A substrate unloading mechanism and unloading equipment

Abstract

This utility model discloses a substrate feeding mechanism and feeding device, relating to the field of substrate processing technology. The substrate feeding mechanism includes a first transmission component and a flipping component. The first transmission component includes a transmission structure and a clearance space disposed between the transmission structure, the transmission structure being configured to transmit substrates. The flipping component includes a lifting frame, a rotating shaft, a flipping arm, and a limiting claw. The rotating shaft is rotatably mounted on the lifting frame and extends along a first direction. The flipping arm is connected to the rotating shaft. The lifting frame is liftable, and the rotating shaft and flipping arm can pass through the clearance space. The flipping arm is equipped with multiple suction cups for adsorbing and fixing the substrate. The limiting claw is disposed on the flipping arm and abuts against the substrate in a second direction, the first direction and the second direction forming an angle. This substrate feeding mechanism can support the substrate during flipping, preventing the suction cups from being pulled, ensuring the adsorption effect between the suction cups and the substrate, protecting the suction cups, and extending their service life.

Description

Technical Field

[0001] This utility model relates to the field of substrate processing technology, and in particular to a substrate feeding mechanism and feeding equipment. Background Technology

[0002] During the processing of glass substrates, robotic arms are needed to handle them. Since different functional glass substrates have different process surfaces, a flipping mechanism needs to be designed to flip the glass substrates, allowing the robotic arm to select either the A or B side of the glass substrate as needed to handle the non-contaminated process surface.

[0003] However, the flipping mechanism uses a suction cup to pick up the glass substrate and then flips it over. But the glass substrate is heavy, and during the flipping process, it pulls the suction cup downwards. When the glass substrate is in a vertical position, the suction cup is prone to shifting, which can easily cause the glass substrate to fall off due to air leakage, or damage the suction cup, causing the production line to stop. Utility Model Content

[0004] The purpose of this invention is to provide a substrate feeding mechanism and feeding device that can support the substrate during the flipping process, avoid pulling the suction cup, ensure the adsorption effect between the suction cup and the substrate, protect the suction cup, and extend its service life.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A substrate unloading mechanism, comprising:

[0007] A first transmission component includes a transmission structure and a clearance space disposed between the transmission structures, wherein the transmission structure is configured as a transmission substrate;

[0008] The flipping assembly includes a lifting frame, a rotating shaft, a flipping arm, and a limiting hook. The rotating shaft is rotatably mounted on the lifting frame and extends along a first direction. The flipping arm is connected to the rotating shaft. The lifting frame is liftable and the rotating shaft and the flipping arm can pass through the clearance space. The flipping arm is provided with multiple suction cups for adsorbing and fixing the substrate. The limiting hook is disposed on the flipping arm and abuts against the substrate in a second direction. The first direction and the second direction are set at an angle.

[0009] As an optional solution for the unloading mechanism of the aforementioned substrate, the flipping assembly further includes a claw drive, which is disposed on the flipping arm and configured to drive the limiting claw to move along the second direction.

[0010] As an optional solution for the unloading mechanism of the aforementioned substrate, the limiting claw includes a horizontal support section and a vertical limiting section. The horizontal support section is connected to the output end of the claw drive and is located below the substrate, while the vertical limiting section can abut against the substrate.

[0011] As an optional solution for the unloading mechanism of the aforementioned substrate, the limiting claw further includes a horizontal limiting section, which is connected to the vertical limiting section. The horizontal limiting section and the horizontal support section are spaced apart, and the substrate is located between the horizontal limiting section and the horizontal support section.

[0012] As an optional solution for the unloading mechanism of the aforementioned substrate, the flipping assembly includes a plurality of flipping arms, which are spaced apart along the first direction; and / or,

[0013] Along the second direction, a plurality of suction cups are spaced apart on the flipping arm.

[0014] As an optional solution for the unloading mechanism of the aforementioned substrate, the unloading mechanism further includes a straightening component, which includes two straightening members disposed on opposite sides of the first transmission component along the second direction, and the two straightening members can move closer to or further away from each other.

[0015] As an optional solution for the unloading mechanism of the aforementioned substrate, the straightening component includes a movable frame and a plurality of straightening wheels spaced apart on the movable frame along the first direction, wherein the plurality of straightening wheels are configured to roll against the substrate.

[0016] A feeding and discharging device includes a substrate discharging mechanism, and further includes:

[0017] The frame includes a feed bin and a discharge bin, and the substrate discharge mechanism is disposed in the discharge bin;

[0018] The second transmission component is located in the feed hopper.

[0019] As an optional solution for the above-mentioned feeding and discharging equipment, the feeding hopper and the discharging hopper are isolated from each other, and the feeding and discharging equipment includes a filter fan, which is hung inside the discharging hopper by a hanging rope.

[0020] As an optional solution for the above-mentioned feeding and discharging equipment, the filter fan includes multiple fixing components with lateral openings. Each fixing component in the discharge hopper is provided with a hanging rod, which can enter the fixing component through the corresponding opening and support the fixing component.

[0021] The beneficial effects of this utility model are:

[0022] This invention provides a substrate unloading mechanism and an infeed / outfeed device. In the substrate unloading mechanism, a first transmission component receives the substrate to be taken by a robotic arm. If the substrate does not need to be flipped, the robotic arm can directly remove it. If the substrate needs to be flipped, the lifting frame of the flipping component rises, and simultaneously, the suction cup on the flipping arm adsorbs the substrate. The flipping of the substrate is completed by the rotation of the rotating shaft. During the flipping process, the limiting claw can support the substrate by abutting against it, ensuring the substrate remains stable during the flipping process.

[0023] The substrate ejection mechanism can support the substrate during the flipping process, preventing the suction cup from being pulled, ensuring the adsorption effect between the suction cup and the substrate, and protecting the suction cup and extending its service life. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the feeding and discharging device provided in one embodiment of the present utility model;

[0025] Figure 2 This is a schematic diagram of the structure of the second transmission component and the discharge mechanism provided in one embodiment of the present invention;

[0026] Figure 3 This is a schematic diagram of the structure of a filter fan provided in one embodiment of the present invention;

[0027] Figure 4 This is a schematic diagram of the material discharge mechanism provided in one embodiment of the present invention;

[0028] Figure 5 yes Figure 4 A magnified view of a section at point A in the middle;

[0029] Figure 6 This is a schematic diagram of the structure of a flipping component provided in one embodiment of the present invention;

[0030] Figure 7 yes Figure 6 A magnified view of a section at point B in the middle;

[0031] Figure 8 This is a schematic diagram of the structure of the corrector provided in one embodiment of the present invention.

[0032] In the picture:

[0033] 100. Robotic arm;

[0034] 1. Frame; 11. Feed inlet; 12. First discharge outlet; 13. Second discharge outlet;

[0035] 2. Second transmission component;

[0036] 3. Discharge mechanism; 31. Tilting assembly; 311. Lifting frame; 312. Rotating shaft; 313. Tilting arm; 314. Limiting claw; 3141. Horizontal support section; 3142. Vertical limiting section; 3143. Horizontal limiting section; 315. Suction cup; 316. Claw drive component; 32. First transmission assembly; 321. Transmission wheel set; 3211. Transmission wheel; 322. Clearance space; 33. Alignment component; 331. Moving frame; 332. Alignment wheel; 333. Support rod;

[0037] 4. Filter fan; 41. Hanging rope; 42. Buckle; 43. Fastener; 431. Opening. Detailed Implementation

[0038] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0039] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0040] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0041] Unless otherwise expressly specified and limited, "above" or "below" a second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of a second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" of a second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0042] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0043] like Figure 1 and Figure 2 As shown, this embodiment provides a feeding device, which includes a frame 1, a discharge mechanism 3, and a second transmission component 2. The frame 1 includes a feeding bin and a discharge bin. The discharge mechanism 3 of the substrate is disposed in the discharge bin; the second transmission component 2 is disposed in the feeding bin.

[0044] The frame 1 is equipped with a feed inlet 11 corresponding to the feeding bin and a discharge outlet corresponding to the discharge bin. To simplify the production line structure, the feed inlet 11 and the discharge outlet are located on the same side of the frame 1, so that the same set of robotic arms 100 can simultaneously complete the operations of feeding the substrate into the feeding bin through the feed inlet 11 and removing the substrate from the discharge bin through the discharge outlet. The substrate discharge mechanism 3 can flip the substrate in the discharge bin, allowing the robotic arm 100 to select either the A or B side of the glass substrate as needed to transport the substrate without contaminating the process surface.

[0045] It is worth noting that the substrate manufacturing process needs to be carried out in a cleanroom environment. For example... Figure 3 As shown, in order to achieve the above purpose, the feeding hopper and the discharging hopper are isolated from each other, and both the feeding hopper and the discharging hopper are equipped with a filter fan 4. After the filter fan 4 is started, it can suck out the dust in the feeding hopper and the discharging hopper, ensuring the cleanliness of the air in the feeding hopper and the discharging hopper.

[0046] Because the discharge hopper is located below the feed hopper, its height is limited. To facilitate the disassembly and assembly of the filter fan 4 inside the discharge hopper, the filter fan 4 is attached to the discharge hopper via a hanging rope 41. The hanging rope 41 is connected to the filter fan 4 via a buckle 42, which greatly improves the disassembly and assembly efficiency of the filter fan 4, making it easier to inspect and maintain.

[0047] Preferably, the filter fan 4 includes multiple fixing members 43 with lateral openings 431. A hanging rod is provided for each fixing member 43 within the discharge hopper. The hanging rod can enter and support the fixing member 43 through the corresponding opening 431. The lateral openings 431 of the fixing members 43 facilitate the operator's removal or entry of the hanging rod to complete the assembly and disassembly of the filter fan 4. Furthermore, they ensure the fixing member 43 remains stable when hung on the hanging rod, preventing excessive vibration of the filter fan 4 caused by relying solely on the hanging rope 41.

[0048] Understandably, the substrate ejection mechanism 3 uses a suction cup 315 to pick up the glass substrate and then flips it over. However, the glass substrate is heavy and will pull the suction cup 315 downwards during the flipping process. When the glass substrate is in a vertical position, the suction cup 315 is prone to shifting, which can easily cause the glass substrate to fall off due to air leakage, or damage the suction cup 315, causing the production line to stop.

[0049] like Figures 4-6 As shown, to solve the above problems, this embodiment provides a substrate ejection mechanism (hereinafter referred to as ejection mechanism 3). The ejection mechanism 3 includes a flipping component 31, which includes a lifting frame 311, a rotating shaft 312, a flipping arm 313, and a limiting claw 314. The rotating shaft 312 is rotatably disposed on the lifting frame 311 and extends along a first direction. The flipping arm 313 is connected to the rotating shaft 312. The lifting frame 311 can be lifted and lowered. The flipping arm 313 is provided with a plurality of suction cups 315, which are used to adsorb and fix the substrate. The limiting claw 314 is disposed on the flipping arm 313 and abuts against the substrate in a second direction. The first direction and the second direction are set at an angle.

[0050] In the unloading mechanism 3, if the substrate does not need to be flipped, the robot arm 100 can directly remove the substrate. If the substrate needs to be flipped, the lifting frame 311 of the flipping component 31 rises, and the suction cup 315 on the flipping arm 313 adsorbs the substrate. The substrate is flipped by the rotation of the rotating shaft 312, and then the robot arm 100 can remove the substrate. During the flipping process, the limiting claw 314 can support the substrate by abutting against it. When the substrate is roughly in a vertical position, the weight of the substrate is basically supported by the limiting claw 314, thereby ensuring that the substrate remains stable during the flipping process.

[0051] The feeding mechanism 3 can support the substrate during the flipping process, avoid pulling the suction cup 315, ensure the adsorption effect between the suction cup 315 and the substrate, and protect the suction cup 315, extending its service life.

[0052] like Figure 4 and Figure 5As shown, the unloading mechanism 3 also includes a first transmission component 32, which is used to receive the substrate to be taken away by the robot arm 100. The first transmission component 32 includes a transmission structure and a clearance space 322 disposed between the transmission structure. The transmission structure is configured to transmit the substrate. The rotating shaft 312 and the rotating arm 313 of the flipping component 31 can pass through the clearance space 322.

[0053] The processed substrate can be transferred to the first transfer component 32, and then transferred by the transfer structure to the top of the flipping component 31. If the substrate needs to be flipped, the lifting frame 311 of the flipping component 31 is raised, the suction cup 315 adsorbs and lifts the substrate, and then the flipping of the substrate can be completed.

[0054] It is worth noting that, since the discharging mechanism 3 can choose whether to flip the substrate, when flipping the substrate is not required, the robot arm 100 needs to remove the substrate from the first transmission component 32. When flipping the substrate is required, the substrate is flipped and located above the first transmission component 32, and the robot arm 100 needs to remove the substrate from above the first transmission component 32. To accommodate the height of the substrate, the frame 1 has two discharge ports, namely a first discharge port 12 and a second discharge port 13. The first discharge port 12 is located above the second discharge port 13, and the first discharge port 12 is at the same height as the flipped substrate. The second discharge port 13 is at the same height as the substrate on the first transmission component 32.

[0055] In this embodiment, the flipping assembly 31 includes a plurality of flipping arms 313, which are spaced apart along a first direction to increase the contact range between the flipping assembly 31 and the substrate and ensure the stability of the substrate. Preferably, the plurality of flipping arms 313 are divided into two groups, and the two groups of flipping arms 313 are symmetrically arranged with respect to the rotating shaft 312.

[0056] In this embodiment, along the second direction, a plurality of suction cups 315 are spaced apart on the flipping arm 313. On the one hand, this can make the adsorption force of the flipping component 31 on the substrate evenly distributed. On the other hand, it can reduce the adsorption force of each suction cup 315, so smaller suction cups 315 can be selected to save costs.

[0057] The first transmission component 32 includes multiple sets of transmission wheel groups 321, each set of transmission wheel groups 321 including multiple transmission wheels 3211. These multiple sets of transmission wheel groups 321 constitute a transmission structure, and the gaps between adjacent sets of transmission wheel groups 321 form clearance spaces 322. In this embodiment, the multiple sets of transmission wheel groups 321 are arranged in two rows along a second direction, with the multiple sets of transmission wheel groups 321 in each row spaced apart along a first direction. Therefore, the gaps between the two rows along the second direction can accommodate the rotating shaft 312, and the gaps between adjacent sets of transmission wheel groups 321 in each row can accommodate the tilting arm 313.

[0058] like Figure 7As shown, the flipping assembly 31 also includes a pawl driver 316, which is disposed on the flipping arm 313. The pawl driver 316 is configured to drive the limiting pawl 314 to move along a second direction. The pawl driver 316 can drive the limiting pawl 314 to move outward so that the substrate moves above the flipping assembly 31. Then, the pawl driver 316 drives the limiting pawl 314 to move inward so that the limiting pawl 314 abuts against the substrate, ensuring the stability of the substrate during the flipping process.

[0059] Furthermore, the limiting claw 314 includes a horizontal support section 3141 and a vertical limiting section 3142. The horizontal support section 3141 is connected to the output end of the claw drive member 316 and is located below the substrate. The vertical limiting section 3142 can abut against the substrate. The vertical support section abuts against the substrate in the second direction to ensure the stability of the substrate during the flipping process. Since the suction cup 315 has a certain degree of flexibility, if the substrate is heavy, the horizontal support section 3141 can abut against the substrate and support it, preventing the weight of the substrate from completely pressing on the suction cup 315 and causing damage to the suction cup 315.

[0060] To prevent the suction cup 315 from being excessively pulled by gravity after the substrate is flipped, the limiting claw 314 also includes a horizontal limiting segment 3143. The horizontal limiting segment 3143 is connected to the vertical limiting segment 3142, and the horizontal limiting segment 3143 and the horizontal support segment 3141 are spaced apart. The substrate is located between the horizontal limiting segment 3143 and the horizontal support segment 3141. Since the limiting claw 314 can move along the second direction, it facilitates the movement of the edge of the substrate between the horizontal limiting segment 3143 and the horizontal support segment 3141. When the substrate rotates and flips with the flipping arm 313, the horizontal limiting segment 3143 can abut against the substrate, thereby providing support for the substrate and protecting the suction cup 315.

[0061] like Figure 4 and Figure 8 As shown, the discharge mechanism 3 also includes a straightening component, which includes two straightening members 33 disposed on opposite sides of the first transmission component 32 along the second direction. The two straightening members 33 can move closer to or further away from each other. The two straightening members 33 can straighten the substrate on the first transmission component 32, ensuring that the limiting claws 314 at both ends of the substrate along the second direction can simultaneously abut the substrate, thus ensuring the stability of the substrate.

[0062] Preferably, the straightening component 33 includes a movable frame 331 and a plurality of straightening wheels 332 spaced apart from the movable frame 331 along a first direction, the plurality of straightening wheels 332 being configured to roll against the substrate. The straightening wheels 332 are able to maintain rolling contact with the substrate when pushing the substrate, avoiding wear on the outer edge of the substrate.

[0063] In this embodiment, the correction assembly further includes baffles and a correction element 33 disposed on opposite sides of the first transmission assembly 32 along the first direction. The baffles are fixedly connected to the frame 1, and the correction element 33 can move closer to or further away from the baffles. The correction element 33 can push the substrate towards the baffles, thereby correcting the substrate in the first direction.

[0064] It is worth noting that the alignment component, through three alignment parts 33 and a fixed barrier, can accurately position the substrate, making it easy for the suction cup 315 to adsorb the substrate.

[0065] Preferably, the movable frame 331 is provided with multiple support rods 333, and each straightening wheel 332 is rotatably mounted on the corresponding support rod 333. By designing the support rods 333, the height of the straightening wheel 332 can be raised, so that when the movable frame 331 is below the first transmission component 32 or the second transmission component 2, the straightening wheel 332 can still perform the straightening operation on the substrate.

[0066] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A substrate unloading mechanism, characterized in that, include: A first transmission component (32) includes a transmission structure and a clearance space (322) disposed between the transmission structures, the transmission structure being configured as a transmission substrate; The flipping assembly (31) includes a lifting frame (311), a rotating shaft (312), a flipping arm (313), and a limiting claw (314). The rotating shaft (312) is rotatably mounted on the lifting frame (311) and extends along a first direction. The flipping arm (313) is connected to the rotating shaft (312). The lifting frame (311) is liftable and the rotating shaft (312) and the flipping arm (313) can pass through the clearance space (322). The flipping arm (313) is provided with a plurality of suction cups (315) for adsorbing and fixing the substrate. The limiting claw (314) is disposed on the flipping arm (313) and abuts against the substrate in a second direction. The first direction and the second direction are set at an angle.

2. The substrate unloading mechanism according to claim 1, characterized in that, The flipping assembly (31) further includes a pawl drive (316), which is disposed on the flipping arm (313) and is configured to drive the limiting pawl (314) to move along the second direction.

3. The substrate unloading mechanism according to claim 2, characterized in that, The limiting claw (314) includes a horizontal support section (3141) and a vertical limiting section (3142). The horizontal support section (3141) is connected to the output end of the claw drive (316) and is located below the substrate. The vertical limiting section (3142) can abut against the substrate.

4. The substrate unloading mechanism according to claim 3, characterized in that, The limiting claw (314) further includes a horizontal limiting segment (3143), which is connected to the vertical limiting segment (3142). The horizontal limiting segment (3143) and the horizontal support segment (3141) are spaced apart, and the substrate is located between the horizontal limiting segment (3143) and the horizontal support segment (3141).

5. The substrate unloading mechanism according to claim 1, characterized in that, The flipping assembly (31) includes a plurality of flipping arms (313), which are spaced apart along the first direction; and / or, Along the second direction, a plurality of suction cups (315) are spaced apart on the flipping arm (313).

6. The substrate unloading mechanism according to any one of claims 1 to 5, characterized in that, The discharge mechanism (3) includes a correction component, which includes two correction elements (33) disposed on opposite sides of the first transmission component (32) along the second direction, and the two correction elements (33) can move closer to or further away from each other.

7. The substrate unloading mechanism according to claim 6, characterized in that, The alignment component (33) includes a movable frame (331) and a plurality of alignment wheels (332) spaced apart on the movable frame (331) along the first direction, the plurality of alignment wheels (332) being configured to roll against the substrate.

8. A feeding / discharging device, characterized in that, The substrate feeding mechanism according to any one of claims 1 to 7 further includes: The frame (1) includes a feed bin and a discharge bin, and the substrate discharge mechanism (3) is disposed in the discharge bin; The second transmission component (2) is disposed in the feed hopper.

9. The feeding and discharging equipment according to claim 8, characterized in that, The feed hopper and the discharge hopper are isolated from each other. The feed equipment includes a filter fan (4), which is attached to the discharge hopper by a hanging rope (41).

10. The feeding and discharging equipment according to claim 9, characterized in that, The filter fan (4) includes a plurality of fixing members (43) with lateral openings (431). Each fixing member (43) in the discharge bin is provided with a hanging rod. The hanging rod can enter the fixing member (43) through the corresponding opening (431) and support the fixing member (43).

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