Evaporation assembly for a vacuum coater

Abstract

The utility model relates to a kind of evaporation subassemblies of vacuum coating machine, belong to vacuum coating machine technical field, including the outer boat body and inner boat body with inside and outside settings, the bottom end fixedly connected with base of outer boat body, the inside embedded setting of base has heat preservation bottom layer, the both ends embedded setting of outer boat body has mount pad, the inboard fixedly connected with heating source of mount pad, the bottom end fixedly connected with heating plate of heating source, the top of inner boat body is equipped with installation cavity, the inside embedded setting of installation cavity has auxiliary heating plate, the surface fixedly connected with outer insulating layer of outer boat body. Through the outer boat body and inner boat body of inside and outside cover settings cooperate embedded setting auxiliary heating plate, reach the effect that effectively guarantee that evaporation subassembly whole has good heat preservation and heated uniformity, through installation cavity reach the effect that auxiliary heating plate is installed limit, effectively guarantee that heating power distribution is uniform, through outer insulating layer further avoid evaporation subassembly overall heat dissipation, play heat preservation protection effect.

Description

Technical Field

[0001] This invention belongs to the field of vacuum coating machine technology, specifically relating to an evaporation component of a vacuum coating machine. Background Technology

[0002] Vacuum evaporation is widely used to deposit thin films of various metals, alloys, and compounds, and is applied in industries such as optics, electronics, semiconductors, solar energy utilization, light industry, and decoration. Evaporation is one of the earliest and most widely used vapor deposition techniques, offering advantages such as simple film formation methods, high film purity and density, and unique film structure and properties. The materials used in vacuum evaporation are called evaporation materials. During the process, the evaporation material source is generally placed inside an evaporation assembly. After being heated by a heat source, the evaporation material vaporizes and deposits onto the surface of the substrate.

[0003] However, the heating power distribution of the evaporation components in existing vacuum coating machines is not uniform enough during use, making it difficult to ensure the thermal stability of the coating material inside the evaporation boat.

[0004] Therefore, this invention provides an evaporation component for a vacuum coating machine. Utility Model Content

[0005] The purpose of this invention is to provide an evaporation component for a vacuum coating machine that can solve the problems mentioned in the background art.

[0006] The specific technical solution adopted in this utility model is as follows:

[0007] An evaporation assembly for a vacuum coating machine includes an outer boat and an inner boat arranged inside and outside. A base is fixedly connected to the bottom of the outer boat, and an insulation layer is embedded inside the base. Mounting seats are embedded at both ends of the outer boat, and a heating source is fixedly connected to the inner side of the mounting seat. A heating plate is fixedly connected to the bottom of the heating source. An installation cavity is opened at the top of the inner boat, and an auxiliary heating plate is embedded inside the installation cavity. An outer insulation layer is fixedly connected to the surface of the outer boat.

[0008] This utility model is further configured such that the outer and inner boats are arranged in an inner-outer jacket configuration, the base is trapezoidal, and the bottom insulation layer is a ceramic fiber insulation layer, which is located below the heating plate.

[0009] This utility model is further configured such that: the mounting cavity is opened in a ring shape along the top of the inner boat body, and the auxiliary heating plate is set as a ring heating plate corresponding to the mounting cavity, and is located around the outer side of the inner boat body.

[0010] The present invention is further configured such that: the outer insulation layer is arranged around the outer surface of the outer boat body, and its arrangement conforms to the insulation layer, specifically consisting of a multi-layer molybdenum foil inner layer and a graphite felt outer layer, and the outer insulation layer and the outer boat body are fixed together by a metal frame.

[0011] This utility model is further configured such that: the heating source and the mounting base are nested inside each other, and are located at both ends between the inner and outer boat bodies; a connecting wire is provided outside the heating source and passes through the outer boat body; the heating plate is located at the bottom between the inner and outer boat bodies, with both ends bent upwards and electrically connected to the heating source, and is configured as a tungsten wire resistance heating plate.

[0012] The technical effects achieved by this utility model are as follows:

[0013] This utility model discloses an evaporation component for a vacuum coating machine. By using an outer boat and an inner boat with an embedded auxiliary heating plate, the evaporation component can effectively ensure good heat preservation and uniform heating. The mounting cavity can limit the installation of the auxiliary heating plate, effectively ensuring uniform distribution of heating power. The outer insulation layer further prevents the overall heat dissipation of the evaporation component, thus achieving a heat preservation and protection effect.

[0014] This utility model discloses an evaporation component for a vacuum coating machine. It achieves the effect of heating the inner boat body through a heating source and a heating plate. At the same time, its location between the inner and outer boat bodies helps to ensure the heating stability and heat preservation between the inner and outer boat bodies. Attached Figure Description

[0015] Figure 1 This is a front view of the structure of this practical book;

[0016] Figure 2 It is a practical book Figure 1 Enlarged view of the structure at point A in the middle;

[0017] Figure 3 This is a schematic diagram of the overall structure and connection of this practical tool.

[0018] In the diagram: 1. Outer boat body; 2. Base; 3. Mounting seat; 4. Heating source; 5. Heating plate; 6. Insulation layer; 7. Inner boat body; 8. Auxiliary heating plate; 9. Outer insulation layer; 10. Mounting cavity; Detailed Implementation

[0019] To make the purpose and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific implementations of this utility model and does not strictly limit the scope of protection specifically claimed by this utility model.

[0020] like Figure 1As shown, an evaporation assembly for a vacuum coating machine includes an outer boat 1 and an inner boat 7 arranged inside and outside. A base 2 is fixedly connected to the bottom end of the outer boat 1, and a heat-insulating bottom layer 6 is embedded inside the base 2. Mounting seats 3 are embedded at both ends of the outer boat 1. A heating source 4 is fixedly connected to the inner side of the mounting seat 3, and a heating plate 5 is fixedly connected to the bottom end of the heating source 4. An installation cavity 10 is opened at the top end of the inner boat 7, and an auxiliary heating plate 8 is embedded inside the installation cavity 10. An outer heat-insulating layer 9 is fixedly connected to the surface of the outer boat 1.

[0021] like Figure 2-3 As shown, the outer boat 1 and inner boat 7 are arranged in an inner-outer jacket configuration, the base 2 is trapezoidal, the bottom insulation layer 6 is a ceramic fiber insulation layer, which is located below the heating plate 5. The mounting cavity 10 is annularly opened along the top of the inner boat 7, and the auxiliary heating plate 8 is annularly set around the outer side of the inner boat 7, corresponding to the mounting cavity 10. The outer insulation layer 9 is arranged around the outer surface of the outer boat 1, and its arrangement conforms to the insulation layer, specifically consisting of a multi-layer molybdenum foil inner layer and a graphite felt outer layer. The outer insulation layer 9 and the outer boat 1 are fixed together by a metal frame. The outer boat 1 and inner boat 7, arranged in an inner-outer jacket configuration, work together with the embedded auxiliary heating plate 8 to effectively ensure that the evaporation component has good insulation and uniform heating. The mounting cavity 10 serves to limit the installation of the auxiliary heating plate 8, effectively ensuring uniform heating power distribution. The outer insulation layer 9 further prevents the overall heat dissipation of the evaporation component, achieving an insulation and protection effect.

[0022] like Figure 2 As shown, the heating source 4 and the mounting base 3 are nested inside each other, and are located at both ends between the inner boat body 7 and the outer boat body 1. A connecting wire is provided outside the heating source 4, which passes through the outer boat body 1. The heating plate 5 is located at the bottom between the inner and outer boat bodies 1, with both ends bent upwards and electrically connected to the heating source 4. It is set as a tungsten wire resistance heating plate. The heating source 4 and the heating plate 5 work together to achieve the effect of heating the inner boat body 7. At the same time, its location between the inner and outer boat bodies helps to ensure the heating stability and heat preservation between the inner and outer boat bodies 1.

[0023] The working principle of this utility model is as follows: The evaporation assembly is positioned inside an external vacuum coating machine, and the positive and negative terminals of the power supply are connected to the heating source 4. The coating material is placed directly in the inner boat 7. When the coating begins, the external power supply is turned on, and the heating plate 5 between the inner and outer boats and the auxiliary heating plate 8 at the top of the inner boat 7 are heated. The coating material evaporates and adheres to the workpiece to be coated at a lower temperature. Throughout the process, the uniform distribution of heating power can be effectively ensured, while ensuring the thermal stability of the coating material in the evaporation boat.

[0024] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the art.

Claims

1. An evaporation component for a vacuum coating machine, characterized in that: It includes an outer boat body (1) and an inner boat body (7) with inner and outer sides. The bottom end of the outer boat body (1) is fixedly connected to a base (2). The base (2) is embedded with a heat insulation layer (6). Both ends of the outer boat body (1) are embedded with mounting seats (3). The inner side of the mounting seat (3) is fixedly connected to a heating source (4). The bottom end of the heating source (4) is fixedly connected to a heating plate (5). The top end of the inner boat body (7) is provided with a mounting cavity (10). The inside of the mounting cavity (10) is embedded with an auxiliary heating plate (8). The surface of the outer boat body (1) is fixedly connected with an outer heat insulation layer (9).

2. The evaporation assembly of a vacuum coating machine according to claim 1, characterized in that: The outer boat (1) and the inner boat (7) are arranged in an inner and outer sleeve configuration, the base (2) is arranged in a trapezoidal shape, and the heat insulation bottom layer (6) is set as a ceramic fiber heat insulation layer, which is located below the heating plate (5).

3. The evaporation assembly of a vacuum coating machine according to claim 1, characterized in that: The mounting cavity (10) is opened in a ring shape along the top of the inner boat (7), and the auxiliary heating plate (8) is set as a ring heating plate corresponding to the mounting cavity (10), and is located around the outer side of the inner boat (7).

4. The evaporation assembly of a vacuum coating machine according to claim 1, characterized in that: The outer insulation layer (9) is arranged around the outer surface of the outer boat body (1). Its arrangement conforms to the insulation layer, specifically a multi-layer molybdenum foil inner layer and a graphite felt outer layer. The outer insulation layer (9) and the outer boat body (1) are fixed together by a metal frame.

5. The evaporation assembly of a vacuum coating machine according to claim 1, characterized in that: The heating source (4) and the mounting base (3) are nested inside each other, and are located at both ends between the inner boat body (7) and the outer boat body (1). A connecting wire that passes through the outer boat body (1) is provided outside the heating source (4).

6. The evaporation assembly of a vacuum coating machine according to claim 1, characterized in that: The heating plate (5) is located at the bottom between the inner and outer boat bodies (1), with both ends bent upwards and electrically connected to the heating source (4), and is configured as a tungsten wire resistance heating plate.

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