level measuring device further includes a housing connected to the mixing container, and the liquid level measuring tube, the liquid level detection capacitor electrode, and the liquid level detection circuit board are all located inside the housing.

[0012] In some embodiments of this application, the mixing container is filled with packing material, which is used to increase the gas-liquid mixing area.

[0013] In some embodiments of this application, the mixing container is further provided with a water distribution structure, which is used to evenly distribute water onto the packing material to increase the gas-liquid mixing efficiency.

[0014] In some embodiments of this application, the water distribution structure includes a water distribution plate, and the water distribution plate is provided with a plurality of water distribution holes.

[0015] In some embodiments of this application, an air intake control valve is provided at the air inlet, an exhaust control valve is provided at the exhaust outlet, a water inlet control valve is provided at the water inlet, and a liquid outlet control valve is provided at the liquid outlet.

[0016] In some embodiments of this application, the ozone water production and mixing device further includes a pressure detection component, which is used to detect the pressure inside the mixing container.

[0017] In some embodiments of this application, a flow meter is also provided at the liquid outlet.

[0018] In some embodiments of this application, the ozone water production and mixing device further includes a controller, which is connected to the liquid level detection circuit board, the air inlet control valve, the exhaust control valve, the water inlet control valve, the liquid outlet control valve, the pressure detection component, and the flow meter.

[0019] Compared with the prior art, the advantages and positive effects of this utility model are:

[0020] (1) By connecting the liquid level measuring tube and the inside of the mixing container, the liquid level height inside the liquid level measuring tube and the mixing container is consistent. The liquid level measuring device can continuously measure the liquid level height inside the mixing container in real time, reduce the pressure fluctuation inside the mixing container, and make the ozone water concentration stable.

[0021] (2) The space above the liquid level line in the mixing container is a gas space and the space below is a liquid space. Under the premise of ensuring that the internal pressure of the mixing container is constant, excess ozone gas can be discharged through the exhaust port. This eliminates the need to add a separate defoaming container at the rear end of the mixing container, simplifies the connection structure of the ozone water production equipment, and makes it more convenient for integrated installation. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of an embodiment of the ozone water production and mixing device of this utility model;

[0024] Figure 2 for Figure 1 Perspective view;

[0025] Figure 3 for Figure 1 A schematic diagram of the exploded structure;

[0026] Figure 4 for Figure 1 A sectional view;

[0027] Figure 5 for Figure 1 Top view;

[0028] Figure 6 This is a schematic diagram of the water distribution plate in one embodiment of the ozone water production system of this utility model.

[0029] Figure 7 This is a schematic diagram showing the connection between the ozone water preparation and mixing device of this utility model and the valve, pressure sensor and flow meter;

[0030] Explanation of reference numerals in the attached figures:

[0031] 100. Mixing container; 101. Air inlet pipe; 102. Exhaust pipe; 103. Water inlet pipe; 104. Liquid outlet pipe; 105. Air inlet; 106. Exhaust outlet; 107. Water inlet; 108. Liquid outlet;

[0032] 200. Liquid level measuring device; 201. Liquid level measuring tube; 202. Liquid level detection circuit board; 203. Housing; 204. Liquid level detection capacitor electrode; 205. Sealing ring; 206. Screw;

[0033] 301. Air intake control valve; 302. Exhaust control valve; 303. Water intake control valve; 304. Liquid discharge control valve;

[0034] 400. Pressure sensor;

[0035] 500. Flow meter;

[0036] 600, liquid level line;

[0037] 700, water distribution plate; 701, water distribution hole. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0039] It should be noted that in the description of this utility model, the terms "upper", "lower", "inner", "outer", etc., indicating the direction or positional relationship are based on the direction or positional relationship shown in the drawings. This is only for the convenience of description and does not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this utility model.

[0040] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0041] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0042] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0043] According to Henry's Law, at a given temperature, the solubility of a gas in a known volume of liquid is directly proportional to the partial pressure of the gas acting on the liquid. Therefore, to maintain a stable concentration of ozone water, under the same conditions, the pressure of the gas-liquid mixture must be kept constant.

[0044] like Figures 1 to 7 As shown, this application provides an ozone water production mixing device, including a mixing container 100 and a liquid level measuring device 200. The liquid level measuring device 200 can continuously and in real-time measure the liquid level inside the mixing container 100, achieving more precise control of the liquid level inside the mixing container 100. This allows for better control of the pressure inside the mixing container 100, resulting in a more stable concentration of the generated ozone water. Specifically:

[0045] like Figure 7As shown, the mixing container 100 is used to mix ozone gas and pure water to generate ozone water. The bottom of the mixing container 100 is provided with an air inlet 105 and a liquid outlet 108. The air inlet 105 is connected to the ozone gas generator through the air inlet pipe 101, and the ozone gas enters the mixing container 100 through the air inlet 105. The liquid outlet 108 is connected to the liquid outlet pipe 104, which is connected to the ozone water outlet. The top of the mixing container 100 is provided with an exhaust port 106 and a water inlet 107. The exhaust port 106 is used to discharge excess ozone gas when the pressure inside the mixing container 100 is constant. The exhaust port 106 can be connected to the ozone exhaust gas treatment device through the exhaust pipe 102, thereby reducing air pollution. The water inlet 107 is connected to the pure water source through the water inlet pipe 103, and the pure water enters the mixing container 100 through the water inlet 107 to dissolve the ozone gas and generate ozone water.

[0046] The mixing container 100 is a cylindrical tank, which facilitates production and processing.

[0047] The ozone gas generator can be any commercially available one, and the ozone gas generator supplies ozone gas to the mixing container 100.

[0048] like Figure 2 , Figure 3 As shown, the liquid level measuring device 200 includes a liquid level measuring tube 201, a liquid level detection capacitor electrode 204, and a liquid level detection circuit board 202. The mixing container 100 has an upper liquid level connection port and a lower liquid level connection port (not shown in the figure). The upper end of the liquid level measuring tube 201 is connected to the interior of the mixing container 100 through the upper liquid level connection port, and the lower end of the liquid level measuring tube 201 is also connected to the interior of the mixing container 100 through the lower liquid level connection port. The liquid level detection capacitor electrode 204 is connected to the liquid level measuring tube 201, and the liquid level detection circuit board 202 is connected to the liquid level detection capacitor electrode 204. The liquid level detection circuit board 202 is used to calculate the liquid level height inside the liquid level measuring tube 201. Using a capacitor electrode to measure the liquid level height in the tank avoids direct contact with ozone water, is unaffected by the conductivity of the liquid, and provides high measurement accuracy. Furthermore, it can operate under harsh conditions and has a fast dynamic response.

[0049] The liquid level measuring tube 201 is connected to the inside of the mixing container 100, which ensures that the liquid level in the liquid level measuring tube 201 is consistent with the liquid level in the mixing container 100. This keeps the liquid level in the mixing container 100 constant and avoids pressure fluctuations inside the mixing container 100 caused by large fluctuations in the liquid level, thereby ensuring the stability of the concentration of generated ozone water.

[0050] During use, ozone gas enters the mixing container 100 through the air inlet 105, and pure water enters the mixing container 100 through the water inlet 107. The ozone gas dissolves in the pure water to generate ozone water. During this process, the liquid level in the liquid level measuring tube 201 is consistent with the liquid level in the mixing container 100. The liquid level detection capacitor electrode 204 can detect the liquid level in real time, and the liquid level detection circuit board 202 can calculate the liquid level in the liquid level measuring tube 201, i.e., the liquid level in the mixing container 100, in real time. The upper space of the liquid level line 600 in the mixing container 100 is a gas space, and the lower space is a liquid space. Under the premise of ensuring a constant pressure inside the mixing container 100, excess ozone gas is discharged through the exhaust port 106, thereby ensuring the stable production of ozone water with a stable concentration.

[0051] like Figure 2 As shown, a sealing ring 205 is provided at the connection between the liquid level measuring tube 201 and the mixing container 100. The sealing ring 205 can ensure that the connection between the liquid level measuring tube 201 and the mixing container 100 is sealed, ensure that the liquid level height in the liquid level measuring tube 201 and the mixing container 100 is consistent, and ensure the accuracy of the measurement.

[0052] The liquid level measuring device 200 also includes a housing 203, which is mounted on the mixing container 100 by screws 206. The liquid level measuring tube 201, the liquid level detection capacitor electrode 204, and the liquid level detection circuit board 202 are all located inside the housing 203. The housing 203 is dustproof and prevents damage to the liquid level measuring tube 201, the liquid level detection capacitor electrode 204, and the liquid level detection circuit board 202, thereby improving the service life of the liquid level measuring device 200.

[0053] The mixing container 100 is filled with packing material (not shown in the figure), such as Pall ring packing. The packing material can increase the gas-liquid mixing area and improve the gas-liquid mixing efficiency, thereby generating high-concentration ozone water.

[0054] like Figures 2 to 6 As shown, the mixing container 100 is also equipped with a water distribution structure inside, which is used to evenly distribute water onto the packing material to increase the gas-liquid mixing efficiency. The water distribution structure includes a water distribution plate 700, which is located near the top of the mixing container 100. The water distribution plate 700 is evenly provided with a plurality of water distribution holes 701. After pure water enters the mixing container 100 through the water inlet 107, the water distribution holes 701 on the water distribution plate 700 can evenly distribute the pure water onto the packing material, thereby increasing the mixing efficiency of pure water and ozone gas.

[0055] like Figure 7As shown, an air intake control valve 301 is provided at the air inlet 105, an exhaust control valve 302 is provided at the exhaust outlet 106, a water inlet control valve 303 is provided at the water inlet 107, and a liquid outlet control valve 304 is provided at the liquid outlet 108. All control valves are pneumatic or electric valves, and the degree of automation is high.

[0056] The ozone water production system also includes a pressure detection component, which uses a pressure sensor 400. The pressure sensor 400 can detect the pressure inside the mixing container 100 in real time, so as to keep the pressure inside the mixing container 100 constant.

[0057] A flow meter 500 is installed at the outlet 108. The flow meter 500 can detect the flow rate of ozone water, which can meet the needs of the ozone water user.

[0058] The ozone water production system also includes a controller (not shown in the figure). The controller is connected to the liquid level detection circuit board 202, the air inlet control valve 301, the exhaust control valve 302, the water inlet control valve 303, the liquid outlet control valve 304, the pressure sensor 400, and the flow meter 500, respectively. By using the controller to control each electrical component, precise control and a high degree of automation can be achieved. The controller can be a PLC controller, which has the advantages of high reliability and simple programming.

[0059] In use, the controller controls the water inlet control valve 303 and the air inlet control valve 301 to maintain the liquid level inside the mixing container 100 at a constant value under a specific flow rate. This avoids pressure fluctuations inside the mixing container 100 caused by large fluctuations in the liquid level, which would affect the concentration of ozone water. The pressure sensor 400 detects the pressure inside the mixing container 100 in real time. Once the set threshold is reached, the controller controls the air inlet control valve 301 and the air outlet control valve to maintain a certain opening degree, which can better maintain the constant pressure inside the mixing container 100. When the flow meter 500 detects that the water demand at the ozone water end is met, the controller can control the water inlet control valve 303 to maintain a certain opening degree, thus maintaining a constant liquid level in the mixing container 100 while meeting the flow demand at the water end.

[0060] This application can precisely control the stability of the concentration of the produced ozone water, better meeting the demand for high-concentration, high-stability ozone water.

[0061] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0062] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions claimed by this utility model.

[0063] Whenever possible, the various aspects and features described and shown in the specification can be applied individually, and these individual aspects can serve as the subject of a divisional application.

Claims

1. An ozone water production and mixing device, characterized in that, include: A mixing container for mixing gas and liquid to generate ozone water. The mixing container is provided with an air inlet, an exhaust outlet, a water inlet, and a liquid outlet. The air inlet is used for ozone gas to enter, the exhaust outlet is used for discharging excess ozone gas, and the water inlet is connected to a water source. The liquid outlet is used for discharging ozone water. A liquid level measuring device is used to continuously measure the liquid level in the mixing container. The liquid level measuring device includes a liquid level measuring tube, a liquid level detection capacitor electrode, and a liquid level detection circuit board. The upper and lower ends of the liquid level measuring tube are respectively connected to the inside of the mixing container. The liquid level detection capacitor electrode is connected to the liquid level measuring tube. The liquid level detection circuit board is connected to the liquid level detection capacitor electrode. The liquid level detection circuit board is used to calculate the liquid level height in the liquid level measuring tube.

2. The ozone water preparation mixing device according to claim 1, characterized by A sealing ring is provided at the connection between the liquid level measuring tube and the mixing container.

3. The ozone water preparation mixing device according to claim 1, characterized by The liquid level measuring device also includes a housing, which is connected to the mixing container. The liquid level measuring tube, the liquid level detection capacitor electrode, and the liquid level detection circuit board are all located inside the housing.

4. The ozone water preparation mixing device according to claim 1, characterized by The mixing container is filled with packing material, which is used to increase the gas-liquid mixing area.

5. The ozone water production and mixing apparatus according to claim 4, characterized in that, The mixing container is also equipped with a water distribution structure, which is used to evenly distribute water onto the packing material to increase the gas-liquid mixing efficiency.

6. The ozone water production and mixing apparatus according to claim 5, characterized in that, The water distribution structure includes a water distribution plate, which has multiple water distribution holes.

7. The ozone water production and mixing apparatus according to claim 1, characterized in that, An air intake control valve is provided at the air inlet, an exhaust control valve is provided at the exhaust outlet, a water inlet control valve is provided at the water inlet, and a liquid outlet control valve is provided at the liquid outlet.

8. The ozone water production and mixing apparatus according to claim 7, characterized in that, The ozone water production and mixing device also includes a pressure detection component, which is used to detect the pressure inside the mixing container.

9. The ozone water production and mixing apparatus according to claim 8, characterized in that, A flow meter is also installed at the liquid outlet.

10. The ozone water production and mixing apparatus according to claim 9, characterized in that, The ozone water production and mixing device also includes a controller, which is connected to the liquid level detection circuit board, the air inlet control valve, the exhaust control valve, the water inlet control valve, the liquid outlet control valve, the pressure detection component, and the flow meter.

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