nitrogen cabinet
By introducing a nitrogen supply pipeline and a pipeline inlet control component into the nitrogen cabinet, intelligent control of the nitrogen quantity is achieved, solving the problems of low efficiency and easy waste in the existing nitrogen cabinet, and improving the control efficiency and environmental stability of the nitrogen cabinet.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN SHICHUANGYI ELECTRONICS CO LTD
- Filing Date
- 2025-07-03
- Publication Date
- 2026-07-03
AI Technical Summary
The existing nitrogen regulation in nitrogen cabinets relies on manual labor, which is inefficient and prone to waste.
A nitrogen cabinet was designed, which includes a nitrogen supply pipeline and a pipeline inlet control component, and is electrically connected to a circuit board. Through components such as a pipeline monitoring module, a control module, a solenoid valve, and sensors, the nitrogen quantity is intelligently controlled to ensure the accuracy of nitrogen supply and prevent leakage.
Intelligent control of nitrogen flow rate into the nitrogen cabinet was achieved, improving control efficiency, avoiding waste, and ensuring the stability of the cabinet environment and the storage quality of semiconductor devices.
Smart Images
Figure CN224440736U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor storage technology, and more particularly to a nitrogen cabinet. Background Technology
[0002] A nitrogen storage cabinet, also known as a nitrogen storage cabinet, is a nitrogen-protected storage cabinet with monitored oxygen concentration. It is suitable for storing finished products, semi-finished products, raw materials, and equipment during the semiconductor device manufacturing process. By controlling the humidity, temperature, and oxygen concentration inside the cabinet, it achieves the function of dry storage of objects.
[0003] Currently, the nitrogen in existing nitrogen cabinets is supplied directly, relying on manual adjustment, which is inefficient and prone to waste. Utility Model Content
[0004] The purpose of this application is to provide a nitrogen cabinet with intelligent control.
[0005] This application discloses a nitrogen cabinet for storing semiconductor devices, including a cabinet body, a cabinet door, and a circuit board. The cabinet door is disposed on the cabinet body and is movably connected to the cabinet body. The circuit board is disposed within the cabinet body. The nitrogen cabinet also includes a nitrogen supply pipe and a pipe inlet control component. Both the nitrogen supply pipe and the pipe inlet control component are disposed within the cabinet body. The nitrogen supply pipe is connected to an external nitrogen supply source, and the pipe inlet control component is electrically connected to the circuit board for controlling the amount of nitrogen flowing into the nitrogen supply pipe.
[0006] Optionally, the pipeline air intake control component includes a pipeline monitoring module, which is located on one side of the nitrogen supply pipeline and is used to monitor whether the nitrogen supply pipeline is leaking.
[0007] Optionally, the pipeline air intake control component further includes a control module, a solenoid valve, and a first alarm. The control module is mounted on the circuit board, and the first alarm is mounted on the cabinet and signal-connected to the control module. The nitrogen supply pipeline includes a first nitrogen pipeline and a second nitrogen pipeline. The first nitrogen pipeline is connected to the external nitrogen supply source through a nitrogen inlet. The solenoid valve is located between the first nitrogen pipeline and the second nitrogen pipeline and is electrically connected to the control module. The pipeline monitoring module is mounted on the first nitrogen pipeline and signal-connected to the control module.
[0008] Optionally, the pipeline air intake control component further includes an oxygen concentration sensor, which is mounted on the circuit board and electrically connected to the control module for monitoring the oxygen content inside the cabinet.
[0009] Optionally, the nitrogen cabinet further includes a temperature and humidity sensor and a drying module. The temperature and humidity sensor is mounted on the circuit board, and the drying module is mounted inside the cabinet. The temperature and humidity sensor and the drying module are respectively electrically connected to the control module.
[0010] Optionally, the pipeline monitoring module is a flow sensor, and the temperature and humidity sensor is a digital sensor.
[0011] Optionally, the nitrogen cabinet may also include a door status monitoring component for monitoring the opening status of the cabinet door.
[0012] Optionally, the door status monitoring component includes a door status detection module, a timing sensor module, and a second alarm. The door status detection module and the timing sensor module are both located on one side of the cabinet door, and the second alarm is located on one side of the cabinet body. The door status detection module and the second alarm are both signal-connected to the timing sensor module, and the second alarm is signal-connected to the control module.
[0013] Optionally, the nitrogen cabinet further includes a network connection module, which is mounted on the cabinet and is electrically connected to the first alarm and the second alarm.
[0014] Optionally, the solenoid valve is provided with at least a first flow switch and a second flow switch, both of which are signal-connected to the control module and used to regulate the intake flow of the solenoid valve.
[0015] Compared to existing nitrogen cabinets where nitrogen levels rely on manual adjustment, resulting in low efficiency and waste, the nitrogen cabinet of this application also includes a nitrogen supply pipeline and a pipeline inlet control component. Both the nitrogen supply pipeline and the pipeline inlet control component are installed inside the cabinet. The pipeline inlet control component is electrically connected to a circuit board and is used to control the amount of nitrogen flowing into the nitrogen supply pipeline. This enables intelligent control of the amount of nitrogen flowing into the nitrogen cabinet, thereby improving control efficiency. Attached Figure Description
[0016] The accompanying drawings, which form part of the specification, are used to provide a further understanding of the embodiments of this application and illustrate the implementation methods of this application, together with the textual description, to explain the principles of this application. Obviously, the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any creative effort. In the drawings:
[0017] Figure 1 This is a schematic diagram of the overall structure of the nitrogen cabinet provided in the embodiments of this application;
[0018] Figure 2 This is a schematic diagram of the internal structure of the nitrogen tank provided in the embodiments of this application;
[0019] Figure 3 This is a block diagram of the circuit board structure provided in the embodiments of this application.
[0020] The components are as follows: 100, Nitrogen cabinet; 110, cabinet body; 111, nitrogen inlet; 120, cabinet door; 130, circuit board; 131, control module; 140, nitrogen supply pipeline; 141, first nitrogen pipeline; 142, second nitrogen pipeline; 150, pipeline air intake control component; 151, pipeline monitoring module; 152, solenoid valve; 153, first flow switch; 154, second flow switch; 155, first alarm; 160, oxygen concentration sensor; 170, temperature and humidity sensor; 180, drying module; 190, door status monitoring component; 191, door status detection module; 192, timing sensor module; 193, second alarm; 200, network connection module; 210, display control panel; 300, pulley. Detailed Implementation
[0021] It should be understood that the terminology, specific structural and functional details used herein are merely for describing particular embodiments and are representative. However, this application may be implemented in many alternative forms and should not be construed as being limited to the embodiments set forth herein.
[0022] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating relative importance or implying the number of indicated technical features. Therefore, unless otherwise stated, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; "multiple" means two or more. The term "comprising" and any variations thereof mean a non-exclusive inclusion, which may include or add one or more other features, integers, steps, operations, units, components, and / or combinations thereof. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0023] The present application will now be described in detail with reference to the accompanying drawings and embodiments.
[0024] Figure 1 This is a schematic diagram of the overall structure of the nitrogen tank provided in the embodiments of this application. Figure 2 This is a schematic diagram of the internal structure of the nitrogen tank provided in an embodiment of this application. Figure 3 This is a block diagram of the circuit board provided in the embodiments of this application, combined with... Figures 1-3This application discloses a nitrogen cabinet 100 for storing semiconductor devices, including a cabinet body 110, a cabinet door 120, and a circuit board 130. The cabinet door 120 is disposed on the cabinet body 110 and is movably connected to the cabinet body 110. The circuit board 130 is disposed inside the cabinet body 110. The nitrogen cabinet 100 also includes a nitrogen supply pipe 140 and a pipe inlet control component 150. Both the nitrogen supply pipe 140 and the pipe inlet control component 150 are disposed inside the cabinet body 110. The pipe inlet control component 150 is electrically connected to the circuit board 130 and is used to control the amount of nitrogen entering the nitrogen supply pipe 140.
[0025] Compared to existing nitrogen cabinets 100 where nitrogen supply relies on manual adjustment, resulting in low efficiency and waste, the nitrogen cabinet 100 of this application also includes a nitrogen supply pipe 140 and a pipe inlet control component 150. Both the nitrogen supply pipe 140 and the pipe inlet control component 150 are located inside the cabinet 110. The pipe inlet control component 150 is electrically connected to the circuit board 130 and is used to control the amount of nitrogen supplied through the nitrogen supply pipe 140. This enables intelligent control of the amount of nitrogen supplied to the nitrogen cabinet 100, thereby improving control efficiency.
[0026] The pipeline air intake control component 150 includes a pipeline monitoring module 151, which is located on one side of the nitrogen supply pipeline 140 and is used to monitor whether the nitrogen supply pipeline 140 is leaking, so that nitrogen is not wasted.
[0027] Combination Figures 1-2 The pipeline air intake control assembly 150 further includes a control module 131, a solenoid valve 152, and a first alarm 155. The control module 131 is mounted on the circuit board 130, and the first alarm 155 is mounted on the cabinet 110 and is signal-connected to the control module 131. The nitrogen supply pipeline 140 includes a first nitrogen pipeline 141 and a second nitrogen pipeline 142. The first nitrogen pipeline 141 is connected to the external nitrogen supply source through a nitrogen inlet 111. The solenoid valve 152 is located on the first nitrogen pipeline 141. Between the first nitrogen pipeline 1 and the second nitrogen pipeline 142, the solenoid valve 152 is electrically connected to the control module 131; the pipeline monitoring module 151 is installed on the first nitrogen pipeline 141 and is signal-connected to the control module 131. By monitoring the nitrogen gas flowing through the first nitrogen pipeline 141 in real time, it ensures that the amount of nitrogen gas flowing through the first nitrogen pipeline 141 is sufficient and enough to supply the needs of the nitrogen cabinet 100. On the other hand, it ensures that nitrogen gas can be supplied as needed, avoiding the problem of uncontrollable nitrogen supply when the pipeline leaks.
[0028] The pipeline monitoring module 151 is a flow sensor that monitors the flow rate of the first nitrogen pipeline 141. Abnormal fluctuations are identified as leaks. A flow threshold can be set within the flow sensor. When the detected flow rate in the first nitrogen pipeline 141 is lower or higher than this threshold, it is considered an abnormal fluctuation. In this case, the flow sensor transmits the detection result signal to the control module 131, which then controls the first alarm 155 to sound an alarm. The first alarm 155 can be a light warning; when an abnormal leak occurs, the first alarm 155 will flash.
[0029] The pipeline air intake control assembly 150 also includes an oxygen concentration sensor 160, which is mounted on the circuit board 130 and electrically connected to the control module 131. The oxygen concentration sensor 160 is used to monitor the oxygen content inside the cabinet 110. Normally, the oxygen content inside the nitrogen cabinet 100 should be ≤1%. If the oxygen content is too high, it can cause oxidation of semiconductor devices, preventing normal production or leading to functional abnormalities. When the oxygen concentration sensor 160 detects that the oxygen content inside the cabinet 110 exceeds this normal value of 1%, the control module 131 controls the solenoid valve 152 to open, introducing nitrogen into the cabinet 110 to expel the oxygen from the nitrogen cabinet 100.
[0030] The nitrogen cabinet 100 also includes a temperature and humidity sensor 170 and a drying module 180. The temperature and humidity sensor 170 is mounted on the circuit board 130, and the drying module 180 is mounted inside the cabinet 110. The temperature and humidity sensor 170 and the drying module 180 are respectively electrically connected to the control module 131. The temperature and humidity sensor 170 monitors according to a first preset threshold. The temperature and humidity sensor 170 is a digital sensor. The first preset threshold is RH≦5% and T≦25℃. When the temperature and humidity exceed the first preset threshold, an alarm is triggered and the drying module 180 is activated to dry the inside of the cabinet 110 to ensure that the temperature and humidity environment inside the cabinet 110 meets the requirements.
[0031] like Figure 1 As shown, the nitrogen cabinet 100 also includes a door status monitoring component 190 for monitoring the opening status of the cabinet door 120. Specifically, the door status monitoring component 190 includes a door status detection module 191, a timing sensor module 192, and a second alarm 193. The door status detection module 191 and the timing sensor module 192 are both located on one side of the cabinet door 120, and the second alarm 193 is located on one side of the cabinet body 110. Both the door status detection module 191 and the second alarm 193 are signal-connected to the timing sensor module 192, and the second alarm 193 is signal-connected to the control module 131.
[0032] The door status detection module 191 can use a high-sensitivity door magnetic sensor to detect whether the door is fully closed, while the timing sensing module 192 records the duration of the cabinet door 120 being open. If the duration exceeds a first threshold, a second alarm 193 will be triggered to issue a first-level audible and visual alarm; if the duration exceeds a second threshold, a second-level remote alarm 193 will be triggered. This distinguishes between short-term operation and abnormally long-term door opening, reducing false alarms. The first threshold can be set to 10 seconds, and the second threshold can be set to 30 seconds.
[0033] The solenoid valve 152 is equipped with at least a first flow switch 153 and a second flow switch 154. Both the first flow switch 153 and the second flow switch 154 are connected to the control module 131. Based on the door opening time and oxygen content data, the nitrogen flow rate is dynamically adjusted. If the door opening time is between 10 and 15 seconds, the first flow switch 153 is opened for a small flow of nitrogen; if the door opening time is between 15 and 25 seconds, the second flow switch 154 is opened for a large flow of nitrogen. Similarly, when the oxygen content in the cabinet is less than 1.5%-2%, the first flow switch 153 is opened for a small flow of nitrogen; when the oxygen content is greater than 2%-4%, the second flow switch 154 is opened for a large flow of nitrogen. When the oxygen content is less than 1%, the flow switches are closed to stop nitrogen replenishment.
[0034] like Figure 1 As shown, the nitrogen cabinet 100 also includes a network connection module 200, which is installed on the cabinet 110 and is electrically connected to the first alarm and the second alarm 193 respectively. The alarm information is pushed to the MES system or DingTalk system. The alarm information can be received synchronously through the APP on the staff's mobile phone, so as to prevent the situation where the staff cannot handle it in time when they are not present.
[0035] like Figure 1 As shown, the nitrogen cabinet 100 can also be equipped with a display control panel 210. The display control panel 210 can be installed on the cabinet body 110 and located on one side of the door status detection module 191. The display control panel 210 is equipped with a display frame and control buttons. The display frame is used to display the temperature and humidity inside the cabinet body 110. The control buttons can be setting buttons and adjustment buttons. The temperature and humidity required by the nitrogen cabinet 100 can be set by setting buttons, while the adjustment buttons can be used to adjust the humidity and temperature. Of course, a power off button can also be set to turn the nitrogen cabinet 100 on or off.
[0036] In addition, four sliding wheels 300 can be provided at the bottom of the nitrogen cabinet 100. The sliding wheels 300 are universal wheels, which are used to move the nitrogen cabinet 100, so as to facilitate the relocation of the nitrogen cabinet 100 and the maintenance of indoor hygiene.
[0037] It should be noted that the inventive concept of this application can form many embodiments, but due to the limited space of the application documents, they cannot all be listed. Therefore, without conflict, the embodiments described above or the technical features can be arbitrarily combined to form new embodiments. After the embodiments or technical features are combined, the original technical effect will be enhanced.
[0038] The above description, in conjunction with specific optional embodiments, provides a further detailed explanation of this application and should not be construed as limiting the specific implementation of this application to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of this application, and all such modifications or substitutions should be considered within the scope of protection of this application.
Claims
1. A nitrogen cabinet for storing semiconductor devices and connected to an external nitrogen supply source, comprising: Cabinet; Cabinet doors are installed on the cabinet body and are movably connected to the cabinet body; The circuit board, disposed within the cabinet, is characterized in that... The nitrogen cabinet also includes a nitrogen supply pipe and a pipe inlet control component. Both the nitrogen supply pipe and the pipe inlet control component are installed inside the cabinet. The nitrogen supply pipe is connected to the external nitrogen supply source, and the pipe inlet control component is electrically connected to the circuit board to control the amount of nitrogen flowing into the nitrogen supply pipe.
2. The nitrogen cabinet of claim 1, wherein, The pipeline air intake control component includes a pipeline monitoring module, which is located on one side of the nitrogen supply pipeline and is used to monitor whether the nitrogen supply pipeline is leaking.
3. The nitrogen cabinet of claim 2, wherein, The pipeline air intake control component also includes a control module, a solenoid valve, and a first alarm. The control module is mounted on the circuit board, and the first alarm is mounted on the cabinet and is signal-connected to the control module. The nitrogen supply pipeline includes a first nitrogen pipeline and a second nitrogen pipeline. The first nitrogen pipeline is connected to the external nitrogen supply source through a nitrogen inlet. The solenoid valve is located between the first nitrogen pipeline and the second nitrogen pipeline and is electrically connected to the control module. The pipeline monitoring module is installed on the first nitrogen pipeline and is connected to the control module via signal.
4. The nitrogen cabinet of claim 3, wherein, The pipeline air intake control component also includes an oxygen concentration sensor, which is mounted on the circuit board and electrically connected to the control module to monitor the oxygen content inside the cabinet.
5. The nitrogen cabinet of claim 4, wherein, The nitrogen cabinet also includes a temperature and humidity sensor and a drying module. The temperature and humidity sensor is mounted on the circuit board, and the drying module is mounted inside the cabinet. The temperature and humidity sensor and the drying module are respectively electrically connected to the control module.
6. The nitrogen cabinet of claim 5, wherein, The pipeline monitoring module is a flow sensor, and the temperature and humidity sensor is a digital sensor.
7. The nitrogen holder as described in claim 4, characterized in that, The nitrogen cabinet also includes a door status monitoring component for monitoring the opening status of the cabinet door.
8. The nitrogen cabinet of claim 7, wherein, The door status monitoring component includes a door status detection module, a timing sensor module, and a second alarm. The door status detection module and the timing sensor module are both located on one side of the cabinet door, and the second alarm is located on one side of the cabinet body. The door status detection module and the second alarm are both signal-connected to the timing sensor module, and the second alarm is signal-connected to the control module.
9. The nitrogen cabinet of claim 8, wherein, The nitrogen cabinet also includes a network connection module, which is installed on the cabinet and is electrically connected to the first alarm and the second alarm, respectively.
10. The nitrogen cabinet of claim 3, wherein, The solenoid valve is equipped with at least a first flow switch and a second flow switch. Both the first flow switch and the second flow switch are signal-connected to the control module and are used to regulate the intake flow of the solenoid valve.