Temporary storage mechanism and processing device

Abstract

The utility model discloses a temporary storage mechanism and processing equipment, temporary storage mechanism includes: for placing the boat tray of the slide boat and for detecting whether the slide boat of boat tray has the jacking sensing component, and jacking sensing component installs at one side of boat tray, and jacking sensing component has the microdrive shaft of activity lift and the elastic member of microdrive shaft connection, and the top of microdrive shaft stretches out boat tray to contact slide boat upward, and elastic member provides the recovery force upward after being pressed microdrive shaft. The utility model can accurately detect whether the slide boat is deposited on the boat tray, avoid the problem that the movement of boat tray produces the error of misjudging, reduce the probability of error of temporary storage mechanism in the process of conveying slide boat.

Description

Technical Field

[0001] This utility model relates to the field of solar cell technology, and in particular to a temporary storage mechanism and processing equipment. Background Technology

[0002] With the continuous development of the photovoltaic industry, current photovoltaic processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD are produced using two types of furnaces: vertical furnaces and horizontal furnaces. Both types of furnaces require the cells (silicon wafers or wafers) to be loaded into a specific carrier (wafer carrier boat) and fed into the furnace's reaction chamber for processing. By heating the reaction chamber and introducing specific reaction gases, specific processes such as coating, diffusion, oxidation, and thin film deposition are achieved on the silicon wafers or wafers. The temporary storage and transport of the wafer carrier boat is a crucial step connecting various process stages, and its accuracy directly affects the yield and production efficiency of the cells.

[0003] In existing technologies, wafer carrier boats are transported via temporary storage mechanisms, but this suffers from insufficient accuracy: traditional mechanical limiters or photoelectric sensors are susceptible to interference from high temperatures and dust, resulting in significant positioning errors and a high rate of malfunctions during unloaded transport, leading to efficiency losses, increased fragmentation rates, and frequent equipment downtime for maintenance. Furthermore, the temporary storage mechanisms have poor spatial adaptability, allowing for very limited transport space, which reduces product yield and limits production capacity.

[0004] Therefore, how to design a temporary storage mechanism that can improve the accuracy of boat transportation is a technical problem that the industry urgently needs to solve. Utility Model Content

[0005] To address the aforementioned deficiencies in the existing technology, this utility model proposes a temporary storage mechanism and processing equipment that can accurately detect whether a tray holds a film carrier, avoiding errors caused by misdetection during tray movement and reducing the probability of errors in the temporary storage mechanism during the transport of the film carrier.

[0006] The technical solution adopted by this utility model is to design a temporary storage mechanism, including: a boat tray for placing a slide boat and a lifting sensing component for detecting whether there is a slide boat on the boat tray. The lifting sensing component is installed on one side of the boat tray. The lifting sensing component has a micro-moving shaft that can be moved up and down and an elastic element connected to the micro-moving shaft. The top end of the micro-moving shaft extends upward out of the boat tray to contact the slide boat. The elastic element provides an upward restoring force after the micro-moving shaft is pressed.

[0007] Furthermore, the temporary storage mechanism also includes: a first drive component for driving the vertical movement of the boat tray and / or a second drive component for driving the horizontal movement of the boat tray.

[0008] Furthermore, the temporary storage mechanism also includes: a first switch assembly that controls the start and stop of the first drive assembly. The first switch assembly is installed on the same side as the lifting sensing assembly. The bottom end of the micro-shaft is located above the contact of the first switch assembly. The first switch assembly is triggered when the micro-shaft is pressed.

[0009] Furthermore, the temporary storage mechanism also includes: a fixing component installed between the first drive assembly and the boat tray, the bottom of the boat tray having a drive shaft and at least one guide shaft parallel to the drive shaft, both the drive shaft and the guide shaft moving through the fixing component, and the drive shaft connecting the boat tray and the first drive assembly.

[0010] Furthermore, the top surface of the fixing component is provided with an upper protrusion, and the bottom surface of the fixing component is provided with a lower protrusion. The upper protrusion and the lower protrusion are provided with guide holes for the guide shaft to pass through.

[0011] Furthermore, the temporary storage mechanism also includes a second switch assembly that controls the start and stop of the second drive assembly. The second switch assembly is used to detect whether the boat tray has moved horizontally to a preset position. The second switch assembly is a micro switch or a photoelectric switch.

[0012] Furthermore, the temporary storage mechanism includes a first drive component and a second drive component. The second drive component drives the first drive component to move horizontally, and the boat tray moves horizontally synchronously with the first drive component.

[0013] Furthermore, the first drive assembly is mounted on the base, and a heat insulation cover is provided around the first drive assembly. A support assembly is provided inside the heat insulation cover. The support assembly includes at least one triangular support frame, with one straight edge of the triangular support frame attached to and fixed to the heat insulation cover and the other straight edge attached to and fixed to the base.

[0014] Furthermore, the top surface of the boat tray is provided with insulating supports for supporting the boat carrier.

[0015] This utility model also proposes a processing device, including: a film carrier boat and the aforementioned temporary storage mechanism.

[0016] Compared with the prior art, this utility model designs a lifting sensing component on one side of the boat tray. The lifting sensing component has a micro-moving shaft and an elastic element. When the lifting sensing component detects the boat, the boat on the boat tray compresses the micro-moving shaft downward, causing the micro-moving shaft to move downward. The elastic element deforms when the micro-moving shaft moves downward. When the lifting sensing component does not detect the boat, the micro-moving shaft is stretched upward to its original position by the elastic force of the elastic element. This makes the detection of the boat on the boat tray 1 more accurate, avoids the problem of misdetection causing errors in the movement of the boat tray, and reduces the probability of errors in the temporary storage mechanism during the transport of the boat. Attached Figure Description

[0017] The present invention will now be described in detail with reference to the embodiments and accompanying drawings, wherein:

[0018] Figure 1 This is a three-dimensional schematic diagram of the temporary storage mechanism of this utility model;

[0019] Figure 2 This is a three-dimensional schematic diagram of the boat tray and the first drive assembly of this utility model;

[0020] Figure 3 This is a side view of the lifting sensing component of this utility model;

[0021] Figure 4 This is a side view of the boat tray and the first drive assembly of this utility model;

[0022] Figure 5 This is a side view of the temporary storage mechanism of this utility model;

[0023] Figure 6 yes Figure 5 A magnified view of a portion of point A in the middle;

[0024] Figure 7 This is a 3D schematic diagram of a micro switch;

[0025] Figure 8 This is a side view of a micro switch;

[0026] Figure 9 This is a 3D schematic diagram of a photoelectric switch;

[0027] Figure 10 This is a side view of a photoelectric switch;

[0028] Figure Descriptions: 1. Boat tray; 2. Lifting sensing assembly; 21. Micro-motion shaft; 22. Elastic element; 3. First switch assembly; 4. First drive assembly; 5. Drive shaft; 6. Guide shaft; 7. Fixing assembly; 71. Upper protrusion; 72. Lower protrusion; 8. Second drive assembly; 9. Second switch assembly; 91. Micro-motion structure; 92. Switch stop block; 93. Switch stop plate; 10. Guide rail; 11. Sliding assembly; 12. Heat insulation cover; 13. Support assembly; 14. Insulating support element; 15. Mounting plate; 16. Base. Detailed Implementation

[0029] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0030] like Figures 1 to 3As shown, the temporary storage mechanism proposed in this utility model includes: a boat tray 1 and a lifting sensing component 2. The boat tray 1 is used to place a slide boat, and the lifting sensing component 2 is used to detect whether there is a slide boat on the boat tray 1. The lifting sensing component 2 is installed on one side of the boat tray 1. The lifting sensing component 2 has a micro-movement shaft 21 and an elastic element 22. The micro-movement shaft 21 can move up and down, and the elastic element 22 is connected to the micro-movement shaft 21 and deforms when the micro-movement shaft 21 moves downward. The type and installation method of the elastic element 22 can be selected according to actual needs. For example, the elastic element 22 is a spring, which is wound around the micro-movement shaft 21.

[0031] like Figures 1 to 3 As shown, the top of the micro-shaft 21 extends upwards from the boat tray 1 to contact the tablet carrier boat. The elastic element 22 provides an upward restoring force after the micro-shaft 21 is pressed. When the tablet carrier boat is placed on the boat tray 1, the micro-shaft 21 is compressed downwards, causing it to move downwards. When the tablet carrier boat is removed from the boat tray 1, the micro-shaft 21 extends and retracts upwards to its original position under the elastic force of the elastic element 22. This allows for the detection of whether a tablet carrier boat is stored in the boat tray 1, making the detection of the tablet carrier boat on the boat tray 1 more accurate, avoiding errors caused by misdetection that could lead to errors in the movement of the boat tray 1, and reducing the probability of errors in the temporary storage mechanism during the transport of the tablet carrier boat.

[0032] like Figure 1 , 5 As shown, in some feasible embodiments of this utility model, the temporary storage mechanism further includes: a first driving component 4 and / or a second driving component 8. The first driving component 4 is used to drive the boat tray 1 to move linearly in the vertical direction, and the second driving component 8 is used to drive the boat tray 1 to move linearly in the horizontal direction, which facilitates the automatic transport of the tray to a greater distance, improves the convenience of equipment operation, and reduces the tediousness of manual operation. The first driving component 4 and the second driving component 8 can be electric cylinders, pneumatic cylinders, etc., as long as they can drive the movement of the boat tray 1.

[0033] like Figures 1 to 3 As shown, to more accurately control the vertical movement of the boat tray, the first drive assembly 4 is connected to the first switch assembly 3. The first switch assembly 3 controls the start or stop of the first drive assembly 4. The first switch assembly 3 is installed on the side of the boat tray 1, and is located on the same side as the lifting sensing assembly. The bottom end of the micro-shaft 21 is located above the contact point of the first switch assembly 3. When the boat tray 1 contains a wafer carrier, the boat tray 1 compresses the micro-shaft 21 of the lifting sensing assembly 2 downwards. The bottom end of the micro-shaft 21 contacts the contact point of the first switch assembly 3 and activates the first switch assembly 3. Thus, when a wafer carrier is detected in the boat tray 1, the first switch assembly 3 controls the first drive assembly 4 to drive the boat tray 1 to move the wafer carrier vertically, avoiding the problem of incorrect delivery when there is no wafer carrier in the boat tray 1, and ensuring the accuracy of the temporary storage mechanism in delivering the wafer carrier.

[0034] Based on this, as a preferred embodiment, the temporary storage mechanism further includes: a fixing component 7, which is installed between the first drive component 4 and the boat tray 1. The bottom of the boat tray 1 is provided with a drive shaft 5 and at least one guide shaft 6 parallel to the drive shaft 5. Both the drive shaft 5 and the guide shaft 6 movably pass through the fixing component 7. The drive shaft 5 connects the boat tray 1 and the first drive component 4. Specifically, the top end of the drive shaft 5 is connected to the boat tray 1, and the bottom end is connected to the first drive component 4. The first drive component 4 drives the boat tray 1 to move vertically through the drive shaft 5. The top end of the guide shaft 6 is connected to the boat tray 1, and the bottom end movably passes downward through the fixing component 7. The guide shaft 6 guides the vertical movement of the boat tray 1.

[0035] like Figure 4 As shown, to improve the accuracy of the boat tray's vertical movement, the top surface of the fixing component 7 has an upper protrusion 71, and the bottom surface of the fixing component 7 has a lower protrusion 72. The upper protrusion 71 and the lower protrusion 72 are provided with guide holes for the guide shaft 6 to pass through. The upper protrusion 71 and the lower protrusion 72 extend the limiting path of the guide shaft 6, allowing the guide shaft 6 to move linearly along the guide holes.

[0036] like Figure 1 , 5 As shown, to more accurately control the horizontal movement of the boat tray, the second drive assembly 8 is connected to the second switch assembly 9. The second drive assembly 8 is located on one side of the guide rail 10 and is used to drive the sliding assembly 11 on the guide rail 10 to move the boat tray 1 along the guide rail 10. The second switch assembly 9 controls the start or stop of the second drive assembly 8 and is used to detect whether the boat tray 1 has moved horizontally to a preset position. The second switch assembly 9 is a micro switch or a photoelectric switch. In practical applications, a mounting plate 15 is provided at the bottom of the guide rail 10 for connection to enhance the stability of the guide rail 10. In addition, a protective cover can be designed around the second switch assembly 9 to protect it.

[0037] For ease of understanding, such as Figures 6 to 8 Taking a micro switch as an example, a switch stop 92 is provided between the micro-motion structure 91 of the second switch assembly 9 and the sliding assembly 11. The switch stop 92 compresses the micro-motion structure 91 to make up-down micro-movements. When the boat tray 1 moves to the preset position, the switch stop 92 presses the micro-motion structure 91 downwards, thereby the second switch assembly 9 controls the second drive assembly 8 to stop the movement of the boat tray 1. Therefore, the second switch assembly 9 can realize the position detection of the boat tray 1 and determine whether the boat tray 1 has been transported to the preset position on the guide rail 10, thereby improving the accuracy of boat transportation. Figure 6 , 9As shown in Figure 10, the working process of the photoelectric switch is similar to that of the micro switch, but the triggering method is different. When the boat tray 1 moves to the preset position, the switch baffle 93 will block the light path of the second switch component 9, triggering a change in its output signal, thereby causing the second drive component 8 to pause the movement of the boat tray 1.

[0038] like Figure 1 , 5 As shown, in a preferred embodiment of this utility model, the temporary storage mechanism includes a first driving component 4 and a second driving component 8. The second driving component 8 drives the first driving component 4 to move horizontally, and the boat tray 1 moves horizontally synchronously with the first driving component 4. That is, the bottom of the first driving component 4 is mounted on the sliding component 11 via a base 16, and the first driving component 4 and the boat tray 1 on its top move horizontally along the guide rail 10 as a whole.

[0039] like Figure 1 , 4 As shown, to prevent the heat dissipated by the first drive component during operation from affecting the processing quality of the solar cells in the carrier boat, a heat shield 12 is provided around the first drive component 4 to insulate the first drive component 4 from the carrier boat tray 1. Furthermore, as a preferred embodiment, a support component 13 is provided inside the heat shield 12. The support component 13 includes at least one triangular support frame, with one straight edge of the triangular support frame fixed to the heat shield 12 and the other straight edge fixed to the base 16 where the first drive component 4 is located. The support component 13 stably and reliably fixes the heat shield 12, preventing the heat shield 12 from shaking and affecting the movement of the carrier boat tray 1.

[0040] like Figure 1 As shown, in some embodiments of this utility model, an insulating support 14 is further provided on the top surface of the boat tray 1 for supporting the wafer carrier boat. The insulating support 14 is higher than the top surface of the boat tray 1. When the wafer carrier boat is stored in the boat tray 1, the wafer carrier boat abuts against the insulating support 14 to avoid metal contamination of the processing quality of the battery cells in the wafer carrier boat. The insulating support 14 can be made of ceramic, tile, etc.

[0041] It should be understood that the number of slide boats that can be placed on the slide tray 1 and the number of slide trays that can move on the guide rail 10 can be designed according to actual needs. This utility model does not limit this. The key point of the technical solution is to improve the accuracy of slide boat transportation by using the lifting induction component 2, etc.

[0042] This utility model also proposes a processing device having a substrate carrier boat and the aforementioned temporary storage mechanism, which includes, but is not limited to, vertical furnaces and horizontal furnaces.

[0043] It should be noted that the terminology used above is for describing specific embodiments only and is not intended to limit the exemplary embodiments according to this utility model. When the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof. The order of execution of actions, steps, etc., in the apparatus and methods shown in the specification and drawings can be implemented in any order unless a specific express order is specified, and as long as the output of the preceding process is not used in the subsequent process. Similar sequential terms used for ease of description do not imply that such an order must be followed.

[0044] Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0045] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A temporary storage mechanism, characterized in that, include: A boat tray (1) for placing a slide boat and a lifting sensing component (2) for detecting whether the slide boat is on the boat tray (1). The lifting sensing component (2) is installed on one side of the boat tray (1). The lifting sensing component (2) has a movable micro-shaft (21) and an elastic element (22) connected to the micro-shaft (21). The top end of the micro-shaft (21) extends upward from the boat tray (1) to contact the slide boat. The elastic element (22) provides an upward restoring force after the micro-shaft (21) is pressed.

2. The temporary storage mechanism according to claim 1, characterized in that, Also includes: A first drive assembly (4) for driving the vertical movement of the boat tray (1) and / or a second drive assembly (8) for driving the horizontal movement of the boat tray (1).

3. The temporary storage mechanism according to claim 2, characterized in that, Also includes: The first switch assembly (3) controls the start and stop of the first drive assembly (4). The first switch assembly (3) is installed on the same side of the lifting sensing assembly (2). The bottom end of the micro-shaft (21) is located above the contact of the first switch assembly (3). The first switch assembly (3) is triggered when the micro-shaft (21) is pressed.

4. The temporary storage mechanism according to claim 2, characterized in that, Also includes: A fixing component (7) is installed between the first drive assembly (4) and the boat tray (1). The bottom of the boat tray (1) is provided with a drive shaft (5) and at least one guide shaft (6) parallel to the drive shaft (5). Both the drive shaft (5) and the guide shaft (6) move through the fixing component (7). The drive shaft (5) connects the boat tray (1) and the first drive assembly (4).

5. The temporary storage mechanism according to claim 4, characterized in that, The top surface of the fixing component (7) is provided with an upper protrusion (71), and the bottom surface of the fixing component (7) is provided with a lower protrusion (72). The upper protrusion (71) and the lower protrusion (72) are provided with guide holes for the guide shaft (6) to pass through.

6. The temporary storage mechanism according to claim 2, characterized in that, Also includes: The second switch assembly (9) controls the start and stop of the second drive assembly (8). The second switch assembly (9) is used to detect whether the boat tray (1) has moved horizontally to a preset position. The second switch assembly (9) is a micro switch or a photoelectric switch.

7. The temporary storage mechanism according to claim 2, characterized in that, The temporary storage mechanism includes a first drive component (4) and a second drive component (8). The second drive component (8) drives the first drive component (4) to move horizontally, and the boat tray (1) moves horizontally synchronously with the first drive component (4).

8. The temporary storage mechanism according to claim 2, characterized in that, The first drive assembly (4) is mounted on the base (16). The periphery of the first drive assembly (4) is provided with a heat insulation cover (12). The inner side of the heat insulation cover (12) is provided with a support assembly (13). The support assembly (13) includes at least one triangular support frame. One straight edge of the triangular support frame is attached to and fixed on the heat insulation cover (12), and the other straight edge is attached to and fixed on the base (16).

9. The temporary storage mechanism according to any one of claims 1 to 8, characterized in that, The top surface of the boat tray (1) is provided with an insulating support (14) for supporting the sheet boat.

10. Processing equipment, characterized in that, include: The film carrier boat and the temporary storage mechanism as described in any one of claims 1 to 9.

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