A two-axis sample stage for a scanning electron microscope and a scanning electron microscope

Abstract

The application provides a two-axis sample stage for a scanning electron microscope and the scanning electron microscope, wherein the two-axis sample stage comprises a door for covering an opening of a sample chamber, an electric drive assembly arranged on one side of the door, and a sample stage assembly arranged on the other side of the door, the sample stage assembly being used for placing a sample, and the electric drive assembly being in transmission connection with the sample stage assembly. The two-axis sample stage is configured such that the electric drive assembly can drive the sample stage assembly to move so as to send the sample at different positions on the sample stage assembly to an observation position. In the technical scheme, the electric drive assembly and the sample stage assembly are arranged on the two sides of the door, and after the door covers the opening of the sample chamber, the sample stage assembly is located in the sample chamber and the electric drive assembly is located outside the sample chamber, thereby reducing the influence of the magnetic field generated by the electric drive assembly during operation on the electron beam in the sample chamber, and thus the image viewing and photographing effects can be improved.

Description

Technical Field

[0001] This application relates to the field of scanning electron microscopy, and more specifically, to a biaxial sample stage for a scanning electron microscope and a scanning electron microscope. Background Technology

[0002] Existing scanning electron microscopes (SEMs) have a sample stage within the sample chamber, on which the sample to be observed is placed. During sample observation, it is necessary to view and photograph the sample from different positions, thus requiring the sample stage to move to change the sample's position. However, existing SEMs suffer from poor image viewing and photographing results. Utility Model Content

[0003] The purpose of this application is to provide a biaxial sample stage for a scanning electron microscope and a scanning electron microscope in order to improve the problem of poor image viewing and imaging results.

[0004] The embodiments of this application are implemented as follows:

[0005] In a first aspect, embodiments of this application provide a biaxial sample stage for a scanning electron microscope, comprising a door for closing the opening of a sample compartment; an electrically driven assembly disposed on one side of the door; and a sample stage assembly disposed on the other side of the door, the sample stage assembly being used to hold a sample, the electrically driven assembly being driveably connected to the sample stage assembly. The biaxial sample stage is configured such that the electrically driven assembly can drive the sample stage assembly to move, thereby delivering samples at different positions on the sample stage assembly to the observation position.

[0006] In the above technical solution, the electric drive assembly and the sample stage assembly are located on both sides of the chamber door. After the chamber door closes the sample chamber opening, the sample stage assembly is located inside the sample chamber, and the electric drive assembly is located outside the sample chamber. The electric drive assembly is used to drive the movement of the sample stage assembly, which can deliver samples from different positions on the sample stage assembly to the observation position. During the operation of the electric drive assembly, a current is generated, which produces a magnetic field. By placing the electric drive assembly and the sample stage assembly on opposite sides of the chamber door, the electric drive assembly is positioned outside the sample chamber of the scanning electron microscope, thereby reducing the influence of the magnetic field generated during the operation of the electric drive assembly on the electron beam inside the sample chamber. This improves the image viewing and imaging results.

[0007] In some alternative implementations, the electric drive assembly includes a drive motor, and a drive shaft is connected between the drive motor and the sample stage assembly; the drive motor is connected to the compartment door; the compartment door is provided with a through hole for the drive shaft to pass through, and a first sealing ring is provided in the through hole; one end of the drive shaft is connected to the drive motor, and the other end passes through the first sealing ring and is connected to the sample stage assembly to drive the sample stage assembly to move.

[0008] In the above technical solution, the drive motor and the sample stage assembly are connected by a drive shaft, so that the drive motor can drive the sample stage assembly to move. By setting a first sealing ring in the through hole on the chamber door for the drive shaft to pass through, the impact on the sealing performance of the chamber door can be reduced, so that the sample chamber can maintain a vacuum state.

[0009] In some optional embodiments, the sample stage assembly includes a base, an X-axis slide, and a Y-axis slide; the base is connected to the compartment door. The base is provided with a first linear guide rail extending in a first direction, and one side of the Y-axis slide is slidably connected to the base via the first linear guide rail; the other side of the Y-axis slide is provided with a second linear guide rail extending in a second direction, and the X-axis slide is slidably connected to the Y-axis slide via the second linear guide rail; the side of the X-axis slide facing away from the Y-axis slide is used to place a sample.

[0010] In the above technical solution, the Y-axis slide is mounted on the first linear guide rail, which can drive the X-axis slide to move along the extension direction of the first linear guide rail; the X-axis slide is mounted on the second linear guide rail, which can move along the extension direction of the second linear guide rail. Therefore, the position of the sample to be observed can be changed by moving the X-axis slide. Since both the X-axis and Y-axis slides are mounted on linear guide rails, their movement is more stable and does not deviate, improving the image viewing and photography results.

[0011] In some optional embodiments, the drive motor includes a first drive motor and a second drive motor; the transmission shaft includes a first ball screw assembly, a steering shaft, and a second ball screw assembly; the screw of the first ball screw assembly is connected to the first drive motor, and the nut of the first ball screw assembly is connected to the Y-axis slide to drive the Y-axis slide to move along the first direction; one end of the steering shaft is connected to the second drive motor, and the other end is connected to the screw of the second ball screw assembly via a bevel gear transmission; the nut of the second ball screw assembly is connected to the X-axis slide to drive the X-axis slide to move along the second direction.

[0012] In some alternative implementations, the sample stage assembly includes a base with a spring on the downward-facing side of the base for abutting against the sample chamber.

[0013] In the above technical solution, by setting a spring clip on the downward-facing side of the base to abut against the sample chamber, the low-frequency vibration of the sample stage assembly during movement can be reduced, thereby improving the image viewing and photography results. It also provides some support for the sample stage assembly.

[0014] In some alternative implementations, the spring is located on the side of the base away from the compartment door.

[0015] In the above technical solution, placing the spring clip on the side of the base away from the compartment door allows the spring clip to provide better support for the base.

[0016] In some alternative implementations, the spring is a metal structural component.

[0017] In the above technical solution, since the spring is a metal structural component and it abuts against the sample chamber, it can serve as a grounding element, increasing the conductivity of the sample stage and guiding away the electrons emitted by the electron gun.

[0018] In some alternative implementations, a second sealing ring is provided on the side of the compartment door where the sample stage assembly is located, and the sample stage assembly is located inside the second sealing ring.

[0019] In the above technical solution, by setting a second sealing ring, the sealing performance when the compartment door is closed can be improved.

[0020] In some alternative implementations, a guide rod is also provided on one side of the sample stage assembly where the compartment door is located.

[0021] In the above technical solution, a guide rod is set on one side of the sample stage assembly through the chamber door, which can play a guiding role during the closing of the chamber door.

[0022] Secondly, embodiments of this application provide a scanning electron microscope, including a sample chamber and a biaxial sample stage provided in the first aspect. The sample chamber has a port for taking out and placing samples, a door for covering the port, and the sample stage assembly is located inside the sample chamber. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 A schematic diagram of a two-axis sample stage provided in an embodiment of this application from a first-view perspective;

[0025] Figure 2 A schematic diagram of a two-axis sample stage provided in an embodiment of this application from a second perspective;

[0026] Figure 3 This is a schematic diagram of a two-axis sample stage provided in an embodiment of this application from a third-person perspective.

[0027] Icons: 100-Door; 210-Electric drive assembly; 211-First drive motor; 212-Second drive motor; 220-First ball screw assembly; 231-Steering shaft; 232-Second ball screw assembly; 300-Sample stage assembly; 310-Base; 320-X-axis slide; 330-Y-axis slide; 410-First linear guide; 420-Second linear guide; 500-Spring; 600-Second sealing ring; 700-Guide rod. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0029] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0030] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0031] In the description of this application, it should be noted that the terms "center," "upper," "lower," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0032] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0033] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0034] In existing scanning electron microscopes, when observing a sample, the electric drive component used to move the sample stage assembly to change the observed sample is also located in the sample chamber. During the operation of the electric drive component, current flows through it, and the current generates a magnetic field, which causes electromagnetic interference to the electron beam emitted by the electron gun, thus affecting the image reading and photography results.

[0035] Based on this, this application provides a scanning electron microscope, including a sample chamber and a biaxial sample stage for the scanning electron microscope. The sample chamber is used to hold the sample to be observed and has an opening through which the sample can be placed and removed. The biaxial sample stage includes a door 100 that can close the opening to create a vacuum environment inside the sample chamber.

[0036] In addition, such as Figure 1 As shown, the biaxial sample stage also includes an electrically driven assembly 210 disposed on one side of the door 100 and a sample stage assembly 300 disposed on the other side of the door 100. The sample stage assembly 300 is used to place samples. The electrically driven assembly 210 is connected to the sample stage assembly 300 to drive the sample stage assembly 300 to move, so that samples at different positions on the sample stage assembly 300 are delivered to the observation position. The observation position refers to the position where the user can observe the sample through a scanning electron microscope.

[0037] When using the scanning electron microscope provided in this application for observation, the sample is placed on the sample stage assembly 300. After the chamber door 100 closes the chamber opening, the sample stage assembly 300 is located inside the sample chamber and the electric drive assembly 210 is located outside the sample chamber. This can effectively reduce the influence of the magnetic field generated by the current when the electric drive assembly 210 is working on the electron beam inside the sample chamber, thus improving the image viewing and photography effects.

[0038] In some embodiments, the electric drive assembly 210 includes a drive motor, and a drive shaft connects the drive motor to the sample stage assembly 300. The drive motor is located on one side of the chamber door 100. The chamber door 100 has a through hole through which the drive shaft passes, and a first sealing ring is provided in the through hole. One end of the drive shaft is connected to the drive motor, and the other end passes through the first sealing ring and is connected to the sample stage assembly 300 to drive the sample stage assembly 300 to move. In this embodiment, the drive motor located on one side of the chamber door 100 is connected to the sample stage assembly 300 located on the other side of the chamber door 100 via a drive shaft. The drive shaft passes through the through hole of the chamber door 100, and the first sealing ring is provided in the through hole, which can reduce the impact on the sealing performance of the chamber door 100, so that a vacuum state can be maintained inside the sample chamber.

[0039] In some implementations, such as Figures 1 to 3 As shown, the sample stage assembly 300 includes a base 310, an X-axis slide 320, and a Y-axis slide 330; the base 310 is connected to the door 100. The base 310 is provided with a first linear guide rail 410 extending along a first direction. One side of the Y-axis slide 330 is slidably connected to the base 310 via the first linear guide rail 410; the other side of the Y-axis slide 330 is provided with a second linear guide rail 420 extending along a second direction, and the X-axis slide 320 is slidably connected to the Y-axis slide 330 via the second linear guide rail 420; the side of the X-axis slide 320 facing away from the Y-axis slide 330 is used to place samples. In some embodiments, the first direction and the second direction are two mutually perpendicular directions.

[0040] When the Y-axis slide 330 moves along the first linear guide 410 on the base 310, the X-axis slide 320 also moves along the first direction, thereby changing the position of the sample in the first direction and thus enabling the sample at different positions to be delivered to the observation position along the first direction. When the X-axis slide 320 moves along the second linear guide 420 on the Y-axis slide 330, it can change the position of the sample in the second direction. In this embodiment, the linear guides (such as the first linear guide 410 and the second linear guide 420) have no other movement clearances except for the permitted movement direction. The movements of the Y-axis slide 330 and the X-axis slide 320 are guided by the linear guides, thus ensuring smooth operation of the Y-axis slide 330 and the X-axis slide 320 without deviation in other directions, which can improve the problem of image shaking during image viewing and photography. Furthermore, both the first linear guide 410 and the second linear guide 420 can be cross roller linear guides as used in the prior art. In other embodiments, the relative movement between the base 310, the Y-axis slide 330, and the X-axis slide 320 can also be guided by a precision slide groove structure or the like.

[0041] In some implementations, such as Figures 1 to 3As shown, the drive motor includes a first drive motor 211 and a second drive motor 212. The transmission shaft includes a first ball screw assembly 220, a steering shaft 231, and a second ball screw assembly 232. The screw of the first ball screw assembly 220 is connected to the first drive motor 211, and the nut of the first ball screw assembly 220 is connected to the Y-axis slide 330 to drive the Y-axis slide 330 to move in a first direction. One end of the steering shaft 231 is connected to the second drive motor 212, and the other end is connected to the screw of the second ball screw assembly 232 through a bevel gear transmission. The nut of the second ball screw assembly 232 is connected to the X-axis slide 320 to drive the X-axis slide 320 to move in a second direction.

[0042] In some embodiments, the nut of the second ball screw assembly 232 is connected to the side of the X-axis slide 320 used for setting the sample, that is, to the side of the X-axis slide 320 facing away from the second linear guide 420; the nut of the first ball screw assembly 220 is connected to the side of the Y-axis slide 330 facing the base 310, that is, to the side of the Y-axis slide 330 connected to the first linear guide 410. In other embodiments, the nut of the second ball screw assembly 232 may be connected to the side of the X-axis slide 320 facing the second linear guide 420; and the nut of the first ball screw assembly 220 may be connected to the side of the Y-axis slide 330 facing away from the first linear guide 410.

[0043] A ball screw assembly (such as the first ball screw assembly 220 and the second ball screw assembly 232) includes a screw and a nut mounted on the screw. When the screw rotates, the nut moves along the axial direction of the screw. The nut in the first ball screw assembly 220 is connected to the Y-axis slide 330, and the screw in the first ball screw assembly 220 is connected to the first drive motor 211. This allows the first drive motor 211 to drive the first ball screw assembly 220 to rotate, thereby causing the nut and the Y-axis slide 330 to move. Furthermore, the Y-axis slide 330 moves along a first direction under the action of the first linear guide 410. One end of the steering shaft 231 is connected to the second drive motor 212, and the other end is connected to the lead screw of the second ball screw assembly 232 through bevel gear transmission, so that the axial direction of the steering shaft 231 can be non-parallel to the axial direction of the lead screw of the second ball screw assembly 232, thereby changing the direction of motion transmission; when the second drive motor 212 is working, the steering shaft 231 and the lead screw of the second ball screw assembly 232 rotate synchronously, thereby causing the nut and the X-axis slide 320 to move. Furthermore, the X-axis slide 320 moves along the second direction under the action of the second linear guide 420.

[0044] In some embodiments, a spring sheet 500 is provided on the downward-facing side of the base 310, which abuts against the sample chamber. The spring sheet 500 is elastic, which helps reduce low-frequency vibrations, thereby reducing vibrations during the movement of the X-axis slide 320 and the Y-axis slide, and improving the image viewing and photography results. Furthermore, after the chamber door 100 closes the opening, the downward-facing side of the base 310 faces the bottom wall of the sample chamber, and the base 310 can be supported against the bottom wall of the sample chamber by the spring sheet 500, reducing deformation of the base 310. Further, the elasticity of the spring sheet 500 can originate from its material, i.e., the spring sheet 500 is made of an elastic material; or the elasticity can originate from its structure, i.e., the structure of the spring sheet 500 is elastic.

[0045] Furthermore, such as Figure 1 and Figure 2 As shown, in some embodiments, the spring piece 500 is located on the side of the base 310 away from the door 100. The base 310 and the door 100 form a cantilever beam structure. By providing support with the spring piece 500 at the end of the base 310 away from the door 100, the deformation of the base 310 can be better reduced.

[0046] Furthermore, the spring 500 is a metal structural component, such as copper or iron, to increase conductivity. After the electron beam emitted by the electron gun irradiates the sample stage assembly 300, the spring 500 can act as a ground wire to conduct the electrons away.

[0047] In some embodiments, the chamber door 100 is further provided with a second sealing ring 600 on one side of the sample stage assembly 300, with the sample stage assembly 300 located inside the second sealing ring 600. When the chamber door 100 closes, the second sealing ring 600 contacts the body of the scanning electron microscope, achieving a sealing effect on the sample chamber, that is, annularly separating the sample chamber from the outside to maintain a vacuum environment inside the sample chamber. In some embodiments, the second sealing ring 600 may not be provided on the chamber door 100, but may be provided on the body of the scanning electron microscope.

[0048] In some embodiments, a guide rod 700 is also provided on the side of the compartment door 100 where the sample stage assembly 300 is located. The guide rod 700 guides the movement of the compartment door 100 during the closing process, ensuring accurate closing of the compartment door 100. Further, as... Figure 2 and Figure 3 As shown, there are two guide rods 700 to achieve a better guiding effect.

[0049] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A biaxial sample stage for a scanning electron microscope, characterized in that, The device includes a door for covering the opening of a sample compartment; an electric drive assembly disposed on one side of the door; and a sample stage assembly disposed on the other side of the door, the sample stage assembly for placing a sample, the electric drive assembly being drively connected to the sample stage assembly. The biaxial sample stage is configured such that the electric drive assembly can drive the sample stage assembly to move, so as to deliver samples at different positions on the sample stage assembly to the observation position.

2. The biaxial sample stage according to claim 1, characterized in that, The electric drive assembly includes a drive motor, and a drive shaft is connected between the drive motor and the sample stage assembly. The drive motor is connected to the chamber door. The chamber door is provided with a through hole for the drive shaft to pass through, and a first sealing ring is provided in the through hole. One end of the drive shaft is connected to the drive motor, and the other end passes through the first sealing ring and is connected to the sample stage assembly to drive the sample stage assembly to move.

3. The biaxial sample stage according to claim 2, characterized in that, The sample stage assembly includes a base, an X-axis slide, and a Y-axis slide; the base is connected to the compartment door. The base is provided with a first linear guide rail extending in a first direction, and one side of the Y-axis slide is slidably connected to the base via the first linear guide rail; the other side of the Y-axis slide is provided with a second linear guide rail extending in a second direction, and the X-axis slide is slidably connected to the Y-axis slide via the second linear guide rail; the side of the X-axis slide facing away from the Y-axis slide is used to place a sample.

4. The biaxial sample stage according to claim 3, characterized in that, The drive motor includes a first drive motor and a second drive motor; the transmission shaft includes a first ball screw assembly, a steering shaft, and a second ball screw assembly; the screw of the first ball screw assembly is connected to the first drive motor, and the nut of the first ball screw assembly is connected to the Y-axis slide to drive the Y-axis slide to move along the first direction; one end of the steering shaft is connected to the second drive motor, and the other end is connected to the screw of the second ball screw assembly through a bevel gear transmission; the nut of the second ball screw assembly is connected to the X-axis slide to drive the X-axis slide to move along the second direction.

5. The biaxial sample stage according to any one of claims 1-4, characterized in that, The sample stage assembly includes a base, and a spring is provided on the downward-facing side of the base, the spring being used to abut against the sample chamber.

6. The biaxial sample stage according to claim 5, characterized in that, The spring is located on the side of the base away from the compartment door.

7. The biaxial sample stage according to claim 5, characterized in that, The spring is a metal structural component.

8. The biaxial sample stage according to claim 1, characterized in that, A second sealing ring is provided on one side of the compartment door where the sample stage assembly is located, and the sample stage assembly is located inside the second sealing ring.

9. The biaxial sample stage according to claim 1, characterized in that, A guide rod is also provided on one side of the sample stage assembly where the chamber door is located.

10. A scanning electron microscope, characterized in that, The sample chamber includes a sample compartment and a biaxial sample stage as described in any one of claims 1-9, the sample compartment having a compartment opening for picking up and placing samples, the compartment door for closing the compartment opening, and the sample stage assembly located inside the sample compartment.

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