A waste liquid recovery control system

By adding a waste liquid recovery cabinet and a new I/O panel to the chemical supply system, with a built-in PLC device and relay coil, the problem of signal conflict between the waste liquid recovery system and the original supply system was solved, achieving stable signal switching and automatic control, and avoiding modification of the original system program.

CN224436796UActive Publication Date: 2026-06-30ZHEJIANG DONGKAI SEMICONDUCTOR EQUIPMENT CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
ZHEJIANG DONGKAI SEMICONDUCTOR EQUIPMENT CO LTD
Filing Date
2025-07-30
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

In existing chemical supply systems, waste liquid recycling and treatment causes signal conflicts with the original supply system, resulting in signal instability.

Method used

A waste liquid recovery cabinet and a new I/O panel are added to the original supply system, with a built-in PLC device and relay coil to achieve automatic signal switching and stable control, avoiding the need to modify the original supply system program.

Benefits of technology

Stable signal switching after waste liquid recycling and treatment was achieved, avoiding modifications to the original supply system program and ensuring the normal operation of the automatic signal switching function.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

This utility model application provides a waste liquid recovery control system, relating to the field of chemical conveying technology. The waste liquid recovery control system includes: a waste liquid recovery cabinet, a new I / O panel, an original I / O panel, a process machine, a VMB (Variable Energy Machine), a T-BOX (Transfer Box), and a chemical conveying unit. The waste liquid recovery cabinet is connected to the new I / O panel. The waste liquid recovery cabinet has a built-in PLC device, and the new I / O panel has a built-in relay coil. The PLC device is electrically connected to the process machine, VMB, and T-BOX through the relay coil. The VMB and T-BOX have built-in solenoid valves and leakage sensors. Beneficial effects: It solves the signal conflict problem between the waste liquid recovered and treated as raw material supply and the original supply system, achieving stable signal switching, and also enables automatic switching without modifying the original supply system's program.
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Description

Technical Field

[0001] This utility model application relates to the field of chemical transportation technology, specifically to a waste liquid recovery control system. Background Technology

[0002] In the existing chemical supply system, the original supply system used after waste liquid recycling and treatment includes the original IO panel, process equipment, VMB, T-BOX, and chemical delivery unit. However, the original supply system has a problem of signal conflict between the waste liquid recycling signal and the original supply system signal. Utility Model Content

[0003] To address the issues in the background technology, a waste liquid recovery cabinet and a new I / O disk are added to the original supply system to obtain a waste liquid recovery control system. This not only solves the signal conflict between the waste liquid recovery and treatment as raw material supply and the original supply system, achieving stable signal switching, but also enables automatic switching without modifying the original supply system's program.

[0004] The waste liquid recycling control system includes:

[0005] The system includes a waste liquid recovery cabinet, a new IO panel, an original IO panel, a process machine, a VMB, a T-BOX, and a chemical conveying unit. The waste liquid recovery cabinet is connected to the new IO panel, and the new IO panel is connected to the original IO panel, the process machine, the VMB, the T-BOX, and the chemical conveying unit, respectively.

[0006] The waste liquid recovery cabinet has a built-in PLC device, and the new IO panel has N built-in relay coils. The PLC device is electrically connected to the process machine, VMB, and T-BOX through the relay coils respectively.

[0007] The VMB and T-BOX have built-in solenoid valves and leakage sensors.

[0008] Optionally, the waste liquid recycling cabinet also includes a switching power supply and a rotary switch, and the input terminal of the PLC device is electrically connected to the switching power supply via the rotary switch.

[0009] Optionally, the new I / O disk includes a first relay coil, a second relay coil, a third relay coil, a fourth relay coil, a fifth relay coil, and a sixth relay coil. The first relay coil includes a first pin, a second pin, a third pin, a fifth pin, a sixth pin, a seventh pin, a ninth pin, a tenth pin, an eleventh pin, a thirteenth pin, and a fourteenth pin. The second relay coil includes a first pin, a second pin, a third pin, a fourth pin, a fifth pin, a thirteenth pin, and a fourteenth pin. The fourth relay coil includes a fifth pin, a sixth pin, a ninth pin, a tenth pin, a thirteenth pin, and a fourteenth pin. The fifth relay coil includes a first pin, a second pin, a third pin, a fourth pin, a fifth pin, a sixth pin, a seventh pin, an eighth pin, a ninth pin, a tenth pin, an eleventh pin, a twelfth pin, a thirteenth pin, and a fourteenth pin. The sixth relay coil includes a fifth pin, a ninth pin, a thirteenth pin, and a fourteenth pin.

[0010] Optionally, the waste liquid recycling control system includes a leakage sensor control unit, which includes a waste liquid recycling cabinet, a first relay coil, a primary I / O panel, and a leakage sensor. The input terminal of the PLC device is connected to the seventh pin of the first relay coil, and the output terminal of the PLC device is connected to the thirteenth pin of the first relay coil. The first output terminal of the switching power supply is connected to the fifth pin of the first relay coil, and the second output terminal of the switching power supply is connected to the sixth and fourteenth pins of the first relay coil, respectively. The leakage sensor is connected to the ninth, tenth, and eleventh pins of the first relay coil, respectively, and the primary I / O panel is connected to the first, second, and third pins of the first relay coil, respectively.

[0011] Optionally, the leakage sensor is the first leakage sensor of the VMB or the second leakage sensor of the T-BOX.

[0012] Optionally, the waste liquid recovery control system further includes a VMB solenoid valve control unit. The VMB solenoid valve control unit includes: a waste liquid recovery cabinet, a second relay coil, a third relay coil, a primary I / O panel, and a VMB solenoid valve. The output terminals of the PLC device are respectively connected to the fifth, sixth, seventh, eighth, and thirteenth pins of the second relay coil and the thirteenth pin of the third relay coil. The output terminals of the switching power supply are connected to the fifth and fourteenth pins of the third relay coil and the fourteenth pin of the second relay coil. The primary I / O panel is respectively connected to the first, second, third, and fourth pins of the second relay coil and the first pin of the third relay coil. The VMB solenoid valve is respectively connected to the ninth, tenth, eleventh, and twelfth pins of the second relay coil and the ninth pin of the third relay coil.

[0013] Optionally, the waste liquid recycling control system further includes a T-BOX solenoid valve control unit, which includes a waste liquid recycling cabinet, a fourth relay coil, and a T-BOX solenoid valve. The output terminals of the PLC device are respectively connected to the fifth, sixth, and thirteenth pins of the fourth relay coil, the output terminal of the switching power supply is connected to the fourteenth pin of the fourth relay coil, and the T-BOX solenoid valve is respectively connected to the ninth, tenth, and fourteenth pins of the fourth relay coil.

[0014] Optionally, the waste liquid recovery control system further includes a process machine control unit, which includes: a waste liquid recovery cabinet, a fifth relay coil, a sixth relay coil, an original I / O panel, and a process machine. The output terminals of the PLC device are respectively connected to the fifth and thirteenth pins of the fifth relay coil and the thirteenth pin of the sixth relay coil. The output terminals of the switching power supply are connected to the fourteenth, sixth, and fourteenth pins of the fifth and sixth relay coils. The process machine is respectively connected to the ninth, tenth, eleventh, and twelfth pins of the fifth relay coil.

[0015] Optionally, the process equipment includes an internal drive device and an internal detection device. The internal drive device includes a first switch and is electrically connected to the ninth and tenth pins of the fifth relay coil. The internal detection device includes a second switch and is electrically connected to the eleventh and twelfth pins of the fifth relay coil.

[0016] Beneficial effects:

[0017] The waste liquid recovery control system, which adds a waste liquid recovery cabinet and a new IO disk to the original supply system, solves the signal conflict problem between the waste liquid recovery and treatment as raw material supply and the original supply system, and achieves stable signal switching.

[0018] The waste liquid recovery control system can automatically switch between the original supply system and the waste liquid recovery control system without modifying the original supply system's program. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the waste liquid recycling control system described in this utility model;

[0021] Figure 2 This is a schematic diagram of the structure of the leakage sensor control unit described in this utility model;

[0022] Figure 3 This is a schematic diagram of the VMB solenoid valve control unit structure described in this utility model;

[0023] Figure 4 This is a schematic diagram of the structure of the T-BOX solenoid valve control unit described in this utility model;

[0024] Figure 5 The process machine control unit described in this utility model;

[0025] Figure label:

[0026] 1 represents the new IO panel, 2 represents the waste liquid recovery cabinet, 3 represents the original IO panel, 4 represents the process machine, 5 represents the chemical delivery unit, 6 represents VMB, 7 represents T-BOX, 8 represents the first leakage sensor, 9 represents the VMB solenoid valve, 10 represents the T-BOX solenoid valve, 11 represents the second leakage sensor, 12 represents the PLC device, 13 represents the switching power supply, 14 represents the rotary switch, 15 represents the first relay coil, 16 represents the second relay coil, 17 represents the third relay coil, 18 represents the fourth relay coil, 19 represents the fifth relay coil, and 20 represents the sixth relay coil. Detailed Implementation

[0027] To make the technical solution of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0029] Example 1: A waste liquid recovery control system

[0030] The aforementioned waste liquid recovery control system, such as Figure 1 As shown, it includes:

[0031] The system consists of a new I / O panel 1, a waste liquid recovery cabinet 2, an original I / O panel 3, a process machine 4, a chemical conveying unit 5, a VMB (Valve Manifold Box) 6, and a T-BOX (Tee Box) 7. The waste liquid recovery cabinet 2 is connected to the new I / O panel 1. The new I / O panel 1 is connected to the original I / O panel 3, the process machine 4, the VMB, the T-BOX, and the chemical conveying unit. The original I / O panel 3 is connected to the original supply system.

[0032] The waste liquid recycling cabinet 2 has a built-in PLC device 12, a switching power supply 13 and a rotary switch 14. The input terminal of the PLC device 12 is electrically connected to the switching power supply 13 through the rotary switch 14.

[0033] In this embodiment, the new IO disk 1 has 6 built-in relay coils, and the PLC device 12 is electrically connected to the process machine 4, VMB6, and T-BOX7 through the relay coils;

[0034] The VMB6 and T-BOX7 have built-in solenoid valves and leakage sensors.

[0035] The new I / O disk 1 includes a first relay coil 15, a second relay coil 16, a third relay coil 17, a fourth relay coil 18, a fifth relay coil 19, and a sixth relay coil 20. The first relay coil 15 includes a first pin, a second pin, a third pin, a fifth pin, a sixth pin, a seventh pin, a ninth pin, a tenth pin, an eleventh pin, a thirteenth pin, and a fourteenth pin. The second relay coil 16 includes a first pin, a second pin, a third pin, a fourth pin, a fifth pin, a sixth pin, a seventh pin, an eighth pin, a ninth pin, a tenth pin, an eleventh pin, a twelfth pin, and a tenth pin. The third relay coil 17 includes a first pin, a fifth pin, a ninth pin, a thirteenth pin, and a fourteenth pin; the fourth relay coil 18 includes a fifth pin, a sixth pin, a ninth pin, a tenth pin, a thirteenth pin, and a fourteenth pin; the fifth relay coil 19 includes a first pin, a second pin, a third pin, a fourth pin, a fifth pin, a sixth pin, a seventh pin, an eighth pin, a ninth pin, a tenth pin, an eleventh pin, a twelfth pin, a thirteenth pin, and a fourteenth pin; and the sixth relay coil 20 includes a fifth pin, a ninth pin, a thirteenth pin, and a fourteenth pin.

[0036] The waste liquid recycling control system includes a leakage sensor control unit, which includes: a waste liquid recycling cabinet 2, a first relay coil 15, a primary I / O panel 3, and a first leakage sensor 8. The input terminal of the PLC device 12 is connected to the seventh pin of the first relay coil 15, and the output terminal of the PLC device 12 is connected to the thirteenth pin of the first relay coil 15. The first output terminal of the switching power supply 13 is connected to the fifth pin of the first relay coil 15, and the second output terminal of the switching power supply 13 is connected to the sixth and fourteenth pins of the first relay coil 15, respectively. The first leakage sensor 8 is connected to the ninth, tenth, and eleventh pins of the first relay coil 15, respectively. The primary I / O panel 3 is connected to the first, second, and third pins of the first relay coil 15, respectively.

[0037] The leakage sensor control unit (such as) Figure 2 The working method (as shown) is as follows:

[0038] When the waste liquid recovery cabinet 2 fails to supply power during self-test, or when the waste liquid recovery cabinet 2 is powered off, or when the rotary switch 14 is not turned on, the first relay coil 15 is in a de-energized state. At this time, the first and ninth pins of the first relay coil 15 are connected, the second and tenth pins are connected, and the third and eleventh pins are connected. The leakage signal is sent to the original supply system through the original IO panel. When the waste liquid recovery cabinet 2 is in a supply-ready state, after the rotary switch 14 is turned on, the output terminal of the PLC device 12 sends power to the thirteenth pin of the first relay coil 15. The other end of the first relay coil 15 is connected to the negative terminal of the DC24V switching power supply 13. Therefore, after the first relay coil 15 is energized, the fifth and ninth pins of the first relay coil 15 are connected, the sixth and tenth pins are connected, and the seventh and eleventh pins are connected. The detector is automatically connected to the waste liquid recovery cabinet 2, and the waste liquid recovery cabinet 2 detects the leakage.

[0039] The second leakage sensor 11 of the T-BOX7 is also controlled in the same way as the leakage sensor.

[0040] The waste liquid recycling control system also includes a VMB solenoid valve control unit, which includes: a waste liquid recycling cabinet 2, a second relay coil 16, a third relay coil 17, a primary I / O panel 3, and a VMB solenoid valve 9. The output terminals of the PLC device 12 are respectively connected to the fifth, sixth, seventh, eighth, and thirteenth pins of the second relay coil 16 and the thirteenth pin of the third relay coil 17. The output terminals of the switching power supply 13 are respectively connected to the fifth and fourteenth pins of the third relay coil 17 and the fourteenth pin of the second relay coil 16. The primary I / O panel 3 is respectively connected to the first, second, third, and fourth pins of the second relay coil 16 and the first pin of the third relay coil 17. The VMB solenoid valve 9 is respectively connected to the ninth, tenth, eleventh, and twelfth pins of the second relay coil 16 and the ninth pin of the third relay coil 17.

[0041] The VMB solenoid valve control unit (such as...) Figure 3 The working method (as shown) is as follows:

[0042] When the waste liquid recovery cabinet 2 fails to supply power during self-test, or the waste liquid recovery cabinet 2 is de-energized, or the rotary switch 14 is not turned on, the second relay coil 16 and the third relay coil 17 are de-energized. At this time, the five contacts of the second relay coil 16 and the third relay coil 17 are connected by the first and ninth pins, the second and tenth pins, the third and eleventh pins, the fourth and twelfth pins, and the first and ninth pins of the third relay coil 17. At this time, the solenoid valve control signal is transmitted to the original supply system through the original IO panel 3.

[0043] When the waste liquid recovery cabinet 2 is in a supply-ready state, after the rotary switch 14 is turned on, the output terminal of the PLC device 12 supplies power to the thirteenth pin of the second relay coil 16 and the third relay coil 17. The other end of the second relay coil 16 and the third relay coil 17 is connected to the negative terminal of the DC24V switching power supply 13. After the second relay coil 16 and the third relay coil 17 are energized, the fifth and ninth pins, the sixth and tenth pins, the seventh and eleventh pins, and the eighth and twelfth pins of the three contacts of the second relay coil 16 are connected. The VMB solenoid valve 9 automatically connects to the waste liquid recovery cabinet 2 and is controlled by the waste liquid recovery cabinet 2.

[0044] The waste liquid recycling control system also includes a T-BOX solenoid valve control unit, which includes a waste liquid recycling cabinet 2, a fourth relay coil 18, and a T-BOX solenoid valve 10. The output terminals of the PLC device 12 are respectively connected to the fifth, sixth, and thirteenth pins of the fourth relay coil 18. The output terminals of the switching power supply 13 are respectively connected to the fourteenth pin of the fourth relay coil 18. The T-BOX solenoid valve 10 is respectively connected to the ninth, tenth, and fourteenth pins of the fourth relay coil 18.

[0045] The T-BOX solenoid valve control unit (such as...) Figure 4 The working method (as shown) is as follows:

[0046] When the waste liquid recovery cabinet 2 fails to supply liquid during self-test, or the waste liquid recovery cabinet 2 is de-energized, or the rotary switch 14 is not turned on, the fourth relay coil 18 is in a de-energized state. At this time, the contacts of the fourth relay coil 18 are disconnected by the fifth and ninth pins, the sixth and tenth pins, and the T-BOX solenoid valve 10 is de-energized. At this time, the system automatically supplies liquid from the original supply system.

[0047] When the waste liquid recovery cabinet 2 is in a supply-ready state, after the rotary switch 14 is turned on, the output terminal of the PLC device 12 sends power to the thirteenth pin of the fourth relay coil 18. The other end of the fourth relay coil 18 is connected to the negative terminal of the DC24V switching power supply 13. After the fourth relay coil 18 is energized, the fifth and ninth pins of the contacts of the fourth relay coil 18 are connected, and the sixth and tenth pins are connected. The PLC device 12 automatically outputs an electrical signal to the T-BOX solenoid valve 10. After the T-BOX solenoid valve 10 is energized, it supplies air to the pneumatic valve, and the system automatically switches to supply liquid to the waste liquid recovery cabinet 2.

[0048] The waste liquid recycling control system also includes a process machine control unit, which includes: a waste liquid recycling cabinet 2, a fifth relay coil 19, a sixth relay coil 20, an original I / O panel 3, and a process machine 4. The output terminals of the PLC device 12 are respectively connected to the fifth and thirteenth pins of the fifth relay coil 19 and the thirteenth pin of the sixth relay coil 20. The output terminals of the switching power supply 13 are connected to the fourteenth and sixth pins of the fifth relay coil 19 and the fourteenth pin of the sixth relay coil 20. The process machine 4 is respectively connected to the ninth, tenth, eleventh, and twelfth pins of the fifth relay coil 19.

[0049] The process equipment 4 includes an internal drive device and an internal detection device. The internal drive device includes a first switch and is electrically connected to the ninth and tenth pins of the fifth relay coil 19. The internal detection device includes a second switch and is electrically connected to the eleventh and twelfth pins of the fifth relay coil 19.

[0050] The process equipment control unit (such as...) Figure 5 The working method (as shown) is as follows:

[0051] When the waste liquid recovery cabinet 2 fails to supply power during self-test, or when the waste liquid recovery cabinet 2 is de-energized, or when the rotary switch 14 is not turned on, the fifth relay coil 19 and the sixth relay coil 20 are in a de-energized state. At this time, the first and ninth pins of the fifth relay coil 19 are closed, the second and tenth pins are closed, the third and eleventh pins are closed, and the fourth and twelfth pins are closed. The READY (standby) signal and REQUEST signal of the process machine 4 are processed by the original system.

[0052] When the waste liquid recovery cabinet 2 is in a supply-ready state, after the rotary switch 14 is turned on, the fifth and ninth pins of the fifth relay coil 19 are closed, the sixth and tenth pins are closed, the seventh and eleventh pins are closed, and the eighth and twelfth pins are closed. The READY signal and REQUEST signal of the process machine 4 are transferred to the waste liquid recovery control system for processing.

[0053] When the waste liquid recovery cabinet 2 is in a supply-ready state, after the rotary switch 14 is turned on, the output terminal of the PLC device 12 sends power to the thirteenth pin of the fifth relay coil 19 and the sixth relay coil 20. The other end of the fifth relay coil 19 and the sixth relay coil 20 is connected to the negative terminal of the DC24V switching power supply 13. Therefore, after the fifth relay coil 19 and the sixth relay coil 20 are energized, the fifth and ninth pins of the fifth relay coil 19 and the sixth relay coil 20 are connected, the sixth and tenth pins are connected, the seventh and eleventh pins are connected, and the eighth and twelfth pins are connected. At this time, if the process machine 4 needs chemicals, the first switch is closed and a signal is sent to the PLC device 12 of the waste liquid recovery cabinet 2. When the PLC device 12 receives the signal, it will start the pump valve to work and finally supply the chemicals to the process machine.

[0054] The standby and request signals are explained as follows: Generally, a chemical supply system has two sets of signals. One set is the READY signal, which is sent from the supply system to process machine 4. When the supply system is in a supply-ready state, it closes the READY dry contact of process machine 4. When the fifth relay coil 19 is energized, its tenth and sixth pins, eleventh and seventh pins are connected. At this time, the sixth relay coil 20 is energized, and its fifth and ninth pins are connected, thus energizing process machine 4 and receiving the RDADY signal from the waste liquid system. The other set is the REQUEST signal. When process machine 4 receives the standby signal, if it needs chemicals, it closes its internal first switch and sends out a request signal, which is then sent to the original system or the waste liquid recovery control system, depending on the system selection.

[0055] Finally, it should be noted that any modification or equivalent substitution of some or all of the technical features based on the technical solution of the present utility model device structure and the described embodiments, which does not depart from the corresponding technical solution of this patent, shall fall within the patent scope of the present utility model device structure and the described implementation.

Claims

1. A waste liquid recovery control system, characterized in that, include: The system includes a waste liquid recovery cabinet, a new IO panel, an original IO panel, a process machine, a VMB, a T-BOX, and a chemical conveying unit. The waste liquid recovery cabinet is connected to the new IO panel, and the new IO panel is connected to the original IO panel, the process machine, the VMB, the T-BOX, and the chemical conveying unit, respectively. The waste liquid recovery cabinet has a built-in PLC device, and the new IO panel has a built-in relay coil. The PLC device is electrically connected to the process machine, VMB, and T-BOX through the relay coil. The VMB and T-BOX have built-in solenoid valves and leakage sensors.

2. The waste liquid recovery control system as described in claim 1, characterized in that, The waste liquid recycling cabinet also includes a switching power supply and a rotary switch. The input terminal of the PLC device is electrically connected to the switching power supply via the rotary switch.

3. The waste liquid recovery control system as described in claim 1, characterized in that, The new I / O disk includes a first relay coil, a second relay coil, a third relay coil, a fourth relay coil, a fifth relay coil, and a sixth relay coil. The first relay coil includes a first pin, a second pin, a third pin, a fifth pin, a sixth pin, a seventh pin, a ninth pin, a tenth pin, an eleventh pin, a thirteenth pin, and a fourteenth pin. The second relay coil includes a first pin, a second pin, a third pin, a fourth pin, a fifth pin, a thirteenth pin, and a fourteenth pin. The fourth relay coil includes a fifth pin, a sixth pin, a ninth pin, a tenth pin, a thirteenth pin, and a fourteenth pin. The fifth relay coil includes a first pin, a second pin, a third pin, a fourth pin, a fifth pin, a sixth pin, a seventh pin, an eighth pin, a ninth pin, a tenth pin, an eleventh pin, a twelfth pin, a thirteenth pin, and a fourteenth pin. The sixth relay coil includes a fifth pin, a ninth pin, a thirteenth pin, and a fourteenth pin.

4. The waste liquid recovery control system as described in claim 2, characterized in that, The waste liquid recycling control system includes a leakage sensor control unit, which comprises a waste liquid recycling cabinet, a first relay coil, a primary I / O panel, and a leakage sensor. The input terminal of the PLC device is connected to the seventh pin of the first relay coil, and the output terminal of the PLC device is connected to the thirteenth pin of the first relay coil. The first output terminal of the switching power supply is connected to the fifth pin of the first relay coil, and the second output terminal of the switching power supply is connected to the sixth and fourteenth pins of the first relay coil, respectively. The leakage sensor is connected to the ninth, tenth, and eleventh pins of the first relay coil, respectively, and the primary I / O panel is connected to the first, second, and third pins of the first relay coil, respectively.

5. The waste liquid recovery control system as described in claim 4, characterized in that, The leakage sensor is either the first leakage sensor of the VMB or the second leakage sensor of the T-BOX.

6. The waste liquid recovery control system as described in claim 2, characterized in that, The waste liquid recycling control system also includes a VMB solenoid valve control unit, which includes a waste liquid recycling cabinet, a second relay coil, a third relay coil, a primary I / O panel, and a VMB solenoid valve. The output terminals of the PLC device are respectively connected to the fifth, sixth, seventh, eighth, and thirteenth pins of the second relay coil and the thirteenth pin of the third relay coil. The output terminals of the switching power supply are connected to the fifth and fourteenth pins of the third relay coil and the fourteenth pin of the second relay coil. The primary I / O panel is respectively connected to the first, second, third, and fourth pins of the second relay coil and the first pin of the third relay coil. The VMB solenoid valve is respectively connected to the ninth, tenth, eleventh, and twelfth pins of the second relay coil and the ninth pin of the third relay coil.

7. The waste liquid recovery control system as described in claim 2, characterized in that, The waste liquid recycling control system also includes a T-BOX solenoid valve control unit, which includes a waste liquid recycling cabinet, a fourth relay coil, and a T-BOX solenoid valve. The output terminals of the PLC device are respectively connected to the fifth, sixth, and thirteenth pins of the fourth relay coil, the output terminal of the switching power supply is connected to the fourteenth pin of the fourth relay coil, and the T-BOX solenoid valve is respectively connected to the ninth, tenth, and fourteenth pins of the fourth relay coil.

8. The waste liquid recovery control system as described in claim 2, characterized in that, The waste liquid recovery control system also includes a process machine control unit, which includes a waste liquid recovery cabinet, a fifth relay coil, a sixth relay coil, an original I / O panel, and a process machine. The output terminals of the PLC device are respectively connected to the fifth and thirteenth pins of the fifth relay coil and the thirteenth pin of the sixth relay coil. The output terminals of the switching power supply are connected to the fourteenth, sixth, and fourteenth pins of the fifth and sixth relay coils. The process machine is respectively connected to the ninth, tenth, eleventh, and twelfth pins of the fifth relay coil.

9. The waste liquid recovery control system as described in claim 8, characterized in that, The process equipment includes an internal drive device and an internal detection device. The internal drive device has a built-in first switch and is electrically connected to the ninth and tenth pins of the fifth relay coil. The internal detection device has a built-in second switch and is electrically connected to the eleventh and twelfth pins of the fifth relay coil.