Evaporation coating device

Abstract

The application relates to the technical field of coating equipment, and provides an evaporation coating device. The evaporation coating device comprises an evaporation boat, a temperature module and an adjusting mechanism. The temperature module is provided with a plurality of heating units which are arranged in the length direction of the evaporation boat and are arranged in the lower portion of the evaporation boat in sequence and at intervals. The adjusting mechanism comprises a driving assembly which is used for driving the heating units to move in the length direction of the evaporation boat. The evaporation coating device can make the temperature rise of each region of the evaporation boat more balanced, and the use quality of the evaporation coating device is improved.

Description

Technical Field

[0001] This application relates to the field of coating equipment technology, and in particular to an evaporation coating apparatus. Background Technology

[0002] In the fabrication of semiconductor devices, it is necessary to prepare thin film layers with specific functions. In the preparation of thin film layers, evaporation deposition technology is generally used. The key functional layers (such as the electron transport layer and electrode layer in photovoltaic cells) are prepared by evaporation deposition equipment. Evaporation deposition technology can form uniform, dense thin films with precise and controllable thickness on the surface of semiconductor devices.

[0003] Currently, evaporation coating apparatuses in related technologies generally employ an integrated heating system. This system typically heats the evaporation boat using a single heat source or a series of heating modules. However, this type of evaporation coating apparatus suffers from uneven temperature field distribution, resulting in a significant thickness gradient in the formed thin film layer. This leads to large fluctuations in the efficiency of semiconductor devices, which is detrimental to improving the overall quality of the evaporation coating apparatus. Utility Model Content

[0004] In view of this, the present application aims to provide an evaporation coating apparatus to improve the quality of use of the evaporation coating apparatus.

[0005] To achieve the above objectives, the technical solution of this application is implemented as follows:

[0006] An evaporation coating apparatus includes an evaporation boat, a temperature module disposed below the evaporation boat, and an adjustment mechanism for adjusting the position of the temperature module.

[0007] The temperature module has a plurality of heating units arranged at intervals along the length of the evaporation boat, and the adjustment mechanism includes a drive component for driving each of the heating units to move along the length of the evaporation boat.

[0008] Furthermore, it also includes a base located below the evaporation boat; the driving assembly includes driving units that are arranged one-to-one with each of the heating units, and each driving unit and each heating unit are disposed on the base.

[0009] Furthermore, the base is provided with slide rails arranged along the length of the evaporation boat, and each of the heating units is slidably mounted on the slide rails.

[0010] Furthermore, the slide rail includes a base plate; the base plate is provided with sliding protrusions arranged along the length direction of the evaporation boat, each heating unit is provided with a sliding groove, each sliding groove is slidably engaged with the sliding protrusion, and / or, the base plate is provided with limiting plates on both sides along the width direction of the evaporation boat, and each heating unit is slidably disposed in the sliding rail defined by each limiting plate and the base plate.

[0011] Furthermore, the drive unit is connected to the heating unit via a transmission assembly.

[0012] Furthermore, the transmission assembly includes a drive gear disposed on the drive shaft of the drive unit and a rack connected to the heating unit. The length direction of the rack is arranged along the moving direction of the heating unit, and the drive gear meshes with the rack for transmission.

[0013] Furthermore, the heating zones of each heating unit are arranged to extend along the width direction of the evaporation boat; and / or, each driving unit is mounted on the base via a mounting component.

[0014] Furthermore, the adjustment mechanism includes a lifting assembly; the base is connected to the lifting end of the lifting assembly, and the lifting assembly is used to drive the base to rise and fall, thereby adjusting the distance between the heating assembly and the evaporation boat.

[0015] Furthermore, the lifting assembly includes multiple lifting units, the base is connected to the lifting end of each lifting unit, and the lifting unit is provided at least at both ends of the base in the length direction.

[0016] Furthermore, the base is made of heat-insulating material; and / or, the drive unit is a motor.

[0017] Compared with related technologies, this application has the following advantages:

[0018] (1) The evaporation coating apparatus described in this application can heat the evaporation boat at multiple points through the heating units located below the evaporation boat. By setting the adjustment mechanism, the position of the heating unit of the temperature module in the length direction of the evaporation boat can be adjusted, so as to adjust the temperature difference in the length direction of the evaporation boat according to the temperature difference in different areas of the evaporation boat. This allows the evaporated material gas to be evenly distributed in all parts of the evaporation boat, which can solve the problems of poor uniformity of thin film layer and material thermal damage caused by traditional integrated heating, meet the industrial preparation requirements of high-performance thin film layer for semiconductor devices, and improve the quality of use of the evaporation coating apparatus.

[0019] (2) By making the drive assembly include drive units that correspond one-to-one with each heating unit, it is easy to adjust the position of each heating unit. The base facilitates the arrangement of the heating units and drive units. The structure is simple and easy to design and implement.

[0020] (3) By setting up the slide rail, and with each heating unit sliding on the slide rail, it is easy to adjust the position of the heating unit, which is helpful for design implementation.

[0021] (4) The sliding protrusion facilitates the sliding of the heating unit. At the same time, the limiting plate defines the sliding track of the heating unit, which facilitates the sliding of the heating unit and helps to better assist the heating unit in moving along the length of the evaporation boat.

[0022] (5) The transmission components facilitate the drive connection between the drive unit and the heating unit, and the structure is simple and easy to design and implement.

[0023] (6) By using the drive gear and rack, it is easy to realize the movement of the heating unit in the length direction of the evaporation boat by the drive unit, and the position of the heating unit can be controlled more precisely, which is conducive to design and implementation.

[0024] (7) By arranging the heating zones of each heating unit to extend along the width of the evaporation boat, it is convenient to heat the evaporation boat in the width direction. At the same time, by setting the mounting parts, it is convenient to arrange the drive unit on the base.

[0025] (8) The setting of the lifting component makes it easy to adjust the distance between the heating unit and the evaporation boat, which helps to adjust the temperature of the evaporation boat and facilitates the design and implementation.

[0026] (9) By setting lifting units at least at both ends of the base along its length, it is easy to adjust the distance between the heating unit and the evaporation boat. The structure is simple and easy to design and implement.

[0027] (10) By using heat-insulating material for the base, it is easy to isolate the influence of the heating unit on the structure below the base when heating the evaporation boat. At the same time, by using a motor for the drive unit, it is easy to process and manufacture, which is helpful for design and implementation. Attached Figure Description

[0028] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments and descriptions of this application are used to explain this application and do not constitute an undue limitation of this application. In the drawings:

[0029] Figure 1 This is a schematic diagram of the evaporation coating apparatus described in the embodiments of this application;

[0030] Figure 2 for Figure 1 Enlarged view of point A;

[0031] Figure 3 for Figure 1 Enlarged view of point B;

[0032] Figure 4 This is a front view of the evaporation coating apparatus described in the embodiments of this application;

[0033] Figure 5 This is a side view of the evaporation coating apparatus described in an embodiment of this application;

[0034] Explanation of reference numerals in the attached figures:

[0035] 1. Evaporation boat;

[0036] 2. Temperature module;

[0037] 201. Heating unit;

[0038] 3. Adjustment mechanism;

[0039] 301, Drive component; 3011, Drive unit;

[0040] 302. Transmission assembly; 3021. Drive gear; 3022. Rack;

[0041] 303. Lifting assembly; 3031. Lifting unit;

[0042] 4. Support; 5. Base;

[0043] 6. Slide rail;

[0044] 601. Base plate; 602. Sliding protrusion; 603. Limiting plate;

[0045] 7. Installation components; 8. Workbench. Detailed Implementation

[0046] To make the technical solution and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0047] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0048] Furthermore, it should be noted that in the description of this application, if terms such as "upper," "lower," "inner," or "outer" appear, indicating orientation or positional relationship, these are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, if terms such as "first" or "second" appear, they are also used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0049] Furthermore, in the description of this application, unless otherwise expressly defined, the terms "installation," "connection," "joining," and "connector" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application in light of the specific circumstances.

[0050] In this application, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0051] The present application will now be described in detail through exemplary embodiments. However, it should be understood that, without further description, elements, structures, and features in one embodiment may be advantageously incorporated into other embodiments.

[0052] The first aspect of this application provides an evaporation coating apparatus for preparing functional thin film layers in semiconductor devices. It is mainly used to complete the evaporation coating operation. The evaporation coating apparatus in this embodiment, through its structural innovation, can evenly heat the heating area of ​​the evaporation boat 1 during the use of the evaporation coating apparatus, improve the uniformity of the thin film layer, and reduce material thermal damage, thereby helping to improve the quality of use of the evaporation coating apparatus.

[0053] In related technologies, the fabrication of semiconductor devices such as photovoltaic cells requires the preparation of thin film layers with specific functions. Evaporation deposition technology is generally used in the fabrication of these thin film layers. This technology uses an evaporation deposition apparatus to prepare key functional layers (such as the electron transport layer and electrode layer in photovoltaic cells). Evaporation deposition technology can form uniform, dense thin films with precisely controllable thickness on the surface of semiconductor devices.

[0054] Currently, evaporation coating apparatuses in related technologies generally employ an integrated heating system. This system typically heats the evaporation boat 1 using a single heat source or a series of heating modules. However, this type of evaporation coating apparatus suffers from uneven temperature field distribution, resulting in a significant thickness gradient in the formed thin film layer. This leads to large fluctuations in the efficiency of semiconductor devices, which is detrimental to improving the overall quality of the evaporation coating apparatus.

[0055] In view of this, in order to overcome the shortcomings of related technologies, the evaporation coating apparatus of this embodiment combines... Figures 1 to 5 As shown, the overall design includes an evaporation boat 1, a temperature module 2, and an adjustment mechanism 3.

[0056] The temperature module 2 has multiple heating units 201 located below the evaporation boat 1, with each heating unit 201 arranged sequentially at intervals along the length of the evaporation boat 1. The adjustment mechanism 3 includes a drive assembly 301 for driving each heating unit 201 to move along the length of the evaporation boat 1.

[0057] Therefore, by means of the heating units 201 located below the evaporation boat 1, the evaporation boat 1 can be heated at multiple points. By means of the adjustment mechanism 3, the position of the heating unit 201 of the temperature module in the length direction of the evaporation boat 1 can be adjusted, so as to adjust the temperature difference in the length direction of the evaporation boat 1 according to the temperature difference in different areas of the evaporation boat 1. This allows the evaporated material gas to be evenly distributed in all parts of the evaporation boat length direction, which can solve the problems of poor uniformity of thin film layer and thermal damage to material caused by traditional integrated heating, meet the industrial preparation requirements of high-performance thin film layer for semiconductor devices, and improve the quality of use of evaporation coating device.

[0058] Based on the above overall introduction, specifically regarding the evaporation boat 1 in this embodiment, combined with... Figure 1 , Figure 4 and Figure 5 As shown, it generally includes a hull and a cover plate fastened to the hull.

[0059] The above-mentioned boat body serves as the main structure of the evaporation boat 1, and is designed in a trough shape, primarily for accommodating the material to be evaporated. In specific implementation, a receiving trough is formed by recessing from the top to the bottom of the boat body, and the material to be evaporated is placed in the receiving trough. In this case, in addition to the trough-shaped structure, the boat body can also refer to the boat body structure in existing evaporation boats 1 (such as a boat-shaped structure), which will not be elaborated here.

[0060] The connection between the boat hull and the cover plate can also be achieved by referring to the connection form of the relevant structure in the existing evaporation boat 1, and will not be described again here.

[0061] It is worth mentioning that, in order to facilitate the placement of the temperature module 2 below the evaporation boat 1, and to facilitate the arrangement of the evaporation boat 1, in this embodiment, the evaporation coating device may include a support 4, for example.

[0062] The support 4 is provided with mounting holes for mounting the evaporation boat 1 on the support 4. In specific implementation, to facilitate the mounting and fixing of the evaporation boat 1 on the support 4, limiting strips are provided on both sides of the boat body to facilitate the mounting and fixing of the evaporation boat 1 on the support 4. At this time, the arrangement of the evaporation boat 1 above the temperature module 2 can also refer to the arrangement of related structures in existing evaporation coating devices, and will not be described in detail here.

[0063] Furthermore, it should be noted that, in specific implementations, the heating unit 201 described above can refer to the configuration of the heating unit 201 in existing evaporation coating devices (such as electric heating), and will not be elaborated further here.

[0064] Continue to combine Figures 1 to 5 As shown, in some exemplary embodiments, this embodiment may, for example, include a base 5 located below the evaporation boat 1 in the evaporation coating apparatus, and the drive assembly 301 includes drive units 3011 that are disposed one-to-one with each heating unit 201, with each drive unit 3011 and each heating unit 201 disposed on the base 5.

[0065] It is understandable that by including a drive unit 3011 corresponding to each heating unit 201 in the drive assembly 301, it is convenient to adjust the position of each heating unit 201. The arrangement of the heating unit 201 and the drive unit 3011 by setting the base 5 is convenient. The structure is simple and easy to design and implement.

[0066] In practical implementation, the base 5 can be arranged in the form of a cuboid, such that the projection area of ​​the evaporator 1 along the height direction of the evaporator 1 is within the projection area of ​​the base 5, so that each heating unit 201 can better heat the evaporator 1. Of course, the base 5 can also be an elliptical platform, an olive-shaped platform, or a waist-shaped platform, as long as its projection area along the height direction of the evaporator 1 includes the projection area of ​​the evaporator 1.

[0067] It is worth mentioning that when setting up the above base 5, it can be placed directly on the worktable 8 after determining the distance from the evaporation boat 1, or it can be placed on the worktable 8 through the lifting assembly 303. It can be set up according to the relevant requirements of evaporation coating.

[0068] Continue to combine Figures 1 to 5 As shown, in some exemplary embodiments, taking the evaporation boat 1 with a base 5 below it as an example, this embodiment may make the base 5 made of heat-insulating material.

[0069] Understandably, by using heat-insulating material to make the base 5, it is easier to isolate the influence of the heating unit 201 on the structure below the base 5 when heating the evaporation boat 1.

[0070] In specific implementation, the base 5 can be made of ceramic, for example. Of course, other heat insulation materials in related technologies (such as polymer materials) are also acceptable, as long as they can isolate the heating unit 201 from the structure below the base 5.

[0071] Continue to combine Figures 1 to 5 As shown, in some exemplary embodiments, taking the evaporation boat 1 with a base 5 below it as an example, this embodiment may have a slide rail 6 on the base 5, the slide rail 6 being arranged along the length of the evaporation boat 1, and each heating unit 201 being slidably disposed on the slide rail 6.

[0072] It is understandable that by setting up the slide rail 6, and with each heating unit 201 sliding on the slide rail 6, the position adjustment of the heating unit 201 is convenient, which helps in the design and implementation.

[0073] In specific implementation, the slide rail 6 can be made of high-temperature resistant materials (such as ceramics) to ensure the service life of the slide rail 6. The surface of the slide rail 6 that slides with the heating unit 201 can be smoothed (such as polished) to facilitate the sliding of the heating unit 201 on the slide rail 6.

[0074] Furthermore, the slide rail 6 can be fixed to the base 5, for example, by means of a limiting snap-fit ​​connection. Specifically, multiple snap-fit ​​blocks are provided on the mating surface of the slide rail 6 and the base 5, and the base 5 has corresponding slots for the snap-fit ​​blocks. During assembly, simply insert the snap-fit ​​blocks on the slide rail 6 into the corresponding slots on the base 5 to fix the slide rail 6 to the base 5. Of course, other configuration methods (such as using the same material to make one piece) are also possible, as long as they can fix the slide rail 6 to the base 5, which will not be elaborated here.

[0075] Continue to combine Figures 1 to 5As shown, in some exemplary embodiments, taking the base 5 with a slide rail 6 as an example, this embodiment may make the slide rail 6 include a base plate 601, and the base plate 601 is provided with a sliding protrusion 602 and a limiting plate 603.

[0076] The sliding protrusions 602 are arranged along the length of the evaporation boat 1, and each heating unit 201 is provided with a sliding groove, which is slidably engaged with the sliding protrusions 602. The limiting plates 603 are respectively provided on both sides of the width of the evaporation boat 1, and each heating unit 201 is slidably disposed in the sliding track defined by the limiting plates 603 and the bottom plate 601.

[0077] It is understandable that the sliding protrusion 602 facilitates the sliding of the heating unit 201. At the same time, the limiting plate 603 defines a sliding track for the heating unit 201, which facilitates the sliding of the heating unit 201 and helps to better assist the movement of the heating unit 201 in the length direction of the evaporation boat 1.

[0078] In a specific implementation, the sliding protrusion 602 may be provided in the middle area of ​​the slide rail 6, for example, to better guide and limit the heating unit 201. The shape of the sliding protrusion 602 may be a semi-cylindrical protrusion, and the arc surface of the sliding protrusion 602 slides and engages with the heating unit 201. Correspondingly, the shape of the sliding groove at the bottom of the heating unit 201 matches the shape of the sliding protrusion 602.

[0079] In addition, the surfaces of the upper plate 603 that form the sliding track can also be smoothed (e.g., polished) to better facilitate the sliding of the heating unit 201 on the sliding track.

[0080] Continue to combine Figures 1 to 5 As shown, in some exemplary embodiments, taking the example that the driving unit 3011 can drive the heating unit 201 to move, this embodiment may, for example, allow the driving unit 3011 to be connected to the heating unit 201 via the transmission assembly 302.

[0081] It is understandable that the transmission component 302 facilitates the driving connection between the drive unit 3011 and the heating unit 201, and the structure is simple and easy to design and implement.

[0082] In specific implementation, the above transmission component 302 can be connected between the drive unit 3011 and the heating unit 201. Specifically, the active end of the transmission component 302 is connected to the drive unit 3011, and the driven end of the transmission component 302 is connected to the heating unit 201, so as to better realize the drive of the heating module by the drive unit 3011 through the transmission component 302.

[0083] Continue to combine Figures 1 to 5 As shown, in some exemplary embodiments, the driving unit 3011 and the heating unit 201 are still connected via a transmission assembly 302. In this embodiment, the transmission assembly 302 may include a driving gear 3021 and a rack 3022.

[0084] The drive gear 3021 is mounted on the drive shaft of the drive unit 3011, and the rack 3022 is connected to the heating unit 201 and is arranged along the moving direction of the heating unit 201. The drive gear 3021 and the rack 3022 mesh and transmit power.

[0085] It is understandable that the cooperation between the drive gear 3021 and the rack 3022 facilitates the movement of the heating unit 201 in the length direction of the evaporation boat 1 by the drive unit 3011, and enables more precise control of the position of the heating unit 201, which is beneficial for design and implementation.

[0086] In practical implementation, the specific parameters of the drive gear 3021 and rack 3022 (such as module, pressure angle, etc.) only need to be set according to the required transmission ratio and the relevant parameters of the drive unit 3011, as long as they can cooperate with the drive unit 3011 to move the heating unit 201.

[0087] In addition, in this embodiment, each drive unit 3011 may be mounted on the base 5 via the mounting member 7. It is understood that the mounting member 7 facilitates the arrangement of the drive unit 3011 on the base 5.

[0088] In specific implementation, the above mounting component 7 can be, for example, a support rod. One end of the support rod is connected to the base 5, and the other end is connected to the drive unit 3011, so that the drive unit 3011 can be arranged on the base 5. The connection between the support rod and the base 5 and the drive unit 3011 can be found in the connection form between the base 5 and the support rod in the related art (such as screw connection, etc.), and will not be described in detail here.

[0089] In addition, in this embodiment, the drive unit 3011 may be a motor. It is understood that by making the drive unit 3011 a motor, it is easier to process and manufacture, and it is helpful for design and implementation.

[0090] In practical implementation, the power output end of the motor is fixedly connected to the drive gear 3021 so that when the power output end of the motor rotates, it drives the drive gear 3021 to rotate, and through the engagement of the rack 3022, it drives the heating unit 201 to move. At this time, the support rod can be used to mount the motor on the base 5 by means of screw connection and welding.

[0091] Continue to combine Figures 1 to 5As shown, in some exemplary embodiments, this embodiment may, for example, arrange the heating zones of each heating unit 201 along the width direction of the evaporation boat 1.

[0092] It is understandable that by arranging the heating zones of each heating unit 201 to extend along the width direction of the evaporation boat 1, it is convenient to heat the evaporation boat 1 in the width direction.

[0093] In practical implementation, the heating zone of each heating unit 201 may be slightly larger than the width of the evaporation boat 1, so as to better improve the heating effect of each heating unit 201 along the width direction of the evaporation boat 1.

[0094] Continue to combine Figures 1 to 5 As shown, in some exemplary embodiments, this embodiment may, for example, make the adjusting mechanism 3 include a lifting assembly 303.

[0095] The base 5 is connected to the lifting end of the lifting assembly 303, and the lifting assembly 303 is used to drive the base 5 to rise and fall, so as to adjust the distance between the heating unit 201 and the evaporation boat 1.

[0096] It is understandable that the lifting component 303 facilitates the adjustment of the distance between the heating unit 201 and the evaporation boat 1, which in turn helps to adjust the temperature of the evaporation boat 1 and facilitates design implementation.

[0097] In specific implementation, the base 5 is arranged on the workbench 8 via the lifting assembly 303. That is, the lifting assembly 303 is arranged on the workbench 8, and the base 5 is arranged on the lifting assembly 303, so as to facilitate the arrangement of the base 5 on the workbench 8, and the height of the base 5 can be adjusted by the lifting assembly 303, thereby adjusting the distance between the heating unit 201 and the evaporation boat 1.

[0098] Continue to combine Figures 1 to 5 As shown, in some exemplary embodiments, the adjusting mechanism 3 includes a lifting assembly 303 as an example. In this embodiment, the lifting assembly 303 may include a plurality of lifting units 3031.

[0099] The lifting ends of the above-mentioned upgrade units are all connected to the base 5, and at least the two ends of the base 5 in the length direction are respectively provided with lifting units 3031.

[0100] It is understandable that by setting lifting units 3031 at at least both ends of the base 5 along its length, the distance between the heating unit 201 and the evaporation boat 1 can be easily adjusted. The structure is simple and easy to design and implement.

[0101] In practical implementation, the two lifting units 3031 are respectively arranged at both ends of the worktable 8, and the two ends of the base 5 are respectively connected to the lifting ends of the corresponding lifting units 3031. When arranging the base 5, the two ends of the base 5 should be connected to the lifting ends of the lifting units 3031 near the middle area in the width direction of the base 5, so as to facilitate more stable adjustment of the height of the base 5. Preferably, the lifting unit 3031 can be a cylinder, for example. Of course, other lifting structures in the prior art that can adjust the height (such as scissor lift structures) can also be used, as long as they can adjust the height of the base 5.

[0102] It is worth noting that, regarding the evaporation coating apparatus of this embodiment, based on the above exemplary embodiments, in specific implementation, as a preferred embodiment, it is still composed of... Figures 1 to 5 As shown, it generally includes an evaporation boat 1.

[0103] The evaporation boat 1 is provided with a temperature module 2 and an adjustment mechanism 3 below it. The temperature module 2 has a plurality of heating units 201 arranged sequentially at intervals along the length of the evaporation boat 1, and the adjustment mechanism 3 includes a drive assembly 301 for driving each heating unit 201 to move along the length of the evaporation boat 1.

[0104] The evaporation boat 1 is further provided with a base 5, which is made of ceramic. The base 5 is provided with a slide rail 6, and each heating unit 201 is slidably mounted on the slide rail 6. The slide rail 6 has a limiting plate 603 at both ends along its width direction, a sliding protrusion 602 at the top of the slide rail 6, and a sliding groove at the bottom of each heating unit 201. The limiting plate 603 and the sliding protrusion 602 constitute the sliding track of each heating unit 201 on the top of the slide rail 6, and the sliding protrusion 602 is located in the sliding groove when sliding.

[0105] The drive assembly 301 includes drive units 3011 corresponding to each heating unit 201. Each drive unit 3011 is mounted on the base 5 via a mounting member 7. A transmission assembly 302 is provided between each drive unit 3011 and each heating unit 201. The transmission assembly 302 includes a drive gear 3021 on the power output end of the drive unit 3011 and a rack 3022 on the heating unit 201. The drive gear 3021 meshes with the rack 3022. The drive unit 3011 is a motor, and each rack 3022 is arranged along the sliding direction of the heating unit 201.

[0106] The base 5 is mounted on the workbench 8 via a lifting assembly 303. The lifting assembly 303 includes two lifting units 3031 located at both ends of the base 5, and the lifting ends of each lifting unit 3031 are connected to the base 5.

[0107] In the above preferred embodiments, the specific settings and arrangements of the evaporation boat 1, temperature module 2, drive component 301 and base 5, etc., can still be referred to the descriptions in the above exemplary embodiments. Furthermore, in this preferred embodiment, the beneficial effects brought about by the design of the evaporation boat 1, temperature module 2, drive component 301 and base 5, etc., can also be referred to the descriptions in the above exemplary embodiments.

[0108] The evaporation coating apparatus of this embodiment adopts the above design. Through the heating units 201 located below the evaporation boat 1, the evaporation boat 1 can be heated at multiple points. By setting the adjustment mechanism 3, the position of the heating unit 201 of the temperature module in the length direction of the evaporation boat 1 and the distance between each heating unit 201 and the evaporation boat 1 can be adjusted, which is convenient for adjusting the temperature difference in the evaporation boat 1. This can solve the problems of poor uniformity of the thin film layer and thermal damage to the material caused by traditional integrated heating, meet the industrial preparation requirements of high-performance thin film layers for semiconductor devices, and help improve the quality of use of the evaporation coating apparatus.

[0109] The above descriptions are merely some embodiments of this application and are not intended to limit this application. The technical features or structures in the foregoing different embodiments can be arbitrarily combined to form other specific technical solutions as needed. For those skilled in the art, this application can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of the claims of this application.

Claims

1. An evaporation coating apparatus, characterized in that: It includes an evaporation boat (1), a temperature module (2) disposed below the evaporation boat (1), and an adjustment mechanism (3) for adjusting the position of the temperature module (2); The temperature module (2) has a plurality of heating units (201) arranged sequentially at intervals along the length of the evaporation boat (1), and the adjustment mechanism (3) includes a drive assembly (301) for driving each of the heating units (201) to move along the length of the evaporation boat (1).

2. The evaporation coating apparatus according to claim 1, characterized in that: It also includes a base (5) located below the evaporation boat (1); The drive assembly (301) includes drive units (3011) that are arranged one-to-one with each of the heating units (201), and each of the drive units (3011) and each of the heating units (201) are disposed on the base (5).

3. The evaporation coating apparatus according to claim 2, characterized in that: The base (5) is provided with a slide rail (6) arranged along the length of the evaporation boat (1), and each heating unit (201) is slidably disposed on the slide rail (6).

4. The evaporation coating apparatus according to claim 3, characterized in that: The slide rail (6) includes a base plate (601); The base plate (601) is provided with sliding protrusions (602) arranged along the length direction of the evaporation boat (1), and each heating unit (201) is provided with a sliding groove. Each sliding groove is slidably engaged with the sliding protrusions (602). Alternatively, the base plate (601) is provided with limiting plates (603) on both sides along the width direction of the evaporation boat (1), and each heating unit (201) is slidably disposed in the sliding track defined by each limiting plate (603) and the base plate (601).

5. The evaporation coating apparatus according to claim 2, characterized in that: The drive unit (3011) is connected to the heating unit (201) via a transmission assembly (302).

6. The evaporation coating apparatus according to claim 5, characterized in that: The transmission assembly (302) includes a drive gear (3021) disposed on the drive shaft of the drive unit (3011) and a rack (3022) connected to the heating unit (201). The length direction of the rack (3022) is arranged along the moving direction of the heating unit (201), and the drive gear (3021) meshes with the rack (3022) for transmission.

7. The evaporation coating apparatus according to claim 2, characterized in that: The heating zones of each of the heating units (201) are arranged to extend along the width direction of the evaporation boat (1); and / or, Each of the drive units (3011) is mounted on the base (5) via a mounting component (7).

8. The evaporation coating apparatus according to claim 2, characterized in that: The adjustment mechanism (3) includes a lifting assembly (303); The base (5) is connected to the lifting end of the lifting assembly (303), and the lifting assembly (303) is used to drive the base (5) to rise and fall, so as to adjust the distance between the heating unit (201) and the evaporation boat (1).

9. The evaporation coating apparatus according to claim 8, characterized in that: The lifting assembly (303) includes a plurality of lifting units (3031), the base (5) is connected to the lifting end of each of the lifting units (3031), and the lifting units (3031) are respectively provided at both ends of the base (5) in the length direction.

10. The evaporation coating device according to any one of claims 2 to 9, characterized in that: The base (5) is made of heat-insulating material; and / or the drive unit (3011) is a motor.

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