A light-shielding structure for an exposure machine

Abstract

This utility model relates to a light-shielding structure for an exposure machine, including an exposure machine body. An exposure chamber is fixedly connected to the front end of the exposure machine body. A square through-plate is disposed above the exposure chamber. Two extension plates are slidably connected to the inner wall of the square through-plate. A pressing plate is fixedly connected to one end of each extension plate, and a rubber pad is fixedly connected to one side of the pressing plate. Two fixing plates are fixedly connected inside the square through-plate. Two limiting grooves are formed on both the upper and lower surfaces of the square through-plate. Limiting sliders are slidably connected to the inner walls of the limiting grooves, and the limiting sliders are fixedly connected to the corresponding extension plates. A moving mechanism is disposed inside the square through-plate. This light-shielding structure for an exposure machine can block ultraviolet light inside the exposure chamber, preventing ultraviolet light from shining onto the human body surface during use and thus avoiding harm to health. It is quite practical.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and in particular to a light-shielding structure for an exposure machine. Background Technology

[0002] An exposure machine is a complex semiconductor processing device that uses UVA wavelength ultraviolet light emitted by turning on a light source to transfer image information from film or other transparent materials to a surface coated with a photosensitive substance. It is a complex semiconductor processing device that integrates electronic optics, electrical, mechanical, vacuum, and computer technologies.

[0003] Some existing exposure machines do not have a light-shielding function. When the exposure machine is in use, the ultraviolet light inside the exposure machine will leak out and cause great harm to the human body. If the exposure machine does not have a certain light-shielding function, the human body will be affected by the long-term exposure of ultraviolet light. Therefore, we propose a light-shielding structure for the exposure machine. Utility Model Content

[0004] This invention provides a light-shielding structure for an exposure machine, which solves the technical problems mentioned in the background section.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a light-shielding structure for an exposure machine, including an exposure machine body, an exposure chamber fixedly connected to the front end of the exposure machine body, a square through plate arranged above the exposure chamber, two extension plates slidably connected to the inner wall of the square through plate, a pressing plate fixedly connected to one end of the extension plate, a rubber pad fixedly connected to one side of the pressing plate, two fixing plates fixedly connected inside the square through plate, two limiting grooves are opened on both the upper and lower surfaces of the square through plate, a limiting slider is slidably connected to the inner wall of the limiting groove, the limiting slider is fixedly connected to the corresponding extension plate, a moving mechanism is arranged inside the square through plate, a light-shielding mechanism is arranged at the front end of the square through plate, and threaded grooves are opened inside the two extension plates.

[0006] A further improvement of the present invention is that the light-shielding mechanism includes a hollow plate fixedly connected to the square through plate via a connecting plate, two vertical plates fixedly connected to the lower end face of the hollow plate, a limiting groove provided on one side of the vertical plate, an opening for retraction on the lower end face of the hollow plate, and a battery fixedly connected to the upper end face of the hollow plate.

[0007] A further improvement of the present invention is that: the hollow plate is provided with a winding rod that penetrates the hollow plate at both ends and is rotatably connected to the penetration part by a bearing; a light-blocking cloth is fixedly connected to the surface of the winding rod; the light-blocking cloth is slidably connected to the inner wall of the winding opening; a counterweight plate is fixedly connected to the lower end of the light-blocking cloth; and the two ends of the counterweight plate are slidably connected to the inner wall of the corresponding limiting groove.

[0008] A further improvement of the present invention is that: one end of the winding rod is fixedly connected to a second gear, the upper end of the second gear is meshed with a first gear, one side of the first gear is provided with a brake-type servo motor fixedly connected to the upper end surface of the hollow plate, and the output shaft of the brake-type servo motor is fixedly connected to the first gear.

[0009] A further improvement of the present invention is that the moving mechanism includes a bidirectional lead screw disposed inside the square through plate, the two ends of the bidirectional lead screw being threadedly connected to the corresponding threaded grooves, and a bevel gear is fixedly sleeved on the surface of the bidirectional lead screw.

[0010] A further improvement of this utility model is that: the bidirectional lead screw passes through the two fixed plates and is rotatably connected to the through part by a bearing; the upper end of the first bevel gear is meshed with the second bevel gear; the upper end of the second bevel gear is provided with a second brake-type servo motor that is fixedly connected to the square through plate; the output shaft of the second brake-type servo motor movably passes through the square through plate; and the output shaft of the second brake-type servo motor is fixedly connected to the second bevel gear.

[0011] The beneficial effects of this utility model are as follows: This utility model provides a light-shielding structure for an exposure machine, which has the following advantages:

[0012] With the cooperation of the set shading mechanism, hollow plate, gear one, gear two, winding rod, winding and unwinding port, vertical plate, shading cloth, counterweight horizontal plate, brake-type servo motor one and limit slide groove one, the brake-type servo motor one can control the forward and reverse rotation of gear one, the gear one can control the forward and reverse rotation of winding rod, and the winding rod can control the winding and unwinding of shading cloth, thereby shading the exposure chamber.

[0013] Through the coordination of the extension plate, extrusion plate, rubber pad, square through plate, threaded groove, limit slider, limit slide groove II, fixed plate, moving mechanism, brake-type servo motor II, bevel gear I, bevel gear II and bidirectional lead screw, the brake-type servo motor II can control the forward and reverse rotation of bevel gear II, bevel gear II can control the forward and reverse rotation of bevel gear I, bevel gear I can control the forward and reverse rotation of bidirectional lead screw, and the bidirectional lead screw can make the two extension plates drive the corresponding extrusion plates to move in opposite directions or in opposite directions, thus facilitating the installation of the entire device at the upper end of the exposure chamber and facilitating the subsequent disassembly of the entire device.

[0014] The above description is merely an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it according to the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. The specific implementation methods of this utility model are given in detail in the following embodiments and their accompanying drawings. Attached Figure Description

[0015] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings:

[0016] Figure 1 This is a front view schematic diagram of the light-shielding structure of an exposure machine according to an embodiment of the present invention;

[0017] Figure 2 for Figure 1 A side view schematic diagram of the structure in the light-shielding structure of an exposure machine is provided;

[0018] Figure 3 for Figure 1 A top view schematic diagram of the light-shielding structure of an exposure machine is provided;

[0019] Figure 4 for Figure 1 A front sectional view of a portion of the light-shielding structure of an exposure machine is provided.

[0020] Figure 5 for Figure 2 A side sectional view of a portion of the light-shielding structure of an exposure machine is provided.

[0021] The attached diagram lists the components represented by each number as follows:

[0022] 1. Exposure machine body; 2. Exposure chamber; 3. Vertical plate; 4. Counterweight horizontal plate; 5. Light-blocking cloth; 6. Gear 1; 7. Brake-type servo motor 1; 8. Battery; 9. Brake-type servo motor 2; 10. Gear 2; 11. Hollow plate; 12. Rewinding rod; 13. Extension plate; 14. Extrusion plate; 15. Rubber pad; 16. Connecting plate; 17. Square through plate; 18. Limiting slide groove 1; 19. Rewinding port; 20. Limiting slide groove 2; 21. Limiting slider; 22. Bidirectional lead screw; 23. Fixing plate; 24. Bevel gear 1; 25. Bevel gear 2; 26. Threaded groove. Detailed Implementation

[0023] The following is in conjunction with the appendix Figure 1-5 The principles and features of this utility model are described below. The examples given are for illustrative purposes only and are not intended to limit the scope of this utility model. The utility model is described more specifically in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of this utility model will become clearer from the following description and claims. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0024] It should be noted that when a component is said to be fixed to another component, it can be directly on the other component or it may have a component in between. When a component is said to be connected to another component, it can be directly connected to the other component or it may have a component in between. When a component is said to be set to another component, it can be directly set to the other component or it may have a component in between. The terms vertical, horizontal, left, right, and similar expressions used in this document are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The terminology used herein includes any and all combinations of one or more of the associated listed items.

[0026] Example 1

[0027] like Figure 1-5As shown, this utility model provides a light-shielding structure for an exposure machine, including an exposure machine body 1. An exposure chamber 2 is fixedly connected to the front end of the exposure machine body 1. A square through plate 17 is arranged above the exposure chamber 2. Two extension plates 13 are slidably connected to the inner wall of the square through plate 17. A pressing plate 14 is fixedly connected to one end of each extension plate 13, and a rubber pad 15 is fixedly connected to one side of the pressing plate 14. Two fixing plates 23 are fixedly connected inside the square through plate 17. Two limiting grooves 20 are formed on both the upper and lower surfaces inside the square through plate 17. Limiting sliders 21 are slidably connected to the inner walls of the limiting grooves 20. The limiting sliders 21 are fixedly connected to the corresponding extension plates 13. A moving mechanism is provided inside the square through plate. A light-shielding mechanism is provided at the front end of the square through plate 17. Threaded grooves 26 are formed inside the two extension plates 13. The light-shielding mechanism includes a hollow core that is fixedly connected to the square through plate 17 via a connecting plate 16. Hollow plate 11 has two vertical plates 3 fixedly connected to its lower end face. One side of the vertical plate 3 has a limiting groove 18. The lower end face of hollow plate 11 has a take-up and release opening 19. The upper end face of hollow plate 11 is fixedly connected to a battery 8. Inside hollow plate 11, there is a take-up rod 12 with both ends penetrating through hollow plate 11 and rotatably connected to the penetrating part through a bearing. A light-shielding cloth 5 is fixedly connected to the surface of the take-up rod 12. The light-shielding cloth 5 is slidably connected to the inner wall of the take-up and release opening 19. The lower end of the light-shielding cloth 5 is fixedly connected to a counterweight horizontal plate 4. The two ends of the counterweight horizontal plate 4 are slidably connected to the inner wall of the corresponding limiting groove 18. One end of the take-up rod 12 is fixedly connected to a gear 10. The upper end of gear 10 is meshed with a gear 6. One side of gear 6 is provided with a brake-type servo motor 7 fixedly connected to the upper end face of hollow plate 11. The output shaft of the brake-type servo motor 7 is fixedly connected to gear 6.

[0028] In this embodiment, the brake-type servo motor 7 enables gear 6 to rotate, which in turn drives gear 10 to rotate. The rotation of gear 10 causes the take-up rod 12 to rotate, which in turn causes the light-shielding cloth 5 wound on the surface of the take-up rod 12 to be unwound through the take-up / unwound port 19. Under the action of the counterweight plate 4, the light-shielding cloth 5 can block the light from the exposure chamber 2, thereby preventing the ultraviolet light inside the exposure chamber 2 from shining on the human body surface during the use of the exposure machine body 1, which could cause harm to the body's health.

[0029] Example 2

[0030] like Figure 1-5As shown, based on Embodiment 1, this utility model provides a light-shielding structure for an exposure machine. The moving mechanism includes a bidirectional lead screw 22 disposed inside a square through plate 17. The two ends of the bidirectional lead screw 22 are respectively threadedly connected to the corresponding threaded grooves 26. A bevel gear 24 is fixedly sleeved on the surface of the bidirectional lead screw 22. The bidirectional lead screw 22 passes through two fixed plates 23 and is rotatably connected to the through portion via a bearing. A bevel gear 25 is meshed at the upper end of the bevel gear 24. A brake-type servo motor 25 is fixedly connected to the upper end of the bevel gear 25 and is fixedly connected to the square through plate 17. The output shaft of the brake-type servo motor 29 movably passes through the square through plate 17 and is fixedly connected to the bevel gear 25.

[0031] In this embodiment, the second brake-type servo motor 9 can drive the second bevel gear 25 to rotate in both directions. The rotation of the second bevel gear 25 can cause the bidirectional lead screw 22 to rotate in both directions. The rotation of the bidirectional lead screw 22 can cooperate with the threaded grooves 26 at both ends, so that the extension plates 13 at both ends of the bidirectional lead screw 22 can drive the corresponding extrusion plates 14 to move in opposite directions. This makes it easy to fix the entire device on the upper end of the exposure chamber 2 for use, and also facilitates subsequent disassembly.

[0032] The specific working principle and usage method of this utility model are as follows:

[0033] This invention provides a light-shielding structure for an exposure machine, such as... Figure 1-5As shown, during use, both the brake-type servo motor 7 and the brake-type servo motor 9 are electrically connected to an external controller for control. Battery 8 provides power to both motors. Controlling the brake-type servo motor 9 causes the bevel gear 25 to rotate. The rotation of the bevel gear 25 causes the bevel gear 24 to drive the bidirectional lead screw 22 to rotate. The rotation of the bidirectional lead screw 22, in conjunction with the threaded grooves 26 at both ends, causes the extension plates 13 at both ends of the bidirectional lead screw 22 to drive the corresponding pressing plates 14 in opposite directions, thereby increasing the distance between the two pressing plates 14. Through the cooperation of the limiting slider 21 and the limiting groove 20, the extension plates 13 can be limited in their movement. Two vertical plates 3 are attached to the side of the opening of the exposure chamber 2. The square through plate 17 is placed on the upper surface of the exposure chamber 2. Then, the brake-type servo motor 29 drives the bevel gear 25 to reverse. The reversal of the bevel gear 25 can drive the bevel gear 1 24 to drive the bidirectional lead screw 22 to reverse. The reversal of the bidirectional lead screw 22 and its threaded grooves 26 at both ends can drive the extension plates 13 at both ends of the bidirectional lead screw 22 to drive the corresponding extrusion plates 14 to move in opposite directions. This causes the extrusion plates 14 to press against the side of the exposure chamber 2, thus completing the installation of the entire device on the exposure chamber 2. For subsequent disassembly, it is only necessary to separate the two extrusion plates 14 from the side of the exposure chamber 2 through the above steps to complete the disassembly of the entire device. The installation and disassembly are relatively convenient.

[0034] After installation, the brake-type servo motor 7 is controlled to rotate gear 6. The rotation of gear 6 causes gear 10 to rotate the winding rod 12. The rotation of the winding rod 12 winds up the light-shielding cloth 5, opening the exposure chamber 2. When the exposure chamber 2 is in use, the brake-type servo motor 7 is controlled to reverse gear 6, which in turn causes gear 10 to reverse the winding rod 12, unwinding the light-shielding cloth 5 and blocking the opening of the exposure chamber 2 to prevent ultraviolet rays from escaping. The counterweight plate 4 acts as a counterweight, facilitating the unwinding of the light-shielding cloth 5.

[0035] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model in any way. Those skilled in the art can readily implement this utility model based on the accompanying drawings and the above description. However, any modifications, alterations, or variations made by those skilled in the art without departing from the scope of the utility model's technical solution, utilizing the disclosed technical content, are equivalent embodiments of this utility model. Furthermore, any equivalent changes, alterations, or variations made to the above embodiments based on the essential technology of this utility model are still within the protection scope of this utility model's technical solution.

Claims

1. A light shielding structure of an exposure machine comprising an exposure machine body (1), characterized in that, The front end of the exposure machine body (1) is fixedly connected to an exposure chamber (2). A square through plate (17) is provided above the exposure chamber (2). Two extension plates (13) are slidably connected to the inner wall of the square through plate (17). One end of the extension plate (13) is fixedly connected to a pressing plate (14). One side of the pressing plate (14) is fixedly connected to a rubber pad (15). Two fixing plates (23) are fixedly connected inside the square through plate (17). Two limiting slide grooves (20) are opened on the upper and lower surfaces inside the square through plate (17). A limiting slider (21) is slidably connected to the inner wall of the limiting slide groove (20). The limiting slider (21) is fixedly connected to the corresponding extension plate (13). A moving mechanism is provided inside the square through plate (17). A light-shielding mechanism is provided at the front end of the square through plate (17). Threaded grooves (26) are opened inside the two extension plates (13).

2. The light shielding structure of the exposure apparatus according to claim 1, wherein The light-shielding mechanism includes a hollow plate (11) fixedly connected to the square through plate (17) via a connecting plate (16). Two vertical plates (3) are fixedly connected to the lower end face of the hollow plate (11). A limit groove (18) is opened on one side of the vertical plate (3). A retraction opening (19) is opened on the lower end face of the hollow plate (11). A battery (8) is fixedly connected to the upper end face of the hollow plate (11).

3. The light shielding structure of the exposure apparatus according to claim 2, wherein The hollow plate (11) is provided with a winding rod (12) that passes through the hollow plate (11) at both ends and is rotatably connected to the through part by bearings. A light-blocking cloth (5) is fixedly connected to the surface of the winding rod (12). The light-blocking cloth (5) is slidably connected to the inner wall of the winding opening (19). A counterweight horizontal plate (4) is fixedly connected to the lower end of the light-blocking cloth (5). The two ends of the counterweight horizontal plate (4) are slidably connected to the inner wall of the corresponding limiting slide groove (18).

4. The light shielding structure of the exposure apparatus according to claim 3, wherein One end of the winding rod (12) is fixedly connected to a gear two (10), and the upper end of the gear two (10) is meshed with a gear one (6). One side of the gear one (6) is provided with a brake-type servo motor one (7) fixedly connected to the upper end of the hollow plate (11). The output shaft of the brake-type servo motor one (7) is fixedly connected to the gear one (6).

5. The light shielding structure of the exposure apparatus according to claim 1, wherein The moving mechanism includes a bidirectional lead screw (22) disposed inside the square through plate (17). The two ends of the bidirectional lead screw (22) are respectively threaded to the corresponding threaded groove (26). A bevel gear (24) is fixedly sleeved on the surface of the bidirectional lead screw (22).

6. The light shielding structure of the exposure apparatus according to claim 5, wherein The bidirectional lead screw (22) passes through the two fixed plates (23) and is rotatably connected to the through part by a bearing. The upper end of the first bevel gear (24) is meshed with the second bevel gear (25). The upper end of the second bevel gear (25) is provided with a brake-type servo motor (9) that is fixedly connected to the square through plate (17). The output shaft of the brake-type servo motor (9) movably passes through the square through plate (17). The output shaft of the brake-type servo motor (9) is fixedly connected to the second bevel gear (25).

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