A slit member of an ion implanter

Abstract

This invention provides a slit component for an ion implanter. The slit component includes a first component and a second component symmetrically arranged, forming a slit between the first and second components to guide the passage of an ion beam. Both the first and second components include a body and a detachable assembly disposed on the body. The detachable assembly faces the ion beam incident direction and shields the body near the slit, preventing the body from being bombarded by the ion beam. The service life of the slit component can be extended by disassembling and replacing the detachable assembly. When the ion beam passes through the slit, the surface of the detachable assembly will be dented due to ion bombardment. In this case, the operator can remove the damaged detachable assembly, rotate it to the un-bombarded side, and then reinstall it, thereby extending its service life.

Description

Technical Field

[0001] This utility model belongs to the field of ion implanters, and particularly relates to a slit component of an ion implanter. Background Technology

[0002] An ion implanter is a key piece of equipment that uses an analytical magnetic field (measured in AMUs) to screen and extract desired ions. After screening, the ion beam undergoes precise isotope filtration through slotted graphite.

[0003] However, due to prolonged bombardment by the ion beam, indentations gradually form on the surface of the slotted graphite. These indentations can cause the graphite slots to break through, allowing excess isotopes to pass through and thus reducing the filtration efficiency of the equipment. To maintain high performance and stable operation, regular replacement of the slotted graphite is an essential operating procedure. Currently, most ion implanters use a one-piece design for the slotted graphite, with the slot structure formed by a single piece of graphite (as shown in the attached image). Figure 1 (As shown). Once the graphite slits are punctured or have too many dents affecting their filtration efficiency, they need to be replaced. To extend the service life of slit graphite, this application proposes a slit component for an ion implanter. Utility Model Content

[0004] In order to solve all or part of the problems of the prior art, this utility model provides a slit component for an ion implanter. By improving the structural design, the replacement life of the slit component is extended without affecting its function.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A slit component for an ion implanter includes a first member and a second member symmetrically arranged, forming a slit between the first and second members for guiding an ion beam through. Both the first and second members include a body and a detachable assembly disposed on the body. The detachable assembly faces the ion beam incident direction and shields the body from ion beam bombardment on the side closest to the slit. The service life of the slit component can be extended by disassembling and replacing the detachable assembly. When the ion beam passes through the slit, the surface of the detachable assembly may be dented due to ion bombardment. In this case, the operator can remove the damaged detachable assembly, rotate it to the un-bombarded side, and then reinstall it, thereby extending its service life.

[0007] The detachable component's side near the slit is coplanar with the corresponding side of the main body in the vertical direction and covers the ion beam bombardment area. This prevents the ion beam from directly bombarding the main body surface due to structural misalignment.

[0008] The detachable component is connected to the main body via a connector; when the connector is in the open state, the detachable component can rotate relative to the main body. This design allows the detachable component to rotate relative to the main body, enabling the utilization of undamaged parts even after damage to a certain area, thus improving the utilization rate and service life of the components.

[0009] At least two connectors are provided; the connectors are vacuum screws. Multiple connectors increase the stability and reliability of the connection, and the vacuum screws have high tightening force, which can ensure a firm connection between the connectors and the body.

[0010] The detachable component has a threaded hole, and the corresponding body has a through hole. The vacuum screw connects to the threaded hole on the detachable component through the through hole. By using a vacuum screw to connect the detachable component and the body, good vacuum sealing performance can be ensured at the connection.

[0011] The main body has a groove for accommodating the detachable component, which is installed within the groove. By installing the detachable component within the groove of the main body, the installation position of the slit component can be made more fixed and stable.

[0012] The detachable component is a regular polygon component. The regular polygon has multiple equal sides. When one of its sides is damaged by ion beam bombardment, the various sides of the regular polygon component can be reused through multiple rotations and reconnections, thereby extending the service life of the slit component.

[0013] The detachable component is a regular hexagonal component with a side length of 4-7 cm and a thickness of 0.8-1.2 cm. This provides better structural stability, sufficient strength and support, enabling the component to withstand external forces.

[0014] The first and second components are rectangular, with a length of 13-17cm, a width of 14-16cm, and a thickness of 1-2cm. Appropriate length, width, and thickness can provide good structural stability.

[0015] Both the main body and the detachable components are made of graphite. This not only meets the requirements for use in harsh environments such as high temperature and corrosion of ion implanters, but also effectively supports and conducts energy and force during the ion implantation process, thereby ensuring stable operation and accurate output of the equipment.

[0016] This invention modifies the first and second components of the slit assembly into a separable structure, allowing damaged parts to be concealed internally and no longer directly exposed to the ion beam, thereby extending the service life of the slit assembly. Simultaneously, the disassembly and replacement of the detachable components become more convenient and faster, significantly improving the reliability and efficiency of the equipment. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of the integrated slotted graphite in the background art of this utility model.

[0019] Figure 2 This is a schematic diagram of the structure of the split slit component in an embodiment of the present invention.

[0020] Reference numerals: 1-First component; 2-Second component; 3-Removable component; 4-Groove. Detailed Implementation

[0021] The technical solutions in specific embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0022] The implementation of this utility model will be described in detail below with reference to specific embodiments.

[0023] In this embodiment of the utility model, in conjunction with reference to the reference Figure 2As shown, a slit component for an ion implanter is provided, including a first component 1 and a second component 2, forming a slit of a certain width between them. This width can be set according to actual needs to guide the passage of the ion beam. Both the first component 1 and the second component 2 include a body and a detachable assembly 3. The detachable assembly 3 is mounted on the main structure and can be easily disassembled and replaced. The detachable assembly 3 is positioned in the ion beam incident direction, and the side near the slit shields the body from ion beam bombardment. The side of the detachable assembly 3 near the slit is coplanar with the corresponding side of the body in the vertical direction, and one side near the slit is exposed to the ion beam bombardment area. When the ion beam passes through the slit, one side surface of the detachable assembly 3 will be bombarded by ions, resulting in a dent. In this case, the operator can remove the damaged detachable assembly 3, rotate it to the unbombarded side, and then reinstall it, thereby extending its service life.

[0024] The detachable component 3 is connected to the main body via connectors that allow the detachable component 3 to rotate relative to the main body when detached. To ensure structural stability and reliability, at least two connectors are provided to enhance support and balance. When the connectors are open, the detachable component 3 can rotate flexibly, allowing the damaged side to easily rotate to other directions, thus fully utilizing the lifespan of the detachable component 3 surface. This design allows the ion implanter to flexibly handle uneven wear on material surfaces during production, maximizing the use of the detachable component 3 surface and simplifying equipment maintenance, thereby improving production efficiency and equipment reliability. To further improve the precision and stability of the components, a positioning structure can be provided between the main body and the detachable component 3 to ensure precise alignment and fixation. In this embodiment, the detachable component 3 is connected to the main body using vacuum screws to ensure a good sealing effect in a high vacuum environment. Threaded holes are provided on the detachable component 3, and corresponding through holes are provided on the main body. The vacuum screws connect to the threaded holes on the detachable component 3 through the through holes. This design not only ensures a strong connection but also allows for quick adjustment when needed. In other implementations, other types of connectors may be used to achieve a more flexible and efficient connection method.

[0025] In this embodiment, the first component 1 and the second component 2 are rectangular components, with a length of 13-17cm, a width of 14-16cm, and a thickness of 1-2cm. The detachable component 3 is a regular polygonal component, specifically a regular hexagonal component in this embodiment, with a side length of 4-7cm and a thickness of 0.8-1.2cm. A groove 4 is provided on the main body to accommodate the regular hexagonal component. The size and shape of the groove 4 match the regular hexagonal component, ensuring that the component can be accurately installed in the groove 4. The design of the groove 4 also considers the fixing and alignment of the component to ensure the accuracy and reliability of the connection. This detachable structure facilitates the installation and replacement of components. If the detachable component 3 needs to be replaced, it only needs to be removed from the groove 4 and replaced accordingly, without disassembling the entire ion implanter. This operation is convenient and quick, saving time and maintenance costs. In other embodiments, the detachable component 3 can also be directly installed on the main body without the need for the groove 4. This direct-installation design can be achieved in various ways, such as using threaded connections, clamping devices, or other fixing devices, to ensure a secure connection and precise alignment between the detachable component 3 and the main body. Both the main body and the detachable component 3 are made of graphite, which not only meets the requirements of ion implanters in harsh environments such as high temperatures and corrosion, but also effectively supports and conducts energy and force during the ion implantation process, thereby ensuring stable operation and accurate output of the equipment.

[0026] This invention extends the replacement cycle of the slit component by improving its structure while ensuring its functionality remains unaffected. Traditional one-piece designs often require complete replacement after being bombarded by an ion beam. However, this invention modifies the first component 1 and the second component 2 into a detachable structure. This allows the detachable component 3 to be decoupled after being bombarded by an ion beam; simply disconnect it, rotate it to the undamaged part, and reconnect it for continued use. In this way, the damaged part is hidden internally and no longer directly exposed to the ion beam, thus extending the service life of the slit component.

[0027] It should be noted that, for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the scope of protection of the claims of this utility model.

Claims

1. A slit component of an ion implanter, characterized in that, The slit component includes a first component (1) and a second component (2) arranged symmetrically, with a slit formed between the first component (1) and the second component (2) for guiding the passage of the ion beam; both the first component (1) and the second component (2) include a body and a detachable component (3) disposed on the body, the detachable component (3) facing the ion beam incident direction and shielding the body near the slit to prevent the body from being bombarded by the ion beam.

2. The slit member according to claim 1, characterized by The detachable component (3) is coplanar in the vertical direction with the corresponding side of the body near the slit and covers the ion beam bombardment area.

3. The slit member according to claim 2, characterized by The detachable component (3) is connected to the body via a connector; when the connector is in the open state, the detachable component (3) can rotate relative to the body.

4. The slit member according to claim 3, characterized by At least two connectors are provided; the connectors are vacuum screws.

5. The slit member according to claim 4, characterized by The detachable component (3) is provided with a threaded hole, and the body is provided with a through hole at the corresponding position. The vacuum screw is connected to the threaded hole on the detachable component (3) through the through hole.

6. The slit member according to claim 3, characterized by The main body has a groove (4) for accommodating the detachable component (3), and the detachable component (3) is installed in the groove (4).

7. The slit member according to claim 1, characterized by The detachable component (3) is a regular polygonal component.

8. The slit component according to claim 7, characterized in that, The detachable component (3) is a regular hexagonal component with a side length of 4-7cm and a thickness of 0.8-1.2cm.

9. The slit member according to claim 1, characterized by The first component (1) and the second component (2) are rectangular components with a length of 13-17cm, a width of 14-16cm, and a thickness of 1-2cm.

10. The slit member according to any one of claims 1 to 9, characterized in that, Both the main body and the detachable component (3) are made of graphite.

Images