Copper pipe target material for optical coating

Abstract

This utility model discloses a copper tube target for optical coating, comprising a coaxially distributed tubular inner layer and a tubular outer layer; multiple interlayer connecting portions are provided between the tubular inner layer and the tubular outer layer, distributed along the axial direction of the tubular inner layer; the centripetal end of the interlayer connecting portion is fixedly connected to the tubular inner layer, and the distal end of the interlayer connecting portion is fixedly connected to the tubular outer layer; two adjacent interlayer connecting portions, together with the tubular inner layer and the tubular outer layer, form an interlayer gap; multiple interlayer annular portions are provided between the tubular inner layer and the tubular outer layer, distributed along the circumferential direction of the tubular inner layer. The beneficial effect of this copper tube target for optical coating is that the double-layer structure of the tubular inner layer and the tubular outer layer, combined with the multiple interlayer connecting portions distributed along the axial direction to form an interlayer gap, and the circumferentially distributed interlayer annular portions, constitute a coolant turbulence channel and an annular skeleton, thereby improving the overall rigidity and enhancing the heat exchange efficiency of the coolant.

Description

Technical Field

[0001] This utility model belongs to the field of target materials, specifically relating to a copper tube target material for optical coating. Background Technology

[0002] The patent, with publication number CN206204408U and subject title "Utility Model Patent for a Highly Efficient Tubular Target Material," and IPC classification number C23C14 / 34, discloses the following technical solution: "The surface of the target material is provided with a target material use surface, and both ends of the target material are provided with fixed installation ends for fixed installation; a bonding layer is provided between the target material and the target material use surface, and the bonding layer can be selected according to the material used."

[0003] Therefore, the above utility model patents have disclosed one technical solution for tubular target materials. However, the technical solutions disclosed in these utility model patents focus on improving the utilization rate of tubular target materials, but do not further address issues such as improving overall rigidity and enhancing the heat exchange efficiency of coolant, and therefore require further improvement. Utility Model Content

[0004] This utility model addresses the shortcomings of the existing technology by providing a copper tube target for optical coating.

[0005] This utility model adopts the following technical solution: a copper tube target for optical coating, comprising a coaxially distributed tubular inner layer and a tubular outer layer, wherein:

[0006] Multiple interlayer connecting parts are provided between the tubular inner layer and the tubular outer layer, distributed along the axial direction of the tubular inner layer. The centripetal end of the interlayer connecting part is fixedly connected to the tubular inner layer, and the distal end of the interlayer connecting part is fixedly connected to the tubular outer layer. Two adjacent interlayer connecting parts together with the tubular inner layer and the tubular outer layer form an interlayer gap.

[0007] Between the tubular inner layer and the tubular outer layer, there are multiple interlayer annular portions distributed along the circumferential direction of the tubular inner layer. The interlayer annular portions and the interlayer connecting portions are integrally formed. There is a gap between the interlayer annular portions and the tubular inner layer, and there is a gap between the interlayer annular portions and the tubular outer layer.

[0008] As a preferred technical solution of the above technical solution, the inner surface of the tubular inner layer is provided with multiple integrally formed inner surface protrusions and multiple inner surface depressions, and the inner surface protrusions and inner surface depressions are alternately distributed along the axial direction of the tubular inner layer.

[0009] As a preferred technical solution to the above technical solutions, the outer surface of the tubular inner layer is provided with multiple protrusions on the outer surface of the inner layer.

[0010] As a preferred technical solution of the above technical solution, the outer surface of the tubular outer layer is provided with multiple outer surface protrusions and multiple outer surface depressions that are alternately distributed, and the outer surface protrusions and outer surface depressions are alternately distributed along the axial direction of the tubular outer layer.

[0011] As a preferred technical solution to the above technical solutions, the inner surface of the tubular outer layer is provided with multiple protrusions on the inner surface of the outer layer.

[0012] The copper tube target material for optical coating disclosed in this utility model has the following advantages: the double-layer structure of the tubular inner layer and the tubular outer layer, combined with multiple interlayer connecting parts distributed along the axial direction to form interlayer gaps, and the circumferentially distributed interlayer annular parts, constitute a coolant turbulence channel and an annular skeleton, thereby improving the overall rigidity and enhancing the heat exchange efficiency of the coolant. In addition, the protruding and recessed structures on the inner and outer layer surfaces (such as the protruding and recessed parts on the inner surface of the inner layer, the outer surface of the inner layer, the inner surface of the outer layer, and the outer surface of the outer layer) further improve the coolant turbulence and magnetron sputtering effect. Attached Figure Description

[0013] Figure 1 This is a perspective view of this application.

[0014] Figure 2 This is the main view of this application.

[0015] Figure 3 This is a side view of this application.

[0016] Figure 4 It is along Figure 3 A three-dimensional sectional view along the AA direction.

[0017] Figure 5 yes Figure 1 A magnified view of a portion of region A.

[0018] Figure 6 yes Figure 3 A magnified view of a portion of region B.

[0019] Figure 7 yes Figure 4 A magnified view of region C.

[0020] Figure 8 yes Figure 4 A magnified view of a portion of region D.

[0021] The reference numerals in the figures include: 100 - tubular inner layer; 101 - protrusion on the inner surface of the inner layer; 102 - recess on the inner surface of the inner layer; 103 - protrusion on the outer surface of the inner layer; 200 - tubular outer layer; 201 - protrusion on the outer surface of the outer layer; 202 - recess on the outer surface of the outer layer; 203 - protrusion on the inner surface of the outer layer; 300 - interlayer annular portion; 400 - interlayer connection portion; 401 - interlayer gap. Detailed Implementation

[0022] This utility model discloses a copper tube target for optical coating. The following description, in conjunction with a preferred embodiment (Example 1), is shown in the accompanying drawings. Figures 1 to 8 The specific embodiments of this utility model will be further described below.

[0023] See attached diagram. Figures 1 to 8 , Figures 1 to 4 The copper tube targets for optical coating are shown from different perspectives. Figures 5 to 8 The partial structures of the copper tube target for optical coating are shown.

[0024] Example 1.

[0025] Preferably, the copper tube target for optical coating includes a coaxially distributed tubular inner layer 100 and a tubular outer layer 200, wherein:

[0026] A plurality of interlayer connecting portions 400 are provided between the tubular inner layer 100 and the tubular outer layer 200, distributed along the axial direction of the tubular inner layer 100. The centripetal end of the interlayer connecting portion 400 is fixedly connected to the tubular inner layer 100, and the distal end of the interlayer connecting portion 400 is fixedly connected to the tubular outer layer 200. Two adjacent interlayer connecting portions 400, the tubular inner layer 100, and the tubular outer layer 200 together form an interlayer gap 401.

[0027] A plurality of interlayer annular portions 300 distributed along the circumferential direction of the tubular inner layer 100 are provided between the tubular inner layer 100 and the tubular outer layer 200. The interlayer annular portions 300 are integrally formed with (all) the interlayer connecting portions 400. There is a gap between the interlayer annular portions 300 and the tubular inner layer 100, and there is a gap between the interlayer annular portions 300 and the tubular outer layer 200, so that the interlayer annular portions 300 are located between the tubular inner layer 100 and the tubular outer layer 200, but the interlayer annular portions 300 are not connected to the tubular inner layer 100 and the tubular outer layer 200. The layers 0 and 100 are not in direct contact (the interlayer annular portion 300 is in direct contact with the interlayer connection portion 400 and is integrally formed); this allows the tubular outer layer 200 to serve as a high-purity copper sputtering layer and the tubular inner layer 100 to serve as a rigid liner such as stainless steel, achieving physical connection and heat transfer; the inner and outer double-layer tubular structure, with the help of the interlayer gap 401, serves as a coolant turbulence channel, improving the heat exchange effect and enhancing the success rate of optical coating; the interlayer annular portion 300 runs through all the interlayer connection portions 400, thus forming an annular skeleton, which helps to improve the overall rigidity.

[0028] The interlayer connection part 400 is sheet-like.

[0029] The inner surface of the tubular inner layer 100 is provided with multiple integrally formed inner surface protrusions 101 and multiple inner surface recesses 102, which are alternately distributed along the axial direction of the tubular inner layer 100 to enhance the turbulence of the coolant and improve the heat exchange effect.

[0030] The outer surface of the tubular inner layer 100 is provided with multiple inner layer outer surface protrusions 103 to enhance the turbulence of the coolant and improve the heat exchange effect.

[0031] The outer surface of the tubular outer layer 200 is provided with multiple alternating outer surface protrusions 201 and multiple outer surface recesses 202, which are alternately distributed along the axial direction of the tubular outer layer 200 to enhance the magnetron sputtering effect and increase the success rate of optical coating.

[0032] The inner surface of the tubular outer layer 200 is provided with multiple outer inner surface protrusions 203 to enhance the turbulence of the coolant and improve the heat exchange effect.

[0033] It is worth mentioning that the specific material and other technical features of the copper sputtering layer involved in this utility model patent application should be regarded as prior art. The specific structure, working principle and possible control methods and spatial arrangement of these technical features can be conventionally selected in the field and should not be regarded as the inventive point of this utility model patent. This utility model patent will not be further elaborated in detail.

[0034] For those skilled in the art, modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A copper tube target for optical coating, characterized in that, It includes a coaxially distributed tubular inner layer and a tubular outer layer, wherein: Multiple interlayer connecting parts are provided between the tubular inner layer and the tubular outer layer, distributed along the axial direction of the tubular inner layer. The centripetal end of the interlayer connecting part is fixedly connected to the tubular inner layer, and the distal end of the interlayer connecting part is fixedly connected to the tubular outer layer. Two adjacent interlayer connecting parts together with the tubular inner layer and the tubular outer layer form an interlayer gap. Between the tubular inner layer and the tubular outer layer, there are multiple interlayer annular portions distributed along the circumferential direction of the tubular inner layer. The interlayer annular portions and the interlayer connecting portions are integrally formed. There is a gap between the interlayer annular portions and the tubular inner layer, and there is a gap between the interlayer annular portions and the tubular outer layer.

2. The copper tube target for optical coating according to claim 1, characterized in that, The inner surface of the tubular inner layer is provided with multiple integrally formed protrusions and multiple recesses on the inner surface of the inner layer, and the protrusions and recesses on the inner surface of the inner layer are alternately distributed along the axial direction of the tubular inner layer.

3. The copper tube target for optical coating according to claim 1, characterized in that, The outer surface of the tubular inner layer has multiple protrusions on the outer surface of the inner layer.

4. The copper tube target for optical coating according to claim 1, characterized in that, The outer surface of the tubular outer layer has multiple alternating protrusions and recesses, which are distributed alternately along the axial direction of the tubular outer layer.

5. The copper tube target for optical coating according to claim 1, characterized in that, The inner surface of the tubular outer layer has multiple protrusions on the inner surface of the outer layer.

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