A temperature control system

The temperature control system, which combines a multi-channel thyristor module with a programmable logic controller, solves the problem of temperature control accuracy in semiconductor manufacturing, achieves precise control of heating devices and stable system operation, and reduces the difficulty of troubleshooting and maintenance costs.

CN224417211UActive Publication Date: 2026-06-26CHENWEI EQUIP TECH (SUZHOU) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CHENWEI EQUIP TECH (SUZHOU) CO LTD
Filing Date
2025-09-22
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

In existing technologies, temperature control systems in semiconductor manufacturing processes struggle to achieve precise temperature control, especially in multi-channel synchronous control, leading to process contamination and production disruptions.

Method used

The temperature control system combines a multi-channel thyristor module with a programmable logic controller. It achieves precise control of multiple heating devices through EtherCAT communication, and is equipped with voltage acquisition, current transformers and temperature probes for real-time monitoring. It also features overcurrent, undervoltage, open circuit and overheat protection mechanisms.

Benefits of technology

It achieves precise temperature control of multiple heating elements, improves the uniformity of temperature distribution and system stability, reduces the difficulty of troubleshooting and maintenance costs, and enhances the reliability and flexibility of the equipment.

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Abstract

The embodiment of the present disclosure provides a temperature control system, comprising: a power module, used for supplying power for a circuit; a multi-channel thyristor module connected with the power module, used for simultaneously controlling a plurality of heating devices; a plurality of heating devices connected with the plurality of channels in the multi-channel thyristor module one by one, used for heating external objects; and a programmable logic controller, used for controlling the multi-channel thyristor module, so as to realize the control of the plurality of heating devices. The embodiment of the present disclosure can accurately adjust the working state of each heating device according to specific temperature requirements, and further realize more accurate temperature distribution and control.
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