A dismounting tool
By designing a disassembly tool that connects hook rods and universal joints, the problem of difficult disassembly of the shielding component of the physical vapor deposition chamber was solved, achieving an efficient and safe disassembly process and improving operational flexibility and safety.
CN224391018UActive Publication Date: 2026-06-23GUANGDONG XINYUENENG SEMICON CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- GUANGDONG XINYUENENG SEMICON CO LTD
- Filing Date
- 2025-07-02
- Publication Date
- 2026-06-23
Smart Images
Figure CN224391018U_ABST
Abstract
The application discloses a dismounting tool for dismounting a shielding part in a metal film deposition process equipment, which comprises a hook rod part and a handle part connected with one end of the hook rod part through a universal joint. In the embodiment of the application, the dismounting tool is used to hook the shielding part at the position where a conveying cavity and a process cavity are communicated in the metal film deposition process equipment through the hook rod part, and the handle part is convenient for an operator to hold. Meanwhile, the hook rod part and the handle part are connected through the universal joint, so that the handle part can be adjusted in multiple degrees of freedom relative to the hook rod part, the function part in the process cavity can be avoided by adjusting the relative angle between the handle part and the hook rod part, the operator can conveniently exert force, the risk of hand scratch of the operator can be reduced, and the dismounting efficiency and the operation safety of the shielding part are greatly improved.
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