Die bonding swing arm device and die bonder

Abstract

The utility model is suitable for semiconductor technical field provides a kind of fixed crystal swing arm device and fixed crystal machine, the above-mentioned fixed crystal swing arm device includes support seat, movable adjusting part, error correction structure and swing arm assembly, and fixed crystal machine includes the fixed crystal swing arm device of any one of the above-mentioned. The position of movable adjusting part in the first direction can be adjusted by error correction structure. When the accuracy of fixed crystal swing arm device appears error after installation, the position of movable adjusting part and swing arm assembly can be adjusted by error correction structure, so that the actual position of the part on swing arm assembly and the preset position of chip contact each other coincide, and then the purpose of eliminating installation error is realized. Compared with the fixed crystal swing arm device in prior art, when the error is corrected, the overall position of fixed crystal swing arm device does not need to be adjusted, only the movable adjusting part needs to be adjusted by error correction structure, so that the correction of error can be realized, and the correction adjustment of error is more convenient and fast.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, and in particular relates to a die bonding arm device and a die bonding machine. Background Technology

[0002] A die bonder is a piece of equipment used in semiconductor device manufacturing, its function being to connect semiconductor wafers to other components. The die bonder arm is a crucial component of the die bonder, performing high-frequency reciprocating motion to pick up and place the die during operation. When the die bonder arm is installed on the machine platform, the cumulative processing errors between components such as the platform's columns, motor pads, and the platform itself result in errors at the die bond nozzle. These errors need to be corrected after installation to ensure accurate die picking and placing. However, most existing die bonder arms suffer from difficulties in error correction. Utility Model Content

[0003] The purpose of this utility model is to provide a die bonding arm device and a die bonding machine, which aims to solve the technical problem of difficulty in error correction during the use of existing die bonding arm devices.

[0004] This invention is implemented as follows: Firstly, a die-bonding swing arm device is provided, comprising:

[0005] The support base has a degree of freedom to rotate about the first axis;

[0006] The movable adjustment component is movably disposed on the support base and has a degree of freedom of movement along a first direction relative to the support base, wherein the first direction is a direction parallel to the first axis.

[0007] An error correction structure is disposed between the support base and the movable adjusting member, and the error correction structure is used to adjust the position of the movable adjusting member along the first direction; and

[0008] The swing arm assembly, mounted on the movable adjustment member, is used to pick up or place the chip.

[0009] In an optional embodiment, the error correction structure includes a rotating member and a driving member. The rotating member is movably disposed on the support base and has a degree of freedom to rotate about a second axis relative to the support base. The driving member is eccentrically disposed on the rotating member and is movably connected to the movable adjustment member. The driving member has only a degree of freedom to move along a second direction relative to the movable adjustment member. The second direction is set at an angle to the first direction, and the second axis is perpendicular to both the first direction and the second direction.

[0010] In an optional embodiment, the movable adjusting member has a drive groove whose length direction is arranged along the second direction, at least a portion of the driving member is located within the drive groove, the driving member is slidable along the length direction of the drive groove, and the width of the drive groove along the first direction is adapted to the size of the driving member.

[0011] In one optional embodiment, the movable adjustment member includes a main body and a connecting part. There are two main bodies, and the two main bodies are respectively located on both sides of the support. The main bodies are slidably connected to the support. The connecting part is connected between the two main bodies, and the swing arm assembly is located in the area between the connecting part and the support.

[0012] In an optional embodiment, the die-bonding swing arm device further includes a guide structure, which is respectively disposed on both sides of the support base. The guide structure is used to limit the sliding direction of the main body so that the main body can slide along a first direction.

[0013] In an optional embodiment, the rotating component includes a rotating shaft located between the two main body portions and passing through the support base. The number of driving components is two, with the two driving components eccentrically disposed at both ends of the rotating shaft. The two main body portions are provided with driving grooves, and the two driving components are slidably disposed in the two driving grooves respectively.

[0014] In an optional embodiment, the swing arm assembly includes a swing arm body, a die-bonding nozzle, and a drive unit. The swing arm body is connected to the movable adjustment member and has a degree of freedom to swing about a third axis relative to the movable adjustment member. The third axis is set at an angle to the first axis. The die-bonding nozzle is disposed at the end of the swing arm body away from the third axis, and the drive unit is used to drive the swing arm body to swing back and forth about the third axis.

[0015] In an optional embodiment, an elastic connection group is provided between the swing arm body and the movable adjustment member. The elastic connection group can undergo elastic deformation when subjected to external force, so that the swing arm assembly can swing back and forth around the third axis with the elastic connection group as support.

[0016] In an optional embodiment, the driving unit includes a voice coil motor, which includes a stator assembly and a mover assembly. The stator assembly is disposed on the support base or the movable adjustment member, and the mover assembly is connected to the swing arm body. At least a portion of the mover assembly is movably disposed inside the stator assembly. The stator assembly has a magnetic part, and the mover assembly has a coil part for communicating with an external circuit. The coil part is also used to interact with the magnetic part after being energized to drive the mover assembly to reciprocate along a preset path.

[0017] In a second aspect, a die bonder is provided, comprising the die bonder arm device described in any of the preceding claims.

[0018] The first aspect of this invention provides the following technical advantages: A movable adjusting member is provided on the support base, and the swing arm assembly is mounted on the movable adjusting member. While the support base rotates around a first axis, the swing arm assembly also swings around the first axis, facilitating the removal of a chip from one position and its placement in another. Simultaneously, the movable adjusting member has a degree of freedom of movement along a first direction relative to the support base, and an error correction structure is provided between the support base and the movable adjusting member. This error correction structure allows adjustment of the position of the movable adjusting member along the first direction. When an error occurs in the precision of the die-bonding swing arm device after installation, the position of the movable adjusting member and the swing arm assembly can be adjusted using the error correction structure, ensuring that the actual position of the part of the swing arm assembly in contact with the chip coincides with the preset position, thereby eliminating installation errors. Compared to existing die-bonding swing arm devices, error correction does not require adjustment of the overall position of the die-bonding swing arm device; only the movable adjusting member needs to be adjusted via the error correction structure to achieve error correction, making error correction more convenient and faster.

[0019] It is understandable that the beneficial effects of the second aspect mentioned above can be found in the relevant descriptions in the first aspect mentioned above, and will not be repeated here. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the die-bonding swing arm device provided in an embodiment of the present invention;

[0022] Figure 2This is an exploded structural diagram of the die-bonding swing arm device provided in this embodiment of the present invention;

[0023] Figure 3 This is a schematic diagram of the error correction structure used in the embodiment of this utility model;

[0024] Figure 4 This is a schematic diagram of the support base and rotating component used in the embodiment of this utility model;

[0025] Figure 5 This is a schematic diagram of the rotating component and the movable adjusting component used in the embodiment of this utility model;

[0026] Figure 6 yes Figure 1 A magnified structural diagram of point A in the middle.

[0027] Explanation of reference numerals in the attached figures:

[0028] 1. Support base; 11. Rotating hole; 12. Clearance groove; 2. Movable adjustment component; 21. Main body; 22. Connecting part; 23. Drive slide; 24. Limiting stop; 3. Error correction structure; 31. Rotating component; 311. Rotating shaft; 312. Drive surface; 32. Drive component; 4. Swing arm assembly; 41. Swing arm body; 42. Die-bonding nozzle; 43. Drive unit; 431. Stator assembly; 432. Mover assembly; 5. Guide structure; 51. First limiting component; 6. Elastic connection group; 61. First elastic piece; 62. Second elastic piece. Detailed Implementation

[0029] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0030] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0032] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0033] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0034] Please refer to Figures 1 to 4 As shown in the embodiments of this utility model, in a first aspect, a die-bonding swing arm device is provided. The die-bonding swing arm device includes a support base 1, a movable adjustment member 2, an error correction structure 3, and a swing arm assembly 4. The support base 1 has a degree of freedom to rotate about a first axis. The movable adjustment member 2 is movably disposed on the support base 1 and has a degree of freedom to move relative to the support base 1 along a first direction, which is a direction parallel to the first axis. The error correction structure 3 is disposed between the support base 1 and the movable adjustment member 2, and is used to adjust the position of the movable adjustment member 2 along the first direction. The swing arm assembly 4 is disposed on the movable adjustment member 2 and is used to pick up or place the chip.

[0035] Specifically, support base 1 refers to a support component with a certain volume. The shape of support base 1 can be block-shaped, column-shaped, or plate-shaped, etc. Support base 1 has the degree of freedom to rotate about a first axis. Support base 1 can be connected to a power device such as a motor and rotate about the first axis under the drive of the power device, where the first axis is usually set in the vertical direction. Movable adjustment component 2 refers to a component with a certain volume. Movable adjustment component 2 can be block-shaped, plate-shaped, or a combination of multiple shapes, and can be freely set according to requirements.

[0036] Error correction structure 3 refers to a component or assembly that can adjust the relative position between two objects. Error correction structure 3 can be a lead screw and slider structure, a cam-crank-slider structure, etc. For example, by mounting a lead screw or cam on the support base 1 and providing a slider on the movable adjusting member 2, or by connecting the movable adjusting member 2 to a crank-slider, the movement of the movable adjusting member 2 is driven by the rotation of the lead screw or cam. Error correction structure 3 can also be a gear and rack structure, for example, by rotatably mounting a gear on the support base 1 and then providing a rack structure on the movable adjusting member 2 that meshes with the gear, and adjusting the position of the movable adjusting member 2 by the rotation of the gear. Furthermore, error correction structure 3 can also employ components such as hydraulic cylinders.

[0037] The swing arm assembly 4 refers to a component or assembly of a certain length, which may include a swing arm body 41, a die-bonding nozzle 42, and a drive unit 43. The swing arm body 41 has a degree of freedom to swing about a certain axis relative to the movable adjustment member 2, and can reciprocate under the action of the drive unit 43. The die-bonding nozzle 42 can be located at one end of the swing arm body 41 and can pick up the wafer by generating negative pressure.

[0038] It should be noted that the error in the die bonding arm device refers to the deviation between the part of the arm assembly 4 that contacts the chip (such as the nozzle end of the die bonding nozzle) and the preset position. The correction of the error is to adjust the position of the die bonding nozzle 42.

[0039] The die-bonding swing arm device provided in this embodiment of the invention features a movable adjusting member 2 mounted on a support base 1, with the swing arm assembly 4 mounted on the movable adjusting member 2. As the support base 1 rotates around a first axis, the swing arm assembly 4 also swings around the first axis, facilitating chip removal from one position and placement in another. Simultaneously, the movable adjusting member 2 has a degree of freedom of movement along a first direction relative to the support base 1, and an error correction structure 3 is provided between the support base 1 and the movable adjusting member 2. This error correction structure 3 allows adjustment of the position of the movable adjusting member 2 along the first direction. When an error occurs in the precision of the die-bonding swing arm device after installation, the error correction structure 3 adjusts the positions of the movable adjusting member 2 and the swing arm assembly 4, ensuring that the actual position of the part of the swing arm assembly 4 in contact with the chip coincides with a preset position, thereby eliminating installation errors. Compared to existing die-bonding swing arm devices, this invention eliminates the need to adjust the overall position of the die-bonding swing arm device when correcting errors; only the movable adjusting member 2 needs to be adjusted via the error correction structure 3 to achieve error correction, making error correction more convenient and faster.

[0040] In one embodiment, see Figure 1 and Figure 2The error correction structure 3 includes a rotating member 31 and a driving member 32. The rotating member 31 is movably mounted on the support base 1 and has a degree of freedom to rotate about the second axis relative to the support base 1. The driving member 32 is eccentrically mounted on the rotating member 31 and is movably connected to the movable adjustment member 2. The driving member 32 has only a degree of freedom to move along the second direction relative to the movable adjustment member 2. The second direction is set at an angle to the first direction, and the second axis is perpendicular to both the first direction and the second direction.

[0041] Specifically, the rotating component 31 refers to a part with a certain volume, which can be cylindrical, disc-shaped, or rod-shaped. For example, when the rotating component 31 is cylindrical, a mounting hole for accommodating the rotating component 31 can be provided on the support base 1, and at least a portion of the rotating component 31 can be rotatably disposed within the mounting hole. The driving component 32 refers to a part with a certain volume, which can be block-shaped, cylindrical, or plate-shaped. The driving component 32 can be connected to the rotating component 31 by means of plug-in, snap-fit, welding, or threaded connection. The driving component 32 can also be an integral structure with the rotating component 31.

[0042] The eccentric setting refers to the setting of the driving member 32 off the rotation axis 311 of the rotating member 31. That is, along the diameter direction of the rotating member 31, the driving member 32 and the rotation axis 311 of the rotating member 31 are spaced apart from each other, so that when the rotating member 31 rotates around the rotation axis 311, the driving member 32 can move along a circular trajectory, and the center of the circular trajectory is located on the rotation axis 311.

[0043] The angle between the second direction and the first direction can be a right angle, meaning they are perpendicular to each other. For example, when the first direction is vertical, the second direction can be any direction in the horizontal plane.

[0044] In this embodiment, when the position of the movable adjusting member 2 needs to be adjusted, the rotating member 31 can be driven to rotate around the second axis. Since the driving member 32 is eccentrically mounted on the rotating member 31, its rotation causes the driving member 32 to move along a circular trajectory. Furthermore, the driving member 32 only has the degree of freedom to move along the second direction relative to the movable adjusting member 2, meaning it can only apply a force along the first direction to the movable adjusting member 2 during its movement. Therefore, as the driving member 32 moves along the circular trajectory, it drives the movable adjusting member 2 to move along the first direction, thus achieving the purpose of adjusting the position of the movable adjusting member 2 along the first direction. This achieves the adjustment function while simplifying the overall structure of the error correction structure 3.

[0045] In one embodiment, see Figure 2 and Figure 3The movable adjusting member 2 has a driving groove 23, the length direction of which is arranged along a second direction. At least a portion of the driving member 32 is located within the driving groove 23, and the driving member 32 can slide along the length direction of the driving groove 23. Furthermore, the width of the driving groove 23 along the first direction is adapted to the size of the driving member 32. Specifically, the driving groove 23 refers to a groove structure with a certain depth. The length of the driving groove 23 refers to the distance between the two sidewalls of the driving groove 23 with a larger distance, and the width of the driving groove 23 refers to the distance between the two sidewalls of the driving groove 23 with a smaller distance. The length of the driving groove 23 is greater than its width.

[0046] In this embodiment, by having a drive groove 23 on the movable adjusting member 2 with its length direction along the second direction, and by having at least a portion of the driving member 32 located within the drive groove 23 and capable of sliding along the length direction of the drive groove 23, the driving member 32 and the movable adjusting member 2 have a degree of freedom to slide relative to each other in the second direction. Furthermore, the width of the drive groove 23 along the first direction is adapted to the size of the driving member 32, allowing both sidewalls of the drive groove 23 to abut against the outside of the driving member 32, thus keeping the driving member 32 relatively fixed relative to the movable adjusting member 2 along the first direction. When the driving member 32 rotates about the second axis, it can drive the movable adjusting member 2 to move only in the first direction without causing displacement in the second direction. The drive groove 23 simplifies and facilitates the movable connection between the driving member 32 and the movable adjusting member 2.

[0047] In one embodiment, see Figure 4 The movable adjustment component 2 includes a main body 21 and a connecting part 22. There are two main bodies 21, and the two main bodies 21 are located on both sides of the support base 1. The main bodies 21 are slidably connected to the support base 1. The connecting part 22 is connected between the two main bodies 21. The swing arm assembly 4 is connected to the connecting part 22, and the swing arm assembly 4 is located in the area between the connecting part 22 and the support base 1.

[0048] Specifically, the main body 21 refers to a component with a certain volume, which can be plate-shaped, block-shaped, or a combination of various shapes. The connecting part 22 also refers to a component with a certain volume, which can be block-shaped, plate-shaped, or column-shaped. The connecting part 22 and the main body 21 can be connected and assembled together by means of snap-fit, welding, or fastener connection. The connecting part 22 and the main body 21 can also be a one-piece molded structure.

[0049] In this embodiment, the movable adjusting member 2 is divided into two parts: a main body 21 and a connecting part 22. The two main bodies 21 are respectively disposed on both sides of the support base 1 and slidably connected to the support base 1. Then, the two main bodies 21 are connected by the connecting part 22, so that the two main bodies 21 can clamp the support base 1 in the middle. This saves the space occupied by the movable adjusting member 2 and the support base 1, and also makes the sliding of the movable adjusting member 2 more stable and convenient.

[0050] In an optional embodiment, please refer to Figure 4 The main body 21 and the connecting part 22 are integrally formed structures. The main body 21 and the connecting part 22 can be formed by machining, so that the overall strength of the movable adjustment part 2 is better.

[0051] In one embodiment, see Figure 2 and Figure 5 The die-bonding swing arm device also includes a guide structure 5, which is respectively disposed on both sides of the support base 1. The guide structure 5 is used to limit the sliding direction of the main body 21 so that the main body 21 can slide along a first direction. Specifically, the guide structure 5 refers to a structure or component that can limit the sliding direction of an object. The guide structure 5 can be a groove structure, in which the main body 21 is directly slidably disposed, and the main body 21 is limited by the side wall of the groove structure. The guide structure 5 can also be two spaced guide blocks, in which the main body 21 is disposed between the two guide blocks, and the main body 21 is limited by the side wall of the guide blocks. In this embodiment, by providing a guide structure 5 on the side of the support base 1, the sliding of the main body 21 can be made more stable, and the position adjustment of the movable adjustment member 2 can be made more precise.

[0052] In one embodiment, see Figure 5 The guide structure 5 includes a first limiting member 51, which abuts against the side of the main body 21 along the second direction, so that the main body 21 can only slide along the first direction. Specifically, the first limiting member 51 is a component with a certain volume, and the first limiting member 51 can be block-shaped, plate-shaped, or column-shaped, etc. The first limiting member 51 can be connected to the support base 1 by means of snap-fit ​​or fastener connection.

[0053] In this embodiment, a first limiting member 51 is provided on the side of the main body 21 along the second direction to prevent displacement of the main body 21 along the second direction. Since the two main bodies 21 are located on both sides of the support base 1 and are connected by the connecting part 22, the main body 21 will be pressed against the side of the support base 1 by the action of the other main body 21, so that the main body 21 can only slide along the first direction. Thus, while ensuring the sliding stability of the movable adjusting member 2, the overall structure of the guide structure 5 is simplified, and the manufacturing cost is reduced.

[0054] In one embodiment, see Figure 5 The rotating component 31 includes a rotating shaft 311, which is located between the two main bodies 21 and passes through the support base 1. There are two driving components 32, eccentrically positioned at both ends of the rotating shaft 311. Each of the two main bodies 21 has a driving groove 23, and the two driving components 32 are slidably disposed within the two driving grooves 23. Specifically, the rotating shaft 311 is a columnar component of a certain length. To facilitate rotation, the cross-sectional shape of the rotating shaft 311 is typically circular. A rotating hole 11 can also be provided on the support base 1, through which the rotating shaft 311 is inserted and passes through the entire support base 1.

[0055] In this embodiment, by passing the rotating shaft 311 through the support base 1, both ends of the rotating shaft 311 can contact the two main body parts 21 respectively. Simultaneously, a driving member 32 is provided at both ends of the rotating shaft 311. Furthermore, driving grooves 23 are provided on the two main body parts 21, and the two driving members 32 are slidably disposed within the two driving grooves 23 respectively. This allows the rotating shaft 311 to drive the two main body parts 21 to move simultaneously along the first direction when rotating, thereby preventing uneven force distribution on the movable adjusting member 2 during position adjustment and making position adjustment of the movable adjusting member 2 more convenient.

[0056] In an optional embodiment, please refer to Figure 3 and Figure 5 The drive groove 23 extends through the main body 21, and the drive component 32 is threadedly connected to the rotating shaft 311. In this embodiment, during installation, the rotating shaft 311 is first installed onto the support base 1, then the support base 1 is inserted between the two main bodies 21, with the position of the drive groove 23 corresponding to the position of the end of the rotating shaft 311. Finally, the drive component 32 is installed onto the end of the rotating shaft 311 to complete the installation of the movable adjusting component 2, making the installation of the movable adjusting component 2 more convenient and quick.

[0057] Based on the aforementioned feature-driven groove 23, please refer to Figure 4 A limiting baffle 24 is also detachably installed on the outer side of the main body 21. The limiting baffle 24 can be connected to the main body 21 by snap-fit, threaded connection, or plug-in connection. After the driving component 32 is installed outside the driving slide groove 23, the limiting baffle 24 can be installed and covered on the driving slide groove 23.

[0058] In another alternative embodiment, please refer to Figure 5The support base 1 is also provided with a clearance groove 12. When the rotating shaft 311 passes through the support base 1, it will pass through the clearance groove 12, so that the rotating shaft 311 located in the clearance groove 12 can contact the outside. When the rotating shaft 311 needs to rotate, the entire rotating shaft 311 can be rotated by driving the part of the rotating shaft 311 located inside the clearance groove 12, making the rotation of the rotating shaft 311 more convenient.

[0059] Furthermore, a drive structure can be provided at the portion of the rotating shaft 311 located within the clearance groove 12. The rotating shaft 311 can be rotated by using a tool such as a wrench in conjunction with the drive structure. The drive structure can consist of two opposing drive surfaces 312, which can clamp together with the two clamping parts of the wrench.

[0060] In one embodiment, see Figure 1 and Figure 2 The swing arm assembly 4 includes a swing arm body 41, a die bonding nozzle 42, and a drive unit 43. The swing arm body 41 is connected to the movable adjustment member 2 and has a degree of freedom to swing around a third axis relative to the movable adjustment member 2. The third axis is set at an angle to the first axis. The die bonding nozzle 42 is disposed on the end of the swing arm body 41 away from the third axis, and the drive unit 43 is used to drive the swing arm body 41 to swing back and forth around the third axis.

[0061] Specifically, the swing arm body 41 refers to a component with a certain length, which can be columnar, rod-shaped, or block-shaped. The die-bonding nozzle 42 refers to a component or assembly used for picking up and placing chips. The working principle of the die-bonding nozzle 42 is that during operation, the vacuum system generates negative pressure at the head of the nozzle through its internal channel. This negative pressure allows the die-bonding nozzle 42 to firmly adhere to the chip, and when chip placement is needed, disconnecting from the vacuum system allows the chip to detach from the nozzle 42. The drive unit 43 refers to a power component that can drive components to move along a straight line or arc. The drive unit 43 can be a cylinder, electric actuator, or voice coil motor, etc. The drive end of the drive unit 43 refers to the part of the drive unit 43 that can move relative to the main body 21.

[0062] In this embodiment, the swing arm assembly 4 is divided into a swing arm body 41, a die-bonding nozzle 42, and a drive unit 43. The swing arm body 41 is connected to the movable adjustment member 2 and has the freedom to swing around a third axis relative to the movable adjustment member 2. The third axis is set at an angle to the first axis. The die-bonding nozzle 42 is located at the end of the swing arm body 41 away from the third axis. In addition to the swing arm assembly 4 being able to swing around the first axis with the support base 1, the drive unit 43 can also drive the swing arm body 41 to swing back and forth around the third axis, allowing the die-bonding nozzle 42 located at the end of the swing arm body 41 to have greater freedom, making the use of the swing arm assembly 4 more convenient and flexible.

[0063] In an optional embodiment, please refer to Figure 1 and Figure 2 The middle part of the swing arm body 41 is connected to the movable adjustment component 2. The die bonding nozzle 42 is set at one end of the swing arm body 41, and the drive unit 43 is connected to the other end of the swing arm body 41. This makes the installation of the swing arm body 41 more stable and makes it more convenient for the drive unit 43 to drive the swing arm body 41 to swing.

[0064] In one embodiment, see Figure 1 and Figure 2 An elastic connection group 6 is provided between the swing arm body 41 and the movable adjustment component 2. The elastic connection group 6 can elastically deform when subjected to external force, allowing the swing arm assembly 4 to reciprocate around a third axis with the elastic connection group 6 as support. Specifically, the elastic connection group 6 refers to a component or assembly that can elastically deform under force. The elastic connection group 6 can be a single component or a combination of multiple components. The second axis refers to a virtual straight line, which generally runs through the elastic connection group 6. The second axis is generally horizontal and its angle with the first axis is generally a right angle.

[0065] In this embodiment, the swing arm body 41 is connected to the movable adjustment member 2 by the elastic connection group 6, which makes the connection between the swing arm body 41 and the movable adjustment member 2 more secure and makes the swing of the swing arm body 41 more convenient.

[0066] In an optional embodiment, please refer to Figure 6 The elastic connection group 6 includes a first elastic piece 61, which is parallel to the second axis. One end of the first elastic piece 61 is fixed to the movable adjustment member 2, and the other end of the first elastic piece 61 is attached and fixed to the swing arm body 41.

[0067] Specifically, the first elastic sheet 61 refers to a sheet-like or plate-like component that can undergo elastic deformation after being subjected to external force. The elastic deformation of the first elastic sheet 61 is mainly bending. The first elastic sheet 61 can be made of metal or non-metallic materials such as plastic. There can be one or more first elastic sheets 61. When there are multiple first elastic sheets 61, they can be arranged in a direction parallel to the second axis.

[0068] During installation, one end of the first elastic plate 61 can be fixed to the movable adjusting member 2, and the other end can be fixed to the swing arm body 41 of the swing arm assembly 4. The first elastic plate 61 is parallel to the second axis. While connecting the swing arm assembly 4 to the movable adjusting member 2 via the first elastic plate 61, when the middle part of the swing arm assembly 4 is pushed by the driving end of the driving unit 43, the elastic deformation of the first elastic plate 61 allows the swing arm assembly 4 to swing around the second axis with the first elastic plate 61 as support. The use of the first elastic plate 61 in the elastic structure simplifies the structure of the elastic connection group 6.

[0069] In an optional embodiment, please refer to Figure 6 The elastic connection group 6 also includes a second elastic piece 62, which is also parallel to the second axis. One end of the second elastic piece 62 is fixed to the movable adjustment member 2, and the other end is fixed to the swing arm body 41. The projections of the second elastic piece 62 and the first elastic piece 61 on the plane perpendicular to the second axis intersect each other.

[0070] Specifically, the second elastic plate 62 refers to a sheet-like or plate-like component that can elastically deform after being subjected to external force. The elastic deformation of the second elastic plate 62 is mainly bending. The second elastic plate 62 can be made of metal or non-metallic materials such as plastic. There can be one or more second elastic plates 62. When there are multiple second elastic plates 62, they can be arranged in a direction parallel to the second axis. The second elastic plate 62 is also parallel to the second axis, with one end of the second elastic plate 62 fixedly attached to the movable adjusting member 2 and the other end fixedly attached to the swing arm body 41.

[0071] In this embodiment, by providing a second elastic sheet 62 on the basis of the first elastic sheet 61, the connection between the swing arm assembly 4 and the support base 1 can be further strengthened. By arranging both the first elastic sheet 61 and the second elastic sheet 62 in a direction parallel to the second axis, and with the projections of the second elastic sheet 62 and the first elastic sheet 61 on a plane perpendicular to the second axis intersecting each other, the swing arm assembly 4 is prevented from deviating from the second axis during swinging. This makes the swinging of the swing arm assembly 4 more stable and the die bonding more precise.

[0072] It should be noted that when the projections of the second elastic plate 62 and the first elastic plate 61 on the plane intersect each other, the intersection position of the second elastic plate 62 and the first elastic plate 61 is the position of the second axis. The second axis intersects with both the second elastic plate 62 and the first elastic plate 61. The aforementioned plane generally refers to a vertical plane. The included angle between the second elastic plate 62 and the first elastic plate 61 is generally a right angle, making the force on the swing arm assembly 4 more uniform.

[0073] In one embodiment, see Figure 2 The drive unit 43 includes a voice coil motor, which includes a stator assembly 431 and a mover assembly 432. The stator assembly 431 is disposed on the support base 1 or the movable adjustment member 2. The mover assembly 432 is connected to the swing arm body 41, and at least part of the mover assembly 432 is movably disposed inside the stator assembly 431. The stator assembly 431 has a magnetic part, and the mover assembly 432 has a coil part for communicating with an external circuit. The coil part is also used to interact with the magnetic part after being energized to drive the mover assembly 432 to reciprocate along a preset path.

[0074] Specifically, the stator assembly 431 refers to a component with a certain volume. The stator assembly 431 typically has a receiving structure, which can be a receiving groove, receiving hole, etc. The magnetic part refers to a component that possesses magnetism and can generate a stable magnetic field. The magnetic part can be housed within the receiving structure on the stator assembly 431. The mover assembly 432 also refers to a component with a certain volume, and it also has a coil part, which is a structure made of wound wire. When the voice coil motor is working, the coil part can be connected to an external circuit. After the coil part is energized, it also generates a magnetic field, which interacts with the magnetic field generated by the magnetic part, causing the mover assembly 432 to move along a straight line or arc. By changing the direction of the current flowing into the coil part (e.g., by applying alternating current), the reciprocating motion of the mover assembly 432 can be achieved. By connecting at least a portion of the mover assembly 432 to the swing arm body 41, the movement of the mover assembly 432 will also drive the swing arm body 41 to move together.

[0075] In this embodiment, a voice coil motor is used instead of a servo motor to drive the movement of the swing arm body 41. The voice coil motor has better high-frequency response characteristics and can realize high-speed reciprocating linear motion. It is particularly suitable for short-stroke servo control with high positioning accuracy. Moreover, the voice coil motor has no intermediate transmission link, which can greatly simplify its own structure and volume, improve the compactness of the entire swing arm assembly 4, and reduce the moment of inertia of the swing arm assembly 4, thereby improving the working efficiency and die bonding accuracy of the entire swing arm assembly 4 during operation.

[0076] Secondly, a die bonder is provided, including the die bonder arm device of any of the above-mentioned embodiments. It is understood that the beneficial effects of the second aspect can be found in the relevant description in the first aspect above, and will not be repeated here.

[0077] The above are merely preferred embodiments of the present utility model, and only specifically describe the technical principles of the present utility model. These descriptions are only for explaining the principles of the present utility model and should not be construed as limiting the scope of protection of the present utility model in any way. Based on this explanation, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model, as well as other specific embodiments of the present utility model that can be conceived by those skilled in the art without creative effort, should be included within the scope of protection of the present utility model.

Claims

1. A die-bonding swing arm device, characterized in that, include: The support base has a degree of freedom to rotate about the first axis; The movable adjustment component is movably disposed on the support base and has a degree of freedom of movement along a first direction relative to the support base, wherein the first direction is a direction parallel to the first axis. An error correction structure is disposed between the support base and the movable adjustment member, and the error correction structure is used to adjust the position of the movable adjustment member along the first direction; as well as The swing arm assembly, mounted on the movable adjustment member, is used to pick up or place the chip.

2. The die-bonding swing arm device as described in claim 1, characterized in that, The error correction structure includes a rotating component and a driving component. The rotating component is movably mounted on the support base and has a degree of freedom to rotate about a second axis relative to the support base. The driving component is eccentrically mounted on the rotating component and is movably connected to the movable adjustment component. The driving component has only a degree of freedom to move along a second direction relative to the movable adjustment component. The second direction is set at an angle to the first direction, and the second axis is perpendicular to both the first and second directions.

3. The die-bonding swing arm device as described in claim 2, characterized in that, The movable adjusting member has a drive slide groove, the length direction of the drive slide groove is arranged along the second direction, at least a portion of the drive member is located in the drive slide groove, the drive member can slide along the length direction of the drive slide groove, and the width of the drive slide groove along the first direction is adapted to the size of the drive member.

4. The die-bonding swing arm device as described in claim 3, characterized in that, The movable adjustment component includes a main body and a connecting part. There are two main bodies, and the two main bodies are respectively located on both sides of the support base. The main bodies are slidably connected to the support base. The connecting part is connected between the two main bodies, and the swing arm assembly is located in the area between the connecting part and the support base.

5. The die-bonding swing arm device as described in claim 4, characterized in that, The die-bonding swing arm device further includes a guide structure, which is respectively disposed on both sides of the support base. The guide structure is used to limit the sliding direction of the main body so that the main body can slide along a first direction.

6. The die-bonding swing arm device as described in claim 4, characterized in that, The rotating component includes a rotating shaft located between the two main bodies and passing through the support base. There are two driving components, which are eccentrically positioned at both ends of the rotating shaft. The two main bodies are provided with driving grooves, and the two driving components are slidably positioned within the two driving grooves respectively.

7. The die-bonding swing arm device according to any one of claims 1 to 6, characterized in that, The swing arm assembly includes a swing arm body, a die-bonding nozzle, and a drive unit. The swing arm body is connected to the movable adjustment member and has a degree of freedom to swing around a third axis relative to the movable adjustment member. The third axis is set at an angle to the first axis. The die-bonding nozzle is disposed on the end of the swing arm body away from the third axis, and the drive unit is used to drive the swing arm body to swing back and forth around the third axis.

8. The die-bonding swing arm device as described in claim 7, characterized in that, An elastic connection group is provided between the swing arm body and the movable adjustment component. The elastic connection group can undergo elastic deformation when subjected to external force, so that the swing arm assembly can swing back and forth around the third axis with the elastic connection group as support.

9. The die-bonding swing arm device as described in claim 7, characterized in that, The drive unit includes a voice coil motor, which includes a stator assembly and a mover assembly. The stator assembly is disposed on the support base or the movable adjustment member. The mover assembly is connected to the swing arm body, and at least a portion of the mover assembly is movably disposed inside the stator assembly. The stator assembly has a magnetic part, and the mover assembly has a coil part for communicating with an external circuit. The coil part is also used to interact with the magnetic part after being energized to drive the mover assembly to reciprocate along a preset path.

10. A die bonder, characterized in that, Includes the die-bonding swing arm device as described in any one of claims 1 to 9.

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