Target flatness detection device

Abstract

This utility model relates to the field of target flatness testing technology and discloses a target flatness testing device. The target flatness testing device includes a testing platform, a depth gauge, and a support assembly. The target is placed on the testing platform, the depth gauge is used to test the flatness of the target, and the support assembly stands on the testing platform and is movable. The support assembly includes a crossbeam and two columns, the two columns being positioned circumferentially outside the target. One end of the crossbeam is connected to one of the two columns, and the opposite end of the crossbeam is connected to the other of the two columns. One end of the depth gauge abuts against the target and is perpendicular to the plane of contact with the target, while the opposite end of the depth gauge abuts against the crossbeam. When testing the flatness of the target, the flatness of any position on the upper surface of the target can be tested by moving the support assembly and the depth gauge.

Description

Technical Field

[0001] This utility model relates to the field of target flatness detection technology, and in particular to a target flatness detection device. Background Technology

[0002] Large-size targets refer to bulk materials of considerable size used in processes such as physical vapor deposition (PVD) to be bombarded by ion beams to produce thin films. The flatness of large-size targets is crucial to coating quality. Even minute deviations in flatness can lead to uneven film thickness during large-area coating, affecting product performance. Due to the large size of the targets, a comprehensive inspection of the entire target surface is necessary to ensure that the flatness is within specified limits.

[0003] Currently, there are some target flatness testing devices. The flatness testing component is mounted on a moving part, which is mounted on the target. The moving part has multiple elongated holes for the movement of the flatness testing component. The flatness testing component can slide within the elongated holes and test the flatness of the target. However, when the target flatness testing device is placed on the target to test its flatness, the flatness testing component can only monitor through the trajectory of the elongated holes. Because the target flatness testing device is on the target, the circumferential edge of the target cannot be detected, resulting in many blind spots in the flatness testing and thus a low accuracy rate in flatness testing.

[0004] Therefore, there is an urgent need for a target flatness detection device that can detect any position on the upper surface of the target, thereby achieving more accurate detection of the target flatness. Utility Model Content

[0005] The purpose of this invention is to provide a target flatness detection device that can detect any position on the upper surface of the target, thereby achieving more accurate detection of the target flatness.

[0006] Based on the above concept, the technical solution adopted by this utility model is as follows:

[0007] A target flatness testing device is used to test the flatness of a target material. The target flatness testing device includes:

[0008] The target material is placed on the testing platform.

[0009] Depth gauge, used to inspect the flatness of the target material;

[0010] A support assembly is provided, which stands on the testing platform and is movable on the testing platform. The support assembly includes a crossbeam and two columns, which are disposed on the circumferential outer side of the target. One end of the crossbeam is connected to one of the two columns, and the other end of the crossbeam is connected to the other of the two columns. One end of the depth gauge abuts against the target and is perpendicular to the plane of the target. The other end of the depth gauge abuts against the crossbeam.

[0011] As an optional solution for the target flatness detection device, the crossbeam is connected to the two columns at the same height.

[0012] As an optional solution for the target flatness detection device, the support assembly is made of metal.

[0013] As an optional solution for the target flatness detection device, the crossbeam has a telescopic structure.

[0014] As an optional solution for the target flatness detection device, a limiting member is provided on the crossbeam, and at least part of the depth gauge passes through the limiting member and is slidably connected to the limiting member. The depth gauge can slide vertically within the limiting member.

[0015] As an optional solution for the target flatness detection device, the two columns are arranged on opposite sides of the target in the horizontal direction, and the distance between the two columns is greater than the maximum dimension of the target in the horizontal direction.

[0016] As an optional solution for the target flatness testing device, the bottom of the column is equipped with anti-slip components.

[0017] As an optional solution for the target flatness detection device, the anti-slip component is made of silicone material.

[0018] As an optional solution for the target flatness detection device, the depth gauge has an accuracy of less than 0.01 mm.

[0019] As an optional solution for the target flatness detection device, the support assembly is provided with one.

[0020] The beneficial effects of this utility model are as follows:

[0021] This invention proposes a target flatness testing device. The target is placed on a testing platform, and a depth gauge is used to test the flatness of the target. A support assembly stands on the testing platform and can move on the testing platform. The support assembly includes a crossbeam and two columns. The two columns are located on the circumferential outer side of the target. One end of the crossbeam is connected to one of the two columns, and the other end of the crossbeam is connected to the other of the two columns. One end of the depth gauge abuts against the target and is perpendicular to the plane of contact with the target. The other end of the depth gauge abuts against the crossbeam. When testing the flatness of the target, the support assembly can move circumferentially outward on the target, and the depth gauge can also move on the upper surface of the target. Since one end of the depth gauge abuts against the target and is perpendicular to the plane of contact with the target, and the other end of the depth gauge abuts against the crossbeam, the support assembly can move along with the movement of the depth gauge, thereby realizing the flatness testing of any position on the upper surface of the target. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the target flatness detection device provided in this embodiment of the utility model.

[0023] In the picture:

[0024] 1. Testing platform;

[0025] 2. Depth gauge;

[0026] 3. Support components; 31. Crossbeam; 32. Column. Detailed Implementation

[0027] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining this utility model and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts related to this utility model are shown in the accompanying drawings, not all of them.

[0028] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0030] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0031] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0032] like Figure 1 As shown, this embodiment provides a target flatness testing device for detecting the flatness of a target. The target flatness testing device includes a testing platform 1, a depth gauge 2, and a support assembly 3. The target is placed on the testing platform 1, and the support assembly 3 is movable on the testing platform 1. The depth gauge 2 is used to detect the flatness of the target. The support assembly 3 includes a crossbeam 31 and two columns 32. The two columns 32 are located on the circumferential outer side of the target. One end of the crossbeam 31 is connected to one of the two columns 32, and the other end of the crossbeam 31 is connected to the other of the two columns 32. One end of the depth gauge 2 abuts against the target and is perpendicular to the plane of the target. The other end of the depth gauge 2 abuts against the crossbeam 31. When inspecting the flatness of the target material, the support component 3 can move outward in the circumferential direction of the target material, and the depth gauge 2 can also move on the upper surface of the target material. Since one end of the depth gauge 2 abuts against the target material and is perpendicular to the plane of the target material, and the other end of the depth gauge 2 abuts against the crossbeam 31, the support component 3 can move along with the movement of the depth gauge 2, thereby realizing the inspection of the flatness of any position on the upper surface of the target material.

[0033] Optionally, in this embodiment, the testing platform 1 is made of marble, which has extremely high hardness and stability. Its surface, after precision machining, can achieve very high flatness accuracy. This provides an accurate reference plane for the target flatness testing, ensuring the accuracy and reliability of the test results. In other embodiments, the testing platform 1 can also be made of granite or aluminum alloy, as long as it can provide an accurate reference plane for the target flatness testing.

[0034] Preferably, such as Figure 1 As shown, in this embodiment, the crossbeam 31 is connected to the two columns 32 at the same height, ensuring the consistency of the vertical position of the depth gauge 2 as it moves across the target surface. Regardless of how the depth gauge 2 moves across the target surface, because the height of the crossbeam 31 is fixed and consistent, the height of the end of the depth gauge 2 that abuts against the crossbeam 31 remains constant, thus ensuring that the vertical measurement reference of the depth gauge 2 remains unchanged, making measurements at different positions comparable. Since the crossbeam 31 is at the same height, the depth gauge 2 can abut against the crossbeam 31 at any position, without being limited to a specific fixed position. This allows operators to flexibly select the contact point between the depth gauge 2 and the crossbeam 31 according to actual needs during the inspection process, facilitating inspection of different positions on the target, enabling more comprehensive and detailed flatness inspection, and improving the flexibility and convenience of the inspection.

[0035] Optionally, the vertical distance between the crossbeam 31 and the detection platform 1 can be 280 mm to 320 mm, accommodating the target material to be tested and supporting the depth gauge 2. In this embodiment, the vertical distance between the crossbeam 31 and the detection platform 1 is 300 mm. In other embodiments, the vertical distance between the crossbeam 31 and the detection platform 1 can also be 285 mm, 290 mm, 295 mm, 305 mm, 310 mm, or 315 mm, etc.

[0036] Optionally, in this embodiment, the support component 3 is made of metal, which has high strength and rigidity, capable of withstanding the depth gauge 2 and other external forces that may be applied. This ensures that the support component 3 does not undergo significant deformation or shaking during the testing process, thereby providing stable support for the depth gauge 2 and guaranteeing the accuracy of the test results. In other embodiments, the support component 3 may also be made of carbon fiber composite material or ceramic material, as long as it can provide support for the depth gauge 2.

[0037] Preferably, in this embodiment, the crossbeam 31 is a telescopic structure, and its length can be adjusted according to the size of the target material, making the detection device applicable to various target material specifications. Whether the target material is small or large, the depth gauge 2 can effectively cooperate with the telescopic crossbeam 31 to detect any position on the upper surface of the target material, avoiding the hassle of designing separate detection devices for different target material sizes and reducing costs. One detection device can meet the detection needs of various target materials by telescopically extending the crossbeam 31, improving the efficiency and economy of the device. Optionally, in this embodiment, the adjustable length range of the crossbeam 31 is 180 mm to 220 mm. In other embodiments, the minimum adjustable length range of the crossbeam 31 can be 170 mm, 175 mm, or 185 mm, etc., and the maximum adjustable length range of the crossbeam 31 can be 215 mm, 225 mm, or 230 mm, etc.

[0038] Optionally, in this embodiment, the crossbeam 31 includes a first beam, a second beam, a screw, and a nut. A portion of the first beam can be fitted over the second beam. One end of the screw is connected to one end of the second beam, and the opposite end of the second beam is slidably connected to the first beam. The nut is disposed within the first beam and is also threadedly connected to and cooperates with the screw. This arrangement allows the first beam to slide relative to the second beam, thereby achieving the telescopic nature of the crossbeam 31. In other embodiments, the screw and nut structure of this embodiment can also be replaced with a linear motor, a gear and rack structure, or a hinge structure, as long as the telescopic nature of the crossbeam 31 can be achieved.

[0039] Preferably, in this embodiment, a limiting member is provided on the crossbeam 31, and at least a portion of the depth gauge 2 passes through and is slidably connected to the limiting member. The depth gauge 2 can slide vertically within the limiting member. By passing the depth gauge 2 through the limiting member, the limiting member can provide stable guidance for the movement of the depth gauge 2. This ensures that the depth gauge 2 does not wobble or deviate when sliding vertically, and that the depth gauge 2 always maintains a perpendicular relationship with the plane in contact with the target material. This makes the contact position between the depth gauge 2 and the target material more accurate, improving the accuracy of the detection data. Because the perpendicularity of the depth gauge 2 to the target material contact plane is crucial for ensuring detection accuracy when detecting the flatness of the target material, the limiting member effectively maintains this perpendicular relationship. The sliding connection between the limiting member and the depth gauge 2 enhances the structural stability of the entire detection device to a certain extent. The limiting and supporting effect of the limiting member on the depth gauge 2 prevents the depth gauge 2 from swinging arbitrarily due to external forces during movement, ensuring the overall stability of the detection device during the detection process, reducing detection errors caused by structural instability, and further improving the reliability of the detection results.

[0040] More preferably, in this embodiment, the limiting member is sleeved on the crossbeam 31 and slidably connected to the crossbeam 31. The limiting member can slide along the extension direction of the crossbeam 31. The operator can flexibly push the limiting member along the crossbeam 31 according to actual testing needs, thereby moving the depth gauge 2 to the specific position on the target that needs to be tested. This flexible movement method makes the testing operation more convenient, and the operator can complete the flatness testing of the target more efficiently, improving testing efficiency.

[0041] Specifically, such as Figure 1 As shown, in this embodiment, two columns 32 are positioned on opposite sides of the target material along the horizontal direction, and the distance between the two columns 32 is greater than the maximum horizontal dimension of the target material. When using the depth gauge 2 to inspect the target material, there is sufficient space to move the depth gauge 2, preventing operational inconvenience caused by the columns 32 being too close to the target material, thus improving inspection efficiency and accuracy. This arrangement allows the support assembly 3 to completely cover the space above the target material. When the depth gauge 2 moves across the upper surface of the target material, it is not restricted by the position of the columns 32 and can reach any position on the upper surface of the target material, thereby enabling the inspection of the flatness of any position on the upper surface of the target material without any blind spots.

[0042] Optionally, the vertical dimension of the column 32 can be 350 mm to 400 mm to accommodate the target material to be tested and to support the depth gauge 2. In this embodiment, the vertical dimension of the column 32 is 380 mm. In other embodiments, the vertical dimension of the column 32 can also be 355 mm, 360 mm, 365 mm, 370 mm, 375 mm, 385 mm, 390 mm, or 395 mm, etc.

[0043] Preferably, in this embodiment, the bottom of the column 32 is provided with an anti-slip component. This component increases the friction between the column 32 and the testing platform 1, making the column 32 less prone to sliding or wobbling during the testing process. This helps ensure the stability of the entire testing device, guaranteeing that the depth gauge 2 maintains an accurate position and orientation when testing the flatness of the target material, thereby improving the accuracy of the testing results. The anti-slip component also prevents accidental sliding of the column 32, avoiding the testing device from tipping over due to column 32 movement, reducing the risk of injury or damage to testing personnel and surrounding equipment, and improving the safety of the testing process.

[0044] Optionally, in this embodiment, the anti-slip component is made of silicone. Silicone has a high coefficient of friction, providing strong friction when in contact with the ground, effectively preventing the bottom of the column 32 from sliding and ensuring the stability of the detection device during the detection process, thereby improving detection accuracy. The soft texture of silicone reduces damage to the ground and avoids leaving scratches on the detection platform 1. In other embodiments, the anti-slip component can also be made of materials such as nylon or polyurethane, as long as it provides anti-slip functionality.

[0045] Preferably, in this embodiment, the depth gauge 2 has an accuracy of less than 0.01 mm. A depth gauge 2 with an accuracy of less than 0.01 mm can accurately detect extremely small flatness deviations on the target surface, ensuring that the target material meets the requirements of high-precision applications. By accurately detecting the flatness of the target material, targets with substandard flatness can be identified in a timely manner, preventing their use in the production process, thereby reducing product defects caused by poor target flatness and improving the quality and performance stability of the final product. In this embodiment, the accuracy of the depth gauge 2 is 0.01 mm. In other embodiments, the accuracy of the depth gauge 2 can be 0.005 mm or 0.001 mm, etc., without excessive limitations.

[0046] Optionally, in this embodiment, only one support component 3 is provided. The installation of a single support component 3 is simpler, reducing the required manual labor time. Compared to multiple support components 3, which require precise installation and adjustment to ensure positional accuracy and collaborative working ability, the assembly process of a single support component 3 is simpler and faster, reducing assembly costs. When a single support component 3 moves on the detection platform 1, it encounters less resistance and moves more flexibly. It can more easily reach various positions on the upper surface of the target material, especially some corners and edges. For example, when detecting a circular target material, a single support component 3 can move flexibly along the edge of the target material, while multiple support components 3 may have difficulty reaching certain specific positions due to their relative positions and spatial limitations. In other embodiments, two, three, or four support components 3 can also be provided, as long as the flatness of the target material can be detected.

[0047] For ease of understanding, combined with Figure 1 The working process of the target flatness testing device is described below. Specifically, the working process of the target flatness testing device includes the following steps:

[0048] S1: Place the target material above the testing platform 1, and place the support component 3 on the testing platform 1 so that the crossbeam 31 is above the target material.

[0049] S2: Place the depth gauge 2 against the upper surface of the target material, move the support assembly 3 to contact the depth gauge 2, and record the value on the depth gauge 2.

[0050] S3: Move the position of depth gauge 2, and at the same time move support component 3 until it abuts against depth gauge 2, and record the value on depth gauge 2.

[0051] S4: Repeat S3 until the detection is completed, and analyze the detection results.

[0052] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A target flatness testing device, used to test the flatness of a target, characterized in that, The target flatness testing device includes: The detection platform (1) is on which the target material is placed; Depth gauge (2), the depth gauge (2) is used to detect the flatness of the target material; A support assembly (3) is erected on the detection platform (1) and is movable on the detection platform (1). The support assembly (3) includes a crossbeam (31) and two columns (32). The two columns (32) are arranged on the circumferential outer side of the target material. One end of the crossbeam (31) is connected to one of the two columns (32), and the other end of the crossbeam (31) is connected to the other of the two columns (32). One end of the depth gauge (2) abuts against the target material and is perpendicular to the plane of the target material. The other end of the depth gauge (2) abuts against the crossbeam (31).

2. The target flatness detection device according to claim 1, characterized in that, The crossbeam (31) is connected to the two columns (32) at the same height.

3. The target flatness detection device according to claim 1, characterized in that, The support component (3) is made of metal.

4. The target flatness detection device according to claim 1, characterized in that, The crossbeam (31) is a telescopic structure.

5. The target flatness detection device according to claim 1, characterized in that, The crossbeam (31) is provided with a limiting member, and at least part of the depth gauge (2) passes through the limiting member and is slidably connected to the limiting member. The depth gauge (2) can slide vertically within the limiting member.

6. The target flatness detection device according to claim 1, characterized in that, The two columns (32) are disposed on opposite sides of the target material in the horizontal direction, and the distance between the two columns (32) is greater than the maximum dimension of the target material in the horizontal direction.

7. The target flatness detection device according to claim 1, characterized in that, The bottom of the column (32) is provided with anti-slip parts.

8. The target flatness detection device according to claim 7, characterized in that, The anti-slip component is made of silicone material.

9. The target flatness detection device according to claim 1, characterized in that, The depth gauge (2) has an accuracy of less than 0.01 mm.

10. The target flatness detection device according to claim 1, characterized in that, The support component (3) is provided with one.

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