A vacuum molecular pump rotor tooling

Abstract

The utility model relates to a vacuum molecular pump technical field especially relates to a kind of vacuum molecular pump rotor tool, including fixed plate and seal cover, the seal cover is fixedly connected on the side wall of the fixed plate, adjusting mechanism is equipped on the fixed plate, the adjusting mechanism includes hollow stem, limit ring, spray cavity, limit cavity, the side wall of the fixed plate is equipped with multiple chutes, the utility model is driven workpiece high-speed rotation to work when the cooperation of carousel, hollow stem, spray cavity and other structures, simultaneously drive carousel rotation, drive two extraction cylinder alternately and uninterruptedly draw into gas and spray from spray cavity, form a positive pressure gas curtain before chuck, avoid the contact point deviation caused by impurity when chuck jaw is fixed workpiece, ensure the precision of processing, after processing, no cleaning is needed, or only simple cleaning can be processed to next workpiece, greatly improve processing efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vacuum molecular pump technology, and in particular to a vacuum molecular pump rotor tooling. Background Technology

[0002] As a key piece of equipment in the high vacuum field, the core performance of vacuum molecular pumps depends on the precise design and stable operation of the rotor. Rotor tooling, as a key auxiliary system supporting rotor manufacturing, assembly and maintenance, directly affects the pumping speed, vacuum level, reliability and lifespan of molecular pumps. With the increasing demands for vacuum environment in high-end manufacturing fields such as semiconductors, photovoltaics, and aerospace, rotor tooling needs to meet technical requirements such as high-precision machining, low-vibration assembly and long-life maintenance.

[0003] Existing rotor fixing fixtures typically use a three-jaw chuck to fix the rotor during machining. During machining, flying iron filings and other impurities can easily splash onto the chuck or jaws. A small amount of iron filings acts like a shim when clamping the workpiece, which can easily cause the actual clamping position of the workpiece to deviate from the theoretical center, resulting in radial or axial runout, which greatly reduces the machining accuracy of the rotor. Utility Model Content

[0004] The purpose of this invention is to address the following shortcomings in the prior art: during processing, flying iron filings and other impurities easily splash onto the chuck or jaws. A small amount of iron filings acts like a shim when clamping the workpiece, which can easily cause the actual clamping position of the workpiece to deviate from the theoretical center, resulting in radial or axial runout, which greatly reduces the machining accuracy of the rotor and reduces efficiency. Therefore, this invention proposes a vacuum molecular pump rotor tooling.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A vacuum molecular pump rotor tooling includes a fixed plate and a sealing cover, wherein the sealing cover is fixedly connected to the side wall of the fixed plate;

[0007] The fixed plate is provided with an adjustment mechanism, which includes a hollow rod, a limiting ring, a spray cavity, and a limiting cavity. Multiple sliding grooves are formed on the side wall of the fixed plate, and multiple hollow rods are slidably connected in the sliding grooves. The limiting ring is slidably connected to the side wall of the fixed plate, and multiple arc-shaped grooves are formed on the side wall of the limiting ring. The hollow rod is slidably connected to the arc-shaped grooves. The spray cavity is fixedly connected to one end of the hollow rod, and the limiting cavity is fixedly connected to the end of the hollow rod away from the spray cavity.

[0008] Preferably, a toothed ring is fixedly connected to the outer surface of the limiting ring, a limiting groove is formed on the side wall of the fixing plate, a rack plate is slidably connected in the limiting groove, and the rack plate is engaged with the toothed ring.

[0009] Preferably, a rotating rod is fixedly connected to the inner side wall of the fixing plate, a motor is fixedly connected to the side wall of the fixing plate, a belt is sleeved between the output end of the motor and the rotating rod, and a turntable is fixedly connected to the side wall of the rotating rod.

[0010] Preferably, the two ends of the sealing cover are respectively fixedly connected to extraction cylinders, extraction plates are slidably connected to the inner sidewalls of the extraction cylinders, extraction rods are fixedly connected between the two extraction plates, sliders are fixedly connected to the outer surface of the extraction rods, and a connecting rod is hinged between the turntable and the sliders.

[0011] Preferably, a transfer chamber is fixedly connected to the inner wall of the sealing cover, an air outlet pipe is fixedly connected between the extraction cylinder and the transfer chamber, an air inlet pipe is fixedly connected between the extraction cylinder and the sealing cover, a one-way valve is provided in both the air outlet pipe and the air inlet pipe, a conduit is fixedly connected between the transfer chamber and the limiting chamber, and a chuck is provided at the end of the rotating rod away from the turntable.

[0012] Preferably, a screw is rotatably connected to the side wall of the rack plate, a connecting plate is provided on the side wall of the fixing plate, the screw is threadedly connected to the connecting plate, and the screw is rotatably connected to the sealing cover.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] Through the cooperation of structures such as the turntable, hollow rod, and spray chamber, the turntable rotates synchronously while the workpiece is being processed at high speed. This causes two extraction cylinders to alternately and continuously draw in gas, which is then ejected from the spray chamber, forming a positive pressure air curtain in front of the chuck. This prevents the contact point of the chuck from shifting due to impurities when fixing the workpiece, thus ensuring processing accuracy. After processing, no cleaning is required, or only simple cleaning is needed before processing the next workpiece, greatly improving processing efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the spray chamber structure of a vacuum molecular pump rotor tooling proposed in this utility model;

[0016] Figure 2 A schematic diagram of a limiting ring for a vacuum molecular pump rotor tooling proposed in this utility model;

[0017] Figure 3 This is a schematic diagram of the connecting rod of a vacuum molecular pump rotor tooling proposed in this utility model;

[0018] Figure 4 This is a schematic diagram of the limiting cavity of a vacuum molecular pump rotor tooling proposed in this utility model.

[0019] In the diagram: 1. Fixed plate, 2. Sealing cover, 3. Hollow rod, 4. Limiting ring, 5. Screw, 6. Spray chamber, 7. Limiting chamber, 8. Gear ring, 9. Gear plate, 10. Rotating rod, 11. Motor, 12. Belt, 13. Turntable, 14. Extraction cylinder, 15. Extraction plate, 16. Extraction rod, 17. Slider, 18. Connecting rod, 19. Transfer chamber, 20. Air outlet pipe, 21. Air inlet pipe, 22. Conduit. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0021] The terms used in this utility model, such as "upper", "lower", "left", "right", "middle" and "one", are only for clarity of description and are not intended to limit the scope of implementation of this utility model. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered as within the scope of implementation of this utility model.

[0022] Reference Figures 1-4 A vacuum molecular pump rotor fixture includes a fixed plate 1 and a sealing cover 2. The sealing cover 2 is fixedly connected to the side wall of the fixed plate 1 and protects internal components such as the rack plate 9 from dust and other impurities. The fixed plate 1 is provided with an adjustment mechanism, which includes a hollow rod 3, a limiting ring 4, a spray chamber 6, and a limiting cavity 7. Multiple sliding grooves are formed on the side wall of the fixed plate 1, and multiple hollow rods 3 are slidably connected in the sliding grooves. The hollow rods 3 are hollow inside, with one end connected to the spray chamber 6 and the other end connected to the extraction cylinder 14 through a conduit 22. The limiting ring 4 is slidably connected to the side wall of the fixed plate 1, and multiple arc-shaped grooves are formed on the side wall of the limiting ring 4. There are three arc-shaped grooves and three sliding grooves. The hollow rod 3 slides simultaneously in the arc-shaped grooves and the sliding grooves. The hollow rod 3 is slidably connected to the arc-shaped grooves. The limiting ring 4 rotates and drives the hollow rod 3 to slide through the arc-shaped grooves, so that the hollow rod 3 slides up and down in the sliding grooves. The spray cavity 6 is fixedly connected to one end of the hollow rod 3. The spray cavities 6 are arc-shaped and staggered, not on the same plane, so there will be some overlap. Even if it moves up and down a certain distance, it can still fully cover the chuck and ensure the isolation effect. The limiting cavity 7 is fixedly connected to the end of the hollow rod 3 away from the spray cavity 6. The limiting cavity 7 is slidably connected to the limiting ring 4. The limiting cavity 7 is hollow inside and also has a limiting effect on the limiting ring 4, preventing the limiting ring 4 from moving back and forth.

[0023] Reference Figure 4A gear ring 8 is fixedly connected to the outer surface of the limiting ring 4. The gear ring 8 is similar to a hollow gear. A limiting groove is opened on the side wall of the fixing plate 1. A rack plate 9 is slidably connected in the limiting groove. The limiting groove limits the rack plate 9 so that it can only move back and forth. The rack plate 9 is meshed with the gear ring 8. A screw 5 is rotatably connected to the side wall of the rack plate 9. A connecting plate is provided on the side wall of the fixing plate 1. The screw 5 is threadedly connected to the connecting plate. The screw 5 is rotatably connected to the sealing cover 2.

[0024] Reference Figure 3 A rotating rod 10 is fixedly connected to the inner side wall of the fixed plate 1, and a motor 11 is fixedly connected to the side wall of the fixed plate 1. A belt 12 is sleeved between the output end of the motor 11 and the rotating rod 10. A turntable 13 is fixedly connected to the side wall of the rotating rod 10. Both the output end of the motor 11 and the rotating rod 10 are equipped with pulleys, which cooperate with the belt 12 for more stable transmission.

[0025] Reference Figure 4 The two ends of the sealing cover 2 are respectively fixedly connected to the extraction cylinder 14. The inner side wall of the extraction cylinder 14 is sealed and slidably connected to the extraction plate 15. The extraction rod 16 is fixedly connected between the two extraction plates 15. The extraction rod 16 and the extraction cylinder 14 are not sealed. The outer surface of the extraction rod 16 is fixedly connected to the slider 17. The turntable 13 and the slider 17 are hinged to the connecting rod 18.

[0026] Reference Figure 2 A transfer chamber 19 is fixedly connected to the inner wall of the sealing cover 2. An air outlet pipe 20 is fixedly connected between the extraction cylinder 14 and the transfer chamber 19. An air inlet pipe 21 is fixedly connected between the extraction cylinder 14 and the sealing cover 2. Both the air outlet pipe 20 and the air inlet pipe 21 are equipped with one-way valves. The flow direction of the one-way valve in the air outlet pipe 20 is from the extraction cylinder 14 to the transfer chamber 19. The flow direction of the one-way valve in the air inlet pipe 21 is from the outside to the extraction cylinder 14. A conduit 22 is fixedly connected between the transfer chamber 19 and the limiting chamber 7. A chuck is provided at the end of the rotating rod 10 away from the turntable 13 (the chuck is existing technology and is used to clamp and fix the rotor, which will not be described in detail here).

[0027] In this invention, the rotor of the vacuum molecular pump is fixed by a chuck during use. The screw 5 is rotated according to the diameter of the rotor, thereby driving the rack plate 9 to move. This causes the gear ring 8 to drive the limiting ring 4 to rotate. The limiting ring 4 drives the hollow rod 3 to move through the arc groove. The hollow rod 3 drives the spray cavity 6 to move, opening outward or closing inward, so that the spray cavity 6 is close to the rotor but not in contact with it. This can adapt to rotors of different diameters, so that the spray cavity 6 completely covers the chuck, achieving the best isolation effect and a wide range of applications.

[0028] Then, the motor 11 is started, causing the belt 12 to drive the rotating rod 10 to rotate. The rotating rod 10 drives the chuck and rotor to rotate at high speed, using a cutting tool to process the rotor. The rotating rod 10 drives the turntable 13, causing the connecting rod 18 to move. The connecting rod 18 drives the slider 17 and the extraction rod 16 to move up and down reciprocally. The extraction rod 16 drives the two extraction plates 15 to move up and down reciprocally. In one extraction cylinder 14, the one-way valve in the air inlet pipe 21 is opened, and the one-way valve in the air outlet pipe 20 is closed, allowing outside gas to enter the extraction cylinder 14 through the air inlet pipe 21. In the other extraction cylinder 14, the one-way valve in the air outlet pipe 20 is opened, and the one-way valve in the air inlet pipe 21 is closed, allowing gas in the extraction cylinder 14 to enter the limited space through the air outlet pipe 20. The air enters the hollow rod 3 through the limiting cavity 7 and is ejected from the spray cavity 6. Two extraction cylinders 14 alternately and continuously extract air from the spray cavity 6, forming a positive pressure air curtain in front of the chuck. The faster the workpiece rotates, the faster the turntable 13 rotates, and the higher the pressure of the ejected airflow. The airflow is matched with the processing speed, blocking the iron filings and impurities that splash over during processing, preventing them from adhering to the chuck and jaws. This avoids the contact point offset caused by impurities when the jaws are fixing the workpiece, which can cause axial or radial runout, thus ensuring the processing accuracy. After processing, no cleaning is required, or only simple cleaning is needed before processing the next workpiece, greatly improving processing efficiency.

[0029] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "connection", "linking", "fixing", etc., should be interpreted broadly.

[0030] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A vacuum molecular pump rotor fixture, comprising a fixed plate (1) and a sealing cover (2), characterized in that, The sealing cover (2) is fixedly connected to the side wall of the fixing plate (1); The fixed plate (1) is provided with an adjustment mechanism, which includes a hollow rod (3), a limiting ring (4), a spray cavity (6), and a limiting cavity (7). Multiple sliding grooves are provided on the side wall of the fixed plate (1), and multiple hollow rods (3) are slidably connected in the sliding grooves. The limiting ring (4) is slidably connected to the side wall of the fixed plate (1). Multiple arc-shaped grooves are provided on the side wall of the limiting ring (4), and the hollow rods (3) are slidably connected to the arc-shaped grooves. The spray cavity (6) is fixedly connected to one end of the hollow rod (3), and the limiting cavity (7) is fixedly connected to the end of the hollow rod (3) away from the spray cavity (6).

2. The vacuum molecular pump rotor tooling according to claim 1, characterized in that, A toothed ring (8) is fixedly connected to the outer surface of the limiting ring (4). A limiting groove is opened on the side wall of the fixing plate (1). A rack plate (9) is slidably connected in the limiting groove. The rack plate (9) is meshed with the toothed ring (8).

3. The vacuum molecular pump rotor tooling according to claim 1, characterized in that, A rotating rod (10) is fixedly connected to the inner side wall of the fixing plate (1), a motor (11) is fixedly connected to the side wall of the fixing plate (1), a belt (12) is sleeved between the output end of the motor (11) and the rotating rod (10), and a turntable (13) is fixedly connected to the side wall of the rotating rod (10).

4. The vacuum molecular pump rotor tooling according to claim 3, characterized in that, The sealing cover (2) is fixedly connected to two ends of an extraction cylinder (14). An extraction plate (15) is slidably connected to the inner side wall of the extraction cylinder (14). An extraction rod (16) is fixedly connected between the two extraction plates (15). A slider (17) is fixedly connected to the outer surface of the extraction rod (16). A connecting rod (18) is hinged between the turntable (13) and the slider (17).

5. A vacuum molecular pump rotor tooling according to claim 4, characterized in that, A transfer chamber (19) is fixedly connected to the inner wall of the sealing cover (2). An air outlet pipe (20) is fixedly connected between the extraction cylinder (14) and the transfer chamber (19). An air inlet pipe (21) is fixedly connected between the extraction cylinder (14) and the sealing cover (2). A one-way valve is provided in both the air outlet pipe (20) and the air inlet pipe (21). A conduit (22) is fixedly connected between the transfer chamber (19) and the limiting chamber (7). A chuck is provided at the end of the rotating rod (10) away from the turntable (13).

6. The vacuum molecular pump rotor tooling according to claim 2, characterized in that, A screw (5) is rotatably connected to the side wall of the rack plate (9), and a connecting plate is provided on the side wall of the fixing plate (1). The screw (5) is threadedly connected to the connecting plate, and the screw (5) is rotatably connected to the sealing cover (2).

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