Air duct, electrode cleaning mechanism and plasma treatment machine

Abstract

This utility model belongs to the technical field of plasma treatment machines, and provides an air duct, an electrode cleaning mechanism, and a plasma treatment machine. A first air duct plate is provided between a first connecting member and a second connecting member, and a second air duct plate is provided on the first air duct plate via a first rotating connecting member. By opening the second air duct plate, the entire interior of the air duct can be cleaned. Compared with the method of flipping and setting cover plates on both sides of the electrode assembly, the opening and closing operation time is shortened. At the same time, the first rotating connecting member includes a first connecting plate and a second connecting plate detachably provided on the first connecting plate. The first connecting plate is provided on the first air duct plate, and the second connecting plate is provided on the second air duct plate. When the second air duct plate needs to be disassembled, it is only necessary to disassemble and install the second connecting plate together with the second air duct plate on the first air duct plate, which is convenient and improves efficiency.

Description

Technical Field

[0001] This utility model belongs to the technical field of plasma treatment machines, specifically relating to an air duct, an electrode cleaning mechanism, and a plasma treatment machine. Background Technology

[0002] After prolonged operation, plasma treatment machines accumulate a lot of dirt on the air ducts and electrodes, which can hinder the ionization process, make the plasma unstable, and reduce the cleaning effect. Therefore, it is necessary to clean the dirt on the air ducts and electrodes in a timely manner.

[0003] Currently, cleaning the electrodes requires disassembling them, which neglects the cleaning of the air duct. Furthermore, there is no effective way to clean the inside of the air duct, and it is impossible to clean the electrodes and air duct simultaneously, resulting in low efficiency and affecting the operation of the ion processor. Utility Model Content

[0004] To solve the above problems, this invention proposes an air duct, an electrode cleaning mechanism, and a plasma treatment machine. By opening the second air duct plate, this invention can clean the entire interior of the air duct and also clean the electrodes on the electrode fixing parts through the air duct, achieving simultaneous cleaning of the air duct and electrodes and ensuring work efficiency.

[0005] According to some embodiments, the first solution of this utility model provides an air duct, which adopts the following technical solution:

[0006] An air duct includes a first connector and a second connector, electrode fixing members respectively disposed on the first connector and the second connector, a first air duct plate disposed between the first connector and the second connector, and a second air duct plate disposed on the first air duct plate via a first rotating connector; one end of the second air duct plate away from the first air duct plate extends to the electrode fixing member.

[0007] Furthermore, the first rotating connector includes a first connecting plate and a second connecting plate detachably disposed on the first connecting plate; the first connecting plate is disposed on the first air duct plate, and the second connecting plate is disposed on the second air duct plate.

[0008] Furthermore, a plurality of first rotating connecting parts are provided between the first air duct plate and the second air duct plate.

[0009] Furthermore, an intermediate plate is provided between the first air duct plate and the second air duct plate; the first rotating connector is provided between the intermediate plate and the second air duct plate, and the second rotating connector is provided between the intermediate plate and the first air duct plate.

[0010] Furthermore, the first rotating connector and the second rotating connector are staggered.

[0011] Furthermore, both the first rotating connector and the second rotating connector include a first connecting plate and a second connecting plate; the first connecting plate and the second connecting plate on the first rotating connector are respectively disposed on the intermediate plate and the second air duct plate; the first connecting plate and the second connecting plate on the second rotating connector are respectively disposed on the first air duct plate and the intermediate plate.

[0012] Furthermore, a first sleeve is provided on the first connecting plate, and a second sleeve is provided on the second connecting plate. A rotating shaft is sleeved inside the first sleeve and the second sleeve. An elongated groove is formed on the side wall of the first sleeve. An operating rod is provided on the rotating shaft, and the operating rod is slidably disposed in the elongated groove. An elastic element is provided between the end of the rotating shaft away from the second sleeve and the bottom end of the first sleeve.

[0013] Furthermore, a retaining groove is provided at the end of the long groove away from the second sleeve, and the circumferential dimension of the retaining groove is larger than the circumferential dimension of the long groove.

[0014] Furthermore, insertion holes and connectors are respectively provided between the two ends of the second air duct plate and the first connector, and between the two ends of the second air duct plate and the second connector.

[0015] Furthermore, the insertion hole is provided on the second air duct plate, and the first connector and the second connector are respectively provided with plug-in components.

[0016] Furthermore, the connector includes a fixing plate, a housing disposed on the fixing plate, and a pin disposed on the housing.

[0017] According to some embodiments, the second aspect of this utility model provides an electrode cleaning mechanism, which adopts the following technical solution:

[0018] An electrode cleaning mechanism includes an air duct as described in the first aspect, and an electrode fixing member disposed on the air duct.

[0019] According to some embodiments, the third aspect of this utility model provides a plasma treatment machine, which adopts the following technical solution:

[0020] A plasma processing machine includes an air duct as described in the first aspect.

[0021] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0022] This utility model provides a first air duct plate between the first connector and the second connector, and provides a second air duct plate on the first air duct plate via a first rotating connector. The end of the second air duct plate away from the first air duct plate extends to the electrode fixing member, serving as a side plate of the entire air duct. When the second air duct plate is opened, the entire side of the air duct is opened, allowing for cleaning of the entire interior of the air duct as well as cleaning of the electrodes on the electrode fixing member through the air duct. This achieves simultaneous cleaning of the air duct and the electrodes, ensuring work efficiency. Attached Figure Description

[0023] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments of this utility model and their descriptions are used to explain this utility model and do not constitute an improper limitation of this utility model.

[0024] Figure 1 This is a schematic diagram of the air duct structure of this utility model;

[0025] Figure 2 This is a schematic diagram of the rotating connector structure of this utility model;

[0026] Figure 3 This is the connector of this utility model;

[0027] Figure 4 This is a schematic diagram of the internal mechanism of the connector of this utility model;

[0028] Figure 5 This is a schematic diagram of the electrode cleaning mechanism of this utility model;

[0029] Figure 6 This is a schematic diagram of the second air duct plate of this utility model after it is opened;

[0030] Figure 7 This is a schematic diagram of the plasma processing machine of this utility model;

[0031] Wherein: 100, air duct; 101, first connecting piece; 102, second connecting piece; 103, first air duct plate; 104, second air duct plate; 105, first rotating connecting piece; 106, intermediate plate; 107, second rotating connecting piece; 1071, first connecting plate; 1072, second connecting plate; 1073, first sleeve; 1074, second sleeve; 1075, elastic element; 1076, rotating shaft; 1077, operating lever; 1078, long slot; 1079, slot; 108, insertion hole; 109, insertion piece fixing hole; 110, insertion piece; 1101, fixing plate; 1102, housing; 1103, pin; 1104, operating end; 1105, spring; 111, air outlet; 200, electrode fixing piece; 300, electrode; 400, plasma treatment machine. Detailed Implementation

[0032] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0033] It should be noted that the following detailed description is illustrative and intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0034] Example 1:

[0035] like Figure 1 As shown, this embodiment provides an air duct 100, including a first connector 101, a second connector 102, a first air duct plate 103, a second air duct plate 104, and a first rotating connector 105, etc. Electrode fixing members 200 are respectively provided on the first connector 101 and the second connector 102.

[0036] The first connector 101 and the second connector 102 are used to connect with the plasma treatment machine, and the air duct 100 is installed on the plasma treatment machine. The first connector 101 and the second connector 102 can be connected by bolts, welding, snap-fit ​​connection or other connection methods. The first connector 101 and the second connector 102 can be configured as a housing, a base or other structural form of connector.

[0037] The two ends of the first air duct plate 103 are connected to the first connector 101 and the second connector 102 by welding, bolting, snap-fitting, plugging, or other connection methods. The shape of the first air duct plate 103 can be set according to the actual situation; for example, when the air duct 100 is a cylinder, the first air duct plate 103 can be arc-shaped; when the air duct 100 is a rectangular structure, the first air duct plate 103 is L-shaped, or the first air duct plate 103 is a flat plate with side plates vertically arranged on it.

[0038] The second air duct plate 104 is hinged to the first air duct plate 103 via the first rotating connector 105, thus realizing the flip-top configuration of the second air duct plate 104. Both ends of the second air duct plate 104 extend to the first connector 101 and the second connector 102, respectively. To improve sealing, sealing elements, such as sealing strips, can be provided between the second air duct plate 104 and the first connector 101, and between the second air duct plate 104 and the second connector 102.

[0039] like Figure 5As shown, the end of the second air duct plate 104 away from the first air duct plate 105 extends to the electrode fixing member 200. It can be understood that the second air duct plate 104 is a side plate of the entire air duct. When the second air duct plate 104 is opened, the entire side of the air duct is opened, allowing for cleaning of the air duct. Furthermore, at this time, the electrode fixing member 200 and the electrodes on it are positioned on the opened air duct, allowing for cleaning of the electrodes on the electrode fixing member 200 through the air duct.

[0040] Similarly, the shape of the second air duct plate 104 can be set according to the actual situation; for example, when the air duct 100 is a cylinder, the second air duct plate 104 can be arc-shaped; when the air duct 100 is a rectangular structure, the second air duct plate 104 is a flat plate.

[0041] When cleaning is required inside the air duct 100, the second air duct plate 104 can be opened to clean the inside of the air duct 100, making cleaning convenient. Furthermore, both ends of the second air duct plate 104 extend to the first connector 101 and the second connector 102 respectively. After opening the second air duct plate 104, the entire air duct can be cleaned.

[0042] In some other embodiments, an intermediate plate 106 is provided between the first air duct plate 103 and the second air duct plate 104; a first rotating connector 105 is provided between the intermediate plate 106 and the first air duct plate 103, and a second rotating connector 107 is provided between the intermediate plate 106 and the second air duct plate 104. In use, the second air duct plate 104 and the intermediate plate 106 can be opened simultaneously, increasing the opening space and facilitating cleaning work inside the air duct 100.

[0043] The two ends of the intermediate plate 106 extend to the first connector 101 and the second connector 102, respectively. To improve sealing, sealing elements, such as sealing strips, can be provided between the intermediate plate 106 and the first connector 101, and between the intermediate plate 106 and the second connector 102. Similarly, the shape of the intermediate plate 106 can be set according to actual conditions; for example, when the air duct 100 is cylindrical, the intermediate plate 106 can be arc-shaped; when the air duct 100 is a rectangular structure, the intermediate plate 106 is a flat plate.

[0044] The number of the first rotating connector 105 and the second rotating connector 107 can be multiple, ensuring the connection strength; the first rotating connector 105 and the second rotating connector 107 are arranged in an alternating manner, which facilitates operation.

[0045] Optionally, the first rotating connector 105 and the second rotating connector 107 may be hinges, pivots, pins, or other rotating connection structures.

[0046] In some embodiments, the first rotating connector 105 and the second rotating connector 107 have the same structure, such as... Figure 2 As shown, taking the second rotating connector 107 as an example, the second rotating connector 107 includes a first connecting plate 1071, a second connecting plate 1072, a first sleeve 1073, a second sleeve 1074, an elastic element 1075, a rotating shaft 1076, an operating rod 1077, a long groove 1078, and a slot 1079, etc.

[0047] Optionally, the first connecting plate 1071 is mounted on the first air duct plate 103 by means of bolts or the like, and the second connecting plate 1072 is mounted on the intermediate plate 106 by means of bolts or the like; the first air duct plate 103 and the second connecting plate 1072 are detachably connected. Similarly, the first connecting plate in the first rotating connector 105 is mounted on the intermediate plate 106 by means of bolts or the like, and the second connecting plate in the first rotating connector 105 is mounted on the second air duct plate 104 by means of bolts or the like. When it is necessary to disassemble the second air duct plate 104 and / or the intermediate plate 106, it is only necessary to disassemble and install the corresponding second connecting plate together with the second air duct plate 104 on the intermediate plate 106, and / or to disassemble and install the corresponding second connecting plate 1072 together with the intermediate plate 106 on the first air duct plate 103, which is convenient and improves efficiency.

[0048] In some embodiments, the first air duct plate 103 and the second connecting plate 1072 are detachably connected by means of a detachable pin connection, snap-fit, or other detachable methods. In this embodiment, the first connecting plate 1071 is provided with a first sleeve 1073 at both ends, and the second connecting plate 1072 is provided with a second sleeve 1074 at both ends. The rotating shaft 1076 is sleeved inside the first sleeve 1073 and the second sleeve 1074 to realize the relative rotation of the first connecting plate 1071 and the second connecting plate 1072. A long slot 1078 is formed in the first sleeve 1073, and an operating rod 1077 is provided on the rotating shaft 1076. The operating rod 1077 passes through the long slot 1078. The movement of the operating rod 1077 within the long slot 1078 drives the rotating shaft 1076 to move within the first sleeve 1073, and simultaneously enables the insertion and removal of the rotating shaft 1076 within the second sleeve 1074. This allows for the connection and separation of the first sleeve 1073 and the second sleeve 1074, achieving a detachable function. It is understood that the length of the rotating shaft 1076 is less than the length of the first sleeve 1073.

[0049] In some embodiments, an elastic element 1075, such as a spring, compression spring, or other elastic element, is provided between the end face of the rotating shaft 1076 away from the second sleeve 1074 and the bottom end of the first sleeve 1073; a slot 1079 is provided at one end of the long groove 1078 away from the second sleeve 1074, the circumferential dimension of the slot 1079 being larger than the circumferential dimension of the long groove 1078, and the slot 1079 being used for temporary engagement of the operating lever 1077.

[0050] During disassembly, press the operating lever 1077 to pull one end of the rotating shaft 1076 out of the second sleeve 1074, separating the first sleeve 1073 and the second sleeve 1074. At this time, the first connecting plate 1071 and the second connecting plate 1072 can be directly disassembled. During the pressing of the operating lever 1077, the elastic element 1075 is compressed, and the elastic element stores energy. After the operating lever 1077 is pressed, it can be temporarily locked in the slot 1079 to prevent the rotating shaft 1076 from protruding, facilitating subsequent installation.

[0051] During installation, the second sleeve 1074 is aligned with the first sleeve 1073. At this time, the operating rod 1077 in the slot 1079 is rotated into the long slot 1078. Under the elastic action of the elastic member 1075, one end of the rotating shaft 1076 is inserted into the second sleeve 1074, thereby realizing the connection between the first sleeve 1073 and the second sleeve 1074.

[0052] like Figure 1 and Figure 3 As shown, at both ends of the second air duct plate 104, insertion holes 108 and connectors 110 are respectively provided between the first connector 101 and the second connector 102. Optionally, connector fixing holes 109 are respectively provided on the first connector 101 and the second connector 102 for installing the connector 110; the connector 110 can be a pin, plug, or other plug-in component or assembly.

[0053] By cooperating with the socket 108 and the connector 110, the second air duct plate 104 and the first connector 101 can be connected by the second air duct plate 104 and the second connector 102, thereby preventing the second air duct plate 104 from opening accidentally and improving stability.

[0054] In some embodiments, the connector 110 includes a fixing plate 1101, a housing 1102, a pin 1103, and an operating end 1104. The fixing plate 1101 can be connected to the connector fixing hole 109 by means of bolts or the like. The housing 1102 is disposed on the fixing plate 1101. The housing 1102 is used to install the pin 1103, etc. The pin 1103 can move on the housing 1102 to achieve the purpose of inserting into the socket 108 and pulling out of the socket 108. One end of the pin 1103 is provided with an operating end 1104 to facilitate the operation of the operating end 1104.

[0055] In some embodiments, such as Figure 4 As shown, a spring 1105 is sleeved on the pin 1103 inside the housing 1102. The two ends of the spring 1105 are respectively connected to the inner wall of the housing 1102 or a baffle or other structure inside the housing 1102, and the other end is connected to the pin 1103. When the pin 1103 is pulled out of the socket 108, the spring 1105 is stretched or compressed to store energy. When the pulling force applied to the pin 1103 disappears, the spring 1105 releases energy, and the pin 1103 is reinserted into the socket 108 under the action of the spring 1105.

[0056] like Figure 1 As shown, an air vent 111 is provided on the first connector 101 or the second connector 102. The air vent 111 is also connected to an exhaust device, which can be implemented through technology and equipment, and will not be described in detail here.

[0057] like Figure 1 and Figure 5 As shown, the electrode fixing component 200 can be a snap-fit ​​component or other connecting component. The electrode fixing component 200 can also be implemented using conventional technology. An electrode 300 is provided on the electrode fixing component 200. When the second air duct plate 104 is opened, the air duct 100 is opened, which can not only clean the space inside the air duct 100, but also clean the side of the electrode 300 facing the inside of the air duct 100, ensuring overall cleaning efficiency.

[0058] Example 2:

[0059] This embodiment provides an electrode cleaning mechanism, such as... Figure 5 As shown, it includes an air duct 100 as described in Embodiment 1, and an electrode fixing member 200 disposed on the air duct 100. The electrode fixing member 200 can be a snap-fit ​​member or other connecting member, and the electrode fixing member 200 can also be implemented using conventional technology. An electrode 300 is disposed on the electrode fixing member 200.

[0060] Example 3:

[0061] This embodiment provides a plasma processing machine 400, such as... Figure 7 As shown, it includes the air duct 100 as described in Embodiment 1. The plasma processor 400 can be a conventional device, and the air duct 100 is disposed at corresponding positions of the plasma processor 400 via a first connector 101 and a second connector 102 at both ends.

[0062] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An air duct, characterized in that It includes a first connector and a second connector, electrode fixing members respectively disposed on the first connector and the second connector, a first air duct plate disposed between the first connector and the second connector, and a second air duct plate disposed on the first air duct plate via a first rotating connector; the end of the second air duct plate away from the first air duct plate extends to the electrode fixing member.

2. The air duct of claim 1, wherein The first rotating connector includes a first connecting plate and a second connecting plate detachably disposed on the first connecting plate; the first connecting plate is disposed on the first air duct plate, and the second connecting plate is disposed on the second air duct plate.

3. The air duct of claim 2, wherein, A plurality of first rotating connecting parts are provided between the first air duct plate and the second air duct plate.

4. The air duct of claim 2, wherein, An intermediate plate is provided between the first air duct plate and the second air duct plate; a first rotating connector is provided between the intermediate plate and the second air duct plate, and a second rotating connector is provided between the intermediate plate and the first air duct plate.

5. The air duct of claim 4, wherein, The first rotating connector and the second rotating connector are staggered.

6. The air duct of claim 4, wherein, Both the first rotating connector and the second rotating connector include a first connecting plate and a second connecting plate; the first connecting plate and the second connecting plate on the first rotating connector are respectively disposed on the intermediate plate and the second air duct plate; the first connecting plate and the second connecting plate on the second rotating connector are respectively disposed on the first air duct plate and the intermediate plate.

7. The air duct of claim 6, wherein A first sleeve is provided on the first connecting plate, and a second sleeve is provided on the second connecting plate. A rotating shaft is sleeved inside the first sleeve and the second sleeve. An elongated groove is provided on the side wall of the first sleeve. An operating rod is provided on the rotating shaft and is slidably disposed in the elongated groove. An elastic element is provided between the end of the rotating shaft away from the second sleeve and the bottom end of the first sleeve.

8. The air duct of claim 7, wherein, A retaining groove is provided at the end of the long groove away from the second sleeve, and the circumferential dimension of the retaining groove is larger than the circumferential dimension of the long groove.

9. The air duct of claim 1, wherein, Insertion holes and connectors are respectively provided between the two ends of the second air duct plate and the first connector, and between the two ends of the second air duct plate and the second connector.

10. The air duct of claim 9, wherein, The insertion hole is provided on the second air duct plate, and the first connector and the second connector are respectively provided with plugs.

11. The air duct of claim 10, wherein, The connector includes a fixing plate, a housing disposed on the fixing plate, and a pin disposed on the housing.

12. An electrode cleaning mechanism, characterized in that, It includes the air duct as described in any one of claims 1-11, and the electrode fixing member disposed on the air duct.

13. A plasma processing machine characterized by, Including the air duct as described in any one of claims 1-11.

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