A temperature control device for semiconductor production capable of rapid temperature rise
Semiconductor manufacturing equipment that uses laser heating devices to rapidly raise the temperature solves the problems of slow heating and heat loss in existing technologies, achieving rapid heating and efficient energy utilization while avoiding pollution.
CN224419231UActive Publication Date: 2026-06-26XIANGHE HAICHUN MASCH EQUIP CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- XIANGHE HAICHUN MASCH EQUIP CO LTD
- Filing Date
- 2025-08-07
- Publication Date
- 2026-06-26
Smart Images
Figure CN224419231U_ABST
Abstract
The utility model discloses a kind of temperature control equipment for semiconductor production with quick heating, including working chamber and temperature control equipment, and the temperature control equipment is composed of temperature sensor, resistance heating device and quick heating device.The utility model, through the synchronous emission of multiple groups of laser transmitters laser beams, after reflection mirror emission, focusing mirror focuses, form array laser, irradiate in heat conduction rod inside, can make heat conduction rod rapidly heat up, laser heating mode heating speed is fast, temperature control precision is high, and contactless heating can avoid pollution.
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