Insulation structure, thermal field and heating furnace
By designing the bottom insulation layer to have a higher thermal resistance than the top insulation layer in the insulation structure, and then compressing it to make their thermal resistance values close, the problem of poor insulation effect of the bottom insulation layer is solved, and the uniformity of the insulation structure is improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIAGENG (JIANGSU) SPECIAL MATERIALS CO LTD
- Filing Date
- 2025-06-30
- Publication Date
- 2026-06-30
AI Technical Summary
In existing technologies, the insulation effect of the bottom insulation layer of the insulation structure is poor, resulting in uneven insulation.
Design an insulation structure in which the thermal resistance of the bottom insulation layer is greater than that of the top insulation layer, and the thermal resistance of the bottom insulation layer is close to that of the top insulation layer after compression, thereby improving the uniformity of insulation.
By adjusting the thickness and material of the bottom insulation layer, it is ensured that its insulation effect is consistent with or close to that of the top insulation layer after compression, thereby improving the overall insulation uniformity of the insulation structure.
Smart Images
Figure CN224435013U_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a thermal insulation structure, a thermal field, and a heating furnace. Background Technology
[0002] In the semiconductor and photovoltaic industries, different manufacturing processes typically require different temperature conditions. Currently, the industry commonly uses thermal fields to heat furnace tubes. To reduce energy consumption and improve heat utilization, insulation structures are usually installed around the circumference of the thermal field for heat preservation.
[0003] However, the insulation of the insulation structure in the relevant technology is uneven, especially the insulation layer at the bottom of the insulation structure has poor insulation effect. Utility Model Content
[0004] In view of this, the present disclosure provides an insulation structure, a thermal field, and a heating furnace, which solves the problem of poor insulation effect of the insulation layer at the bottom of the insulation structure.
[0005] In a first aspect, one embodiment of this disclosure provides a thermal insulation structure having a receiving cavity, the thermal insulation structure comprising: an annular thermal insulation body; wherein the annular thermal insulation body comprises: a top thermal insulation layer located at the top of the receiving cavity; and a bottom thermal insulation layer located at the bottom of the receiving cavity; wherein, before the bottom thermal insulation layer is compressed, the thermal resistance value of the bottom thermal insulation layer is greater than the thermal resistance value of the top thermal insulation layer, the thermal resistance value being used to characterize the ability of the material of the bottom thermal insulation layer or the material of the top thermal insulation layer to prevent heat from passing through per unit area at a certain temperature.
[0006] In some embodiments, the thermal resistance value is the ratio of the thickness of the insulation layer to the thermal conductivity of the insulation layer, the thermal resistance value is directly proportional to the thickness of the insulation layer, and the thermal resistance value is inversely proportional to the thermal conductivity of the insulation layer.
[0007] In some embodiments, when the material of the top insulation layer is the same as that of the bottom insulation layer, the maximum thickness of the bottom insulation layer is greater than the maximum thickness of the top insulation layer before the bottom insulation layer is compressed.
[0008] In some embodiments, the inner end face of the insulation structure is circular, the cross-sectional shape of the bottom insulation layer is an irregular fan ring, and the thickness of the bottom insulation layer gradually decreases from the middle to both ends along the circumference of the circle.
[0009] In some embodiments, the annular insulation body further includes: a first side insulation layer disposed on one side of the receiving cavity, connecting the top insulation layer and the bottom insulation layer; and a second side insulation layer disposed opposite to the first side insulation layer, connecting the top insulation layer and the bottom insulation layer; wherein the material of the top insulation layer is the same as the material of the bottom insulation layer, the material of the first side insulation layer is the same as the material of the second side insulation layer, and the thermal conductivity of the material of the top insulation layer is less than the thermal conductivity of the material of the first side insulation layer, the thickness of the top insulation layer is less than the thickness of the first side insulation layer, and the thickness of the top insulation layer is less than the thickness of the second side insulation layer.
[0010] In some embodiments, the materials of the top insulation layer and the bottom insulation layer are both aerogel or aerogel fiber; and / or, the materials of the first side insulation layer and the second side insulation layer are both aluminum silicate fiber.
[0011] In some embodiments, the thickness of the top insulation layer ranges from 5 mm to 20 mm; and / or the thickness of the bottom insulation layer ranges from 5 mm to 20 mm; and / or the thickness of the first side insulation layer ranges from 5 mm to 20 mm; and / or the thickness of the second side insulation layer ranges from 5 mm to 20 mm.
[0012] In some embodiments, the maximum thickness of the top insulation layer ranges from 7 mm to 8 mm, the maximum thickness of the bottom insulation layer ranges from 14 mm to 15 mm, the maximum thickness of the first side insulation layer ranges from 19 mm to 20 mm, and the maximum thickness of the second side insulation layer ranges from 19 mm to 20 mm.
[0013] In some embodiments, when the materials of the top insulation layer and the bottom insulation layer are different, the thermal conductivity of the top insulation layer is greater than that of the bottom insulation layer before the bottom insulation layer is compressed.
[0014] In some embodiments, the thermal insulation structure further includes: an annular thermal insulation body, the annular thermal insulation body being connected to the annular thermal insulation body and disposed between the annular thermal insulation body and the receiving cavity, wherein the annular thermal insulation body forms the receiving cavity.
[0015] In some embodiments, the thermal insulation structure further includes an annular thermal insulation body connected to the annular thermal insulation body and disposed between the annular thermal insulation body and the receiving cavity, wherein the annular thermal insulation body forms the receiving cavity; the cross-sectional shape of the annular thermal insulation body includes an irregularly shaped ring symmetrical with respect to a vertical plane, the top and bottom of the irregularly shaped ring being straight, and the opposite sides of the irregularly shaped ring being arc-shaped; wherein the thickness of the portion of the first side thermal insulation layer near the bottom thermal insulation layer is greater than the thickness of the portion of the first side thermal insulation layer near the top thermal insulation layer; and / or, the thickness of the portion of the second side thermal insulation layer near the bottom thermal insulation layer is greater than the thickness of the portion of the second side thermal insulation layer near the top thermal insulation layer.
[0016] Secondly, one embodiment of this disclosure provides a thermal field, comprising: the insulation structure described in the first aspect, the insulation structure having a receiving cavity configured to receive a furnace tube, the insulation structure being configured to insulate the furnace tube; a heating element disposed on the insulation structure and configured to heat the furnace tube; and an annular sheet metal part sleeved on the outer side of the insulation structure.
[0017] Thirdly, one embodiment of this disclosure provides a heating furnace, including: the hot zone described in the second aspect; and a furnace tube disposed in the hot zone.
[0018] The inventors discovered that when the furnace tube is placed in the cavity of the insulation structure, the bottom insulation layer is compressed due to the weight of the furnace tube. Before the bottom insulation layer is compressed, with the same thermal resistance value between the top and bottom insulation layers, the compressed bottom insulation layer has a lower thermal resistance value compared to the top insulation layer. Therefore, the insulation effect of the compressed bottom insulation layer is poor, and the insulation uniformity of the insulation structure is poor.
[0019] In this embodiment, before the bottom insulation layer of the insulation structure is compressed, its thermal resistance is greater than that of the top insulation layer, resulting in better insulation performance. After compression, the insulation performance of the compressed bottom insulation layer deteriorates, becoming consistent with or close to that of the top insulation layer. Therefore, compared to the case where the thermal resistance values of the top and bottom insulation layers are the same before compression, the insulation uniformity of the insulation structure of this application is improved. Attached Figure Description
[0020] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to offer a further understanding of the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.
[0021] Figure 1 The diagram shown is a schematic diagram of the thermal field structure provided in an embodiment of this disclosure.
[0022] Figure 2 The image shown is a front view of the thermal insulation structure of the thermal field provided in an embodiment of this disclosure before compression.
[0023] Figure 3 The image shown is a front view of the thermal insulation structure of the thermal field provided in an embodiment of this disclosure after compression.
[0024] Figure 4 The diagram shown is a schematic diagram of the thermal field structure provided in another embodiment of this disclosure.
[0025] Figure 5 The image shown is a front view of the thermal insulation structure of the thermal field provided in another embodiment of this disclosure after compression.
[0026] Figure 6 The image shown is a front view of the thermal insulation structure of the thermal field provided in another embodiment of this disclosure after compression.
[0027] Figure 7 The image shown is a front view of a thermal field provided in another embodiment of this disclosure.
[0028] Figure 8 The image shown is a front view of a heating furnace provided in an embodiment of this disclosure.
[0029] Figure label:
[0030] 123. Heating furnace; 1. Hot zone; 10. Insulation structure; 1001. Receiving cavity; 100. Annular insulation body; 110. Top insulation layer; 120. Bottom insulation layer; 130. First side insulation layer; 140. Second side insulation layer; 200. Annular heat insulation body; 20. Heating element; 30. Annular sheet metal part; 2. Furnace tube. Detailed Implementation
[0031] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.
[0032] Figure 1 The diagram shown is a schematic diagram of the thermal field structure provided in an embodiment of this disclosure. Figure 2 The image shown is a front view of the thermal insulation structure of the thermal field provided in an embodiment of this disclosure before compression. Figure 3 The image shown is a front view of the thermal insulation structure of a thermal field provided in an embodiment of this disclosure after compression. Figures 1 to 3 As shown, the insulation structure 10 has a receiving cavity 1001. The insulation structure 10 includes an annular insulation body 100, which includes a top insulation layer 110 and a bottom insulation layer 120. The top insulation layer 110 is located at the top of the receiving cavity 1001, and the bottom insulation layer 120 is located at the bottom of the receiving cavity 1001. Before being compressed, the thermal resistance of the bottom insulation layer 120 is greater than that of the top insulation layer 110. The thermal resistance value is used to characterize the ability of the material of the bottom insulation layer 120 or the material of the top insulation layer 110 to prevent heat from passing through per unit area at a certain temperature.
[0033] The top insulation layer 110 and the bottom insulation layer 120 can be two parts of an integrally formed insulation structure 10, or they can be two components of an insulation structure 10 spliced together. The same applies to other insulation layers of the insulation structure 10 in this application, and will not be elaborated upon here. For example, the first side insulation layer 130 and the second side insulation layer 140 described below can be two parts of an integrally formed insulation structure 10, or they can be two components of an insulation structure 10 spliced together.
[0034] Figure 8 The image shown is a front view of a heating furnace provided according to an embodiment of this disclosure. Figure 8 As shown, after the furnace tube 2 is placed in the receiving cavity 1001 of the insulation structure 10, the bottom insulation layer 120 is compressed under the gravity of the furnace tube 2. Compared with the bottom insulation layer 120 before compression, the insulation effect of the compressed bottom insulation layer 120 is worse. Therefore, compared with the case where the thermal resistance values of the top insulation layer 110 and the bottom insulation layer 120 are the same before the bottom insulation layer 120 is compressed, the insulation effect of the compressed bottom insulation layer 120 in this application is the same as or close to the insulation effect of the top insulation layer 110, thereby improving the insulation uniformity of the insulation structure 10.
[0035] The thermal resistance (R-value) of an insulation layer refers to the ability of a material to prevent heat from passing through per unit area at a given temperature. The R-value of an insulation layer is calculated as: insulation layer thickness / thermal conductivity. The thickness of the insulation layer is directly proportional to the R-value; that is, a thicker insulation layer provides better insulation. Conversely, the thermal resistance is inversely proportional to the thermal conductivity; a higher thermal conductivity results in poorer insulation.
[0036] "Before the bottom insulation layer 120 is compressed" includes the following two situations:
[0037] In the first scenario, after the hot zone 1 is prepared, the furnace tube 2 has not yet been installed, so it is not subjected to the pressure of the furnace tube 2, and the bottom insulation layer 120 will not be compressed.
[0038] In the second scenario, after the furnace tube 2 is installed in the hot zone 1, although the bottom insulation layer 120 is subjected to the pressure of the furnace tube 2, the thickness of the bottom insulation layer 120 may be very small and difficult to measure within a certain period of time. Usually, after a relatively long period of time, the thickness of the bottom insulation layer 120 can be measured directly.
[0039] The thickness of the insulation layer can be measured using a measuring tape, ruler, caliper, ultrasonic thickness gauge, or infrared thermal imager. The thermal conductivity of the insulation layer is generally determined by its material, and can therefore be obtained from the manufacturer's product manual. The thermal resistance of the insulation layer can be calculated by measuring its thickness before compression and its thermal conductivity.
[0040] In some embodiments, when the material of the top insulation layer 110 is the same as that of the bottom insulation layer 120, the maximum thickness of the bottom insulation layer 120 is greater than the maximum thickness of the top insulation layer 110 before the bottom insulation layer 120 is compressed.
[0041] Before compression, the maximum thickness of the bottom insulation layer 120 was greater than that of the top insulation layer 110. Therefore, assuming the materials of the top insulation layer 110 and the bottom insulation layer 120 were the same, the thermal resistance of the bottom insulation layer 120 before compression was greater than that of the top insulation layer 110. Consequently, before compression, the insulation effect of the bottom insulation layer 120 was better than that of the top insulation layer 110. Under the influence of gravity of the furnace tube 2, the bottom insulation layer 120 was compressed. After compression, the thickness of the bottom insulation layer 120 decreased, its thermal conductivity increased, and its insulation effect deteriorated. Therefore, the insulation effect of the compressed bottom insulation layer 120 was the same as or close to that of the top insulation layer 110. Therefore, compared with the case where the materials of the top insulation layer 110 and the bottom insulation layer 120 are the same, and the thickness of the bottom insulation layer 120 before compression is the same as the thickness of the top insulation layer 110, the top insulation layer 110 and the bottom insulation layer 120 provided in this embodiment improve the insulation effect of the bottom insulation layer 120 and the insulation uniformity of the insulation structure 10.
[0042] For example, when the material of the top insulation layer 110 is the same as that of the bottom insulation layer 120, the thickness of each location of the bottom insulation layer 120 before compression is the same, and the thickness of each location of the top insulation layer 110 is the same, to facilitate manufacturing. For example, the thickness ratio of the bottom insulation layer 120 to the top insulation layer 110 before compression is 2:1, 3:1, etc. When the thickness of each location of the bottom insulation layer 120 before compression is the same, and the thickness of each location of the top insulation layer 110 is the same, the maximum thickness of the bottom insulation layer 120 is the same, and the maximum thickness of the top insulation layer 110 is the same.
[0043] For example, the thickness of the bottom insulation layer 120 before compression is different at different locations, the thickness of the top insulation layer 110 is different at different locations, the maximum thickness of the bottom insulation layer 120 is the thickness at the location where the bottom insulation layer 120 has the largest thickness, and the maximum thickness of the top insulation layer 110 is the thickness at the location where the top insulation layer 110 has the largest thickness.
[0044] For example, the top insulation layer 110 and the bottom insulation layer 120 are detachably connected to the top and bottom of the furnace tube 2, respectively, to facilitate replacement and maintenance of the top insulation layer 110 and the bottom insulation layer 120.
[0045] In some embodiments, such as Figure 2 and Figure 3 As shown, the inner end face of the insulation structure 10 has a circular shape, and the cross-sectional shape of the bottom insulation layer 120 includes an irregular fan ring. The thickness of the bottom insulation layer 120 gradually decreases from the middle to both ends along the circumference of the circle.
[0046] For insulation layers of the same material and thickness, the higher the density, the higher the thermal conductivity and the worse the insulation effect. Since the pressure exerted by the annular furnace tube 2 on the center of the bottom insulation layer 120 is the greatest, the compression of the bottom insulation layer 120 is greatest at the center. Therefore, the density of the compressed bottom insulation layer 120 gradually decreases from the center to both ends along the circumference of the circle, and the thickness of the compressed bottom insulation layer 120 also gradually decreases from the center to both ends along the circumference of the circle. This allows the insulation effect of the compressed bottom insulation layer 120 to be similar at all locations, thereby further improving the insulation uniformity of the bottom insulation layer 120.
[0047] For example, the inner end face of the insulation structure 10 is a surface that can contact the outer surface of the furnace tube 2.
[0048] For example, the cross-sectional shape of the top insulation layer 110 includes an arc shape.
[0049] For example, the cross-sectional shape of the top insulation layer 110 before compression is semi-circular, and the cross-sectional shape of the bottom insulation layer 120 is semi-circular or arc-shaped.
[0050] Figure 4 The diagram shown is a schematic diagram of the thermal field structure provided in another embodiment of this disclosure. Figure 5 The image shown is a front view of the thermal insulation structure of the thermal field provided in another embodiment of this disclosure after compression. Figure 4 and Figure 5 As shown, the annular insulation body 100 also includes a first side insulation layer 130 and a second side insulation layer 140. The first side insulation layer 130 is disposed on one side of the receiving cavity 1001, connecting the top insulation layer 110 and the bottom insulation layer 120. The second side insulation layer 140 is disposed opposite to the first side insulation layer 130, connecting the top insulation layer 110 and the bottom insulation layer 120. The material of the top insulation layer 110 is the same as that of the bottom insulation layer 120, and the material of the first side insulation layer 130 is the same as that of the second side insulation layer 140. The thermal conductivity of the material of the top insulation layer 110 is less than that of the material of the first side insulation layer 130, and the thickness of the top insulation layer 110 is less than that of the first side insulation layer 130 and the thickness of the second side insulation layer 140.
[0051] Due to vertical space constraints, the top and bottom spaces are limited, making it impossible to improve the top and bottom insulation performance by increasing the thickness of the top insulation layer 110 and the bottom insulation layer 120. However, the sides have ample space, allowing for improved side insulation performance by increasing the thickness of the first side insulation layer 130 and the second side insulation layer 140. Furthermore, the thermal conductivity of the materials used in the top and bottom insulation layers 110 and 120 is lower than that of the first and second side insulation layers 130 and 140, and the thickness of the top insulation layer 110 is less than that of the first and second side insulation layers 130 and 140. This ensures that the insulation performance of the top insulation layer 110, bottom insulation layer 120, first side insulation layer 130, and second side insulation layer 140 is close to or the same, thereby further improving the insulation uniformity of the insulation structure 10.
[0052] For example, the thickness of the first side insulation layer 130 before compression gradually increases along the direction from the top insulation layer 110 to the bottom insulation layer 120. Therefore, the insulation effect of the first side insulation layer 130 before compression gradually increases along the direction from the top insulation layer 110 to the bottom insulation layer 120, resulting in poor insulation uniformity of the first side insulation layer 130 before compression. Since the pressure of the furnace tube 2 on the first side insulation layer 130 gradually increases along the direction from the top insulation layer 110 to the bottom insulation layer 120, the compression amount of the first side insulation layer 130 gradually increases along the direction from the top insulation layer 110 to the bottom insulation layer 120. This allows the overall thickness of the first side insulation layer 130 after compression to be the same, or the thickness of the first side insulation layer 130 after compression to gradually increase along the direction from the top insulation layer 110 to the bottom insulation layer 120, resulting in better insulation uniformity compared to the insulation uniformity of the first side insulation layer 130 before compression.
[0053] Similarly, the thickness of the second side insulation layer 140 before compression gradually increases from the top insulation layer 110 to the bottom insulation layer 120. Therefore, the insulation effect of the second side insulation layer 140 before compression gradually increases from the top insulation layer 110 to the bottom insulation layer 120, resulting in poor insulation uniformity of the second side insulation layer 140 before compression. Since the pressure of the furnace tube 2 on the second side insulation layer 140 gradually increases from the top insulation layer 110 to the bottom insulation layer 120, the compression amount of the second side insulation layer 140 gradually increases from the top insulation layer 110 to the bottom insulation layer 120. This allows the overall thickness of the second side insulation layer 140 after compression to be the same or the thickness of the second side insulation layer 140 after compression to gradually increase from the top insulation layer 110 to the bottom insulation layer 120. Compared with the insulation uniformity of the second side insulation layer 140 before compression, the insulation uniformity is better.
[0054] In some embodiments, the materials of the top insulation layer 110 and the bottom insulation layer 120 are both aerogel or aerogel fiber.
[0055] In some embodiments, the material of the first side insulation layer 130 and the material of the second side insulation layer 140 are both aluminum silicate fiber.
[0056] Due to limited vertical space and small top and bottom spaces, it is not possible to improve the insulation effect of the top and bottom by increasing the thickness of the top insulation layer 110 and the bottom insulation layer 120. Therefore, the materials of the top insulation layer 110 and the bottom insulation layer 120 are selected with low thermal conductivity and good insulation performance to improve the insulation effect of the top and bottom.
[0057] Since there is ample space on the sides, the materials for the first side insulation layer 130 and the second side insulation layer 140 can be low-cost materials with poor insulation performance. By increasing the thickness of the first side insulation layer 130 and the second side insulation layer 140, the side insulation effect can be improved, and the side insulation effect can be made close to the insulation effect of the top and bottom, thereby improving the insulation uniformity of the insulation structure 10.
[0058] In some embodiments, the thickness of the top insulation layer 110 ranges from 5 mm to 20 mm.
[0059] In some embodiments, the thickness of the bottom insulation layer 120 ranges from 5 mm to 20 mm.
[0060] In some embodiments, the thickness of the first side insulation layer 130 ranges from 5 mm to 20 mm.
[0061] The thickness of the second side insulation layer 140 ranges from 5 mm to 20 mm.
[0062] By setting the thickness range of the top insulation layer 110, the bottom insulation layer 120, the first side insulation layer 130, and the second side insulation layer 140, the insulation effect of the insulation structure 10 can meet the process requirements.
[0063] For example, the thickness of the furnace tube 2 ranges from 30 mm to 60 mm.
[0064] In some embodiments, the maximum thickness of the top insulation layer 110 ranges from 7 mm to 8 mm, the maximum thickness of the bottom insulation layer 120 ranges from 14 mm to 15 mm, the maximum thickness of the first side insulation layer 130 ranges from 19 mm to 20 mm, and the maximum thickness of the second side insulation layer 140 ranges from 19 mm to 20 mm.
[0065] The thickness configuration of the top insulation layer 110, bottom insulation layer 120, first side insulation layer 130 and second side insulation layer 140, as verified by experiments, shows that when the thickness of the furnace tube 2 is 60 mm, the insulation structure 10 has a high insulation effect and good insulation uniformity.
[0066] For example, the maximum thickness of the top insulation layer 110 is 8 mm and 9 cm, the maximum thickness of the bottom insulation layer 120 is 15 mm and 18 cm, the maximum thickness of the first side insulation layer 130 is 19 cm and 20 mm, and the maximum thickness of the second side insulation layer 140 is 19 cm and 20 mm.
[0067] In some embodiments, when the materials of the top insulation layer 110 and the bottom insulation layer 120 are different, the thermal conductivity of the material of the top insulation layer 110 is greater than that of the material of the bottom insulation layer 120 before the bottom insulation layer 120 is compressed.
[0068] When the materials of the top insulation layer 110 and the bottom insulation layer 120 are different, the insulation effect and insulation uniformity of the insulation structure 10 can be adjusted by adjusting the thickness of the top insulation layer 110 and the bottom insulation layer 120 and the thermal conductivity of the materials.
[0069] For example, when the bottom insulation layer 120 and the top insulation layer 110 have the same thickness before compression, the ratio of their thermal conductivity is 1:3, meaning the bottom insulation layer 120 has a better insulation effect than the top insulation layer 110. After compression, the bottom insulation layer 120 has a higher density, higher thermal conductivity, and a thinner thickness, resulting in a worse insulation effect than the bottom insulation layer 120 before compression, but closer to the insulation effect of the top insulation layer 110, thereby improving the insulation uniformity of the insulation structure 10.
[0070] In some embodiments, such as Figures 1 to 5 As shown, the thermal insulation structure 10 also includes an annular thermal insulation body 200. The annular thermal insulation body 200 is connected to the annular thermal insulation body 100 and is disposed between the annular thermal insulation body 100 and the receiving cavity 1001, with the annular thermal insulation body 200 forming the receiving cavity 1001.
[0071] By adding an annular heat insulation body 200, the heat insulation effect of the heat insulation structure 10 is further improved.
[0072] In some embodiments, such as Figure 4 and Figure 6 As shown, the cross-sectional shape of the annular heat insulation body 200 includes an irregularly shaped ring symmetrical with respect to the vertical plane. The top and bottom of the irregularly shaped ring are both straight, and the opposite sides of the irregularly shaped ring are both arc-shaped. The thickness of the portion of the first side insulation layer 130 near the bottom insulation layer 120 is greater than the thickness of the portion of the first side insulation layer 130 near the top insulation layer 110.
[0073] In some embodiments, the thickness of the portion of the second side insulation layer 140 near the bottom insulation layer 120 is greater than the thickness of the portion of the second side insulation layer 140 near the top insulation layer 110.
[0074] When the first side insulation layer 130 is compressed, the portion of the first side insulation layer 130 near the bottom insulation layer 120 experiences greater pressure and compression. Assuming the thickness of the first side insulation layer 130 is the same before compression, the portion of the first side insulation layer 130 near the bottom insulation layer 120 after compression is thinner, denser, has a higher thermal conductivity, and a worse insulation effect compared to the portion of the first side insulation layer 130 near the top insulation layer 110 after compression. The insulation uniformity of the first side insulation layer 130 is also poor.
[0075] Therefore, the portion of the first side insulation layer 130 near the bottom insulation layer 120 before compression is made thicker, resulting in better insulation performance in this portion. The thickness of the portion of the first side insulation layer 130 near the bottom insulation layer 120 after compression is greater than the thickness of the portion near the top insulation layer 110, and the density of the portion near the bottom insulation layer 120 after compression is greater than the density of the portion near the top insulation layer 110. This results in the same or similar insulation performance between the portions of the first side insulation layer 130 near the bottom insulation layer 120 and the portion near the top insulation layer 110 after compression. Compared to the case where the thickness of the first side insulation layer 130 is the same as before compression, the insulation effect of the portion of the first side insulation layer 130 near the bottom insulation layer 120 and the insulation uniformity of the first side insulation layer 130 are improved.
[0076] In addition, when the second side insulation layer 140 is compressed, the portion of the second side insulation layer 140 near the bottom insulation layer 120 is subjected to greater pressure and compression. Assuming the thickness of the second side insulation layer 140 is the same before compression, the portion of the second side insulation layer 140 near the bottom insulation layer 120 after compression is thinner, denser, has a higher thermal conductivity, and a worse insulation effect compared to the portion of the second side insulation layer 140 near the top insulation layer 110 after compression. The insulation uniformity of the first side insulation layer 130 is also poor.
[0077] Therefore, the portion of the second side insulation layer 140 near the bottom insulation layer 120 before compression is made thicker, resulting in better insulation performance in this portion. The thickness of the portion of the second side insulation layer 140 near the bottom insulation layer 120 after compression is greater than the thickness of the portion near the top insulation layer 110, and the density of the portion near the bottom insulation layer 120 after compression is greater than the density of the portion near the top insulation layer 110. This results in the same or similar insulation performance between the portions of the second side insulation layer 140 near the bottom insulation layer 120 and the portion near the top insulation layer 110 after compression. Compared to the case where the thickness of the second side insulation layer 140 is the same as before compression, the insulation effect of the portion of the second side insulation layer 140 near the bottom insulation layer 120 and the insulation uniformity of the second side insulation layer 140 are improved.
[0078] like Figure 1 , Figure 4 , Figure 7 and Figure 8 As shown, the thermal field 1 includes the insulation structure 10, heating element 20, and annular sheet metal part 30 mentioned in the above embodiments. The insulation structure 10 has a receiving cavity 1001, which is configured to receive the furnace tube 2. The insulation structure 10 is configured to insulate the furnace tube 2. The heating element 20 is disposed on the insulation structure 10 and configured to heat the furnace tube 2. The annular sheet metal part 30 is sleeved on the outer side of the insulation structure 10. The annular sheet metal part 30 is used to limit and protect the insulation structure 10, so that the annular insulation body 100 of the insulation structure 10 can be stably maintained on the outer side of the annular heat insulation body 200. In addition, the annular sheet metal part 30 can also reduce heat loss and further improve the insulation effect of the thermal field 1.
[0079] For example, the heating element 20 is disposed on the inner side of the annular heat insulation body 200. For example, a plurality of heating elements 20 are evenly spaced along the circumference of the annular heat insulation body 200, and the heating elements 20 extend in the horizontal direction, which further improves the heating efficiency and heating uniformity of the heating elements 20.
[0080] For example, the heating element 20 may be a heating wire, a heating rod, etc.
[0081] Since thermal field 1 includes insulation structure 10, all the technical features and effects of thermal field 1 and insulation structure 10 will not be described in detail here.
[0082] like Figure 1 , Figure 7 and Figure 8As shown, the heating furnace 123 includes the hot zone 1 and furnace tube 2 mentioned in the above embodiment, with the furnace tube 2 disposed in the hot zone 1.
[0083] For example, the furnace tube 2 is disposed in the receiving cavity 1001 of the hot field 1 and extends in the horizontal direction.
[0084] Since the heating furnace 123 includes the hot zone 1, all the technical features and effects of the heating furnace 123 including the hot zone 1 will not be described in detail here.
[0085] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where the form of detachable engagement is not explicitly limited, a non-detachable connection can be achieved using welding, bonding, etc.
[0086] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.
[0087] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.
[0088] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.
[0089] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.
[0090] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.
Claims
1. A thermal insulation structure, characterized in that, The thermal insulation structure has a receiving cavity, and the thermal insulation structure includes: Circular insulation body; The annular insulation body includes: A top insulation layer is located at the top of the receiving cavity; A bottom insulation layer is located at the bottom of the receiving cavity; Before the bottom insulation layer is compressed, the thermal resistance value of the bottom insulation layer is greater than that of the top insulation layer. The thermal resistance value is used to characterize the ability of the material of the bottom insulation layer or the material of the top insulation layer to prevent heat from passing through per unit area at a certain temperature.
2. The thermal insulation structure according to claim 1, characterized in that, The thermal resistance value is the ratio of the thickness of the insulation layer to the thermal conductivity of the insulation layer. The thermal resistance value is directly proportional to the thickness of the insulation layer and inversely proportional to the thermal conductivity of the insulation layer.
3. The thermal insulation structure according to claim 1, characterized in that, When the material of the top insulation layer is the same as that of the bottom insulation layer, the maximum thickness of the bottom insulation layer is greater than the maximum thickness of the top insulation layer before the bottom insulation layer is compressed.
4. The thermal insulation structure according to claim 3, characterized in that, The inner end face of the insulation structure is circular, the cross-sectional shape of the bottom insulation layer is irregularly shaped fan ring, and the thickness of the bottom insulation layer gradually decreases from the middle to both ends along the circumference of the circle.
5. The thermal insulation structure according to claim 3, characterized in that, The annular insulation body also includes: A first side insulation layer is disposed on one side of the receiving cavity, connecting the top insulation layer and the bottom insulation layer; The second side insulation layer is disposed opposite to the first side insulation layer and connects the top insulation layer and the bottom insulation layer; The material of the top insulation layer is the same as that of the bottom insulation layer, the material of the first side insulation layer is the same as that of the second side insulation layer, and the thermal conductivity of the top insulation layer is less than that of the first side insulation layer. The thickness of the top insulation layer is less than that of the first side insulation layer, and the thickness of the top insulation layer is less than that of the second side insulation layer.
6. The thermal insulation structure according to claim 5, characterized in that, Both the top insulation layer and the bottom insulation layer are made of aerogel or aerogel fiber. And / or, The material of the first side insulation layer and the material of the second side insulation layer are both aluminum silicate fiber.
7. The thermal insulation structure according to claim 5, characterized in that, The thickness of the top insulation layer ranges from 5 mm to 20 mm; and / or The thickness of the bottom insulation layer ranges from 5 mm to 20 mm; and / or The thickness of the first side insulation layer ranges from 5 mm to 20 mm; and / or The thickness of the second side insulation layer ranges from 5 mm to 20 mm.
8. The thermal insulation structure according to claim 7, characterized in that, The maximum thickness of the top insulation layer is 7 mm-8 mm, the maximum thickness of the bottom insulation layer is 14 mm-15 mm, the maximum thickness of the first side insulation layer is 19 mm-20 mm, and the maximum thickness of the second side insulation layer is 19 mm-20 mm.
9. The thermal insulation structure according to claim 1, characterized in that, When the materials of the top insulation layer and the bottom insulation layer are different, before the bottom insulation layer is compressed, the thermal conductivity of the top insulation layer is greater than that of the bottom insulation layer.
10. The thermal insulation structure according to claim 1, characterized in that, The insulation structure also includes: An annular heat insulation body is connected to the annular thermal insulation body and disposed between the annular thermal insulation body and the receiving cavity, wherein the annular heat insulation body forms the receiving cavity.
11. The thermal insulation structure according to claim 5, characterized in that, The thermal insulation structure further includes an annular thermal insulation body, which is connected to the annular thermal insulation body and disposed between the annular thermal insulation body and the receiving cavity, wherein the annular thermal insulation body forms the receiving cavity; the cross-sectional shape of the annular thermal insulation body includes an irregularly shaped ring symmetrical with respect to the vertical plane, the top and bottom of the irregularly shaped ring are both straight, and the opposite sides of the irregularly shaped ring are both arc-shaped. Wherein, the thickness of the portion of the first side insulation layer near the bottom insulation layer is greater than the thickness of the portion of the first side insulation layer near the top insulation layer; and / or, the thickness of the portion of the second side insulation layer near the bottom insulation layer is greater than the thickness of the portion of the second side insulation layer near the top insulation layer.
12. A thermal field, characterized in that, include: The insulation structure according to any one of claims 1 to 11, the insulation structure having a receiving cavity configured to receive a furnace tube, the insulation structure being configured to insulate the furnace tube; A heating element, disposed in the insulation structure, is configured to heat the furnace tube; A ring-shaped sheet metal part is fitted onto the outer side of the insulation structure.
13. A heating furnace, characterized in that, include: The thermal field as described in claim 12; Furnace tubes are installed in the aforementioned hot zone.