An aerial, straddle carrier for an automated material handling system
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
- Filing Date
- 2025-05-07
- Publication Date
- 2026-06-23
Smart Images
Figure CN224402063U_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to an aerial mobile transport vehicle for an automated material handling system. Background Technology
[0002] The following content relates to semiconductor manufacturing facilities, automated material handling systems (AMHS) for semiconductor manufacturing facilities, and the like. Utility Model Content
[0003] According to some embodiments of this disclosure, an overhead hoist transport (OHT) vehicle for an automated material handling system in a semiconductor manufacturing facility includes: a traveling motor; a lift for picking up containers of semiconductor wafers onto the OHT vehicle and placing the containers of semiconductor wafers from the OHT vehicle onto or within an associated loading port of a semiconductor processing or characterization tool; a lift motor connected to drive the lift; an onboard energy storage device; a motor driver operable to perform transfer operations, each transfer operation including one of: (i) transferring energy from the onboard energy storage device to the traveling motor, or (ii) transferring energy from the onboard energy storage device to the lift motor; and a relay operable to disconnect the onboard energy storage device of the OHT vehicle.
[0004] To make the above-described features and advantages of this disclosure more apparent and understandable, specific embodiments are described below in conjunction with the accompanying drawings. Attached Figure Description
[0005] The various aspects of this disclosure are best understood from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that, in accordance with industry standard practice, the various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or decreased for clarity of explanation.
[0006] Figure 1 A side sectional view of a portion of an automated material handling system (AMHS) is shown in schematic form, including overhead rails and a representative overhead hoist transport (OHT) vehicle shown in schematic form.
[0007] Figure 2 Illustrated in the form of diagrams Figure 1A side cross-sectional view of the AMHS section, showing the system in operation to transmit electricity to accelerate or drive the OHT vehicle or its lift.
[0008] Figure 3 Illustrated in the form of diagrams Figure 1 The side cross-sectional view of the AMHS section shows the system recovering kinetic energy during the deceleration of the OHT vehicle or its lift.
[0009] Figure 4 Illustrated in the form of diagrams Figure 1 A side profile of the AMHS section, in which the OHT vehicle is in an idle state.
[0010] Figure 5 The operation flowchart of OHT vehicle operation in AMHS is illustrated in the form of a diagram.
[0011] Figure 6 The flowchart illustrates the operation of OHT vehicles performing kinetic energy recovery transfer operations in AMHS.
[0012] Figure 7 The functional operations of material handling in a semiconductor manufacturing facility are illustrated using diagrams.
[0013] Explanation of reference numerals in the attached figures
[0014] 10: Aerial transport vehicles, OHT vehicles
[0015] 12: Aerial Orbit
[0016] 14: Walking motor, electric motor
[0017] 16: Wheels, rollers, casters, drums or similar objects
[0018] 17: First loading port, loading port
[0019] 18: Second loading port, loading port
[0020] 20: Lifting motor, electric motor
[0021] 22: Lifter
[0022] 24: Container
[0023] 26: Motor controller, motor driver
[0024] 28: Airborne energy storage devices
[0025] 30: Vehicle Controller
[0026] 32: AMHS Controller
[0027] 34: Wireless transceiver
[0028] 38: AMHS energy storage devices, off-board energy storage devices
[0029] 34, 36: Wireless connection
[0030] 40: Kinetic Energy Recovery Controller
[0031] 42: Relay
[0032] 44: Boost Converter
[0033] 50: Teleportation Operation
[0034] 52: OHT Controller
[0035] 54: Mode Change
[0036] 56: Discharge Mode
[0037] 58: Energy Saving Mode
[0038] 60: Completed
[0039] 72: Intelligent Control Methods Detailed Implementation
[0040] The following disclosure provides several different embodiments or instances for implementing various features of the provided subject matter. Specific examples of elements and arrangements are described below to simplify this disclosure. Of course, these elements and arrangements are merely examples and are not intended to be limiting. For example, in the following description, the formation of a first feature over or on a second feature may include embodiments where the first and second features are formed in direct contact, and may further include embodiments where additional features may be formed between the first and second features such that the first and second features are not in direct contact. Additionally, reference numerals and / or letters may be repeated in various instances of this disclosure. Such repetition is for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations discussed.
[0041] Furthermore, for ease of description, spatially related terms such as “below,” “under,” “lower,” “above,” “upper,” etc., may be used herein to describe the relationship between one element or feature and another element or feature as shown in the figures. In addition to the orientations depicted in the figures, spatially related terms are intended to cover different orientations of the device in use or operation. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptive terms used herein may be interpreted accordingly. The terms “first,” “second,” “third,” “fourth,” etc., are merely general designations and are therefore interchangeable in various embodiments. For example, while an element (e.g., an opening) may be referred to as a “first” element in some embodiments, it may be referred to as a “second” element in other embodiments.
[0042] Some semiconductor manufacturing facilities employ automated material handling systems (AMHS). These systems use overhead hoist transport vehicles (OHT vehicles) that travel along overhead tracks within the AMHS to transport containers of semiconductor wafers, such as front-opening unified pods (FOUPs), between semiconductor processing or characterization tools within the semiconductor manufacturing facility. This approach offers numerous advantages, such as placing wafer transport overhead to avoid interfering with personnel; facilitating automated workflows by transporting wafer-containing containers along pre-programmed routes within the semiconductor manufacturing facility; and providing automated wafer transport that minimizes the likelihood and extent of wafer contamination resulting from close interaction with facility personnel.
[0043] Since the Industrial Revolution, greenhouse gas emissions have been increasing. Today, more and more people are concerned about energy issues. Semiconductor manufacturing facilities consume a lot of electricity, and this article recognizes that AMHS is a major power-consuming system.
[0044] This paper discloses a method for reducing AMHS power consumption through energy recovery. This energy recovery can provide significant energy savings for semiconductor manufacturing facilities and contribute to environmental sustainability.
[0045] AMHS's OHT (Out-of-Track) vehicles are electrically powered and typically include a travel motor for operating wheels, rollers, casters, drums, or the like to move the OHT vehicle along AMHS's overhead tracks; and a lifter motor for operating the OHT vehicle's lifters to lift or attract containers carrying semiconductor wafers onto the OHT vehicle for aerial transport, and to lower or otherwise transport the containers to loading ports for semiconductor processing or characterization tools. To maximize transport speed, these motors typically operate at 100% power when in use and at 0% power when not in use. Therefore, the OHT vehicle travels along the overhead tracks at maximum speed (e.g., approximately 3 to 4 meters per second in some non-limiting illustrative examples). Similarly, the OHT vehicle's lifters raise and lower containers carrying semiconductor wafers at maximum speed (e.g., approximately 0.5 to 2 meters per second in some non-limiting illustrative examples).
[0046] This paper recognizes that the kinetic energy generated by the OHT vehicle during transport operations can be recovered and reused by the AMHS to improve AMHS energy efficiency. Transport operations may involve activating the OHT vehicle's travel motor to move the OHT vehicle along the AMHS's overhead track, or activating the OHT vehicle's lift motor to operate the OHT vehicle's lift. During the deceleration phase of the transport operation, the kinetic energy of the OHT vehicle moving along the AMHS's overhead track or the kinetic energy of the OHT vehicle's lift is converted into recovered electrical energy and stored in an energy storage device, which may be onboard or offboard on the OHT vehicle. Subsequently, the recovered electrical energy is used (at least partially) to power the AMHS's OHT vehicle for subsequent transport operations.
[0047] The deceleration phase of a transfer operation refers to a time interval at or near the end of the transfer operation during which the movement speed decreases. For OHT vehicle transfers, the deceleration phase refers to the time during which the OHT vehicle slows down as it approaches the tool loading port or other final target position of the transfer operation. For elevator operations, the deceleration phase refers to the time during which the elevator's lifting mechanism (e.g., the hoist's rotating drum or lifting wheel, or other rotating elements, or the moving shaft, robotic arm, or other lifting mechanism) slows down. The deceleration phase of a transfer operation typically occurs simultaneously with the cessation or rapid reduction of motor power supply. Kinetic energy can be translational kinetic energy, such as the translational kinetic energy of the OHT vehicle moving along the AMHS overhead track, or rotational kinetic energy, such as the rotational kinetic energy of the elevator's rotating drum or lifting wheel used in the transfer operation.
[0048] This paper further recognizes that idling OHT carriers are another source of wasted power in AMHS operations. OHT carriers can become idle for various reasons. For example, an OHT carrier may be preprogrammed to remain stationary above the loading port of a semiconductor processing or characterization tool while that tool is processing or characterizing semiconductor wafers from a wafer container transported by the OHT carrier. This type of idle time can be reduced in some cases through efficient path planning of the OHT carrier; for example, during semiconductor wafer processing or characterization, the OHT carrier may be used to transfer another wafer container. However, the complexity of planning the movement paths of multiple batches of semiconductor wafers in many containers throughout the semiconductor manufacturing facility, and practical constraints such as avoiding two OHT carriers simultaneously appearing in the same location on the overhead track (i.e., avoiding OHT carrier collisions), limit path planning efficiency. Another reason for OHT carrier idleness is unexpected problems in the semiconductor processing workflow. For example, if a semiconductor processing or characterization tool malfunctions, the OHT vehicle pre-positioned to transport semiconductor wafer containers to and from the tool may be idle until the semiconductor processing or characterization tool is repaired and brought back online.
[0049] One might expect that idle OHT vehicles consume little or no power. However, this document recognizes that idle OHT vehicles still consume power due to the electrical connection between their onboard battery and power-consuming components, particularly the drive motor and lift motor. In light of this recognition, some embodiments disclosed herein provide a relay for placing an idle OHT vehicle in an idle state, which includes opening the relay to electrically disconnect the onboard energy storage devices of the OHT vehicle. This minimizes the power consumption of energy storage devices (e.g., batteries or energy storage capacitors), thereby further improving the energy efficiency of AMHS (Air-to-Mount Safe Harness).
[0050] These energy-saving mechanisms can be controlled locally, with each OHT vehicle controlling its own kinetic energy recovery operation and controlling its relays to isolate its battery when the OHT vehicle is idle. The kinetic energy converted into recovered electrical energy can be stored in the OHT vehicle's onboard energy storage devices.
[0051] Alternatively, an AMHS controller can implement AMHS-wide control of these energy-saving mechanisms. In this case, the AMHS controller sends signals to the OHT vehicle based on sensor data from the OHT vehicle, for example, wirelessly via WiFi or other wireless transmit / receive communication protocols. Centralized energy recovery control by the AMHS controller can further improve the energy efficiency of AMHS. Centralized control can also selectively increase the storage capacity of recovered energy by coordinating the transfer of recovered energy from the OHT vehicle's onboard energy storage devices to AMHS-level energy storage devices, such as at the AMHS power panel. This can improve energy efficiency, especially when the OHT vehicle's onboard energy storage devices are nearing capacity, making it impossible for them to effectively store recovered energy on the OHT vehicle.
[0052] refer to Figure 1 The illustration shows a side sectional view of a portion of an automated material handling system (AMHS), including an exemplary OHT vehicle 10, which is shown fixed on an overhead track 12 of the AMHS. Figure 1 Only a portion of the aerial track 12, located above the current position of the OHT vehicle 10, is shown. Furthermore, Figure 1 The overhead track 12 is shown in a side view. In various embodiments, the overhead track 12 may consist of a single rail or a single track (e.g., a monorail), a pair of tracks or tracks, or other track configurations. Movement of the OHT vehicle 10 along the overhead track 12 is performed by drive wheels, rollers, casters, drums, or the like 16 driven by drive motors 14 (implemented in a non-limiting example as two drive motors), which engage with the overhead track 12 to move the OHT vehicle 10 along it. Through this movement along the overhead track 12, the OHT vehicle 10 moves from a position above a first semiconductor processing or characterization tool loading port 17 to a position above a second semiconductor processing or characterization tool loading port 18. Loading ports 17 and 18 are located at… Figure 1As illustrated in the diagram, loading ports 17 and 18 may typically be quite far apart, for example, several meters, tens of meters, or more. Furthermore, the path from loading port 17 to loading port 18 may be curved, angled, or otherwise non-linear, which can be adapted by appropriately curving, angling, or other non-linear paths in the portion of the overhead track 12 that runs between loading ports 17 and 18.
[0053] The OHT vehicle further includes a lifting motor 20 that operates a lifter 22 to raise or lower the container 24 containing semiconductor wafers. The lifter 22 is schematically shown as a cable, lifting shaft, or robotic arm. More generally, the lifter 22 can be a crane incorporating cables that are raised or lowered via rollers, lifting wheels, or other rotating elements driven by the lifting motor; or, the lifter may have other configurations, such as a telescopic shaft or robotic arm or the like, that extend or retract by operating the lifting motor 20. These are merely non-limiting examples. If the lifter 22 is a crane, then the OHT vehicle 10 may also be referred to as an Overhead Hoist Transport vehicle 10. In some embodiments, the lifter 22 may include the ability to move the container 24 laterally (e.g., via an articulated robotic arm) in addition to (or alternatively) vertically raising or lowering it. Furthermore, while container 24 is described herein as a container 24 for semiconductor wafers, which is the material typically transported by AMHS in semiconductor manufacturing facilities, it is also understood that container 24 may contain other materials used in semiconductor manufacturing facilities, such as (by further non-limiting examples) consumable chemicals used in semiconductor processing or characterization tools. It is also important to note that... Figure 1 This is illustrative; in actual applications, the lift 22 may be located in other locations within the OHT vehicle 10, rather than as shown. For example, in some OHT vehicle designs, the lift 22 is located at the center of the OHT vehicle 10 to provide better load balancing (e.g., the center of gravity is located near the geometric center of the OHT vehicle).
[0054] The travel motor 14 (two travel motors are shown schematically) drives the wheels, rollers, casters, drums, or similar objects 16 to move the OHT vehicle 10 along the overhead track 12, and the lifting motor 20 operates the lifting device 22. Figure 1The motor is depicted as an independent electric motor. However, another concept is that the travel motor and the lifting motor can be a single motor equipped with appropriate gears or the like for switching between two functions: (i) driving the wheels, rollers, casters, drums or the like 16 to move the OHT vehicle 10 along the overhead track 12, and (ii) driving the lift 22 to retrieve or place the container 24 from the first loading port 17 or the second loading port 18, respectively.
[0055] The OHT vehicle 10 further includes a motor controller 26 for controlling motors 14 and 20. More specifically, the motor controller 26 performs transport operations, including powering the travel motor 14 of the OHT vehicle 10 to move the OHT vehicle 10 along the AMHS overhead track 12, or powering the lifting motor 20 to operate the lifting mechanism 22 of the OHT vehicle 10. An onboard energy storage device 28 (e.g., an onboard battery, storage capacitor, electrostatic double-layer capacitor, or the like) stores electrical energy, which is transferred by the motor controller 26 to the appropriate motor 14 or 20 to operate the appropriate motor to perform the transport operations. The OHT vehicle 10 further includes a vehicle controller 30, such as a microprocessor or microcontroller with appropriate auxiliary electronics (e.g., solid-state memory storing program code), and controls the motor driver 26 and optionally other functions of the OHT vehicle 10. Although in Figure 1 The vehicle controller 30 is depicted as a separate component, but integration with the motor drive 26 is also considered.
[0056] As mentioned above, Figure 1 A sectional side view of a portion of an AMHS is illustrated, including a schematic sectional view of an OHT vehicle 10 and a portion of an aerial track 12. AMHS typically includes multiple such OHT vehicles 10; for example, in some complex AMHS systems, large semiconductor manufacturing facilities may have dozens or more OHT vehicles. Similarly, the portion of the aerial track 12 shown represents an extensive network of aerial tracks distributed across most or all of the ceiling or other elevated structure of the semiconductor manufacturing facility. The network of aerial tracks 12 typically includes intersecting tracks equipped with appropriate electromechanical track switches or the like (not shown) for guiding moving OHT vehicles along the correct pre-defined aerial paths through the semiconductor manufacturing facility.
[0057] The overall operation of AMHS is controlled by AMHS controller 32, which can wirelessly communicate with OHT vehicle 10 via wireless transceivers (Tx / Rx) 34 included in each OHT vehicle 10. These wireless transceivers communicate with one or more transceivers (Tx / Rx) 36 of AMHS controller 32. As a non-limiting illustrative example, the wireless transmission protocol might be a wireless local area network (WiFi), the wireless transceivers 34 of OHT vehicle 10 might be WiFi radios built into OHT vehicle 10, and the wireless transceivers 36 of AMHS controller 32 might be a set of WiFi access points (APs) distributed throughout the semiconductor manufacturing facility.
[0058] AMHS controller 32 controls the operation of the entire AMHS and may implement pre-set transport recipes or procedures performed by OHT vehicle 10. As a non-limiting illustrative example, AMHS controller 32 may control or operate track switches to guide the moving OHT vehicle along the correct route, send commands to OHT vehicle 10 to perform various transfer operations and / or similar operations. As a non-limiting specific example, AMHS controller 32 may send a series of commands to the illustrated OHT vehicle 10 to perform a series of transfer operations, including: (1) a first transfer operation in which lift 22, operated by lift motor 20, retrieves a container 24 containing semiconductor wafers from first loading port 17; (2) a second transfer operation in which OHT vehicle 10, driven by travel motor 14, moves along aerial track 12 from a position above first loading port 17 to a position above second loading port 18; and (3) a third transfer operation in which lift 22, operated by lift motor 20, places the container 24 containing semiconductor wafers onto second loading port 18. The combined transfer operations of these three operations thus enable the container 24 containing semiconductor wafers to be moved from the first loading port 17 to the second loading port 18. A longer sequence of similar transfer operations can transport the container 24 containing semiconductor wafers along a pre-defined workflow through the semiconductor processing facility, advantageously requiring little or no intervention from facility personnel.
[0059] While the AMHS controller 32 is described above as sending individual transfer operation commands, another concept is that the OHT carrier 10 locally incorporates and executes some programs to autonomously perform certain operations on the OHT carrier 10, for example, by executing appropriate code on the carrier controller 30. For instance, the AMHS controller 32 might send a command to move the container 24 containing the semiconductor wafer from the first loading port 17 to the second loading port 18, and the carrier controller 30 would then respond to and implement the command by autonomously executing the previously described first, second, and third transfer operation sequences. More generally, processing can be distributed in various ways between centralized processing by the AMHS controller 32 and local processing autonomously executed on the individual OHT carrier 10.
[0060] AMHS may optionally include an AMHS energy storage device 38 separate from the onboard energy storage device 28 of the OHT vehicle 10. Therefore, AMHS energy storage device 38 is also referred to herein as a non-onboard energy storage device because it is not located on the OHT vehicle 10. AMHS energy storage device 38 may be a battery, energy storage capacitor, electrostatic double-layer capacitor, a combination of these batteries or capacitors, various combinations, or the like. AMHS energy storage device 38 appropriately provides power for AMHS operation, such as orbit switching of the network operating the air track 12, powering the AMHS controller 32, and other AMHS-wide functions. Alternatively, AMHS energy storage device 38 may also deliver power via power conductors integrated into the air track 12 to charge the onboard energy storage device 28 of the OHT vehicle 10's fleet.
[0061] The illustrative AMHS integrates various energy-saving mechanisms to improve the energy efficiency of the AMHS and the individual OHT vehicle 10. In one illustrative aspect, these energy-saving mechanisms include a kinetic energy recovery system (KERS) controller 40 integrated with the electric motor drive 26. The function of the kinetic energy recovery controller 40 is to convert the kinetic energy generated during transport operations (e.g., the kinetic energy of the OHT vehicle 10 moving along the air track 12 or the kinetic energy of the elevator 22 used for transport operations) into recovered electrical energy and store the recovered electrical energy in the onboard energy storage device 28.
[0062] In another illustrative aspect, a relay 42 is provided for disconnecting the onboard energy storage device 28 of the OHT vehicle 10 during idle intervals when the OHT vehicle 10 is not performing transmission operations. The relay 42 can be an electromagnetically driven relay or a solid-state relay, such as a thyristor, transistor, silicon-controlled rectifier (SCR), triac, etc. Opening the relay 42 when the OHT vehicle is not used for transmission operations minimizes power loss from the energy storage device 28, thereby further improving the energy efficiency of the OHT vehicle 10 (and thus the AMHS).
[0063] refer to Figure 2 and Figure 3 This describes the operation of kinetic energy recovery. Figure 2 and Figure 3 In this configuration, relay 42 is closed to connect the onboard energy storage device 28 to the motor driver 26. For example... Figure 2 As shown, the AMHS controller 32 transmits command C to the OHT vehicle 10 via wireless connections 34 and 36. Trans To perform transport operations. In response, the motor drive 26 uses power from the onboard energy storage device 28 to power the walking motor 14 to provide power (P Del The OHT vehicle 10 is moved along the overhead track 12 by driving wheels, rollers, casters, drums, or similar objects 16. Alternatively, during transport operations, the speed of the OHT vehicle 10 is measured by sensors (e.g., indirectly measuring the voltage or current of the drive motor 14 or other operating parameters, or directly measuring the speed with an accelerometer, or a rotational speed sensor integrated into the wheels, rollers, casters, drums, or similar objects 16), and the OHT vehicle 10 may selectively transmit a signal S indicating the measured speed of the OHT vehicle 10 to the AMHS controller 32 via wireless connections 34, 36. OHT During this phase of the transport operation, the kinetic energy recovery system controller 40 of the motor drive 26 is inactive. As the OHT vehicle 10 approaches its final position (e.g., above the second or target loading port 18 in the illustrative embodiment), the transport operation enters a deceleration phase, where the OHT vehicle 10 decelerates to stop at its final position.
[0064] Figure 3 Illustrated in the form of diagrams Figure 1A side sectional view of the AMHS section, which performs kinetic energy recovery during deceleration of the OHT vehicle or its lift. A switching circuit of the kinetic energy recovery system controller 40 connects a boost converter 44 between the travel motor 14 and the onboard energy storage device 28 to perform energy recovery. During kinetic energy recovery, the travel motor 14 now operates as a power generator, converting the kinetic energy of the moving OHT vehicle 10 (via rotating wheels, rollers, casters, drums, or the like) into recovered electrical energy, which is stored in the onboard energy storage device 28. Subsequent transport operations performed by the OHT vehicle 10 can be powered at least partially using the recovered electrical energy retrieved from the energy storage device 28.
[0065] Figure 2 and Figure 3 The example describes kinetic energy recovery during a transfer operation, which includes energizing the travel motor 14 of the OHT vehicle 10 to move the OHT vehicle 10 along the AMHS air track 12 and converting the kinetic energy of the OHT vehicle 10 moving along the AMHS air track 12 into recovered electrical energy during deceleration. For example, the OHT vehicle 10 may be transporting a container 24 containing semiconductor wafers being processed in a semiconductor manufacturing facility, and the transfer operation includes moving the OHT vehicle 10 along the AMHS air track 12 from a position above a first semiconductor processing or characterization tool loading port 17 to a position above a second semiconductor processing or characterization tool loading port 18.
[0066] Although not shown in the diagram, Figure 2 and Figure 3 The same method used for recovering kinetic energy can also be applied to the operation of the elevator 22. Here, the transfer operation includes energizing the lifting motor 20 of the OHT carrier 10 to operate the elevator 22 of the OHT carrier, and converting the kinetic energy of the elevator 22 used in the transfer operation into recovered electrical energy during the deceleration of the elevator 22. In one example, the transfer operation involves lowering a container 24 containing a semiconductor wafer being processed in a semiconductor manufacturing facility from the OHT carrier 10 onto a semiconductor processing or characterization tool loading port 18. In another example, the transfer operation involves raising the container 24 containing a semiconductor wafer being processed in a semiconductor manufacturing facility from the semiconductor processing or characterization tool loading port 18 onto the OHT carrier 10.
[0067] In one implementation of kinetic energy recovery, a parameter is sensed to indicate whether the OHT vehicle 10 moves along the AMHS air track 12 or whether the elevator 22 of the OHT vehicle 10 moves, and based on this parameter (a parameter indicating the deceleration of the OHT vehicle 10 or the elevator 22 of the OHT vehicle 10), the transfer operation ( Figure 2 Switch to performing kinetic energy recovery. Figure 3 For transport operations involving the movement of the OHT vehicle 10, the sensed parameters may be, for example, a direct measurement of the current or voltage of the operating travel motor 14 or the speed of the OHT vehicle 10 or its alternatives, such as the rotational speed of the wheels, rollers, casters, drums or similar elements 16 of the OHT vehicle 10 engaged with the overhead track 12, or other similar parameters. For transport operations involving the operation of the lift 22, the sensed parameters may be, for example, the current or voltage of the operating lift motor 20, or a direct measurement of the movement of the lift 22 (such as the rotational speed of the rotating drums or lifting wheels or other rotating elements of the lift 22 (e.g., if the lift 22 includes a hoist), or sensors monitoring movement on the moving shaft or robotic arm or other lifting mechanism.
[0068] As previously described, the electrical energy recovered from the kinetic energy recovery system (KERS) is stored in the onboard energy storage device 28, and can then be retrieved and used (at least partially) to power subsequent transport operations performed by the OHT vehicle 10.
[0069] Furthermore, in some embodiments, some or all of the recovered electrical energy may be stored in off-board energy storage devices not mounted on the OHT vehicle, such as in the exemplary AMHS energy storage device 38, which is separate from the on-board energy storage device 28 of the OHT vehicle 10. In these embodiments, energy recovery may involve initially storing the recovered electrical energy in the on-board energy storage device 28 of the OHT vehicle, and then transferring at least a portion of the recovered electrical energy from the on-board energy storage device 28 to the off-board energy storage device 38 via the AMHS air track 12. For this purpose, the air track 12 may include electrical conductors (not shown) connected to transmit electrical energy to and from the AMHS energy storage device 38, while the OHT vehicle 10 may include electrodes in the form of conductive brushes or the like (not shown) that can be moved to engage or disengage from the track conductors. The AMHS controller 32 appropriately controls this energy transfer, for example by sending... Figure 2 The signal C shown Trans The AMHS controller 32 coordinates the transfer of electrical energy from AMHS energy storage device 38 to onboard energy storage device 28 via wireless connections 34 and 36. Similarly, AMHS controller 32 may send... Figure 3 The signal C shown RecThe system coordinates the transfer of electrical energy from the onboard energy storage device 28 to the AMHS energy storage device 38 via wireless connections 34 and 36, in order to transfer (at least a portion) of the recovered electrical energy to the offboard AMHS energy storage device 38. This coordination may further include transmitting sensor signals S from the OHT vehicle 10 via wireless connections 34 and 36. Dec The AMHS controller 32 is notified when the HHT vehicle 10 (or its elevator 22) enters the deceleration phase of the transport operation.
[0070] The optional capability of transferring recovered electrical energy to and from off-board energy storage device 38 has certain advantages. Further storage of recovered electrical energy provided by kinetic energy recovery in on-board energy storage device 28 is of little benefit when it has reached or is nearing its maximum charge storage limit. Such storage may be inefficient, and may be impossible if the on-board energy storage device is already at full capacity. Recovered electrical energy can be stored and reused more efficiently by transferring it between AMHS energy storage device 38 and the on-board energy storage device 28 of the AMHS's OHT vehicle 10. AMHS energy storage device 38 may be a large battery pack or the like with a much larger energy storage capacity than the individual on-board energy storage devices 28 of the OHT vehicle 10. In this way, for example, subsequent transfer operations performed by different OHT vehicles in the AMHS can be powered at least partially using the recovered electrical energy retrieved from off-board AMHS energy storage device 38.
[0071] In the embodiments shown in Figures 2 and 3, relay 42 is turned off to connect the onboard energy storage device 28 to the motor driver 26. This is the normal operating setting for relay 42.
[0072] Figure 4 Illustrated in diagram form Figure 1 A side cross-sectional view of the AMHS section, showing the OHT vehicle in an idle state. As previously mentioned, the function of relay 42 is to disconnect the onboard energy storage device 28 of the OHT vehicle 10 during idle intervals when the OHT vehicle is not performing transmission operations. This is in Figure 4 This is explained in the text. Relay 42 can be an electromagnetically driven relay or a solid-state relay, such as a thyristor, transistor, silicon-controlled rectifier (SCR), or triac. When the OHT carrier is not used to perform transmission operations, opening relay 42 can minimize the power consumption of energy storage device 28, thereby further improving the energy efficiency of OHT carrier 10 (and thus AMHS). Therefore, after the transmission operation is completed, OHT carrier 10 may be placed in an idle state, including as... Figure 4 The relay 42 is turned on to electrically disconnect the energy storage device 28 of the OHT carrier 10. This prevents the electronics of the motor driver 26 from consuming energy from the energy storage device 28, which would otherwise consume some power even when not used for transmission operations. As a non-limiting illustrative example, such power consumption may include the power consumed by the integrated circuitry and / or transistors of the boost converter 44 and / or other electronics of the motor driver 26, the power consumed by the windings of the non-operating motors 14 and 20, and so on.
[0073] The opening and closing of relay 42 can be locally controlled by the vehicle controller 30 of the OHT vehicle 10 and / or controlled by the AMHS controller 32. Figure 4 In the illustrative example, AMHS controller 32 sends an idle signal CIdle to OHT carrier 10 via wireless connections 34, 36 to command OHT carrier 10 to enter an idle mode, including turning on relay 42. The switching of relay 42 between on and off may itself generate transient power consumption (e.g., when powering motor driver 26 after turning off relay 42 to exit idle mode). Therefore, it may be advantageous for AMHS controller 32 to command OHT carrier 10 to enter an idle mode because AMHS controller 32 can access semiconductor manufacturing workflows and information about unplanned events. For example, in the event of an unplanned downtime in semiconductor manufacturing or characterization tooling, AMHS controller 32 can place the affected OHT carrier 10 in an idle state until the downtime problem is resolved, and the affected OHT carrier 10 can then be used again to transport materials in and out of the tooling.
[0074] Reference Figure 5 The operation of the kinetic energy recovery system and relay 42 to maximize the energy efficiency of AMHS is illustrated. The transfer operation (i.e., the "transfer request") 50 is controlled by the vehicle controller (i.e., the "OHT controller") 30 and / or the AMHS controller 32 (in... Figure 5 The OHT controller 52 (collectively referred to as OHT controller 52) initiates and / or receives power. During the transmission operation, the OHT controller 52 controls a mode change 54, switching the motor driver 26 to a discharge mode 56, in which power is drawn from the onboard energy storage device 28 to perform the transmission operation 50 (e.g., corresponding to...). Figure 2This may include drawing recovered electrical energy stored during a previous transfer operation from the onboard energy storage device 28 to perform the current transfer operation. During the deceleration phase of the transfer operation, the OHT controller 52 issues a mode change 54, switching the motor driver 26 to an energy recovery mode (i.e., an energy-saving mode or "ECO mode") 58, in which kinetic energy recovery is performed (e.g., corresponding to...). Figure 3 ECO mode 58 is more likely to include placing the OHT vehicle 10 into an idle state (if it is not used) by activating relay 42, for example, corresponding to Figure 4 .exist Figure 5 In the illustrative examples, the OHT controller performs intelligent control to maximize the energy efficiency of the OHT vehicle 10 (and, consequently, the overall energy efficiency of the AMHS is maximized due to the implementation of similar kinetic energy recovery systems (KERS) and idle relay activation on all AMHS OHT vehicles). As previously described, the functionality of the OHT controller 52 can be distributed between the AMHS controller 32 and the vehicle controller 30 in various ways. For example, the AMHS controller 32 may issue high-level commands, such as transfer request 50, while the vehicle controller 30 may issue lower-level commands, such as control mode change 54, to implement transfer with kinetic energy recovery. In another example, the AMHS controller 32 may provide lower-level control, such as directly controlling mode change 54. In some embodiments, the AMHS controller 32 may additionally or alternatively coordinate the transfer of (partially) recovered electrical energy from kinetic energy recovery between the onboard energy storage device 28 of the OHT vehicle 10 and the AMHS energy storage device 38. These are merely some non-limiting illustrative examples.
[0075] Reference Figure 6 This shows some examples of power flow during a transfer operation, including kinetic energy recovery. The transfer request or operation 50 is initiated by the OHT controller 52 and the OHT vehicle 10 (in...). Figure 6 This is referred to as OHT 10. During the discharge mode 56 of the transmission operation, the motor 14 or 20 consumes electrical energy from the onboard energy storage device 28 and / or the AMHS energy storage device 38, such as... Figure 6 As indicated by the arrow marked "Power Consumption". During the deceleration phase (i.e., ECO mode 58), motor 14 or 20 switches to an energy generation mode driven by the kinetic energy generated during the transmission operation. This recovered energy is stored in the onboard energy storage device 28, such as... Figure 6 The arrow marked "Storage Power" indicates this. Therefore, due to the (at least partially) recovery of kinetic energy, the transfer operation is completed with a 60% reduction in total energy consumption.
[0076] Reference Figure 7The material handling operations in a semiconductor manufacturing facility are illustrated. A manufacturing control system (MCS), manufacturing execution system (MES), manufacturing operations system (MOM), or similar system 70 controls the overall workflow in the semiconductor manufacturing facility, including sending commands to an automated material handling system (AMHS) to execute transfer operations performed by the AMHS's OHT carrier 10. Figure 7 As shown, this involves the control of the transfer operation by the OHT controller 52 (e.g., including the AMHS controller 32 and / or the vehicle controller 30 of the individual OHT vehicle 10), the electrical energy storage in the onboard energy storage device 28 of the individual OHT vehicle 10 and / or the AMHS energy storage device 38, which power the motors 14, 20 of the OHT vehicle 10 via a motor driver 26 with a boost converter 44 to perform transfer operations with kinetic energy recovery and idle state power-off (i.e., start / stop), using the relay 42 of the OHT vehicle 10. In this way, the AMHS implements the kinetic energy recovery system (KERS) 40 and the relay 42 of the OHT vehicle 10. The intelligent control method 72 implemented in the OHT controller 52 controls the kinetic energy recovery and idle speed shutdown system to maximize the energy efficiency of the AMHS. In some embodiments, the intelligent control method 72 employs pattern recognition 74 to optimize the implementation of the KERS and idle speed shutdown system. For example, patterns of how an OHT vehicle approaches and docks above a specific loading port 17 or 18, and how the lift motor 20 places and removes a front opening unified pod (FOUP) 24 from loading port 17 or 18, can be analyzed by inputting training data containing a large amount of historical execution data of such transfer operations to determine pattern changes 54 (see Figure 5 The optimal time to switch from discharge mode 56 to ECO mode 58 should be determined to ensure a smooth transfer operation and maximize kinetic energy recovery. In some embodiments, adaptive training of the intelligent control method 72 may be used. For example, if energy recovery begins too early in a travel operation instance of the OHT vehicle from loading port 17 to loading port 18, adaptive training may switch to ECO mode later in subsequent transfer operations of the OHT vehicle travel operation instances.
[0077] The illustrative embodiment includes a motor drive 26 with a kinetic energy recovery controller 40 for walking and lifting operations, and for idle mode energy saving via a relay 42. However, it is also possible to include only a subset of these energy-saving aspects.
[0078] Therefore, in some non-limiting illustrative embodiments, a particular Automated Material Handling System (AMHS) implementation provides kinetic energy recovery during a transfer operation in which the travel motor 14 is energized to move the OHT vehicle 10 along the AMHS overhead track 12, but does not provide kinetic energy recovery during a transfer operation in which the lifting motor is energized to operate the lifter.
[0079] In some non-limiting illustrative embodiments, specific AMHS implementations provide kinetic energy recovery during transport operations that energize the lifting motor 20 to operate the lift 22, but do not provide kinetic energy recovery during transport operations that energize the travel motor to move the OHT vehicle along the aerial track.
[0080] In some non-limiting illustrative embodiments, specific AMHS implementations provide kinetic energy recovery during transport operations, which involve energizing the travel motor 14 to move the OHT vehicle 10 along the AMHS overhead track 12, and also during transport operations that involve energizing the lift motor 20 to operate the lift 22.
[0081] In any of these examples of specific AMHS implementations, relay 42 may be further included or may be omitted. In some non-limiting illustrative embodiments, a particular AMHS implementation provides relay 42 but does not provide an energy recovery aspect.
[0082] Further embodiments are described below.
[0083] In a non-limiting illustrative embodiment, a method for operating an automated material handling system (AMHS) for a semiconductor manufacturing facility is disclosed. The method includes: performing a transfer operation, including energizing a motor of an overhead hoist transport vehicle (OHT) to move the OHT along an overhead track of the AMHS or operating an elevator of the OHT; and, during a deceleration phase of the transfer operation, converting the kinetic energy of the OHT moving along the overhead track of the AMHS or the elevator of the OHT into recovered electrical energy, and storing the recovered electrical energy in an energy storage device. In one embodiment, the transfer operation includes energizing the motor, which includes a travel motor of the overhead hoist transport vehicle, to move the overhead hoist transport vehicle along the overhead track of the automated material handling system; and the conversion includes converting the kinetic energy of the overhead hoist transport vehicle moving along the overhead track of the automated material handling system into recovered electrical energy. In one embodiment, the aerial transport vehicle transports a container housing semiconductor wafers being processed in the semiconductor manufacturing facility; and the transfer operation includes moving the aerial transport vehicle along the aerial track of the automated material handling system from a position above a first semiconductor processing or characterization tool loading port to a position above a second semiconductor processing or characterization tool loading port. In one embodiment, the transfer operation includes energizing the motor, including a lifting motor of the aerial transport vehicle, to operate the lifting mechanism of the aerial transport vehicle; and the conversion includes converting the kinetic energy of the lifting mechanism of the aerial transport vehicle into recovered electrical energy. In one embodiment, the transfer operation includes one of: lowering the container housing the semiconductor wafers being processed in the semiconductor manufacturing facility from the aerial transport vehicle to the semiconductor processing or characterization tool loading port; or raising the container housing the semiconductor wafers being processed in the semiconductor manufacturing facility from the semiconductor processing or characterization tool loading port to the aerial transport vehicle. In one embodiment, the method further includes: sensing parameters indicating movement of the aerial transport vehicle along the aerial track of the automated material handling system or movement of the lift of the aerial transport vehicle; and switching from the conveying operation to performing kinetic energy recovery based on the parameters indicating deceleration of the aerial transport vehicle or the lift of the aerial transport vehicle. In one embodiment, the sensed parameters include at least one of the voltage of the aerial transport vehicle and the current of the aerial transport vehicle.In one embodiment, the energy storage device includes: an onboard energy storage device disposed on the airborne transport vehicle; and a non-onboard energy storage device not disposed on the airborne transport vehicle; wherein storing the recovered electrical energy in the energy storage device includes first storing the recovered electrical energy in the onboard transport vehicle's energy storage device, and then transferring at least a portion of the recovered electrical energy from the onboard energy storage device to the non-onboard energy storage device via the airborne track of the automated material handling system. In one embodiment, the method further includes: placing the airborne transport vehicle in an idle state after the transfer operation is completed, which includes activating a relay to electrically disconnect the energy storage device of the airborne transport vehicle. In one embodiment, the method further includes: using at least a portion of the recovered electrical energy retrieved from the energy storage device to power subsequent transfer operations performed by the automated material handling system.
[0084] In a non-limiting illustrative embodiment, an OHT (Out-of-Track) carrier for an AMHS (Advanced Semiconductor Manufacturing System) of a semiconductor manufacturing facility is disclosed. The OHT carrier includes a travel motor, a lift, a lift motor, an onboard energy storage device, and a motor driver. The lift is configured to lift containers of semiconductor wafers onto the OHT carrier and place containers of semiconductor wafers from the OHT carrier onto or within a relevant loading port of a semiconductor processing or characterization tool. The lift motor is connected to drive the lift. The motor driver is operable to perform transfer operations. Each transfer operation includes one of: (i) supplying energy from the onboard energy storage device to the travel motor to move the OHT carrier along an air track of the AMHS, or (ii) supplying energy from the onboard energy storage device to the lift motor to operate the lift. The OHT carrier further includes a relay operable to disconnect the onboard energy storage device of the OHT carrier during idle intervals when the OHT carrier is not performing transfer operations. In one embodiment, the motor driver includes a kinetic energy recovery system controller operable to convert kinetic energy generated during the transfer operation into recovered electrical energy and store the recovered electrical energy in the onboard energy storage device. In one embodiment, the kinetic energy recovery system controller includes a switching circuit operable to switch between: (i) transferring energy from the onboard energy storage device to the travel motor or the lifting motor, and (ii) converting kinetic energy into recovered electrical energy. In one embodiment, the kinetic energy recovery system controller further includes a boost converter; and wherein the switching circuit operable to connect the boost converter to perform the energy recovery.
[0085] In one non-limiting illustrative embodiment, a method for operating an AMHS (Advanced Semiconductor Handling System) of a semiconductor manufacturing facility is disclosed. The method includes: performing a transfer operation to move containers of semiconductor wafers within the semiconductor manufacturing facility using multiple OHT (Out-of-Hand) carriers, the transfer operation including moving the OHT carriers along an overhead track of the AMHS and operating lifters of the OHT carriers to transfer, or remove from, semiconductor processing and / or characterization tools within the semiconductor manufacturing facility; and, during a deceleration phase of the transfer operation, converting the kinetic energy of the OHT carriers moving along the overhead track and the operating lifters into recovered electrical energy. The transfer operation is performed using at least a portion of the recovered electrical energy.
[0086] In a non-limiting illustrative embodiment of the AMHS (Advanced Mobility Handling System) of a semiconductor manufacturing facility, a transfer operation is performed. The transfer operation includes energizing the motors of an OHT (Overhead Telephone Transport) vehicle to move the OHT vehicle along an aerial track of the AMHS, or operating the elevator of the OHT vehicle. During a deceleration phase of the transfer operation, the kinetic energy of the OHT vehicle moving along the aerial track of the AMHS or the elevator of the OHT vehicle is converted into recovered electrical energy and stored in an energy storage device. Subsequent transfer operations performed by the AMHS are powered at least partially using the recovered electrical energy retrieved from the energy storage device. After the transfer operation is completed, the OHT vehicle may be placed in an idle state, including opening a relay to electrically disconnect the energy storage device of the OHT vehicle. In one embodiment, the method further includes: powering the transfer operation performed by the airborne transport vehicle via an onboard energy storage device of the airborne transport vehicle on each of the airborne transport vehicles; and storing the recovered electrical energy retrieved from the airborne transport vehicle or its elevator in the onboard energy storage device on each of the airborne transport vehicles. In one embodiment, the method further includes storing at least a portion of the recovered electrical energy in an automated material handling system energy storage device, the automated material handling system energy storage device being electrically connected to the airborne transport vehicle via the overhead rail. In one embodiment, the conversion of the kinetic energy into recovered electrical energy is performed using a boost converter of each of the airborne transport vehicles. In one embodiment, the method further includes: when each of the airborne transport vehicles is not participating in a transfer operation, opening a relay of each of the airborne transport vehicles to electrically disconnect the onboard energy storage device of each of the airborne transport vehicles; and when each of the airborne transport vehicles is participating in a transfer operation, closing the relay of each of the airborne transport vehicles to electrically connect the onboard energy storage device of each of the airborne transport vehicles. In one embodiment, the opening and closing of the relays of the airborne transport vehicles is controlled by an automated material handling system controller.
[0087] The foregoing has outlined features of several embodiments to enable those skilled in the art to better understand various aspects of this disclosure. Those skilled in the art should understand that they can readily use this disclosure as a basis for designing or modifying other processes and structures for performing the same purposes and / or achieving the same advantages of the embodiments described herein. Those skilled in the art should also recognize that such equivalent structures do not depart from the spirit and scope of this disclosure, and that various alterations, substitutions, and changes can be made to this document without departing from the spirit and scope of this disclosure.
Claims
1. An aerial transport vehicle for an automated material handling system in a semiconductor manufacturing facility, characterized in that, The aforementioned aerial mobile transport vehicle includes: Walking motor; A lifter for picking up containers of semiconductor wafers onto the airborne transport vehicle and placing the containers of semiconductor wafers from the airborne transport vehicle onto or within an associated loading port of a semiconductor processing or characterization tool. A lifting motor is connected to drive the lifting device; Airborne energy storage devices; An electric motor driver, operated to perform a transmission operation, each transmission operation comprising one of the following: (i) transferring energy from the onboard energy storage device to the travel motor, or (ii) transferring energy from the onboard energy storage device to the lifting motor; and A relay, which operates to disconnect the onboard energy storage device of the airborne transport vehicle.
2. The aerial mobile transport vehicle according to claim 1, characterized in that, in: The motor driver includes a kinetic energy recovery system controller that operates to convert the kinetic energy generated during the transmission operation into recovered electrical energy and store the recovered electrical energy in the onboard energy storage device.
3. The aerial mobile transport vehicle according to claim 2, characterized in that, The kinetic energy recovery system controller includes: The switching circuit operates to switch between: (i) transferring energy from the onboard energy storage device to the travel motor or the lifting motor, and (ii) converting kinetic energy into recovered electrical energy.
4. The aerial mobile transport vehicle according to claim 3, characterized in that, The kinetic energy recovery system controller further includes: Boost converter; and The switching circuit described therein operates to connect the boost converter to perform the energy recovery.
5. The aerial mobile transport vehicle according to claim 2, characterized in that, The recovered electrical energy stored in the onboard energy storage device is transferred, at least a portion of which is transferred from the onboard energy storage device to the offboard energy storage device of the automated material handling system via the overhead track of the automated material handling system.
6. The aerial mobile transport vehicle according to claim 2, characterized in that, At least a portion of the recovered electrical energy retrieved from the onboard energy storage device is used to power subsequent transfer operations performed by the automated material handling system.
7. The aerial mobile transport vehicle according to claim 1, characterized in that, It also includes sensors that sense parameters used to indicate the movement of the aerial transport vehicle along the aerial track of the automated material handling system or the movement of the lift of the aerial transport vehicle.
8. The aerial mobile transport vehicle according to claim 7, characterized in that, The electric motor driver switches from the transport operation to perform kinetic energy recovery based on the parameters indicating deceleration of the airborne transport vehicle or the lift of the airborne transport vehicle.
9. The aerial mobile transport vehicle according to claim 7, characterized in that, The sensed parameters include at least one of the voltage of the airborne transport vehicle and the current of the airborne transport vehicle.
10. The aerial mobile transport vehicle according to claim 1, characterized in that, The opening and closing of the relay is controlled by the controller of the automated material handling system.