Ion-thinning device stage convenient to replace

Abstract

A kind of ion thinning device loading table convenient to replace, it is characterized by including loading bearing table device, connecting block, connecting groove, sterilization device, sample positioning device, detachable loading table device, the connecting block is installed on the side of loading bearing table device, connecting groove is set up on the connecting block, loading bearing table device is connected with connecting block by bolt nut, multiple sterilization devices are installed on loading bearing table device, loading bearing table device is connected with sterilization device by hinge hinge, detachable loading table device is installed on loading bearing table device, sample positioning device is installed on detachable loading table device.

Description

Technical Field

[0001] This utility model relates to the field of ion thinning technology, and in particular to a stage for an ion thinning device that is easy to replace. Background Technology

[0002] Traditional ion thinning instruments bombard both sides of a rotating sample with argon ion beams emitted from dual ion guns in a high-vacuum environment, achieving thinning through the principle of physical sputtering. Ultimately, a perforated thin film region that can be penetrated by an electron beam is formed in the center of the sample. This is the core equipment for sample preparation in transmission electron microscopy. In a high-vacuum environment, two high-energy argon ion beams (with energy at an angle of 5°–30°) bombard both sides of a rotating sample, gradually stripping away the surface atoms of the material through the principle of physical sputtering, ultimately forming a thin film region that can be penetrated by an electron beam in the center of the sample. This method is suitable for solid materials such as metals, ceramics, and semiconductors, and requires the sample to be pre-processed into a disc with a diameter of 112 < 200 μm and a thickness of 112 < 200 μm.

[0003] Existing application CN202323267017.7 discloses a sample stage for an ion thinning instrument, comprising a disc-shaped base with a first central through-hole penetrating the upper and lower bottom surfaces of the base. A rotating tray is rotatably connected to the base around the first central through-hole, and a second central through-hole communicating with the first central through-hole is located in the center of the rotating tray. The sample stage also includes a sample fixing cup, which has a lid and a cup body for fixing and containing the sample. The lid is detachably attached to the mouth of the cup body. A third central through-hole is located in the center of the lid, and a fourth central through-hole communicating with the third central through-hole is located in the center of the bottom of the cup body. The sample fixing cup is located in the second central through-hole and connected to the rotating tray. However, the existing technology makes the sample stage replacement operation complex and time-consuming, affecting experimental efficiency. Furthermore, the ion thinning device requires a period of time to peel off atomic layers during use, during which time it is impossible to pre-process the subsequent samples, leading to interruptions in the experimental process and reducing overall work efficiency. The used sample stage is also prone to residual impurities, affecting the accuracy of subsequent experiments. Utility Model Content

[0004] To address the above technical problems, this utility model provides a replaceable stage for an ion thinning device, characterized by comprising a stage assembly, a connecting block, a connecting groove, a sterilization device, a sample positioning device, and a detachable stage assembly. The connecting block is mounted on the side of the stage assembly, and a connecting groove is formed on the connecting block. The stage assembly and the connecting block are connected by bolts and nuts. Multiple sterilization devices are mounted on the stage assembly, and the stage assembly and the sterilization devices are connected by hinges. A detachable stage assembly is mounted on the stage assembly, and a sample positioning device is mounted on the detachable stage assembly.

[0005] The loading platform device consists of a loading platform, magnetic grooves, supporting legs, an electrical interface, an ion beam controller, a permanent magnet, and a motor. Multiple supporting legs are installed below the loading platform, which is fixed to the legs with bolts. A spacious operating area is provided in the middle of the loading platform. Magnetic grooves are located on the inner side of the loading platform, with conductive springs embedded within them and electrically connected to the electrical interface. Conductive contacts are positioned at corresponding positions on the magnetic snap-fit ​​of the detachable loading platform device, enabling automatic connection of the electrical interface through magnetic attraction. The ion beam controller, permanent magnet, and motor are installed inside the loading platform. The motor drives the permanent magnet to rotate, and the permanent magnet is connected to the ion beam controller.

[0006] The disinfection device consists of a disinfection base, a control switch, an electric pump, a connecting base, a motor, a centrifugal atomizing head, a Hall sensor, and a connecting shell. The connecting base is installed on top of the disinfection base, and the connecting shell is installed on the connecting base. The motor, the electric pump, and the Hall sensor are installed inside the connecting shell. The motor is connected to the electric pump. The centrifugal atomizing head is installed on the side of the connecting shell. The motor is connected to the centrifugal atomizing head above through the electric pump. The control switch is installed on the side of the disinfection base.

[0007] The sample positioning device consists of a positioning base, an adjusting screw, a telescopic clamp, a rotating bracket, a rotating shaft, a roller, and a rotating handle. The adjusting screw is installed above the positioning base, the rotating shaft is installed above the adjusting screw, the rotating bracket is installed on the rotating shaft, the telescopic clamp is installed on the side of the rotating bracket, the telescopic clamp is connected to the rotating bracket by a buckle, and the rotating handle is installed on the side of the rotating bracket to adjust the telescopic length of the telescopic clamp. The roller is installed below the positioning base, and the positioning base moves on a movable shaft on a detachable stage device via the roller.

[0008] The detachable platform device consists of a platform, a moving shaft, a motor, and magnetic buckles. The moving shaft is installed on the platform, and the motor is installed inside the platform. The two ends of the moving shaft are connected to the motor. Magnetic buckles are installed at both ends of the platform, and conductive contacts are set at corresponding positions of the magnetic buckles. The platform is installed in the magnetic groove on the platform through the magnetic buckles.

[0009] The beneficial effects of this utility model are as follows:

[0010] This invention adds a sample carrier stage, a sterilization device, a sample positioning device, and a detachable sample carrier stage to the original design. These additions facilitate stage replacement, with installation and disassembly achieved via magnetic snap-fit, improving operational efficiency. Furthermore, since the ion thinning device requires continuous use, samples can be prepared in advance on other sample carrier stages, enabling seamless switching and avoiding downtime. This significantly improves experimental continuity and overall work efficiency. Cleaning and maintenance of the experimental stage are also more convenient. The sterilization device and continuous stage replacement mechanism effectively prevent cross-contamination and ensure the accuracy of experimental data.

[0011] The newly added loading platform device of this utility model consists of a loading platform, a magnetic groove, supporting table legs, an electrical interface, an ion beam controller, a permanent magnet, and a motor. The magnetic groove of the added loading platform device cooperates with the electrical interface to ensure that the loading platform can be quickly and accurately connected and is easy to replace.

[0012] The newly added disinfection device of this utility model consists of a disinfection base, a connecting base, a control switch, an electric pump, a motor, a centrifugal atomizing head, a Hall sensor, and a connecting shell. The added disinfection device uses the Hall sensor to precisely control the atomization of the disinfectant solution, ensuring all-round coverage, efficient sterilization, improving the cleanliness of the experimental environment, and ensuring the reliability of experimental results.

[0013] The newly added sample positioning device of this utility model consists of a positioning base, an adjusting screw, a telescopic clamp, a rotating bracket, a rotating shaft, a roller, and a rotating handle. The added sample positioning device can perform multi-angle thinning of the sample, ensuring uniform thinning of the sample surface, improving experimental accuracy, and reducing human error.

[0014] The newly added detachable stage device of this utility model consists of a stage, a moving shaft, a motor, and a magnetic buckle. The added detachable stage device can be quickly connected to the stage via the magnetic buckle, which facilitates replacement and maintenance, improves the convenience of operation, and ensures the efficiency and accuracy of the experimental process. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the stage of the ion thinning device that is easy to replace according to this utility model.

[0016] Figure 2 This is a diagram of a loading platform for an easily replaceable ion thinning device according to the present invention.

[0017] Figure 3 This is a diagram of a sterilization device for an easily replaceable ion thinning device stage according to the present invention.

[0018] Figure 4This is a sample positioning device diagram of a stage for an easily replaceable ion thinning device according to the present invention.

[0019] Figure 5 This is a diagram of a detachable stage device for an ion thinning device that is easy to replace, according to the present invention.

[0020] 1-Loading platform, 2-Magnetic groove, 3-Supporting table leg, 4-Electrical interface, 5-Disinfection base, 6-Connecting base, 7-Control switch, 8-Centrifugal atomizing head, 9-Connecting shell, 10-Positioning base, 11-Adjusting screw, 12-Extendable clamp, 13-Rotating bracket, 14-Rotating shaft, 15-Roller, 16-Loading platform, 17-Moving shaft, 18-Magnetic buckle, 19-Connecting block, 20-Connecting groove. Detailed Implementation

[0021] Example 1

[0022] This utility model provides a replaceable ion thinning device platform, characterized by including a platform 1 with multiple supporting legs 3 installed below it, the platform 1 and the supporting legs 3 being fixed by bolts, a spacious operating area in the middle of the platform 1, an electrical interface 4 and a magnetic groove 2 on the inner side of the platform 1, an electrical interface 4 on the side of the magnetic groove 2, a connecting base 6 installed above the disinfection base 5, a connecting shell 9 installed on the connecting base 6, a centrifugal atomizing head 8 installed on the side of the connecting shell 9, a control switch 7 installed on the side of the disinfection base 5, and a positioning base 1. An adjusting screw 11 is installed above the positioning base 10. A rotating shaft 14 is installed above the adjusting screw 11. A rotating bracket 13 is installed on the rotating shaft 14. A telescopic clamp 12 is installed on the side of the rotating bracket 13. The telescopic clamp 12 is connected to the rotating bracket 13 by bolts and nuts. A moving shaft 17 is installed on the platform 16. Magnetic buckles 18 are installed at both ends of the platform 16. The platform 16 is installed in the magnetic groove 2 on the platform through the magnetic buckles 18. A roller 15 is installed below the positioning base 10. A connecting block 19 is installed on the platform 1. A connecting groove 20 is opened on the connecting block 19.

[0023] Example 2

[0024] When using this utility model, the sample is installed on the telescopic clamp 12. By adjusting the tightness of the telescopic clamp 12, the sample is ensured to be stable. After installation, the ion thinning device is installed on the carrier stage 1 through the groove of the connecting block 19. The motor is started, and the entire carrier stage 16 is installed in the magnetic groove 2 of the carrier stage 1 through the magnetic buckle 18. The motor drives the roller 15 to accurately position the carrier stage 16, ensuring that the sample is uniformly stressed and efficiently thinned during the ion thinning process, thereby improving the accuracy and repeatability of the experimental results. While the ion thinning device is thinning the sample, the next sample is installed on the replacement carrier stage 16 in the same manner as described above. Pre-prepared samples can be quickly replaced, reducing downtime, improving experimental efficiency, ensuring the smooth progress of continuous experiments, and further improving the overall efficiency of scientific research.

[0025] When a sample needs to be changed, simply loosen the magnetic latch 18, remove the stage 16, and reinstall the new sample. The operation is simple and saves time. Furthermore, the stage 1 of this invention is equipped with a permanent magnet, an ion beam controller, and an electrical interface that work together to power the stage 16 during installation. When the stage is removed, the power is automatically cut off after the magnetic field of the magnetic latch 18 and the magnetic groove 2 changes, ensuring operational safety. The magnetic groove 2 and the magnetic latch 19 provide stable magnetic attraction to ensure the stability of the stage 16. After power is cut off, the Hall sensor transmits a signal, and the centrifugal atomizing head 8 on the disinfection base 5 automatically starts to efficiently disinfect the stage 16, preventing cross-contamination and ensuring a clean experimental environment. At the same time, the control switch 7 can adjust the atomization intensity to adapt to different disinfection needs, ensuring the cleanliness of the stage before and after each experiment and improving the reliability of experimental data.

[0026] This invention, through its ingenious design with magnetic connections and electrical interfaces, enables the rapid installation and disassembly of the stage 16, improving the convenience and safety of experimental operations. At the same time, the efficient disinfection function of the centrifugal atomizing head effectively prevents cross-contamination, ensures the cleanliness of the experimental environment, and further improves the accuracy of experimental data and research efficiency.

[0027] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. The various components mentioned in this utility model are common technologies in the existing field. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A replaceable stage for an ion thinning device, characterized in that... The device includes a carrying platform, a connecting block, a connecting groove, a sterilization device, a sample positioning device, and a detachable carrying platform. The connecting block is installed on the side of the carrying platform, and the connecting block has a connecting groove. The carrying platform and the connecting block are connected by bolts and nuts. Multiple sterilization devices are installed on the carrying platform, and the carrying platform and the sterilization devices are connected by hinges. The detachable carrying platform is installed on the carrying platform, and the sample positioning device is installed on the detachable carrying platform.

2. The easily replaceable ion thinning device stage according to claim 1, characterized in that... The material carrier platform consists of a material carrier platform, magnetic grooves, supporting legs, an electrical interface, an ion beam controller, a permanent magnet, and a motor. Multiple supporting legs are installed below the material carrier platform, which is fixed to the supporting legs with bolts. A spacious operating area is provided in the middle of the material carrier platform. Magnetic grooves are located on the inner side of the material carrier platform, with conductive springs embedded within the grooves and electrically connected to the electrical interface. Conductive contacts are positioned at corresponding positions on the magnetic snap-fit ​​of the detachable material carrier platform, enabling automatic connection of the electrical interface through magnetic attraction. The ion beam controller, permanent magnet, and motor are installed inside the material carrier platform. The motor drives the permanent magnet to rotate, and the permanent magnet is connected to the ion beam controller.

3. The easily replaceable ion thinning device stage according to claim 1, characterized in that... The disinfection device consists of a disinfection base, a control switch, an electric pump, a connecting base, a motor, a centrifugal atomizing head, a Hall sensor, and a connecting housing. The connecting base is installed on top of the disinfection base, and the connecting housing is installed on the connecting base. The motor, the electric pump, and the Hall sensor are installed inside the connecting housing. The motor is connected to the electric pump. The centrifugal atomizing head is installed on the side of the connecting housing. The motor is connected to the centrifugal atomizing head above the electric pump. The control switch is installed on the side of the disinfection base.

4. The easily replaceable ion thinning device stage according to claim 1, characterized in that... The sample positioning device consists of a positioning base, an adjusting screw, a telescopic clamp, a rotating bracket, a rotating shaft, a roller, and a rotating handle. The adjusting screw is installed above the positioning base, and the rotating shaft is installed above the adjusting screw. The rotating bracket is installed on the rotating shaft, and the telescopic clamp is installed on the side of the rotating bracket. The telescopic clamp is connected to the rotating bracket by a buckle. A rotating handle is installed on the side of the rotating bracket, and the telescopic length of the telescopic clamp is adjusted by rotating the handle. The roller is installed below the positioning base, and the positioning base moves on a movable shaft on a detachable stage device via the roller.

5. The easily replaceable stage for an ion thinning device according to claim 1, characterized in that... The detachable platform device consists of a platform, a moving shaft, a motor, and magnetic buckles. The moving shaft is installed on the platform, and the motor is installed inside the platform. The two ends of the moving shaft are connected to the motor. Magnetic buckles are installed at both ends of the platform, and conductive contacts are set at corresponding positions of the magnetic buckles. The platform is installed in the magnetic groove on the platform through the magnetic buckles.

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