A two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support

Abstract

This utility model discloses a two-dimensional large-angle fast-reflecting mirror device based on a sheet-like flexible support. The flexible support component includes a hollow flexible connecting piece and a flexible connecting rod. One side of the flexible connecting piece is fixedly connected to the mirror assembly, and the other side is fixedly connected to the base. The axis of the flexible connecting rod is perpendicular to the plane of the flexible connecting piece and passes through the center of the flexible connecting piece. One end of the flexible connecting rod is fixedly connected to the center of one side of the mirror assembly, and the other end is fixedly connected to the center of one side of the mirror assembly. An electromagnetic drive component passes through the flexible connecting piece and is fixedly connected to both the mirror assembly and the base. A sensor component is fixed at the center of the base and spaced a first preset distance from the mirror assembly. By adopting a composite support structure of flexible connecting piece and flexible connecting rod and a tilted moving-magnetic drive component in synergy, a large-angle deflection capability on the order of ±10° in two dimensions is achieved.

Description

Technical Field

[0001] This utility model relates to the field of fast reflector technology, and in particular to a two-dimensional large-angle fast reflector device based on a sheet-like flexible support. Background Technology

[0002] Fast-reflecting mirrors (FRMirrors) are core actuators in precision optical systems, achieving rapid, high-frequency deflection of light beams by driving mirror surfaces. They play an irreplaceable role in modern optical engineering. With their compact structure, fast dynamic response, and high positioning accuracy, they are widely used in fields such as space laser communication, adaptive optics correction for astronomical telescopes, high-precision laser processing, and aerospace imaging systems. Traditional FMirrors typically use moving-coil voice coil motors for drive; however, the dragging of moving wires can easily reduce system reliability, and the thermal deformation of the mirror surface caused by coil heating directly affects optical performance.

[0003] In recent years, the development of moving-magnetic fast-reflecting mirror technology has effectively solved the problem of wire interference by using a fixed coil and a movable magnet structure, while reducing the impact of heat conduction on the mirror surface. These devices typically combine flexible supports and eddy current sensors to achieve micro-radian-level angular resolution and high-speed resetting capabilities. However, existing moving-magnetic fast-reflecting mirrors face significant limitations in achieving large-angle two-dimensional deflection: constrained by the magnetic circuit structure and mechanical interference, their maximum deflection angle is usually less than ±5°, making it difficult to meet the demands of cutting-edge applications such as wide-field scanning and large-range tracking.

[0004] Specifically, the parallel arrangement of the permanent magnet and coil in traditional moving magnet designs leads to a sharp change in the magnetic gap during deflection. This not only increases magnetic field loss and reduces driving efficiency, but also poses a risk of mechanical collision between the magnet and coil at larger angles. In addition, the support structure generally uses cross-shaped flexible hinges or ball bearings. The former suffers from multi-axis coupling interference, while the latter suffers from bandwidth limitations, shortened lifespan, and low-temperature failure due to friction and clearance, further restricting the improvement of the deflection angle. Summary of the Invention

[0005] The purpose of this utility model embodiment is to provide a two-dimensional large-angle fast reflector device based on sheet-like flexible support. By adopting a composite support structure of "flexible connecting piece-flexible connecting rod" and a tilted layout of moving magnet electromagnetic drive component, a large-angle deflection capability on the order of ±10° in two dimensions is achieved.

[0006] To solve the above-mentioned technical problems, this utility model provides a two-dimensional large-angle fast reflector device based on a sheet-like flexible support, including: a reflector assembly, an electromagnetic drive assembly, a flexible support assembly, a sensor assembly, and a base;

[0007] The flexible support assembly includes: a hollow flexible connecting piece and a flexible connecting rod. One side of the flexible connecting piece is fixedly connected to the reflector assembly, and the other side of the flexible connecting piece is fixedly connected to the base. The axial direction of the flexible connecting rod is perpendicular to the plane of the flexible connecting piece and passes through the center of the flexible connecting piece. One end of the flexible connecting rod is fixedly connected to the center of one side of the reflector assembly, and the other end of the flexible connecting rod is fixedly connected to the center of one side of the reflector assembly.

[0008] The electromagnetic drive component passes through the flexible connecting piece and is fixedly connected to the reflector assembly and the base, respectively.

[0009] The sensor assembly is fixed at the center of the base and is spaced a first preset distance from the reflector assembly.

[0010] Furthermore, the reflector assembly includes a reflector and a mirror holder that are fixedly connected;

[0011] The flexible connecting piece includes a base ring and several lens holder connectors;

[0012] The base ring is a ring-shaped sheet structure, and the base ring is fixedly connected to the base.

[0013] The mirror holder connector is a sheet-like structure, and several of the mirror holder connectors are respectively fixedly connected to the mirror assembly;

[0014] Each of the aforementioned lens holder connectors is fixedly connected to the inner wall of the base ring via a base ring connecting piece.

[0015] Furthermore, the flexible connecting piece includes four lens holder connectors;

[0016] The four lens holder connectors are evenly arranged around the base ring, and the line connecting two oppositely arranged lens holder connectors is perpendicular to the line connecting the other two oppositely arranged lens holder connectors.

[0017] Furthermore, the base ring connecting piece is an arc-shaped sheet structure, and the arc shape of the base ring connecting piece corresponds to the arc shape of the inner wall of the base ring.

[0018] Furthermore, a first through hole is provided at the center of the lens holder;

[0019] The flexible connecting rod has a cylindrical structure;

[0020] The flexible connecting rod passes through the first through hole and is fixedly connected to the center position of one side of the reflector.

[0021] The flexible connecting rod passes through the side wall at a corresponding position of the first through hole at a predetermined distance from the edge of the first through hole.

[0022] Furthermore, the materials of the flexible connecting piece and the flexible connecting rod include: beryllium copper alloy, stainless steel, titanium alloy or nickel-titanium shape memory alloy.

[0023] Furthermore, the electromagnetic drive assembly includes four electromagnetic drive units, each of which includes a coil and a permanent magnet with the same axial direction.

[0024] One end of the permanent magnet is fixedly connected to the reflector assembly, and the other end is located inside the coil;

[0025] The end of the coil furthest from the permanent magnet is fixedly connected to the base;

[0026] The axial directions of the coil and the permanent magnet are in the same plane as the axial direction of the reflector assembly, and the included angle is a preset angle value.

[0027] The axial distance between the end of the coil closest to the base and the mirror assembly is less than the axial distance between the end of the coil furthest from the base and the mirror assembly.

[0028] Furthermore, the permanent magnet is conical, with the top of the cone located inside the coil.

[0029] Furthermore, the preset angle value is 10°.

[0030] Furthermore, the sensor assembly is disposed at the center of the base and is spaced from the reflector assembly by a second preset distance;

[0031] The sensor assembly has a second through hole at its center, corresponding to the flexible connecting rod.

[0032] The flexible connecting rod passes through the second through hole and is fixedly connected to the reflector assembly and the base respectively.

[0033] The above-described technical solution of this utility model embodiment has the following beneficial technical effects:

[0034] 1. The composite support design of flexible connecting plates and flexible connecting rods significantly improves deflection stability and mirror positioning accuracy. During mirror deflection, the flexible structure generates a self-resetting force, effectively suppressing overshoot in closed-loop control. Compared to the friction, clearance, and low-temperature jamming defects of traditional bearings, this design achieves frictionless, zero-clearance movement with micro-radian level repeatability, and requires no lubrication, extending service life in vacuum / low-temperature environments and completely eliminating the constraint of mechanical wear on system reliability.

[0035] 2. By integrating the moving magnet drive assembly and the eddy current sensor at the bottom, the axial space of the device is significantly compressed, creating an ultra-large deflection range of ±10° for the reflector. The innovative design of a 10° tilted coil and a conical permanent magnet eliminates cable dragging interference while dynamically constructing avoidance space using the magnet taper and coil tilt angle, ensuring a safe clearance even at the maximum deflection angle and completely eliminating the risk of magnetic circuit collision. Simultaneously, the magnetic gap distribution is optimized to improve driving force efficiency and ensure linear torque output and motion accuracy under large-angle deflection conditions. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the overall structure of a two-dimensional large-angle fast-reflecting mirror device based on a sheet-like flexible support, provided in one embodiment of this utility model.

[0037] Figure 2 This is a side cross-sectional view of the overall structure of the two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support of this utility model.

[0038] Figure 3 This is a schematic diagram of the flexible connecting piece in the two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support of this utility model;

[0039] Figure 4 This is a schematic diagram of the bottom of the mirror support in the two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support of this utility model;

[0040] Figure 5 This is a front sectional view of the base structure of the two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support of this utility model.

[0041] Figure 6 This is a schematic diagram of the sensor assembly in the two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support of this utility model;

[0042] Figure 7 This is a block diagram showing the input-output relationship of the two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support of this utility model.

[0043] Figure label:

[0044] 1. Reflector lens; 2. Mirror holder; 3. Flexible connecting piece; 4. Flexible connecting rod; 5. Permanent magnet; 6. Coil; 7. Sensor assembly; 8. Base; 9. Communication cable; 10. Circuit board; 11. Bottom cover; 12. Eddy current sensor probe; 13. FPC communication cable; 14. Eddy current sensor circuit board; 15. Base ring (15); 16. Mirror holder connector (16); 17. Base ring connecting piece. Detailed Implementation

[0045] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0046] Please refer to Figure 1 , Figure 2 and Figure 3 This utility model provides a two-dimensional large-angle fast reflector device based on a sheet-like flexible support, including: a reflector assembly, an electromagnetic drive assembly, a flexible support assembly, a sensor assembly 7, and a base 8. The flexible support assembly includes: a hollow flexible connecting piece 3 and a flexible connecting rod 4. One side of the flexible connecting piece 3 is fixedly connected to the reflector assembly, and the other side is fixedly connected to the base 8. The axial direction of the flexible connecting rod 4 is perpendicular to the plane of the flexible connecting piece 3 and passes through the center of the flexible connecting piece 3. One end of the flexible connecting rod 4 is fixedly connected to the center of one side of the reflector assembly, and the other end is fixedly connected to the center of one side of the reflector assembly. The electromagnetic drive assembly passes through the flexible connecting piece 3 and is fixedly connected to both the reflector assembly and the base 8. The sensor assembly 7 is fixedly mounted at the center of the base 8 and spaced a first preset distance from the reflector assembly.

[0047] The aforementioned fast reflector device achieves motion decoupling and precision improvement through a composite flexible support system. The flexible connecting piece 3 adopts a thin sheet structure, with its inner and outer rings respectively screwed to fix the mirror support 2 and the base 8, giving the reflector elastic degrees of freedom in the X / Y directions. The self-resetting force generated during deflection effectively suppresses closed-loop overshoot. The flexible connecting rod 4, which runs through the center of the mirror support 2, the sensor, and the base 8, has a diameter of 0.25mm and axially constrains the Z degree of freedom, eliminating the risk of mirror tilt. It replaces traditional mechanical bearings with elastic deformation, achieving frictionless and zero-backlash motion, and completely solving the bottlenecks of low-temperature jamming and lifespan.

[0048] Specifically, the reflector assembly is disposed on top of the flexible support assembly for reflecting the light beam; the flexible support assembly is disposed at the center between the reflector assembly and the base 8; the moving magnet electromagnetic drive assembly is distributed around the center of the base 8 and is used to drive the reflector assembly to deflect at a set angle; the sensor assembly 7 is disposed between the reflector assembly and the base 8 and maintains a first preset distance from the center of the reflector assembly for measuring the angle deflection of the reflector assembly.

[0049] Further, please refer to Figure 4The reflector assembly includes a reflector and a support 2 fixedly connected. The reflector assembly includes a reflector lens 1 and a support 2. The reflector lens 1 is fixed to the support 2 and moves together with the support 2. The sides between the reflector lens 1 and the support 2 can be, but are not limited to, using epoxy resin, polyurethane, acrylic, silicone, or other adhesives for fixing. Preferably, in this embodiment, the sides between the reflector lens 1 and the support 2 are bonded with silicone around the perimeter. The diameter of the reflector lens 1 is 40mm ± 0.05mm. The thickness of the lens can be selected from 1.8mm, 2mm, 2.2mm, etc., with a typical thickness of 1.8mm ± 0.05mm. The lens substrate material can be any reflector material such as fused silica, K9, or aluminum, with fused silica being a typical choice. The reflector lens 1 is coated with a silver film.

[0050] The flexible support assembly employs a flexible connecting piece 3 and a flexible connecting rod 4. The flexible connecting piece 3 is positioned between the base 8 and the reflector assembly. Its top end is secured to the mirror holder 2 with four 1.6mm diameter, 3mm threaded head screws, and its bottom end is secured to the base 8 with four 1.6mm diameter, 5mm threaded head screws. The flexible connecting piece 3 has a curved structure, providing perimeter support and providing freedom of movement in the X / Y working directions of the reflector while restricting freedom of movement in non-working directions.

[0051] The lens holder 2 is connected to the flexible connecting piece 3 by four hexagon socket head cap screws, which are secured with thread-locking adhesive. The lens holder 2 can be made of, but is not limited to, aluminum alloys such as AL6061-T6, titanium alloys such as Ti-6Al-4V, beryllium aluminum alloys (such as AlBeMet), carbon fiber reinforced polymer (CFRP), and Invar alloys (such as Fe-Ni 36%). Preferably, the lens holder 2 is made of aluminum alloys such as AL6061-T6.

[0052] Preferably, the flexible connecting piece 3 used in this embodiment has a thickness of 0.15 mm and an shape as shown in the figure. Figure 4 As shown, the connecting holes are divided into inner and outer rings. The outer ring connecting holes are used to connect with the base 8, and the inner ring connecting holes are used to connect with the mirror holder 2. The inner and outer ring connecting holes are connected by four curved structures. The flexible connecting rod 4 has a diameter of 0.25 mm and passes through the through hole of the sensor assembly 7, the mirror holder 2, and the center through hole of the base 8.

[0053] In one specific implementation, such as Figure 3 As shown, the flexible connecting piece 3 includes a base ring 15 and several mirror support connectors 16; the base ring 15 is an annular sheet structure and is fixedly connected to the base 8; the mirror support connectors 16 are sheet structures and several mirror support connectors (16) are fixedly connected to the mirror assembly respectively; each mirror support connector (16) is fixedly connected to the inner wall of the base ring 15 through a base ring connecting piece 17.

[0054] Preferably, the flexible connecting piece 3 includes four lens holder connectors 16; the four lens holder connectors 16 are evenly arranged in the circumferential position of the base ring 15, and the line connecting two oppositely arranged lens holder connectors 16 is perpendicular to the connection of the other two oppositely arranged lens holder connectors 16.

[0055] The flexible connecting piece 3 achieves motion decoupling and stress optimization through the split structure of the base ring 15 and the mirror holder connector 16: the annular base ring 15 is fixed to the base 8 to provide overall support rigidity, and the four arc-shaped mirror holder connectors 16 are symmetrically connected to the mirror holder 2 in a central radial pattern. Each connector is integrally formed with the inner wall of the base ring 15 through a thin sheet with a gradually varying curvature. This structure absorbs deformation energy through the elastic bending of the arc-shaped sheet during X / Y deflection, so that a linear restoring torque is generated uniformly in four directions. This not only eliminates the inter-axial coupling interference of traditional cross hinges, but also avoids fatigue fracture caused by stress concentration. At the same time, the split layout releases thermal expansion tolerance, maintains mirror surface stability in the operating temperature range, and improves the service life of the integral flexible support.

[0056] Furthermore, the base ring connecting piece 17 is an arc-shaped sheet structure, and the arc shape of the base ring connecting piece 17 corresponds to the arc shape of the inner wall of the base ring 15.

[0057] Furthermore, such as Figure 4 As shown, the mirror holder 2 has a first through hole at its center; the flexible connecting rod 4 is a cylindrical structure; the flexible connecting rod 4 passes through the first through hole and is fixedly connected to the center of one side of the mirror; the side wall of the flexible connecting rod 4 at the corresponding position of the first through hole is spaced at a preset distance from the edge of the first through hole.

[0058] Optionally, the materials for the flexible connecting piece 3 and the flexible connecting rod 4 include: beryllium copper alloy, stainless steel, titanium alloy or nickel-titanium shape memory alloy.

[0059] The flexible connecting piece 3 and the flexible connecting rod 4 can be made of materials such as beryllium copper alloys (BeCu, C17200), stainless steel (17-4PH, 304, 316), titanium alloys (Ti-6Al-4V, Grade 5), and nickel-titanium shape memory alloys (Nitinol, NiTi). Preferably, in this embodiment, 304 stainless steel is used.

[0060] In this embodiment of the invention, the electromagnetic drive assembly includes four electromagnetic drive units. Each electromagnetic drive unit includes a coil 6 and a permanent magnet 5 with the same axial direction. One end of the permanent magnet 5 is fixedly connected to the reflector assembly, and the other end is located inside the coil 6. The end of the coil 6 away from the permanent magnet 5 is fixedly connected to the base 8. The axial directions of the coil 6 and the permanent magnet 5 are in the same plane as the axial direction of the reflector assembly, and the included angle is a preset angle value. The distance between the end of the coil 6 near the base 8 and the axial direction of the reflector assembly is less than the distance between the end of the coil 6 away from the base 8 and the axial direction of the reflector assembly. Optionally, the preset angle value is 10°. Further, the permanent magnet 5 is conical, and the top of the cone is located inside the coil 6.

[0061] The innovative spatial configuration of the moving magnetic drive assembly breaks through the deflection angle limit. Coil 6 is fixed to the mounting slot of base 8 at a 10° outward tilt angle, while the conical permanent magnet 5 is glued to the bottom of mirror holder 2 at a corresponding 10° inward tilt angle, forming a "V"-shaped adaptive magnetic gap. During deflection, the magnet's taper and the coil 6's tilt angle dynamically coordinate, maintaining a 0.2mm safety gap even at a maximum deflection angle of ±10°, preventing magnetic circuit collisions. Optimized magnetic gap distribution improves driving force efficiency by 35%, ensuring linear torque output at large angles. The integrated layout at the bottom simultaneously compresses axial space by 40%, releasing the mirror's movement margin.

[0062] In one specific embodiment, the electromagnetic drive assembly includes four permanent magnets 5 and four coils 6. The four coils 6 are respectively embedded and fixed in the base 8 and located around the flexible support assembly. The permanent magnets 5 are correspondingly arranged in the coils 6 and are connected to the bottom of the mirror holder 2. Each drive assembly is symmetrically arranged in pairs around the central axis of the reflector assembly, so that the force in all directions is balanced and the accuracy is high when the reflector assembly deflects.

[0063] Coil 6 is tilted outward at a certain angle and fixed to base 8, that is, tilted in the direction extending outward from base 8. Permanent magnets 5 are correspondingly arranged inside coil 6. This arrangement can reduce the amount of air passing through it. The technical effect is that when the motor drives the reflector assembly to deflect, it effectively reduces the loss of the magnetic field in the air, improves the motor driving efficiency, and can obtain a larger deflection angle.

[0064] The material of coil 6 can be, but is not limited to, conductive materials such as copper, aluminum, iron, silver, and gold. Preferably, in this embodiment, copper enameled wire is used as the material of coil 6.

[0065] Preferably, in this embodiment, each coil 6 frame is tilted outward at an angle of 10° to the vertical direction and is bonded to the side wall of the base 8 by injecting epoxy resin.

[0066] The bottom part of the permanent magnet 5 near the coil 6 and the base 8 is conical in shape, or a combination of conical and arc-shaped. At the same time, the permanent magnet 5 is also fixed to the mirror support 2 at a certain angle inward, just like the coil 6. The purpose is to ensure that the diameter of the bottom of the permanent magnet 5 gradually decreases, so as to avoid the bottom of the permanent magnet 5 contacting the inner wall of the coil 6 when driving the mirror assembly to deflect, thus affecting the deflection angle and accuracy of the mirror assembly.

[0067] The permanent magnet 5 can be made of magnetic materials such as AlNiCo, FeChCrCo, ferrite, SamariumCo, and Neodymium Iron Boron. Preferably, in this embodiment, Neodymium Iron Boron is used as the permanent magnet 5 material.

[0068] Preferably, in this embodiment, each permanent magnet 5 is tilted inward at an angle of 10° to the vertical direction and is bonded to the bottom of the mirror holder 2 with epoxy resin, thus fixing it in the corresponding groove at the bottom of the mirror holder 2. When the permanent magnet 5 is located in the corresponding groove of the coil 6 frame, it does not contact the coil 6 frame within the allowable deflection range.

[0069] The base 8 has mounting slots corresponding to the moving magnet electromagnetic drive components. These mounting slots are angled, their shape and angle corresponding to the coil 6. This design ensures a close fit between the coil 6 and the mounting slots on the base 8, making the voice coil motor more stable during installation and operation, improving its output efficiency, and allowing for faster and more precise deflection of the reflector assembly. Simultaneously, the angled design of the electromagnetic drive component coil 6 causes the bottom of the base 8 to contract, further saving space and making the structure more compact. Furthermore, the base 8 has a bottom cover 11.

[0070] It should be noted that, please refer to Figure 5 The coil 6 is fixed to the mounting groove of the base 8 by epoxy resin bonding to the side wall of the base 8. The bottom of the base 8 is a rounded rectangle with a length of 59mm, a width of 20mm, and a chamfer of 4mm. There are two pairs of mounting holes on each side of the bottom of the base 8, each pair containing two 3.5mm diameter holes. The center distance between a pair of mounting holes is 12mm, and the center distance between the two pairs of mounting holes is 52mm. The distance from the center of the mounting hole to the short side of the bottom of the base 8 is 3.5mm, and the distance to the long side is 4mm. With the mirror facing forward, the right side of the bottom of the base 8 has an elliptical pin with a major axis of 4mm and a minor axis of 3mm, and the left side has a circular pin with a diameter of 3mm. The distance between the center lines of the two pins is 38mm, and the distance from the short side of the bottom is 5.5mm. They are positioned symmetrically along the two center lines of the bottom.

[0071] The aforementioned electromagnetic drive assembly is controlled by a host computer via a communication cable 9. The communication cable 9 is connected to a circuit board, and the circuit board 10 transmits current to the coil 6 of the moving magnet electromagnetic drive assembly. The coil 6 drives the permanent magnet 5 to deflect the mirror.

[0072] Further, please refer to Figure 6 The sensor assembly 7 is positioned at the center of the base 8 and spaced a second preset distance from the reflector assembly. A second through hole, corresponding to the flexible connecting rod 4, is located at the center of the sensor assembly 7. The flexible connecting rod 4 passes through the second through hole and is fixedly connected to both the reflector assembly and the base 8. By providing the second through hole at the center of the sensor assembly 7, the flexible connecting rod 4 passes through the through hole of the sensor assembly 7, the mirror holder 2, and the center through hole of the base 8. Its top end connects to the bottom of the reflector lens 1, and its bottom end connects to the base 8, and they are fixed together using epoxy resin adhesive. The flexible connecting rod 4 restricts the Z-direction freedom of the fast-reflecting mirror, preventing the reflector assembly from popping out.

[0073] The eddy current sensor probe 12 in sensor assembly 7 uses an existing 4-in-1 probe. Sensor assembly 7 contains two pairs of sensor probes, each pair symmetrically arranged around the center position of the reflector assembly. In a preferred embodiment, sensor assembly 7 contains four sensor probes, symmetrically arranged in pairs around the center position axis of the reflector assembly. These four sensor probes can measure the deflection of the reflector assembly in four directions. It should be noted that the number of sensors is not limited here; the number of sensors can be increased as long as it meets the requirements for measuring and providing feedback on the deflection of the reflector assembly.

[0074] Specifically, the sensor assembly 7 includes an eddy current sensor probe 12, an FPC communication cable 13, and an eddy current sensor circuit board 14. The sensor assembly 7 is fixed to the center of the base 8 by epoxy resin bonding within an injection groove on the back of the base 8. Preferably, the sensor assembly 7 is fixed to the center of the base 8 using auxiliary pins for fixing the sensor position on the base 8 and 1.6mm diameter, 5mm nominal length Phillips head screws. The eddy current sensor probe 12 is connected to the eddy current sensor circuit board 14 and to the circuit board 10 via the FPC communication cable 13. Two FPC communication cables 13 are used, each transmitting signals from one pair of eddy current sensor probes 12.

[0075] Sensor assembly 7 achieves micro-radius level detection through a symmetrical differential architecture. Four eddy current probes are symmetrically arranged in pairs directly below the reflector, with the probe axes coinciding with the rotation center to eliminate measurement cosine errors. Differential processing of the symmetrical probe signals can suppress common-mode interference such as thermal drift. Combined with the positioning accuracy of the flexible support, a highly stable closed-loop control is formed.

[0076] In addition, please refer to Figure 7Both the sensor assembly 7 and the coil 6 of the moving-magnet electromagnetic drive assembly are soldered to the circuit board 10, enabling the acquisition of measurement data from the sensor assembly 7 and the control of the moving-magnet electromagnetic drive assembly. In this embodiment, the circuit board 10 has functions such as differential output, signal amplification, and noise filtering. Through the above settings, in the entire system, the sensor, in conjunction with the circuit board 10, acquires the deflection information of the reflector assembly and converts it into an electrical signal. Then, through the communication cable 9, it measures the rotation angle information of the fast-reflecting mirror and directly feeds it back to the user as an analog signal.

[0077] This utility model embodiment aims to protect a two-dimensional large-angle fast-reflecting mirror device based on a sheet-like flexible support, which has the following effects:

[0078] 1. The composite support design of flexible connecting plates and flexible connecting rods significantly improves deflection stability and mirror positioning accuracy. During mirror deflection, the flexible structure generates a self-resetting force, effectively suppressing overshoot in closed-loop control. Compared to the friction, clearance, and low-temperature jamming defects of traditional bearings, this design achieves frictionless, zero-clearance movement with micro-radian level repeatability, and requires no lubrication, extending service life in vacuum / low-temperature environments and completely eliminating the constraint of mechanical wear on system reliability.

[0079] 2. By integrating the moving magnet drive assembly and the eddy current sensor at the bottom, the axial space of the device is significantly compressed, creating an ultra-large deflection range of ±10° for the reflector. The innovative design of a 10° tilted coil and a conical permanent magnet eliminates cable dragging interference while dynamically constructing avoidance space using the magnet taper and coil tilt angle, ensuring a safe clearance even at the maximum deflection angle and completely eliminating the risk of magnetic circuit collision. Simultaneously, the magnetic gap distribution is optimized to improve driving force efficiency and ensure linear torque output and motion accuracy under large-angle deflection conditions.

[0080] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation of this utility model. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model should be covered within the protection scope of the claims of this utility model.

Claims

1. A two-dimensional large-angle fast-reflecting mirror device based on a sheet-like flexible support, characterized in that, include: The reflector assembly, the electromagnetic drive assembly, the flexible support assembly, the sensor assembly (7), and the base (8); The flexible support assembly includes: a hollow flexible connecting piece (3) and a flexible connecting rod (4). One side of the flexible connecting piece (3) is fixedly connected to the reflector assembly, and the other side of the flexible connecting piece (3) is fixedly connected to the base (8). The axial direction of the flexible connecting rod (4) is perpendicular to the plane where the flexible connecting piece (3) is located and passes through the center of the flexible connecting piece (3). One end of the flexible connecting rod (4) is fixedly connected to the center of one side of the reflector assembly, and the other end of the flexible connecting rod (4) is fixedly connected to the center of one side of the reflector assembly. The electromagnetic drive assembly passes through the flexible connecting piece (3) and is fixedly connected to the reflector assembly and the base (8) respectively; The sensor assembly (7) is fixed at the center of the base (8) and spaced a first preset distance from the reflector assembly.

2. The two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support according to claim 1, characterized in that, The mirror assembly includes a mirror and a mirror holder (2) that are fixedly connected; The flexible connecting piece (3) includes a base ring (15) and several lens holder connectors (16); The base ring (15) is an annular sheet structure, and the base ring (15) is fixedly connected to the base (8); The mirror support connector (16) is a sheet-like structure, and several of the mirror support connectors (16) are respectively fixedly connected to the mirror assembly; Each of the aforementioned lens holder connectors (16) is fixedly connected to the inner wall of the base ring (15) via a base ring connector (17).

3. The two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support according to claim 2, characterized in that, The flexible connecting piece (3) includes four mirror holder connectors (16); The four lens holder connectors (16) are evenly arranged on the circumferential position of the base ring (15), and the line connecting two oppositely arranged lens holder connectors (16) is perpendicular to the line connecting the other two oppositely arranged lens holder connectors (16).

4. The two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support according to claim 2, characterized in that, The base ring connecting piece (17) is an arc-shaped sheet structure, and the arc shape of the base ring connecting piece (17) corresponds to the arc shape of the inner wall of the base ring (15).

5. The two-dimensional large-angle fast-reflecting mirror device based on a sheet-like flexible support according to claim 4, characterized in that, The mirror holder (2) has a first through hole at its center; The flexible connecting rod (4) has a cylindrical structure; The flexible connecting rod (4) passes through the first through hole and is fixedly connected to the center position of one side of the reflector; The flexible connecting rod (4) passes through the side wall of the corresponding position of the first through hole at a predetermined distance from the edge of the first through hole.

6. The two-dimensional large-angle fast-reflecting mirror device based on sheet-like flexible support according to claim 5, characterized in that, The materials of the flexible connecting piece (3) and the flexible connecting rod (4) include: beryllium copper alloy, stainless steel, titanium alloy or nickel-titanium shape memory alloy.

7. The two-dimensional large-angle fast-reflecting mirror device based on a sheet-like flexible support according to claim 1, characterized in that, The electromagnetic drive assembly includes four electromagnetic drive units, each of which includes a coil (6) and a permanent magnet (5) with the same axial direction. One end of the permanent magnet (5) is fixedly connected to the reflector assembly, and the other end is located inside the coil (6); The end of the coil (6) away from the permanent magnet (5) is fixedly connected to the base (8); The axial directions of the coil (6) and the permanent magnet (5) are in the same plane as the axial direction of the reflector assembly and the included angle is a preset angle value. The axial distance between the end of the coil (6) near the base (8) and the mirror assembly is less than the axial distance between the end of the coil (6) away from the base (8) and the mirror assembly.

8. The two-dimensional large-angle fast-reflecting mirror device based on a sheet-like flexible support according to claim 7, characterized in that, The permanent magnet (5) is conical, and the top of the cone is located inside the coil (6).

9. The two-dimensional large-angle fast-reflecting mirror device based on a sheet-like flexible support according to claim 7, characterized in that, The preset angle value is 10°.

10. The two-dimensional large-angle fast-reflecting mirror device based on a sheet-like flexible support according to any one of claims 1-9, characterized in that, The sensor assembly (7) is located at the center of the base (8) and is spaced from the reflector assembly by a second preset distance; The sensor assembly (7) has a second through hole at its center, corresponding to the flexible connecting rod (4); The flexible connecting rod (4) passes through the second through hole and is fixedly connected to the reflector assembly and the base (8) respectively.

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