An in-line cell system

Abstract

This utility model belongs to the technical field of semiconductor photovoltaic wet process equipment, specifically relating to an online soaking tank system. It includes a storage tank for containing the soaking solution and multiple process tanks, as well as a buffer tank for containing the working solution. Each process tank is connected to the buffer tank via a separate working solution transfer circuit, and each process tank is connected to the storage tank via a separate soaking solution transfer circuit. The working solution transfer circuit includes a working solution input pipe and a working solution return pipe. A working solution input pump is connected to the working solution input pipe, and a control valve is installed on the working solution return pipe. The soaking solution transfer circuit also includes a soaking solution input pipe and a soaking solution return pipe. A soaking solution input pump is connected to the soaking solution input pipe, and a control valve is installed on the soaking solution return pipe. This utility model enables soaking and cleaning maintenance of the process tanks without shutting down the system, while simultaneously achieving the circulation and recovery of the soaking solution and the synchronous cleaning of the pipelines, simplifying the system structure and further reducing maintenance requirements.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor photovoltaic wet process equipment technology, specifically relating to an improved soaking tank system. Background Technology

[0002] In the manufacturing process of semiconductor photovoltaics, various working solutions are required for wet processing of silicon wafers. Some working solutions undergo changes such as turbidity, sedimentation, and scum formation after single use or recycling, resulting in deposits in the tank or pipelines. This phenomenon is particularly pronounced in processes like electroless plating, where the effects of the working solution's composition are crucial. Therefore, the tanks and pipelines of related process equipment require frequent soaking cleaning. The soaking solutions used include acidic solutions for metal plating and oxide layer deposits, as well as alkaline solutions for organic impurities and grease deposits. In the prior art, patent CN202410132284.3 proposes an automatic solution dispensing system for wet processing equipment, capable of automatically replenishing the soaking solution in the tank requiring cleaning. The drawback of this solution is that multiple tanks in the soaking tank system are linearly arranged on the pipeline of the soaking solution, and the tanks are connected in series. Once any tank needs to be soaked, the preceding and subsequent tank equipment connected in series with it need to be stopped for processing, which reduces the continuity of production. Since the process quality of the wet process depends on the cleaning and maintenance of the tank equipment, this soaking tank system will further face the problem of not being able to achieve both production efficiency and quality. Utility Model Content

[0003] This invention proposes an online soaking tank system that can resolve the contradiction between production efficiency and quality in the prior art. The soaking tank process does not require machine downtime, thereby improving production efficiency while ensuring production quality.

[0004] This utility model is achieved through the following technical solution:

[0005] An online foaming tank system includes a storage tank for containing foaming solution and multiple sets of process tanks, and a buffer tank for containing working solution; each of the multiple sets of process tanks is connected to the buffer tank through a separate working solution transfer circuit, and each of the multiple sets of process tanks is connected to the storage tank through a separate foaming solution transfer circuit.

[0006] The working fluid transmission circuit includes a working fluid input pipe and a working fluid return pipe. A working fluid input pump is connected to the working fluid input pipe, and a control valve is provided on the working fluid return pipe.

[0007] The foaming solution transmission circuit includes a foaming solution input pipe and a foaming solution return pipe. A foaming solution input pump is connected to the foaming solution input pipe, and a control valve is provided on the foaming solution return pipe.

[0008] To address the problem of production continuity interruption caused by soaking tank cleaning in existing technologies, this invention achieves the scheduling of working fluid and soaking tank solution by setting up a buffer tank and a storage tank, along with multiple independent working fluid transfer circuits and soaking tank solution transfer circuits. When the system is running, the working fluid can be recovered to the buffer tank through the working fluid return pipe; when scheduling is needed, the working fluid can be distributed from the buffer tank to other designated process tanks through the working fluid input pipe, driven by the working fluid input pump. The system forms a working fluid scheduling trajectory that sequentially flows through the process tank to be maintained, the drainage network, the buffer tank, the working fluid input pipe, and the standby process tank. When a process tank needs soaking, other process tanks can take over and continue operation without stopping the entire system's production. This design avoids overall downtime caused by the maintenance of a single tank, improving production continuity at the process step level. Furthermore, the tank cleaning and maintenance in this invention does not sacrifice production efficiency, achieving a balance between production efficiency and process quality. Furthermore, when the cleaning and maintenance cycle of the tank or pipeline is not synchronized with the scrapping cycle of the working fluid (such as chemical plating solution), this utility model can transfer the original working fluid to other process tanks by means of a scheduling trajectory, while retaining the working fluid, thereby maintaining the stability of the process quality within the production batch and saving material costs.

[0009] Preferably, each set of working fluid return pipes includes a common flow section near the process tank and a branch flow section near the buffer tank; the common flow section is located on the foaming tank liquid transfer circuit.

[0010] The co-flow section is located on both the working fluid transmission circuit and the foaming tank fluid transmission circuit. This means that the working fluid and the foaming tank fluid flow alternately inside the co-flow section pipe. On the one hand, this can save workstations, and on the other hand, the flowing foaming tank fluid can be used to flush the pipeline, achieving synchronous maintenance of the process tank and the drainage pipeline.

[0011] Preferably, the system also includes a water washing flow path; the water washing flow path includes independent input pipes and discharge pipes; multiple sets of the process tanks are each connected to a separate water washing flow path, and the common flow section is located on the water washing flow path.

[0012] The combination of the shared flow section and the water washing flow path can further remove the residual soaking solution in the working fluid return pipe after the soaking tank, reducing residue. At the same time, the shared section also simplifies the system structure.

[0013] Preferably, the process tank is directly connected to the co-flow section on the corresponding working fluid transmission circuit, and a tank drain valve is provided at the connection point.

[0014] The co-flow section is directly connected to the process tank. This means that the starting point of the co-flow section is located at the connection between the working fluid return pipe and the process tank. The soaking solution can flow through the starting point of the working fluid return path, expanding the range of pipes that the soaking solution can clean, reducing maintenance requirements, and ensuring process quality.

[0015] Preferably, the process tank includes a main tank and an overflow tank adjacent to the main tank. The bottom of the main tank and the bottom of the overflow tank are both provided with tank drain valves and connected to the co-flow section.

[0016] Both the bottom of the main tank and the bottom of the overflow tank are equipped with tank drain valves and connected to the common flow section. Therefore, the process tank has two draining methods: it can drain the liquid in the main tank by gravity or it can drain the liquid from the overflow tank by overflow. Gravity draining can be used to quickly empty the working liquid in the main tank, while overflow draining corresponds to the condition where the soaking liquid is fully in contact with and washes the inner wall of the main tank before being discharged from the overflow tank.

[0017] Preferably, both the working fluid input pipe and the foaming tank liquid input pipe are connected to the main tank of the process tank.

[0018] Preferably, the process tank is also provided with a self-circulating pipeline; the starting end of the self-circulating pipeline is connected to the overflow tank, and the ending end is connected to the main tank.

[0019] The self-circulating pipeline connects the main tank and the overflow tank, with liquid flowing from the overflow tank into the main tank, forming a circulating flow. During the circulation process, the liquid is continuously agitated, which ensures a uniform distribution of chemical composition and temperature within the tank, preventing localized excessively high or low concentrations and guaranteeing consistent process conditions throughout the tank.

[0020] Preferably, the self-circulating pipeline is connected to the common flow section.

[0021] The self-circulating pipeline is connected to the common flow section. When drainage is required, the liquid in the self-circulating pipeline can be discharged through the common flow section. During water washing of the system, water can enter the self-circulating pipeline for rinsing and be discharged directly from the common flow section without affecting subsequent processes.

[0022] Preferably, the process tank includes parallel tanks and spare tanks, and the parallel tanks and spare tanks have corresponding numbers.

[0023] The corresponding number of tanks ensures that each parallel tank has a corresponding spare tank. When a parallel tank needs to be soaked or malfunctions, its work can be transferred to the corresponding spare tank in a timely manner, ensuring that the process tank group always has enough tanks for production, maintaining the production rhythm, ensuring the continuity and stability of production, and avoiding production bottlenecks caused by mismatch in the number of tanks.

[0024] Preferably, a filter is connected to the working fluid inlet pipe.

[0025] The filter is installed on the working fluid replenishment path. When the working fluid flows from the buffer tank to the process tank, it needs to pass through the filter. The filter uses a filter screen and other structures to intercept solid particles and other impurities in the working fluid, allowing only pure working fluid to pass through, thereby ensuring the quality of the working fluid.

[0026] This utility model has the following technical effects:

[0027] 1. Improve production continuity. When the parallel tank needs rinsing or malfunctions, the standby tank can take over, avoiding overall shutdown due to maintenance of a single tank and maintaining production rhythm; the working fluid is transferred to the standby tank, which can maintain process continuity and stable process quality within the production batch.

[0028] 2. Simplified system structure. With the control of corresponding valves, part of the pipeline in the working fluid input pipe is used as a common flow section, in which the working fluid, soaking tank solution and water flow alternately, eliminating the need for separate pipelines for different liquids.

[0029] 3. Reduced maintenance requirements. Based on the simplified system structure, the foaming solution flowing in the co-flow section can clean the residual working fluid, while the water flow can further clean the residual foaming solution in the pipeline network, reducing the formation of deposits.

[0030] 4. Ensure process quality. Based on the foregoing, this utility model achieves a balance between production efficiency and process quality, and can maintain a high frequency of tank soaking and maintenance.

[0031] 5. Saves material costs. The working fluid can be transferred to the spare tank, avoiding waste caused by the mismatch between maintenance and the working fluid's expiration cycle; the soaking solution can also be recycled, reducing soaking solution loss and lowering material costs. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the online bubbling tank system;

[0033] Figure 2 This is a schematic diagram of a single process tank.

[0034] Legend:

[0035] 1 Process tank, 101 Main tank, 102 Overflow tank, 103 Tank drain valve, 110 Parallel tank, 120 Spare tank;

[0036] 2. Liquid storage tanks;

[0037] 3. Cache repository;

[0038] 4. Working fluid transfer circuit, 410. Working fluid inlet pipe, 420. Working fluid return pipe, 421. Common flow section, 422. Branch flow section, 430. Working fluid inlet pump, 440. Filter;

[0039] 5. Bubble bath liquid transfer circuit, 510 bubble bath liquid input pipe, 520 bubble bath liquid return pipe, 530 bubble bath liquid input pump;

[0040] 6 water washing flow path, 610 drain pipe;

[0041] 7. Self-circulating pipeline. Detailed Implementation

[0042] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Those skilled in the art can implement the present invention based on these descriptions. Furthermore, the embodiments of the present invention described below are generally only a part of the embodiments of the present invention, and not all of the embodiments. Therefore, all other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort should fall within the scope of protection of the present invention. Example

[0043] This embodiment proposes an online soaking tank system. The process tank in this embodiment is a chemical plating process tank, the working fluid used is a chemical plating solution (hereinafter referred to as "chemical plating solution"), and the soaking tank solution used is an acid solution.

[0044] Please see Figure 1 The system includes multiple sets of process tanks 1, buffer tanks 3 for holding working fluids (such as electroless plating solutions), and storage tanks 2 for holding bath solutions, as well as piping equipment such as working fluid inlet pipes 410, working fluid return pipes 420, bath solution inlet pipes 510, and bath solution return pipes 520. Each process tank 1 contains multiple sets of parallel tanks 110, and each set of parallel tanks 110 is equipped with a corresponding spare tank 120. The number of parallel tanks 110 and spare tanks 120 corresponds to the number of spare tanks, ensuring that when a parallel tank 110 requires maintenance, the spare tank 120 can promptly take over operation.

[0045] The working fluid inlet pipe 410 and the working fluid return pipe 420 cooperate to form the main body of the working fluid transmission circuit 4. One end of the working fluid inlet pipe 410 is connected to the buffer tank 3, and the other end is connected to the process tank 1; the working fluid inlet pump 430 is connected between the buffer tank 3 and the working fluid inlet pipe 410. Driven by the working fluid inlet pump 430, the working fluid flows out of the buffer tank 3, flows into the designated process tank 1 through the working fluid inlet pipe 410, and replenishes the working fluid in the process tank 1. One end of the working fluid return pipe 420 is connected to the process tank 1, and the other end is connected to the buffer tank 3. The working fluid return pipe 420 is equipped with a control valve, and the working fluid discharged from the process tank 1 can be recovered into the buffer tank 3 through the working fluid return pipe 420 via the opened control valve.

[0046] The foaming solution inlet pipe 510 and the foaming solution return pipe 520 cooperate to form the main body of the foaming solution transmission circuit 5. One end of the foaming solution inlet pipe 510 is connected to the storage tank 2, and the other end is connected to the process tank 1; the foaming solution inlet pump 530 is connected between the storage tank 2 and the foaming solution inlet pipe 510. Driven by the foaming solution inlet pump 530, the foaming solution flows out from the storage tank 2, flows into the process tank 1 through the foaming solution inlet pipe 510, and replenishes the foaming solution in the process tank 1. One end of the foaming solution return pipe 520 is connected to the process tank 1, and the other end is connected to the storage tank 2. The foaming solution return pipe 520 is equipped with a control valve. The foaming solution discharged from the process tank 1 can be recovered into the storage tank 2 through the foaming solution return pipe 520 via the opened control valve.

[0047] To enable non-stop soaking tank maintenance, the system features a working fluid scheduling function: the working fluid flows out from the process tank 1 to be maintained, flows into the buffer tank 3 via the working fluid return pipe 420, and then, driven by the working fluid input pump 430, flows into another designated process tank 1 via the working fluid input pipe 410. Specifically, when a parallel tank 110 needs soaking or malfunctions, its internal working fluid can be transferred to the corresponding standby tank 120 according to this scheduling trajectory, and the standby tank 120 takes over operation, ensuring continuous production.

[0048] In a preferred embodiment, a filter is connected to the working fluid inlet pipe 410. When the working fluid flows from the buffer tank 3 to the process tank 1, it needs to pass through the filter. The filter uses a filter screen and other structures to intercept impurities such as solid particles in the working fluid, allowing only pure working fluid to pass through, thereby ensuring the quality of the working fluid.

[0049] Please see Figure 1Each working fluid return pipe 420 includes a common flow section 421 near the process tank 1 and a branch flow section 422 near the buffer tank 3. The common flow section 421 is also located on the foaming bath liquid transfer circuit 5. The system also includes a water washing path 6, which includes independent inlet and outlet pipes 610. Multiple process tanks 1 are each connected to a separate water washing path 6, and the common flow section 421 is also located on the water washing path 6. In other words, the common flow section 421 is part of the working fluid return pipe 420, and also part of the foaming bath liquid return pipe 520 and the outlet pipe 610. The working fluid, foaming bath liquid, and water flow alternately in the common flow section 421. The common flow section 421 achieves efficient self-cleaning during the alternating flow of liquids. When process tank 1 is operating normally, the working fluid flows back to buffer tank 3 through co-flow section 421, which serves as a channel for working fluid transfer. During soaking maintenance in process tank 1, the soaking solution is discharged from process tank 1 and flows back to storage tank 2 through co-flow section 421. The flowing soaking solution flushes away any remaining working fluid in co-flow section 421, preventing sedimentation. In the post-soaking rinsing stage, water flows through co-flow section 421 to further remove residual soaking solution, preventing impurities from mixing with different solutions. This alternating flow pattern allows co-flow section 421 to remain clean without additional cleaning steps, reducing the frequency and cost of pipeline maintenance. Furthermore, co-flow section 421 avoids the cumbersome design of separate pipelines for the three fluids, reducing the number and complexity of pipelines.

[0050] Please see Figure 2 The process tank 1 includes a main tank 101 and an overflow tank 102 adjacent to the main tank 101. Both the bottom of the main tank 101 and the bottom of the overflow tank 102 are equipped with tank drain valves 103, which are connected to the co-flow section 421 of the working fluid return pipe 420. Therefore, the process tank 1 has two drainage methods: gravity drainage from the liquid in the main tank 101 and overflow drainage from the overflow tank 102. Gravity drainage can be used to quickly empty the working fluid in the main tank 101, while overflow drainage can be used to ensure that the soaking solution fully contacts and washes the inner wall of the main tank 101. In a preferred embodiment, the process tank 1 also includes a self-circulating pipeline 7. The starting end of the self-circulating pipeline 7 is connected to the overflow tank 102, and the terminal end is connected to the main tank 101, thereby forming a self-circulating path within the self-circulating pipeline 7 from the overflow tank 102 into the main tank 101. During the circulation process, the liquid is continuously agitated, which ensures a uniform distribution of chemical composition and temperature within the tank, preventing localized excessively high or low concentrations and guaranteeing consistent process conditions throughout the process tank 1. The self-circulating pipeline 7 is connected to the co-flow section 421. When drainage is required, the liquid in the self-circulating pipeline 7 can be discharged through the co-flow section 421; during water washing, water can enter the self-circulating pipeline 7 for rinsing and then be discharged through the co-flow section 421.

[0051] The scheduling and operation mode of this online soaking tank system is as follows:

[0052] When the parallel tank 110 reaches its maintenance cycle and needs to be soaked, the system initiates working fluid scheduling: the tank drain valve 103 and the control valve on the working fluid return pipe 420 corresponding to the parallel tank 110 are opened, and the working fluid in the parallel tank 110 flows into the buffer tank 3 under the action of gravity through the common flow section 421 and the branch section 422; then, the relevant passage of the working fluid input pipe 410 corresponding to the target standby tank 120 is opened, and under the drive of the working fluid input pump 430, the working fluid in the buffer tank 3 flows into the standby tank 120 after being filtered by the working fluid input pipe 410 and the filter, completing the transfer of working fluid from the parallel tank 110 to the standby tank 120. At this time, the standby tank 120 takes over from the parallel tank 110 to continue production, ensuring that production is not interrupted.

[0053] After the liquid introduction is completed, the parallel tank 110 is soaked: the soaking liquid input pump 530 is started, and the soaking liquid is delivered from the storage tank 2 to the main tank 101 of the parallel tank 110 through the soaking liquid input pipe 510; the tank body drain valve 103 of the main tank 101 is closed, and the tank body drain valve 103 of the overflow tank 102 is opened, and the soaking liquid enters the common flow pipe from the overflow tank 102; the soaking liquid circulates in the soaking liquid transmission circuit 5. During circulation, the relevant valves of the self-circulation pipeline 7 are opened at the same time, and the soaking liquid circulates in the self-circulation path, so that the soaking liquid fully contacts the inside of the tank and improves the soaking effect; after the soaking is completed, the soaking liquid input pump 530 is turned off, and the tank body drain valves 103 corresponding to the main tank 101 and the overflow tank 102 are opened at the same time, and the soaking liquid flows back to the storage tank 2 through the common flow section 421, realizing the recycling of the soaking liquid.

[0054] After the soaking solution is recovered, the parallel tank 110 is washed with water: purified water is injected into the main tank 101 and the overflow tank 102, the tank drain valve 103 and the drain control component of the water washing flow path 6 are opened, and the water washing wastewater is discharged through the co-flow section 421. The co-flow section 421 is rinsed at the same time to avoid chemical residue. After the water washing is completed, the relevant drain control components are turned off, and the parallel tank 110 is restored to standby status, waiting for the next use.

[0055] This solution, through the aforementioned structure and process, enables flexible scheduling of the working fluid, recycling of the soaking tank solution, and simultaneous cleaning of pipelines. While ensuring production continuity, it simplifies the system structure, reduces maintenance costs, and maintains the stability of process quality within production batches, achieving a balance between production efficiency and process quality.

Claims

1. An in-line cell system comprising a reservoir (2) for holding cell liquor and a plurality of process cells (1), characterised in that, It also includes a buffer tank (3) for containing the working fluid; multiple sets of the process tanks (1) are connected to the buffer tank (3) through separate working fluid transfer loops (4), and multiple sets of the process tanks (1) are connected to the storage tank (2) through separate foaming liquid transfer loops (5); The working fluid transmission circuit (4) includes a working fluid input pipe (410) and a working fluid return pipe (420). A working fluid input pump (430) is connected to the working fluid input pipe (410), and a control valve is provided on the working fluid return pipe (420). The foaming solution transmission circuit (5) includes a foaming solution input pipe (510) and a foaming solution return pipe (520). A foaming solution input pump (530) is connected to the foaming solution input pipe (510), and a control valve is provided on the foaming solution return pipe (520).

2. The online soaking tank system according to claim 1, characterized in that, Each working fluid return pipe (420) includes a common flow section (421) near the process tank (1) and a branch flow section (422) near the buffer tank (3); the common flow section (421) is located on the foam tank liquid transfer circuit (5).

3. The online soaking tank system according to claim 2, characterized in that, It also includes a water washing flow path (6); the water washing flow path (6) includes an independent input pipe and a drain pipe (610); multiple sets of the process tanks (1) are each connected to a separate water washing flow path (6), and the common flow section (421) is located on the water washing flow path (6).

4. The online soaking tank system according to claim 2, characterized in that, The process tank (1) is directly connected to the co-flow section (421) on the corresponding working fluid transmission circuit (4), and a tank drain valve (103) is provided at the connection.

5. The online soaking tank system according to claim 4, characterized in that, The structure of the process tank (1) includes a main tank (101) and an overflow tank (102) adjacent to the main tank (101). The bottom of the main tank (101) and the bottom of the overflow tank (102) are both provided with the tank body drain valve (103) and connected to the co-flow section (421).

6. The online soaking tank system according to claim 5, characterized in that, Both the working fluid input pipe (410) and the foaming tank liquid input pipe (510) are connected to the main tank (101) of the process tank (1).

7. The online soaking tank system according to claim 5, characterized in that, The process tank (1) is also provided with a self-circulating pipeline (7); the starting end of the self-circulating pipeline (7) is connected to the overflow tank (102), and the ending end is connected to the main tank (101).

8. The online soaking tank system according to claim 7, characterized in that, The self-circulating pipeline (7) is connected to the common flow section (421).

9. The online soaking tank system according to claim 1, characterized in that, The process tank (1) includes a parallel tank (110) and a spare tank (120), and the parallel tank (110) and the spare tank (120) have corresponding numbers.

10. The online soaking tank system according to claim 1, characterized in that, A filter (440) is connected to the working fluid input pipe (410).

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