A reactor with adjustable discharge gap
By using piezoelectric ceramic elements to drive the electrode plates, the problems of low accuracy and slow response speed in the electrode plate spacing adjustment of traditional discharge reactors are solved. This achieves high-precision and fast electrode plate spacing adjustment, improving the reactor's adaptability and equipment stability under dynamic operating conditions.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI CAIWIN SEMICONDUCTOR CO LTD
- Filing Date
- 2025-06-27
- Publication Date
- 2026-06-30
AI Technical Summary
Traditional discharge reactors have low precision in adjusting the electrode plate spacing and slow response speed, making it difficult to meet the requirements for high precision and rapid real-time adjustment, thus limiting their application under dynamically changing operating conditions.
By using piezoelectric ceramic elements to drive the electrode plates to move through the inverse piezoelectric effect, high-precision, fast, and continuous adjustment of the electrode plate spacing is achieved, avoiding the problems of precision loss and long response time caused by mechanical transmission components.
It achieves high-precision, rapid, and continuous adjustment of the electrode plate spacing, adapts to different operating conditions, improves the dynamic adaptability of the reactor and the stability of the equipment, and reduces energy consumption and yield fluctuations.
Smart Images

Figure CN224422830U_ABST