Parallelism adjusting structure and gluing system

Abstract

The utility model provides a parallelism adjusting structure for adjusting the parallelism of jacking mechanism, including the flat plate for installing jacking mechanism, the first support position for supporting one end of flat plate, the second support position for supporting the other end of flat plate, wherein, the first support position is movably connected with flat plate, and the second support position is fixed in vertical direction between flat plate and is slidably matched in horizontal direction, the first support position and the second support position move oppositely, for adjusting the parallelism of both ends of flat plate, and then adjusting the parallelism of jacking mechanism, so that the needle assembly in jacking mechanism slides in the guide hole arranged in the platform, reduces the friction between needle assembly and guide hole, and facilitates the smooth sliding of needle assembly in guide hole. The utility model also provides a gluing system with parallelism adjusting structure, wherein, the jacking mechanism places the semiconductor substrate on the platform at the first position, and receives the semiconductor substrate transferred by the mechanical hand at the second position.

Description

Technical Field

[0001] This utility model relates to an adhesive application system, and more particularly to a parallelism adjustment structure for a lifting mechanism used in an adhesive application system. Background Technology

[0002] The adhesive application system includes a platform and a lifting mechanism installed within the platform. The ejector pin assembly in the lifting mechanism rises to a set position to receive the semiconductor substrate transferred by the robotic arm, and the ejector pin assembly descends to a set position to place the semiconductor substrate on the platform.

[0003] In the prior art, the parallelism of the ejector pin assembly is not adjustable, and the fitting precision requirements between it and the platform are high. The ejector pin assembly needs to slide through the guide hole of the platform with a gap. If the ejector pin assembly and the guide hole are not parallel, it will increase the friction between the ejector pin assembly and the guide hole, making it difficult for the ejector pin assembly to slide smoothly in the guide hole.

[0004] For the reasons mentioned above, there is an urgent need for a parallelism adjustment structure for a lifting mechanism to solve the above problems. Utility Model Content

[0005] The purpose of this utility model is to overcome the shortcomings of the prior art and provide a parallelism adjustment structure for a lifting mechanism in an adhesive application system. By adjusting the parallelism of the lifting mechanism, the ejector pin assembly in the lifting mechanism can slide through the guide hole of the platform, reducing the friction between the ejector pin assembly and the guide hole, and facilitating the smooth sliding of the ejector pin assembly in the guide hole.

[0006] This utility model is implemented as follows: a parallelism adjustment structure for adjusting the parallelism of a lifting mechanism, comprising:

[0007] Flat plate, used to install the lifting mechanism;

[0008] The first support position is used to support one end of the plate and is movably connected to the plate;

[0009] The second support position is used to support the other end of the plate. The second support position is fixed vertically and slides horizontally with the plate.

[0010] The relative movement between the first support position and the second support position is used to adjust the parallelism of the two ends of the plate, thereby adjusting the parallelism of the lifting mechanism.

[0011] Furthermore, the parallelism adjustment structure includes:

[0012] Two power components are used to drive the first support position and the second support position to move up or down, respectively.

[0013] Furthermore, the parallelism adjustment structure includes:

[0014] Two guide members are used to guide the first support position and the second support position respectively. Each guide member includes two spaced and vertically arranged slide rails. The first support position and the second support position are slidably mounted directly or indirectly on the corresponding slide rails.

[0015] Furthermore, the parallelism adjustment structure includes:

[0016] A parallelism measuring instrument is used to detect the parallelism of the flat plate and output a data signal containing parallelism error information.

[0017] The drive controller controls the two power components to drive the first support position and the second support position to move relative to each other based on the received data signals.

[0018] Alternatively, one of the power components can be controlled to drive the first or second support position to move up and down, thereby adjusting the parallelism of the two ends of the plate.

[0019] Preferably, the movable connection includes a rotatable connection or a hinged connection.

[0020] Preferably, the structure that is fixed in the vertical direction and has a sliding fit in the horizontal direction includes:

[0021] The guide port is horizontally positioned on the second support location;

[0022] The connector includes a vertical section fixedly connected to the flat plate and a horizontal section fixedly connected to the vertical section, the horizontal section being slidably inserted into the guide opening.

[0023] Preferably, the horizontal segment is arranged parallel to the flat plate.

[0024] Furthermore, the structure that is fixed in the vertical direction and has a sliding fit in the horizontal direction also includes:

[0025] Two vertically spaced rolling wheels have a guide opening formed at the interval between the two rolling wheels;

[0026] The connecting position is vertically set on the second support position, and the rotating shafts of both rollers are fixedly connected to the connecting position.

[0027] Preferably, the second support is positioned at the midpoint between two adjacent first support positions.

[0028] Preferably, the two first supports are arranged in a triangular pattern at a second support position.

[0029] Furthermore, the plate is rotatably connected to the two first support positions via a rotating structure. The rotating structure includes a horizontal block and a vertical block that is fixedly connected to the horizontal block. The horizontal block is fixedly connected to the plate via multiple first bolts, and the vertical block is rotatably connected to the first support position via a rotating shaft.

[0030] This utility model also provides an adhesive application system, including:

[0031] A lifting mechanism is used to receive semiconductor substrates transferred by a robotic arm;

[0032] The adhesive application system also includes the parallelism adjustment structure described above, wherein the power component drives the lifting mechanism to rise from the first position to the second position for receiving the semiconductor substrate transferred by the robot arm, and the power component drives the lifting mechanism to fall from the second position to the first position for placing the semiconductor substrate on the platform.

[0033] This utility model provides a parallelism adjustment structure and a gluing system with a parallelism adjustment structure for adjusting the parallelism of a lifting mechanism. The system includes a plate for mounting the lifting mechanism, a first support position for supporting one end of the plate, and a second support position for supporting the other end of the plate. The first support position is movably connected to the plate, while the second support position is vertically fixed and horizontally slidingly engaged with the plate. The relative movement between the two first and second support positions adjusts the parallelism of the two ends of the plate, thereby adjusting the parallelism of the lifting mechanism. This allows the ejector pin assembly in the lifting mechanism to slide through the guide hole of the platform, reducing the friction between the ejector pin assembly and the guide hole, and facilitating smooth sliding of the ejector pin assembly within the guide hole. This utility model also provides a gluing system with a parallelism adjustment structure, wherein the lifting mechanism places a semiconductor substrate on the platform at a first position and receives a semiconductor substrate transferred by a robotic arm at a second position. Attached Figure Description

[0034] To more clearly illustrate the technical solution of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a structural diagram of the parallelism adjustment structure and lifting mechanism provided in the embodiment of this utility model.

[0036] Figure 2 This is a structural diagram of the parallelism adjustment structure and lifting mechanism provided in this embodiment of the utility model from another perspective.

[0037] Figure 3 This is a schematic diagram of the drive controller in the parallelism adjustment structure provided in this embodiment of the utility model.

[0038] Figure 4 This is a structural diagram of the adhesive application system provided in an embodiment of the present invention.

[0039] Figure 5 This is a structural diagram of the platform in the adhesive coating system provided in this embodiment of the utility model.

[0040] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings.

[0041] The reference numerals in the attached figures are explained as follows:

[0042] Parallelism adjustment structure 100, flat plate 110, first support position 120, rotating structure 130, horizontal block 131, vertical block 132, first bolt 133, rotating shaft 134, second support position 140, power component 150, two guide parts (160, 160'), two slide rails 161, two slide rails 161', two sliders (162, 162'), drive controller 170, guide port 181, connecting part 182, vertical section 1821, rolling wheel (183, 183'), connecting position 184;

[0043] Lifting mechanism 200, ejector pin assembly 210;

[0044] Semiconductor substrate 300;

[0045] Platform 400, guide hole 410. Detailed Implementation

[0046] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or state relationship based on the orientation or state relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0047] Furthermore, in addition to indicating location or state relationships, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain situations to indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0048] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0049] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts, which may be the same or different in type and construction, and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0050] To clarify the directional relationships in the diagram, a coordinate system with the vertical direction as the Z-direction and the horizontal plane as the XY-plane is appropriately labeled.

[0051] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0052] like Figures 1-5 As shown, this utility model embodiment provides a parallelism adjustment structure 100 for adjusting the parallelism of the lifting mechanism 200, comprising:

[0053] Flat plate 110, used to install lifting mechanism 200;

[0054] The first support position 120 is preferably two and symmetrically arranged at intervals along the Y direction. The two first support positions 120 are used to support one end of the plate 110 and are movably connected to the plate 110. The movable connection includes a rotational connection or a hinge connection. In this embodiment, both ends of the plate 110 in the Y direction are rotatably connected to the two first support positions 120 through a rotational structure 130. Preferably, each of the two rotational structures 130 includes a horizontal block 131 and a vertical block 132 that is vertically fixedly connected to the horizontal block 131. The horizontal block 131 is fixedly connected to the plate 110 through a plurality of first bolts 133. In this embodiment, the first bolts 133 are preferably two and spaced apart. The two first bolts 133 can enhance the firmness between the horizontal block 131 and the plate 110. The two vertical blocks 132 are rotatably connected to the two first support positions 120 through rotating shafts 134 respectively. The axes of the two rotating shafts 134 are symmetrically arranged.

[0055] The second support position 140 is preferably one. The second support position 140 is used to support the other end of the plate 110. The second support position 140 and the plate 110 are fixed in the vertical direction and slidably engaged in the horizontal direction. The second support position 140 is vertically set.

[0056] The relative movement between the first support position 120 and the second support position 140 is used to adjust the parallelism of the two ends of the plate 110, and then adjust the parallelism of the lifting mechanism 200, so that the ejector pin assembly 210 in the lifting mechanism 200 slides through the guide hole 410 of the platform 400, reducing the friction between the ejector pin assembly 210 and the guide hole 410, and facilitating the smooth sliding of the ejector pin assembly 210 in the guide hole 410.

[0057] The relative movement between the first support position 120 and the second support position 140 includes:

[0058] The first support position 120 remains stationary, while the second support position 140 extends along its length (see [reference]). Figure 1 The first support level 120 moves upward or downward along its length direction (in the Z direction); or the second support level 140 does not move, and the first support level 120 moves upward or downward along its length direction; or the first support level 120 and the second support level 140 move towards each other.

[0059] Furthermore, the parallelism adjustment structure 100 includes:

[0060] The two power units 150 drive the first support position 120 and the second support position 140 to move up or down according to the set speed, number of revolutions and direction, respectively or simultaneously.

[0061] Furthermore, the parallelism adjustment structure 100 includes:

[0062] Two guide members (160, 160') are used to guide the first support position 120 and the second support position 140 respectively. One guide member 160 includes two vertically symmetrically arranged slide rails 161 spaced apart, and the other guide member 160' includes two vertically symmetrically arranged slide rails 161' spaced apart. The first support position 120 is directly or indirectly slidably mounted on the two slide rails 161, and the second support position 140 is directly or indirectly slidably mounted on the two slide rails 161'. In this embodiment, two sliders (162, 162') are slidably mounted on the two slide rails 161 and the two slide rails 161' respectively. The first support position 120 and the second support position 140 are detachably fixedly connected to the two sliders (162, 162'). In this embodiment, the detachable connection is preferably a screw connection.

[0063] In this embodiment, the first support position 120 is screwed to the slider 162 by a plurality of second bolts 121. Preferably, there are two second bolts 121. The two second bolts 121 arranged at intervals can enhance the firmness between the slider 162 and the first support position 120.

[0064] like Figure 3As shown, the parallelism adjustment structure 100 further includes:

[0065] A parallelism measuring instrument (not shown) is used to detect the parallelism of the plate 110 and outputs a data signal containing parallelism error information.

[0066] The drive controller 170 controls the two power components 150 to drive the relative movement between the first support position 120 and the second support position 140 according to the received data signals; or,

[0067] The drive controller 170 controls one of the power components 150 to drive the first support position 120 or the second support position 140 to move up and down, in order to adjust the parallelism of the two ends of the plate 110.

[0068] The power component 150 includes a telescopic motor, a lead screw motor, and a telescopic cylinder. In this embodiment, the power component is preferably a lead screw motor. The displacement distance between the two sliders (162, 162') is the product of the number of rotations of the lead screw motor and the pitch of the lead screw. For example, if the displacement distance is 1 mm and the pitch is 0.5 mm, the lead screw power component needs to rotate 2 times.

[0069] like Figure 1 As shown, preferably, the structure that is fixed in the vertical direction and slidingly fitted in the horizontal direction includes:

[0070] The guide port 181 is configured to be horizontally positioned on the second support position 140;

[0071] The connector 182 includes a vertical section 1821 fixedly connected to the plate 110 and a horizontal section 1822 fixedly connected to the vertical section 1821. The horizontal section 1822 is slidably inserted into the guide opening 181 and is configured to be parallel and spaced apart from the plate 110.

[0072] like Figure 1 As shown, the structure that is fixed in the vertical direction and slidingly fitted in the horizontal direction further includes:

[0073] Two vertically spaced rollers (183, 183') have a guide opening 181 formed between them. With this structure, when adjusting the parallelism of the ejector assembly 210, there is a movable gap between the second support position 140 and the plate 110, which facilitates the rotation of the plate 110 relative to the first support position 120. The two rollers (183, 183') also have a guiding function, which facilitates the sliding horizontal section 1822 to quickly enter the guide opening 181, saving alignment time and improving installation efficiency.

[0074] The connecting position 184 is vertically set at the upper end of the second support position 140, and the rotating shafts 1831 of the two rolling wheels (183, 183') are horizontally set at the upper and lower ends of the connecting position 184.

[0075] Preferably, in this embodiment, the two sliders (162, 162') are symmetrically arranged and spaced apart. The first support position 120 is preferably two, and the second support position 140 is preferably one. The two first support positions 120 are vertically arranged at both ends of the slider 162, and the second support position 140 is vertically installed at the middle of the slider 162'. The two first support positions 120 and the second support position 140 are arranged in a triangular pattern, preferably in an isosceles triangle pattern. This structural design is beneficial to the stability between the first support position 120 and the second support position 140 and the plate 110, and avoids the phenomenon of the plate 110 shaking.

[0076] In this embodiment, the power component 150 drives the slide 162' to move up and down on the slide rail 161', which in turn moves the second support position 140 up and down along the Z direction to adjust the parallelism of the plate 110. The parallelism of the plate 110 in the Y direction is ensured by two spaced first support positions 120 located at the same height. In this embodiment, the parallelism of the plate 110 in the X direction is adjusted. Only one second support position 140 is needed to adjust the balance of the plate 110, which simplifies the product structure and saves costs.

[0077] like Figure 4 and Figure 5 As shown, this utility model also provides an adhesive application system, comprising:

[0078] Lifting mechanism 200, used to receive semiconductor substrate 300 transferred by robotic arm;

[0079] The adhesive application system also includes the parallelism adjustment structure 100 described above, wherein the power component 150 drives the lifting mechanism 200 to rise from the first position to the second position for receiving the semiconductor substrate 300 transferred by the robot arm, and the power component 150 drives the lifting mechanism 200 to fall from the second position to the first position for placing the semiconductor substrate 300 on the platform 400, and the flat plate 110 is arranged parallel to the platform 400.

[0080] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications are also considered to be within the protection scope of this utility model.

Claims

1. A parallelism adjustment structure for adjusting the parallelism of a lifting mechanism, characterized in that, include: Flat plate, used to install the lifting mechanism; The first support position is used to support one end of the plate and is movably connected to the plate; The second support position is used to support the other end of the plate. The second support position is fixed vertically and slides horizontally with the plate. The first support position and the second support position move relative to each other to adjust the parallelism of the two ends of the plate, thereby adjusting the parallelism of the lifting mechanism.

2. The parallelism adjustment structure according to claim 1, characterized in that, include: Two power components are used to drive the first support position and the second support position to move up or down, respectively.

3. The parallelism adjustment structure according to claim 2, characterized in that, include: Two guide members are used to guide the first support position and the second support position respectively, and each guide member includes two spaced and vertically arranged slide rails.

4. The parallelism adjustment structure according to claim 3, characterized in that, include: A parallelism measuring instrument is used to detect the parallelism of the flat plate and output a data signal containing parallelism error information. The drive controller controls the two power components to drive the first support position and the second support position to move relative to each other based on the received data signals. Alternatively, one of the power components can be controlled to drive the first or second support position to move up and down, thereby adjusting the parallelism of the two ends of the plate.

5. The parallelism adjustment structure according to claim 1, characterized in that, Structures that are fixed vertically and have a sliding fit horizontally include: The guide port is horizontally positioned on the second support location; The connector includes a vertical section fixedly connected to the flat plate and a horizontal section fixedly connected to the vertical section, the horizontal section being slidably inserted into the guide opening.

6. The parallelism adjustment structure according to claim 5, characterized in that, The horizontal segment is arranged parallel to the flat plate.

7. The parallelism adjustment structure according to claim 5, characterized in that, Structures that are fixed vertically and slide horizontally also include: Two vertically spaced rolling wheels have a guide opening formed at the interval between the two rolling wheels; A connecting position is provided on the second support position, and the rotating shafts of both rollers are fixedly connected to the connecting position.

8. The parallelism adjustment structure according to claim 7, characterized in that, There are two first support positions and one second support position. The second support is set at the midpoint between two adjacent first support positions, and the two first supports are arranged in a triangle at the second support position.

9. The parallelism adjustment structure according to claim 1, characterized in that, The plate and the first support position are rotatably connected by a rotating structure. The rotating structure includes a horizontal block and a vertical block that is fixedly connected to the horizontal block. The horizontal block is fixedly connected to the plate by a plurality of first bolts, and the vertical block is rotatably connected to the first support position by a rotating shaft.

10. An adhesive application system, characterized in that, include: A lifting mechanism is used to receive semiconductor substrates transferred by a robotic arm; It also includes a parallelism adjustment structure as described in any one of claims 2 to 9, wherein the power component drives the lifting mechanism to rise from the first position to the second position for receiving the semiconductor substrate transferred by the robot arm, and the power component drives the lifting mechanism to fall from the second position to the first position for placing the semiconductor substrate on the platform; The flat plate is set parallel to the platform.

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