A cleanroom-free, sealed transport vehicle for photomasks
By designing a dust-free, sealed transport vehicle, the risks of exposure and damage to photomasks during transport in the external environment have been resolved, enabling safe transport of photomasks. This technology is applicable to the LCD, LED, TFT, and IC industries.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHENGDU NEWWAY PHOTOMASK MAKING TECH CO LTD
- Filing Date
- 2025-06-19
- Publication Date
- 2026-06-30
AI Technical Summary
In existing technologies, photomasks are at risk of exposure and damage during transport in the external environment, and therefore cannot be directly transported in the external environment.
A cleanroom-free, sealed transfer vehicle was designed, including a vehicle body with a sealed chamber, equipped with anti-collision components and anti-collision partition beams, made of stainless steel with a smooth surface to reduce friction, and equipped with ramps and sealing rings to achieve direct docking with the cleanroom and prevent dust from entering.
It enables the safe transport of photomasks in the external environment, avoiding exposure and damage, reducing friction and dust contamination, and is suitable for photomask transport in the LCD, LED, TFT, and IC industries.
Smart Images
Figure CN224427448U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of mask transfer technology, specifically to a dust-free, sealed transfer vehicle for mask plates. Background Technology
[0002] A photomask, also known as a photomask, is a mask tool used in the fabrication of microelectronic chips. It is fabricated using photolithography technology. The fabrication process begins by creating a transparent mask from the design pattern of the chip to be fabricated. This mask is then bonded to a semiconductor silicon wafer, and a series of processes, including exposure and development, are performed using a photolithography machine to ultimately fabricate the microelectronic chip. The lifespan of the mask materials and the quality of the transport process must be strictly controlled.
[0003] To ensure the quality of the mask materials, which are at risk of exposure and damage during external transportation, the transportation process must be carried out in a sealed, light-free environment to prevent exposure and ensure that the mask materials are not affected by the product. Utility Model Content
[0004] To address the shortcomings of existing technologies, this invention aims to provide a cleanroom-free, sealed transport vehicle for photomasks. This solution enables direct docking between the transport vehicle and the cleanroom, eliminating the need for transport equipment and packaging materials. It allows for direct transport of photomasks and provides circumferential anti-collision protection for the raw material packaging boxes, thus solving the problem that some photomask materials cannot be directly transported in the external environment.
[0005] This utility model is achieved through the following technical solution:
[0006] A cleanroom-free, sealed transport vehicle for photomasks includes:
[0007] The vehicle body has a sealed chamber inside; one side of the vehicle body is open, and the open side has a door panel for opening or closing the sealed chamber; the sealed chamber is divided into several placement chambers, and the several placement chambers are arranged sequentially along the width direction of the open side;
[0008] Each of the placement cavities is equipped with anti-collision components on all four circumferential sides.
[0009] Compared to existing technologies that pose risks of exposure and damage during the external transport of raw materials, this invention provides a cleanroom-safe, sealed transport vehicle for photomasks. This solution allows for direct docking between the transport vehicle and the cleanroom, eliminating the need for transport equipment and packaging materials. It directly transports photomasks and provides circumferential anti-collision protection for the raw material packaging boxes, solving the problem of transporting multiple photomask materials directly in the external environment. Specifically, the solution includes a vehicle body for entering the cleanroom. After production, the photomask materials are placed in specific packaging boxes. These boxes are then moved into the cleanroom. When multiple boxes need to be transported out of the cleanroom, the vehicle body is moved into the cleanroom for docking. The vehicle body then loads the boxes side-by-side, with anti-collision devices on all four sides of the placement cavity providing protection and restraint. This keeps the boxes upright and prevents collisions and wear during vehicle movement, as well as dust accumulation due to friction between the boxes during transport.
[0010] To further optimize the design and prevent adjacent mask materials from colliding and rubbing against each other, a collision-resistant partition beam is used as the anti-collision component between adjacent placement cavities. The upper end of the partition beam is fixed to the top of the vehicle body, while the lower end is free and extends downwards. The front and rear ends of the partition beam are arranged along the length of the sealed chamber. In this design, the partition beam is made of stainless steel with a smooth surface to reduce friction between the mask materials and the partition beam while separating them. In addition, the partition beam partially limits the top of the mask materials, preventing them from tipping over and reducing the contact area.
[0011] To further optimize the design and protect the outermost MASK material sidewalls while reducing the contact area, the anti-collision components on both sides of the sealed chamber are anti-collision strips. These anti-collision strips are fixed to the inside of the vehicle body and are arranged along the length of the sealed chamber.
[0012] To further optimize the design and reduce friction, the anti-collision strip is equipped with several pulleys along its length. These pulleys are flexible to minimize impact during collisions, and their free rotation further reduces friction on the mask material.
[0013] Further optimized, to facilitate pushing the packaging box into the vehicle body, a ramp is hinged to the bottom of the open side of the vehicle body. One end of the ramp is hinged to the vehicle body, and the other end can rotate towards the outside of the vehicle body or towards the sealed cavity. Furthermore, the ramp's rotation towards the sealed cavity allows it to be fully positioned within the sealed cavity. In this design, the ramp can rotate outwards via the hinge, placing its other end on the ground for easy pushing into the packaging box. For different product packaging boxes, a ramp design is added at the loader position, applicable to both double-wheeled boxes and PVC wheelless boxes, suitable for diverse scenarios. After pushing in, the ramp can be stored inside the vehicle body to prevent contact with external dust.
[0014] To further optimize the system and enable automatic opening and closing of the ramp, resistance rods are hinged to both sides of the opening, and the output end of the resistance rods is hinged to the side of the ramp.
[0015] To further optimize the design and provide anti-collision protection in the door panel direction, the inner side of the door panel is provided with an installation strip, the length of which is set along the width direction of the opening.
[0016] At a corresponding position in each of the placement cavities, an anti-collision pad is provided on the mounting strip. One side of the anti-collision pad is detachably connected to the mounting strip, and the other side of the anti-collision pad extends into the placement cavity. In this design, due to the intervals of the ramp plates, anti-collision pads of sufficient length are required to extend into the placement cavity to hold the packaging box in place, effectively preventing damage caused by collisions due to inertia during transport.
[0017] In addition, cross-fixed anti-collision components are also installed on the side walls of the vehicle body away from the door panels.
[0018] To further optimize the design and prevent external dust from entering, sealing rings are provided around the inner perimeter of the door panel to seal the opening.
[0019] Further optimized, for manual pushing of the vehicle body, the vehicle body also has a handle bar on the side away from the opening.
[0020] Furthermore, the vehicle body is constructed by welding several stainless steel baffles sequentially. Specifically, it is formed by welding six stainless steel baffles together, achieving a seamless connection.
[0021] Compared with the prior art, this utility model has the following advantages and beneficial effects:
[0022] 1. This utility model provides a cleanroom sealed transfer vehicle for photomasks. By adopting this solution, the transfer vehicle can be directly connected to the cleanroom, eliminating the need for transfer equipment and packaging materials, directly transferring photomasks, and providing circumferential anti-collision protection for the raw material packaging boxes, thus solving the problem that some mask raw materials cannot be directly transferred in the external environment.
[0023] 2. This utility model provides a dust-free, sealed transport vehicle for photomasks, suitable for transporting photomask raw materials in the LCD, LED, TFT, and IC industries. It adopts a seamless, one-piece box design, which is not easy to crack and has good anti-permeability. It is environmentally friendly and radiation-free, and will not be affected by the external environment in terms of product quality. It is easy to clean, will not rust, and its color will remain unchanged for a long time. Attached Figure Description
[0024] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings:
[0025] Figure 1 A schematic diagram of the structure of the dust-free sealed transfer vehicle provided by this utility model when the door panel is opened;
[0026] Figure 2 A schematic diagram of the structure of the dust-free sealed transfer vehicle provided by this utility model when the ramp is lowered;
[0027] Figure 3 This is a schematic diagram of the structure of the dust-free sealed transfer vehicle provided by this utility model when the door panel is closed.
[0028] The attached diagram shows the markings and corresponding component names:
[0029] 1-Vehicle body, 2-Door panel, 3-Anti-collision partition beam, 4-Anti-collision barrier strip, 5-Ramp plate, 6-Resistance pull rod, 7-Anti-collision pad block, 8-Sealing ring, 9-Pull rod handrail, 10-Manual lock. Detailed Implementation
[0030] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.
[0031] Example
[0032] This embodiment provides a cleanroom-free, sealed transport vehicle for photomasks, such as... Figures 1-3 As shown, it includes:
[0033] The vehicle body 1 has a sealed chamber inside; one side of the vehicle body 1 is open, and the open side has a door panel 2 for opening or closing the sealed chamber; the sealed chamber is divided into several placement chambers, and the several placement chambers are arranged sequentially along the width direction of the open side.
[0034] Each of the placement cavities is equipped with anti-collision components on all four circumferential sides.
[0035] Compared to existing technologies that pose risks of exposure and damage during the external transport of raw materials, this invention provides a cleanroom-safe, sealed transport vehicle for photomasks. This solution allows for direct docking between the transport vehicle and the cleanroom, eliminating the need for transport equipment and packaging materials. It directly transports photomasks while providing circumferential anti-collision protection for the raw material packaging boxes, solving the problem of transporting multiple photomask materials directly in the external environment. Specifically, the solution includes a vehicle body 1 for entering the cleanroom. After production, the photomask materials are placed in specific packaging boxes. These boxes are then moved into the cleanroom. When multiple boxes need to be transported out of the cleanroom, the vehicle body 1 is moved into the cleanroom for docking. Multiple boxes are then sequentially loaded onto the vehicle body 1, with anti-collision devices on all four sides of the placement cavity providing protection and restraint. This keeps the boxes upright and prevents collisions and wear during the movement of the vehicle body 1, as well as preventing dust accumulation due to friction between the boxes during transport.
[0036] In some embodiments, to prevent adjacent mask materials from colliding and rubbing against each other, a collision-resistant partition beam 3 is used as the anti-collision component between adjacent placement cavities. The upper end of the anti-collision partition beam 3 is fixed to the top of the vehicle body 1, and the lower end is a free end that extends downwards. The front and rear ends of the anti-collision partition beam 3 are arranged along the length of the sealed cavity. In this embodiment, the anti-collision partition beam 3 is made of stainless steel with a smooth surface to reduce friction between the mask materials and the anti-collision partition beam 3 while separating them. In addition, the anti-collision partition beam 3 partially limits the top of the mask materials, preventing them from tipping over and reducing the contact area.
[0037] In some embodiments, in order to protect the outermost MASK material sidewall and reduce the contact area, the anti-collision components on both sides of the sealed chamber are anti-collision strips 4. The anti-collision strips 4 are fixed to the inner side of the vehicle body 1 and are arranged along the length direction of the sealed chamber.
[0038] In some embodiments, to reduce friction, the anti-collision strip 4 is equipped with a plurality of pulleys along its length. These pulleys are flexible to reduce impact during collisions, and their free rotation reduces friction on the mask material.
[0039] In some embodiments, to push the packaging box into the vehicle body 1, a ramp 5 is hinged to the bottom of the open side of the vehicle body 1. One end of the ramp 5 is hinged to the vehicle body 1, and the other end of the ramp 5 can rotate towards the outside of the vehicle body 1 or towards the sealed cavity. The ramp 5 can rotate towards the sealed cavity so that it is entirely within the sealed cavity. In this design, the ramp 5 can rotate outwards via the hinge, placing its other end on the ground for easy pushing into the packaging box. The design of the ramp 5 at the loader position is suitable for packaging boxes of different products, and can be used for both double-row wheeled boxes and PVC wheelless boxes, applicable to diverse scenarios. After pushing in, the ramp 5 can be stored inside the vehicle body 1 to prevent contact with external dust.
[0040] In some embodiments, to enable the automatic retraction and extension of the ramp 5, resistance rods 6 are hinged to both sides of the opening, and the output end of the resistance rods 6 is hinged to the side of the ramp 5.
[0041] In some embodiments, for anti-collision treatment in the direction of door panel 2, the inner side of door panel 2 is provided with an installation strip, the length direction of the installation strip being set along the width direction of the opening;
[0042] At a corresponding position in each of the placement cavities, an anti-collision pad 7 is provided on the mounting strip. One side of the anti-collision pad 7 is detachably connected to the mounting strip, and the other side of the anti-collision pad 7 extends into the placement cavity. In this design, due to the spacing of the ramp plates 5, sufficiently long anti-collision pads 7 are required to extend into the placement cavity to hold the packaging box in place, effectively preventing damage caused by collisions due to inertia during transport.
[0043] In addition, cross-fixed anti-collision components are also provided on the side wall of the vehicle body 1, which is away from the door panel 2.
[0044] In some embodiments, to perform sealing treatment and prevent external dust from entering, sealing rings 8 are provided around the inner side of the door panel 2 to seal the opening.
[0045] In some embodiments, the vehicle body 1 is manually pushed, and the vehicle body 1 is also equipped with a handlebar 9 on the side away from the opening.
[0046] In some embodiments, the vehicle body 1 is formed by welding several stainless steel baffles sequentially. That is, it is formed by welding six stainless steel baffles together to achieve a seamless connection.
[0047] How this solution works:
[0048] When it is necessary to transfer the mask materials out of the cleanroom, push them into the cleanroom sealed transfer cart, open door panel 2 under warm light, then lower ramp 5 and clean the bottom of cart body 1. Slowly push several wheeled boxes into the placement chamber, retract ramp 5, close door panel 2, and then fasten manual lock 10. Then slowly transfer the cleanroom sealed transfer cart to the cleanroom air shower room. It is important to note that operators must open and retrieve the boxes under warm light.
[0049] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above description is only a specific embodiment of this utility model and is not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.
Claims
1. A cleanroom, sealed transport vehicle for photomasks, characterized in that, include: The vehicle body (1) has a sealed chamber inside; one side of the vehicle body (1) is open, and the open side has a door panel (2) for opening or closing the sealed chamber; the sealed chamber is divided into several placement chambers, and the several placement chambers are arranged sequentially along the width direction of the open side; Each of the placement cavities is equipped with anti-collision components on all four circumferential sides.
2. The dust-free, sealed transport vehicle for photomasks according to claim 1, characterized in that, The anti-collision component between adjacent placement cavities is an anti-collision partition beam (3). The upper end of the anti-collision partition beam (3) is fixed to the top of the vehicle body (1), and the lower end is a free end that extends downward. The front and rear ends of the anti-collision partition beam (3) are arranged along the length direction of the sealed cavity.
3. A dust-free, sealed transport vehicle for photomasks according to claim 1, characterized in that, The anti-collision components on both sides of the sealed chamber are anti-collision strips (4), which are fixed to the inside of the vehicle body (1) and are arranged along the length of the sealed chamber.
4. A dust-free, sealed transport vehicle for photomasks according to claim 3, characterized in that, The anti-collision strip (4) has several pulleys along its length.
5. A dust-free, sealed transport vehicle for photomasks according to claim 1, characterized in that, A ramp plate (5) is hinged to the bottom of the open side of the vehicle body (1). One end of the ramp plate (5) is hinged to the vehicle body (1), and the other end of the ramp plate (5) can rotate toward the outside of the vehicle body (1) or toward the sealed cavity. The ramp plate (5) can rotate toward the sealed cavity so that it is entirely located in the sealed cavity.
6. A dust-free, sealed transport vehicle for photomasks according to claim 5, characterized in that, Both sides of the opening are hinged with resistance rods (6), and the output end of the resistance rods (6) is hinged to the side of the ramp plate (5).
7. A dust-free, sealed transport vehicle for photomasks according to claim 5, characterized in that, The inner side of the door panel (2) is provided with an installation strip, the length of which is set along the width direction of the opening; At the corresponding position of each of the placement cavities, an anti-collision pad (7) is provided on the mounting strip. One side of the anti-collision pad (7) is detachably connected to the mounting strip, and the other side of the anti-collision pad (7) extends into the placement cavity.
8. A dust-free, sealed transport vehicle for photomasks according to claim 1, characterized in that, The inner side of the door panel (2) is provided with sealing rings (8) for sealing the opening.
9. A dust-free, sealed transport vehicle for photomasks according to claim 1, characterized in that, The vehicle body (1) also has a handlebar (9) on the side away from the opening.
10. A dust-free, sealed transport vehicle for photomasks according to claim 1, characterized in that, The vehicle body (1) is formed by welding several stainless steel baffles in sequence.