An ozone generator

Abstract

This utility model discloses an ozone generator, including a high-voltage electrode, a low-voltage electrode, and a dielectric element. The high-voltage electrode is a flat plate structure connected to the positive terminal of a high-voltage power supply to provide high voltage. The low-voltage electrode is a flat plate structure with the same shape as the high-voltage electrode and is connected to the negative terminal of the high-voltage power supply to provide low voltage. The dielectric element is a plate-shaped structure with the same shape as the high-voltage electrode, located between the high-voltage and low-voltage electrodes, coaxially connected to the low-voltage electrode, and coaxial with the high-voltage electrode with a gap. Grooves arranged at intervals are formed on the side of the dielectric element facing the high-voltage electrode. This utility model increases the area of ​​the dielectric element facing the high-voltage electrode by forming grooves arranged at intervals on the side of the dielectric element facing the high-voltage electrode, thereby increasing the discharge area and improving the ozone generation efficiency of the ozone generator, as well as the concentration and purity of ozone in the generated ozone gas.

Description

Technical Field

[0001] This utility model belongs to the field of ozone water environmental cleaning technology in the semiconductor and chip industry, specifically, it relates to an ozone generator. Background Technology

[0002] Ozone is a strong oxidant widely used in water treatment, air purification, medical disinfection, semiconductor manufacturing, and other fields. Dielectric barrier discharge (DBD) ozone generators are a common type of ozone generation device. Their core principle is to generate ozone through the discharge between a dielectric and a gas using a high-voltage electric field. However, traditional DBD ozone generators suffer from limitations such as small discharge area, low ozone concentration, and insufficient purity, restricting their application in demanding scenarios. The limited discharge area on the dielectric plate surface makes it difficult to meet the requirements for generating high-concentration ozone. Summary of the Invention

[0003] This invention addresses the problems of low ozone generation efficiency, low concentration, and insufficient purity caused by the small dielectric barrier discharge area in existing technologies by proposing an ozone generator. By optimizing the structure of the dielectric plate, the efficiency of ozone generation, as well as the concentration and purity of the generated ozone, are significantly improved.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] An ozone generator includes a high-voltage electrode, a low-voltage electrode, and a dielectric element;

[0006] The high-voltage electrode is a flat plate structure and is connected to the positive terminal of the high-voltage power supply to provide high voltage;

[0007] The low-voltage electrode component is a flat plate structure with the same shape as the high-voltage electrode component, and is connected to the negative terminal of the high-voltage power supply to provide low voltage.

[0008] The dielectric element is a plate-shaped structure with the same shape as the high-voltage electrode element, located between the high-voltage electrode element and the low-voltage electrode element, coaxially connected to the low-voltage electrode element, and coaxial with the high-voltage electrode element with a gap; grooves are formed at intervals on the side of the dielectric element facing the high-voltage electrode element.

[0009] In some specific embodiments, the medium is made of high-purity opaque quartz glass.

[0010] In some specific embodiments, the thickness of the dielectric element ranges from 0.4 mm to 1.2 mm.

[0011] In some specific embodiments, the high-voltage electrode, the low-voltage electrode, and the dielectric element are all circular; each of the grooves is a uniformly distributed concentric annular groove.

[0012] In some specific embodiments, the groove is a V-shaped groove; adjacent grooves are transitioned by rounded corners.

[0013] In some specific embodiments, the depth of the trench ranges from 0.05mm to 0.5mm, the width ranges from 0.1mm to 1mm, and the spacing ranges from 0.1mm to 1mm.

[0014] In some specific embodiments, it also includes a base and a cover;

[0015] The base has a first groove adapted to the installation of the low-pressure electrode, the dielectric component, and the high-pressure electrode; the low-pressure electrode, the dielectric component, and the high-pressure electrode are installed in the first groove; an annular second groove is formed on the groove wall of the first groove at a position corresponding to the high-pressure electrode and the groove, with its opening facing the side wall of the high-pressure electrode and the dielectric component; at least one air inlet is formed at the bottom of the second groove for connecting an oxygen delivery pipeline;

[0016] The cover has a boss that is adapted to the first groove and is fixedly connected to the high-voltage electrode and installed in the first groove; a third groove is formed in the middle of the side of the dielectric component with the groove; the high-voltage electrode has a through hole corresponding to the position of the third groove, one end of which is connected to the third groove; the cover has an ozone output channel connected to the other end of the through hole, which includes an outlet for connecting to an ozone output pipe.

[0017] In some specific embodiments, both the base and the cover are cylindrical; the air inlet is located on the side wall of the base; and the air outlet is located on the side wall of the cover.

[0018] In some specific embodiments, a first cooling water channel and a second cooling water channel are formed inside the base and the cover, respectively; the first cooling water channel includes a first inlet and a first outlet, which are respectively disposed on the side wall of the base; the second cooling water channel includes a second inlet and a second outlet, which are respectively disposed on the side wall of the cover.

[0019] In some specific embodiments, the first cooling water channel and the second cooling water channel are respectively dual-channel spirals located at the same height of the base and the same height of the cover, and whose inner ends are interconnected.

[0020] Compared with the prior art, the advantages and positive effects of this utility model are as follows: The ozone generator of this utility model forms grooves arranged at intervals on the side of the dielectric component facing the high-voltage electrode component, thereby increasing the area of ​​the dielectric component facing the high-voltage electrode component, which in turn increases the discharge area of ​​the high-voltage electrode component to the dielectric component connected to the low-voltage electrode component, improves the ozone generation efficiency of the ozone generator and the ratio of oxygen to ozone, and increases the concentration and purity of ozone in the generated ozone gas. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the overall structure of the ozone generator according to an embodiment;

[0023] Figure 2 This is an exploded structural diagram of an ozone generator according to an embodiment;

[0024] Figure 3 This is an exploded structural diagram of an ozone generator according to an embodiment;

[0025] Figure 4 This is a cross-sectional structural schematic diagram of an ozone generator according to an embodiment;

[0026] Figure 5 This is a schematic diagram of the dielectric substrate structure according to an embodiment;

[0027] Figure 6 This is a schematic cross-sectional view of the dielectric substrate according to an embodiment;

[0028] Figure 7 yes Figure 6 A magnified view of the structure at point A in the middle;

[0029] Figure 8 This is a schematic diagram of the cooling channel structure of the upper and lower cooling components according to an embodiment.

[0030] In the picture,

[0031] 1. Cover; 2. Base; 3. High-voltage electrode; 4. Low-voltage electrode; 5. Dielectric component; 11. Air outlet; 12. Boss; 13. Ozone output channel; 14. First water outlet; 15. First water inlet; 16. First cooling water channel; 161. First spiral channel; 162. Second spiral channel; 21. First groove; 22. Second groove; 23. Air inlet; 24. Second water outlet; 25. Second water inlet; 26. Second cooling water channel; 31. Through hole; 51. Groove; 52. Third groove. Detailed Implementation

[0032] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0033] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 This utility model discloses an ozone generator, which includes a high-voltage electrode 3, a low-voltage electrode 4, and a dielectric element 5.

[0034] The high-voltage electrode 3 is a flat plate structure connected to the positive terminal of the high-voltage power supply to provide high voltage; the low-voltage electrode 4 is a flat plate structure with the same shape as the high-voltage electrode 3 and is connected to the negative terminal of the high-voltage power supply to provide low voltage; the dielectric element 5 is a plate-shaped structure with the same shape as the high-voltage electrode 3, located between the high-voltage electrode 3 and the low-voltage electrode 4, coaxially connected to the low-voltage electrode 4, and coaxial with the high-voltage electrode 3 with a gap; thus forming a dielectric barrier discharge ozone generator with the dielectric element 5 as the barrier.

[0035] The dielectric element 5 is coaxially connected to the low-voltage electrode element 4 and coaxial with the high-voltage electrode element 3 with a gap; that is, the dielectric element 5, the high-voltage electrode element 3, and the low-voltage electrode element 4 are plate structures with the same shape and size, their centers are on a straight line and in the same direction, so that the high-voltage electrode element 3, the dielectric element 5, and the low-voltage electrode element 4 are completely aligned, so that the discharge area of ​​the high-voltage electrode element 3 and the low-voltage electrode element 4 is maximized; the blocking effect of the dielectric element 5 is most effective.

[0036] On the side of the dielectric element 5 facing the high-voltage electrode element 3, there are grooves 51 arranged at intervals. These grooves can be arranged regularly or irregularly to increase the area of ​​the dielectric element 5 facing the high-voltage electrode element 3, so that the discharge of the high-voltage electrode to the low-voltage electrode element 4 can be increased through the grooves 51 of the dielectric element 5.

[0037] The ozone generator of this invention forms grooves 51 arranged at intervals on the side of the dielectric element 5 facing the high-voltage electrode element 3, thereby increasing the area of ​​the dielectric element 5 facing the high-voltage electrode element 3, and thus increasing the discharge area of ​​the high-voltage electrode element 3 to the dielectric element 5 connected to the low-voltage electrode element 4. This improves the ozone generation efficiency of the ozone generator and the ratio of oxygen to ozone, and increases the concentration and purity of ozone in the generated ozone gas.

[0038] The specific structure and principle of the ozone generator of this utility model will be described in detail below through specific embodiments.

[0039] In some specific embodiments, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 The dielectric element 5 is made of high-purity opaque quartz glass through precision processing, making its discharge surface smooth and defect-free.

[0040] The ozone generator of this embodiment uses high-purity opaque quartz glass to make the dielectric component 5, which improves the pressure resistance and thermal stability of the dielectric component 5, giving it high pressure resistance and high thermal stability, and extending the service life of the ozone generator equipment.

[0041] Of course, the dielectric element 5 can also be made of high-purity transparent adaptive glass.

[0042] In some specific embodiments, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 The thickness of the dielectric element 5 ranges from 0.4 mm to 1.2 mm.

[0043] In some specific embodiments, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 The high-voltage electrode 3, the low-voltage electrode 4, and the dielectric element 5 are all circular; each groove 51 is a concentric annular groove evenly distributed.

[0044] In some specific embodiments, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7The groove 51 is a V-shaped groove; adjacent grooves 51 are transitioned by rounded corners.

[0045] The ozone generator in this embodiment maximizes the discharge area of ​​the dielectric element 5 toward the high-voltage electrode element 3 by setting the groove 51 as a V-shaped groove and the transition between adjacent grooves 51 by rounded corners, thereby improving the ozone generation efficiency, ozone concentration and purity.

[0046] In some specific embodiments, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 The depth of the groove 51 ranges from 0.05mm to 0.5mm, the width ranges from 0.1mm to 1mm, and the spacing ranges from 0.1mm to 1mm.

[0047] The ozone generator in this embodiment increases the ozone generation efficiency, ozone concentration, and purity by limiting the depth, width, and spacing of the trench 51, ensuring strength while maximizing the discharge area of ​​the dielectric component 5 toward the high-voltage electrode component 3.

[0048] In some specific embodiments, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 The ozone generator also includes a base 2 and a cover 1.

[0049] The base 2 has a first groove 21 that is adapted to the installation of the low-voltage electrode 4, the dielectric component 5, and the high-voltage electrode 3; the low-voltage electrode 4, the dielectric component 5, and the high-voltage electrode 3 are installed in the first groove 21; wherein the low-voltage electrode 4 is connected to the bottom of the first groove 21; and the dielectric component 5 is fixedly connected to the low-voltage electrode 4.

[0050] On the groove wall of the first groove 21, at the position corresponding to the high voltage electrode 3 and the groove 51, an annular second groove 22 is formed with its opening facing the side wall of the high voltage electrode 3 and the dielectric component 5; at least one air inlet 23 is formed at the bottom of the second groove 22, which communicates with the outside of the base 2 and is used to connect an oxygen delivery pipeline.

[0051] The cover 1 has a boss 12 that is adapted to the first groove 21 for installation, and the shape of the boss 12 is adapted to the high voltage electrode 3 for installation. The high voltage electrode 3 is fixedly installed on the outside of the boss 12. The boss 12 is installed together with the high voltage electrode 3 in the first groove 21. A third groove 52 is formed in the middle of the side of the medium 5 with the groove 51. A through hole 31 is formed in the high voltage electrode 3 corresponding to the position of the third groove 52, and one end of the through hole 31 is connected to the third groove 52. The cover 1 has an ozone output channel 13 that is connected to the other end of the through hole 31, which includes an outlet 11 connected to the outside of the cover 1 for connecting to the ozone output pipe.

[0052] The ozone generator in this embodiment creates a closed environment for ozone generation by setting a base 2 and a cover 1; by setting an air inlet 23 and channel, an ozone output channel 13 and an air outlet 11 on the base 2 and the cover 1, a generation and flow path from oxygen to ozone is formed, thereby improving the safety of ozone generation.

[0053] In this embodiment, the ozone generator, through the structure of the base 2 and the cover 1, can be conveniently set as an ozone generating unit and configured into an ozone generating device composed of multiple ozone generators, thereby increasing the amount of ozone generated.

[0054] In some specific embodiments, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 Both the base 2 and the cover 1 are cylindrical; the air inlet 23 is located on the side wall of the base 2; and the air outlet 11 is located on the side wall of the cover 1.

[0055] In this embodiment, the ozone generator facilitates the integration of multiple ozone generators by setting the air inlet 23 and the air outlet 11 on the side walls of the base 2 and the cover 1, respectively.

[0056] In some specific embodiments, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 A first cooling water channel 16 and a second cooling water channel 26 are formed inside the base 2 and the cover 1, respectively. The first cooling water channel 16 includes a first inlet 15 and a first outlet 14, which are respectively disposed on the side wall of the base 2. The second cooling water channel 26 includes a second inlet 25 and a second outlet 24, which are respectively disposed on the side wall of the cover 1.

[0057] In this embodiment, the ozone generator is designed to facilitate the integration of multiple ozone generators by setting the first inlet 15, the first outlet 14, the second inlet 25, and the second outlet 24 on the side walls of the base 2 and the cover 1, respectively.

[0058] In some specific embodiments, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 The first cooling water channel 16 and the second cooling water channel 26 are respectively double-channel spirals located at the same height of the base 2 and the same height of the cover 1, and their inner ends are connected to each other.

[0059] The dual-channel spiral first cooling water channel 16 includes a first spiral channel 161 and a second spiral channel 162, which are adjacent to each other and simultaneously vortex to the middle of the base 2 and are connected in the middle, so that the cooling water flows from the first spiral channel 161 to the second spiral channel 162 and flows out from the second spiral channel 162; the port of the first spiral channel 161 is the first water inlet 15; the outer port of the second spiral channel 162 is the first water outlet 14; the first water inlet 15 and the first water outlet 14 can be set on the same side or both sides of the base 2.

[0060] Similarly, the dual-channel spiral second cooling water channel 26 includes a third spiral channel and a fourth spiral channel, which are adjacent to each other and simultaneously vortex to the middle of the base 2 and are connected in the middle, so that the cooling water flows from the middle to the fourth spiral channel after passing through the third spiral channel and flows out from the fourth spiral channel; the port of the third spiral channel is the second inlet 25; the outer port of the fourth spiral channel is the second outlet 24; the second inlet 25 and the second outlet 24 can be set on the same side or both sides of the base 2.

[0061] The ozone generator in this embodiment extends the heat exchange time of the cooling water by setting a dual-channel spiral first cooling water channel 16 and a second cooling water channel 26 in the base 2 and the cover 1. The first half and the second half of the cooling water are set together, so that the low temperature zone and the high temperature zone of the cooling water are set adjacent to each other, thereby improving the temperature uniformity of the base 2 and the cover 1, and thus improving the safety, reliability and life of the ozone generator.

[0062] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0063] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0064] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0065] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0066] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0067] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. An ozone generator characterized by, include: High-voltage electrode components, which are flat plate structures, are connected to the positive terminal of a high-voltage power supply to provide high voltage; The low-voltage electrode, which has the same flat plate structure as the high-voltage electrode, is connected to the negative terminal of the high-voltage power supply to provide a low voltage. The dielectric element is a plate-shaped structure with the same shape as the high-voltage electrode element. It is located between the high-voltage electrode element and the low-voltage electrode element, coaxially connected to the low-voltage electrode element, and coaxial with the high-voltage electrode element with a gap. Grooves arranged at intervals are formed on the side of the dielectric element facing the high-voltage electrode element.

2. The ozone generator of claim 1, wherein, The medium is made of high-purity, opaque quartz glass.

3. The ozone generator of claim 1, wherein, The thickness of the medium element ranges from 0.4 mm to 1.2 mm.

4. The ozone generator of claim 1, wherein, The high-voltage electrode, the low-voltage electrode, and the dielectric element are all circular; each of the grooves is a concentric annular groove evenly distributed.

5. The ozone generator of claim 4, wherein, The groove is a V-shaped groove; adjacent grooves are transitioned by rounded corners.

6. The ozone generator of claim 4, wherein, The depth of the groove ranges from 0.05mm to 0.5mm, the width ranges from 0.1mm to 1mm, and the spacing ranges from 0.1mm to 1mm.

7. The ozone generator according to any one of claims 1 to 6, characterized in that It also includes the base and the cover; The base has a first groove adapted to the installation of the low-pressure electrode, the dielectric component, and the high-pressure electrode; the low-pressure electrode, the dielectric component, and the high-pressure electrode are installed in the first groove; an annular second groove is formed on the groove wall of the first groove at a position corresponding to the high-pressure electrode and the groove, with its opening facing the side wall of the high-pressure electrode and the dielectric component; at least one air inlet is formed at the bottom of the second groove for connecting an oxygen delivery pipeline; The cover has a boss that is adapted to the first groove and is fixedly connected to the high-voltage electrode and installed in the first groove; a third groove is formed in the middle of the side of the dielectric component with the groove; the high-voltage electrode has a through hole corresponding to the position of the third groove, one end of which is connected to the third groove; the cover has an ozone output channel connected to the other end of the through hole, which includes an outlet for connecting to an ozone output pipe.

8. The ozone generator of claim 7, wherein, Both the base and the cover are cylindrical; the air inlet is located on the side wall of the base; and the air outlet is located on the side wall of the cover.

9. The ozone generator of claim 8, wherein, A first cooling water channel and a second cooling water channel are formed inside the base and the cover, respectively; the first cooling water channel includes a first inlet and a first outlet, which are respectively disposed on the side wall of the base; the second cooling water channel includes a second inlet and a second outlet, which are respectively disposed on the side wall of the cover.

10. The ozone generator of claim 9, wherein, The first cooling water channel and the second cooling water channel are respectively located at the same height of the base and the same height of the cover, and their inner ends are connected to each other in a double-channel spiral shape.

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