Filling system

Abstract

The application discloses a filling system, which belongs to the technical field of liquid filling and is used for filling alkyl gallium and comprises a storage device, a pipeline assembly and multiple sub-filling devices. The storage device comprises a storage tank, the sub-filling device comprises a sub-filling bottle, the pipeline assembly comprises a sub-pipeline, the sub-pipeline connects the storage device and the sub-filling device, the sub-pipeline comprises a sub-pipeline main pipe and multiple sub-pipeline branch pipes, the sub-pipeline branch pipes are communicated with the sub-pipeline main pipe respectively, the sub-pipeline main pipe is communicated with the storage tank, the sub-pipeline branch pipes are communicated with the sub-filling bottle, the pipeline assembly comprises a storage gas inlet pipeline, the storage gas inlet pipeline is connected with the storage device, and the storage gas inlet pipeline is configured to introduce inert gas into the storage tank so as to transfer the fluid in the storage tank to the sub-filling bottle through the sub-pipeline. Inert gas is introduced into the storage tank by using the storage gas inlet pipeline, and the fluid in the storage tank is transferred to the sub-filling bottle through the sub-pipeline, thereby avoiding leakage when the alkyl gallium is transported by using a pump and improving the safety performance.

Description

Technical Field

[0001] This application belongs to the field of liquid filling technology, and specifically relates to a filling system. Background Technology

[0002] Currently, for filling highly active organometallic compounds such as alkyl gallium (e.g., trimethylgallium, triethylgallium), a closed system is typically used to prevent the material from coming into contact with air and water.

[0003] In related technologies, filling systems for alkyl gallium utilize pumps as pressurized delivery devices to pump the liquid from the storage tank to the dispensing bottles. However, this pump-based approach is prone to leakage during long-term operation due to the dynamic sealing structure of the pump (mechanical seals, packing seals, etc.). For self-igniting alkyl gallium, leakage could trigger combustion or explosion, posing a significant safety hazard. Furthermore, the storage tank can only fill one dispensing bottle at a time, requiring a long waiting period before moving on to the next bottle. Utility Model Content

[0004] One of the objectives of this application is to provide a filling system that improves safety performance, thereby at least partially solving the aforementioned technical problems.

[0005] To achieve the above objectives, this application provides a filling system for filling alkyl gallium, and includes:

[0006] Storage devices, including storage tanks;

[0007] Multiple dispensing devices, each dispensing device including dispensing bottles;

[0008] Piping components include a distributing pipeline that connects the storage device to the dispensing device. The distributing pipeline includes a main distributing pipe and multiple branch distributing pipes. Each branch distributing pipe is connected to the main distributing pipe. Each branch distributing pipe corresponds to a dispensing device. The main distributing pipe is connected to the storage tank. Each branch distributing pipe is connected to the dispensing bottle.

[0009] The pipeline assembly includes a storage gas inlet pipeline, which is connected to the storage device. The storage gas inlet pipeline is configured to introduce inert gas into the storage tank to transfer the fluid in the storage tank to the dispensing bottle through the dispensing pipeline.

[0010] The dispensing device includes a first weighing element configured to weigh the dispensing bottles, and the storage device includes a second weighing element configured to weigh the storage tank.

[0011] In one or more embodiments of this application, the pipeline assembly includes a first valve and a plurality of second valves, each of which corresponds to a dispensing device. The first valve is located on the main dispensing pipe, and the second valves are located on the branch dispensing pipes.

[0012] In one or more embodiments of this application, the filling system is configured to: close the second valve corresponding to any dispensing bottle after filling is completed; and close the first valve after all second valves are closed.

[0013] In one or more embodiments of this application, the dispensing device includes a first weighing element configured to weigh the dispensing bottle, and the filling system is configured to close the second valve corresponding to the dispensing bottle when the weighing value of any of the first weighing elements reaches a first preset value.

[0014] In one or more embodiments of this application, the filling system includes an inert gas source, a vacuum source, and an exhaust device; the dispensing device includes a dispensing gas dispensing platform connected to a dispensing branch pipe; the pipeline assembly includes a dispensing inlet pipeline, a dispensing vacuum pipeline, and a dispensing exhaust pipeline; the dispensing inlet pipeline connects each dispensing gas dispensing platform to the inert gas source; the dispensing vacuum pipeline connects each dispensing gas dispensing platform to the vacuum source; and the dispensing exhaust pipeline connects each dispensing gas dispensing platform to the exhaust device.

[0015] In one or more embodiments of this application, the dispensing device includes a connecting valve and a connecting pipe. The connecting valve is disposed on the dispensing bottle, and the connecting pipe connects the connecting valve to the dispensing and dispensing station.

[0016] In one or more embodiments of this application, the filling system has a replacement mode, in which a second valve disconnects the main feed pipe from the filling assembly platform, and a connecting valve disconnects the connecting pipe from the filling bottle.

[0017] In one or more embodiments of this application, the storage device includes a storage gas distribution platform connected to a storage tank. The pipeline assembly includes a storage vacuum pipeline and a storage exhaust gas pipeline. The storage inlet pipeline connects the storage gas distribution platform to an inert gas source, the storage vacuum pipeline connects the storage gas distribution platform to a vacuum source, and the storage exhaust gas pipeline connects the storage gas distribution platform to an exhaust device.

[0018] In one or more embodiments of this application, the piping assembly includes an incoming material pipeline and a return material pipeline. The incoming material pipeline connects the material storage and gas distribution station to the production system, and the return material pipeline connects the material storage and gas distribution station to the production system.

[0019] In one or more embodiments of this application, the pipeline assembly includes a filter and a bypass valve. The filter is disposed in the main distribution pipe, the distribution pipeline includes a bypass pipe, the bypass pipe is connected upstream and downstream of the filter, and the bypass valve is disposed in the bypass pipe.

[0020] Compared with the prior art, the filling system of this application uses an inert gas inlet pipe to introduce inert gas into the storage tank, and transfers the fluid in the storage tank to the dispensing bottle through the dispensing pipe, avoiding leakage when using a pump to transport alkyl gallium and improving safety performance; the storage tank can fill multiple dispensing bottles at a time, and multiple dispensing bottles can be filled at the same time, reducing waiting time. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the filling system in one embodiment of this application;

[0023] Figure 2 This is a schematic diagram of the filling system in another embodiment of this application.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Storage device; 11. Storage tank; 12. Storage gas distribution platform; 13. Second weighing piece;

[0026] 2. Dispensing device; 21. Dispensing bottle; 22. First weighing piece; 23. Dispensing and gasification platform; 24. Connecting valve; 25. Connecting pipe;

[0027] 3. Piping components; 31. Distribution pipeline; 311. Main distribution pipeline; 312. Branch distribution pipeline; 313. Bypass pipeline; 32. Storage air inlet pipeline; 33. First valve; 34. Second valve; 35. Dispensing air inlet pipeline; 36. Dispensing vacuum pipeline; 37. Dispensing exhaust gas pipeline; 38. Storage vacuum pipeline; 39. Storage exhaust gas pipeline; 310. Incoming material pipeline; 320. Return material pipeline; 330. Filter; 340. Bypass valve. Detailed Implementation

[0028] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0029] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0030] Please see Figure 1 and Figure 2 This application provides a filling system for filling alkyl gallium.

[0031] In this embodiment, alkyl gallium can be trimethylgallium liquid.

[0032] In some embodiments, the filling system includes a storage device 1, a piping assembly 3, and at least one dispensing device 2.

[0033] In this embodiment, as Figure 1 The filling system may have only one dispensing device 2. For example... Figure 2 The filling system may also have two or more dispensing devices 2.

[0034] In some embodiments, the storage device 1 includes a storage tank 11, the dispensing device 2 includes a dispensing bottle 21, and the pipeline assembly 3 includes a dispensing pipeline 31, which connects the storage device 1 and the dispensing device 2.

[0035] In some embodiments, the piping assembly 3 includes a storage inlet gas pipe 32, which is connected to the storage device 1. The storage inlet gas pipe 32 is configured to introduce inert gas into the storage tank 11 to transfer the fluid in the storage tank 11 to the dispensing bottle 21 through the dispensing pipe 31.

[0036] In this embodiment, an inert gas (such as nitrogen) is used for pressurization. Since there are no moving mechanical parts, friction from the pump impeller and seals will not generate metal or polymer particles, ensuring the high purity of the alkyl gallium. Furthermore, the pneumatic delivery method provides a static seal, significantly reducing the probability of leakage compared to the dynamic seals of pumps (mechanical seals, magnetic seals, etc.). This is particularly suitable for spontaneously combustible materials that are extremely sensitive to water and oxygen (such as alkyl gallium). Additionally, the inert gas pressurization process is stable, eliminating the risk of overpressure associated with pumps, and the inert gas also serves as a protective atmosphere.

[0037] In some embodiments, continue to refer to Figure 2 As shown, the filling system includes multiple dispensing devices 2, and the dispensing pipeline 31 includes a dispensing main pipe 311 and multiple dispensing branch pipes 312. Each dispensing branch pipe 312 is connected to the dispensing main pipe 311, and each dispensing branch pipe 312 corresponds to a dispensing device 2. The dispensing main pipe 311 is connected to the storage tank 11, and the dispensing branch pipes 312 are connected to the dispensing bottles 21.

[0038] In this embodiment, the inert gas pressurizes the material in the storage tank 11 into the main distribution pipe 311 and distributes it to each distribution branch pipe 312, thereby filling multiple dispensing bottles 21 at the same time, avoiding the waiting time of "filling one bottle and then changing to the next bottle".

[0039] In some embodiments, continue to refer to Figure 2 As shown, the pipeline assembly 3 includes a first valve 33 and multiple second valves 34. The second valves 34 correspond one-to-one with the dispensing device 2. The first valve 33 is located on the main dispensing pipe 311, and the second valves 34 are located on the branch dispensing pipes 312.

[0040] In this embodiment, the first valve 33 serves as the main switch, simultaneously controlling the start and stop of feeding into all dispensing bottles 21. At the start of filling, the first valve 33 is opened first, followed by each of the second valves 34; after filling is complete, each of the second valves 34 is closed first, followed by the first valve 33. This hierarchical control avoids pressure fluctuations that may occur when each branch is opened independently.

[0041] In this embodiment, in case of an emergency (such as leakage, overpressure, or abnormality of a certain dispensing bottle), the corresponding second valve 34 can be immediately closed by the PLC program, or the first valve 33 of the main circuit can be directly closed to achieve overall emergency cut-off, providing multiple safety protections.

[0042] In this embodiment, when a dispensing bottle 21 in a certain branch malfunctions, the second valve 34 of that branch can be closed for isolation and maintenance, without affecting the continued filling operation of other branches, thus improving the availability of the system.

[0043] In some embodiments, continue to refer to Figure 2 As shown, the filling system is configured such that when any dispensing bottle 21 is filled, the second valve 34 corresponding to that dispensing bottle 21 is closed; after all the second valves 34 are closed, the first valve 33 is closed.

[0044] In this embodiment, the second valve 34 on each distribution branch pipe 312 is closed first, and then the first valve 33 on the main distribution pipe 311 is closed. This can prevent the material remaining in the main distribution pipe 311 after the first valve 33 is closed from continuing to flow into the distribution branch pipe 312 due to gravity or pressure difference, or from causing pressure fluctuations that affect the already filled dispensing bottles 21.

[0045] In this embodiment, each dispensing bottle 21 has its valve closed independently, achieving "first-in, first-out". The dispensing bottle 21 that has been filled first will not continue to be pressurized because the first valve 33 is not closed (in fact, the second valve 34 on the dispensing branch pipe 312 is closed, so the material will not enter the corresponding dispensing bottle 21), and other dispensing bottles 21 continue to be filled without affecting each other.

[0046] In this embodiment, the first valve 33 is closed last, so that the main distribution pipe 311 always maintains pressure before the last dispensing bottle 21 is filled, and the material will not be cut off prematurely.

[0047] In this embodiment, due to slight differences in the initial weight and pipeline resistance of each dispensing bottle 21, the filling rate cannot be completely consistent. This valve closing sequence allows each dispensing bottle 21 to complete independently, without waiting for the slowest dispensing bottle 21 to close the first valve 33, thus improving overall efficiency.

[0048] In some embodiments, continue to refer to Figure 2 As shown, the dispensing device 2 includes a first weighing element 22, which is configured to weigh the dispensing bottle 21. The filling system is configured to close the second valve 34 corresponding to the dispensing bottle 21 when the weighing value of any first weighing element 22 reaches a first preset value.

[0049] In this embodiment, the first weighing device 22 (e.g., an electronic scale) has high measurement accuracy and can respond quickly in conjunction with the control program (e.g., a PLC control program), which can achieve precise control of the filling weight and avoid overfilling or underfilling caused by manual visual inspection or cumulative errors of the flow meter.

[0050] In this embodiment, alkyl gallium (such as trimethylgallium) is a spontaneously combustible substance. Overcharging may cause excessive pressure or overflow within the dispensing bottle 21, leading to combustion and explosion. The weight feedback automatic valve shut-off provides reliable overcharging protection. Furthermore, it eliminates the need for manual observation of liquid level or weight, and manual valve operation, reducing labor intensity and avoiding human error.

[0051] In this embodiment, each dispensing bottle 21 is equipped with an independent first weighing element 22, and the weight signal of each bottle independently triggers the closing of the corresponding second valve 34, thereby achieving parallel and independent control.

[0052] In some embodiments, continue to refer to Figure 2 As shown, the filling system includes an inert gas source (not shown in the figure), a vacuum source (not shown in the figure), and an exhaust device (not shown in the figure). The dispensing device includes a dispensing gas dispensing platform 23, which is connected to the dispensing branch pipe 312.

[0053] In some embodiments, the piping assembly 3 includes a sub-intake pipe 35, a sub-vacuum pipe 36, and a sub-exhaust pipe 37. The sub-intake pipe 35 connects each sub-vacuum assembly station 23 to an inert gas source, the sub-vacuum pipe 36 connects each sub-vacuum assembly station 23 to a vacuum source, and the sub-exhaust pipe 37 connects each sub-vacuum assembly station 23 to an exhaust device.

[0054] In this embodiment, multiple dispensing bottles 21 share the same inert gas source (such as nitrogen), the same vacuum source, and the same exhaust equipment. There is no need to configure a separate gas source for each dispensing bottle 21, which reduces the number of devices and pipeline complexity, and lowers system costs and maintenance workload.

[0055] In this embodiment, by using the dispensing inlet pipe 35 (connected to an inert gas source) and the dispensing vacuum pipe 36 (connected to a vacuum source), each dispensing bottle 21 can be evacuated and replaced with inert gas independently or simultaneously, ensuring that there is no air or moisture in the bottle before dispensing, and avoiding spontaneous combustion or explosion of alkyl gallium upon contact with air.

[0056] In this embodiment, during filling, the gas phase space inside the dispensing bottle 21 is connected to the exhaust device through the dispensing tail gas pipeline 37, which can safely discharge the displaced gas or the tail gas generated during the filling process, maintain stable pressure inside the bottle, and ensure smooth filling.

[0057] In this embodiment, the dispensing and gasification platform 23 is equipped with monitoring elements such as pressure gauges and safety valves to monitor the pressure on the dispensing bottle side in real time and prevent overpressure. Simultaneously, all exhaust gases are uniformly discharged to the exhaust equipment to prevent the direct emission of toxic or spontaneously combustible gases.

[0058] In this embodiment, since the dispensing and evacuation platforms 23 of each dispensing bottle 21 are connected in parallel to the inert gas source, vacuum source and exhaust equipment, each dispensing bottle 21 can independently control its replacement, evacuation and exhaust operations, or they can be performed simultaneously, which improves the operational flexibility.

[0059] In some embodiments, in conjunction with reference Figure 2 As shown, the dispensing device 2 includes a connecting valve 24 and a connecting pipe 25. The connecting valve 24 is disposed on the dispensing bottle 21, and the connecting pipe 25 connects the connecting valve 24 to the dispensing and gasification platform 23.

[0060] In some embodiments, the filling system has a replacement mode, in which the second valve 34 disconnects the main material distribution pipe 311 from the gas dispensing platform 23, and the connecting valve 24 disconnects the connecting pipe 25 from the dispensing bottle 21.

[0061] In this embodiment, after filling, alkyl gallium liquid or vapor may remain inside the dispensing and gasification platform 23, part of the dispensing branch pipe 312, and the connecting pipe 25. If the connecting pipe is directly disassembled, the residue may spontaneously combust or even explode upon contact with air. By using a displacement mode, the connecting valve 24 and the second valve 34 are first closed to isolate the dispensing and gasification platform 23 and the connecting pipe 25 from the dispensing bottle 21. Then, a vacuum source and an inert gas source are used to evacuate and displace them to remove the residual alkyl gallium inside, making the process of separating the connecting pipe 25 from the dispensing bottle 21 safe and reliable.

[0062] In this embodiment, alkyl gallium (such as trimethylgallium) is spontaneously combustible and ignites upon contact with air. The displacement mode ensures that there is no alkyl gallium residue (or an extremely low residual concentration) inside the connecting pipe 25 and the dispensing gas assembly platform 23, preventing combustion or explosion during disassembly and ensuring the safety of operators and equipment.

[0063] In this embodiment, when it is necessary to replace the dispensing bottle 21 or maintain the dispensing and gasification platform 23, the dispensing device 2 can be switched to the replacement mode first, and then disassembled after safe isolation. There is no need to stop the entire filling system and it does not affect the normal filling operation of other dispensing bottles.

[0064] For example, the connection between the connecting pipe 25 and the sub-assembly gas platform 23, and the connection between the connecting valve 24 and the connecting pipe 25 can be sealed by means of metal gasket face seal.

[0065] In some embodiments, continue to refer to Figure 2 As shown, the storage device 1 includes a storage gas distribution platform 12, which is connected to the storage tank 11.

[0066] In some embodiments, the pipeline assembly 3 includes a storage vacuum pipeline 38 and a storage exhaust gas pipeline 39. The storage inlet pipeline 32 connects the storage gas distribution platform 12 to an inert gas source, the storage vacuum pipeline 38 connects the storage gas distribution platform 12 to a vacuum source, and the storage exhaust gas pipeline 39 connects the storage gas distribution platform 12 to an exhaust device.

[0067] In this embodiment, before receiving materials from the production system, the storage tank 11 can be evacuated by connecting a vacuum source to the storage gas distribution platform 12, and an inert gas (e.g., nitrogen) can be introduced into the storage tank through the inert gas distribution platform 12 to replace the material, ensuring that there is no air or moisture inside the storage tank 11, and preventing alkyl gallium from being contaminated or reacting during the storage process. Moreover, when the material in the storage tank 11 is contaminated or needs to be changed, it can also be cleaned by vacuuming and replacement.

[0068] In this embodiment, when the inert gas pressurizes the material out of the storage tank 11, the liquid level in the storage tank 11 drops, the gas phase space increases, and the pressure tends to decrease. By connecting the exhaust device through the storage tail gas pipeline 39, nitrogen can be added or excess gas can be discharged in a timely manner to maintain the pressure stability in the storage tank 11 and ensure the continuity of the pressing process.

[0069] In this embodiment, the storage device 1 and the dispensing device 2 share the same inert gas source (such as high-purity nitrogen), the same vacuum source, and the same exhaust equipment. This eliminates the need for separate inert gas source, vacuum source, and exhaust equipment for the storage device 1, reducing equipment costs, floor space, and maintenance workload. The piping design is more compact, facilitating centralized control and monitoring. The storage device 1 and the dispensing device 2 are connected in parallel to the inert gas source, vacuum source, and exhaust equipment.

[0070] For example, the storage and gas distribution platform 12 integrates monitoring components such as pressure gauges and safety valves, which can monitor the status of the storage tank in real time.

[0071] In this embodiment, when the storage tank 11 needs to be cleaned or repaired regularly, the storage tank 11 can be connected to a vacuum source and an inert gas source through the storage gas distribution platform 12 to perform multiple evacuation and replacement cycles, so as to safely discharge and recover the residual alkyl gallium in the storage tank 11. Then, inert gas is introduced for protection before the manhole and other maintenance ports can be opened to ensure safe operation.

[0072] In this embodiment, the storage tank 11 and the dispensing bottle 21 share a high-purity inert gas source, and both undergo strict vacuuming and replacement treatment, which fundamentally avoids the mixing of impurities such as oxygen and moisture into the product, ensuring the high purity of alkyl gallium throughout the entire process from storage to dispensing, and ultimately improving the yield of downstream customers.

[0073] In some embodiments, continue to refer to Figure 2 As shown, the pipeline assembly 3 includes an incoming material pipeline 310 and a return material pipeline 320. The incoming material pipeline 310 connects the material storage and gas distribution platform 12 to the production system, and the return material pipeline 320 connects the material storage and gas distribution platform 12 to the production system.

[0074] In this embodiment, qualified alkyl gallium produced by the production system can be directly sent to the storage tank 11 through the incoming material pipeline 310, achieving seamless connection between continuous production and storage. When the material in the storage tank 11 fails the test (such as excessive particle size or decreased purity) or needs to be reprocessed due to process adjustments, the material can be returned to the production system through the return material pipeline 320 for further purification or processing, avoiding material waste.

[0075] In this embodiment, both the incoming material pipeline 310 and the return material pipeline 320 are integrated with the storage gas distribution platform 12. They can be purged and replaced using the pre-configured inert gas source and vacuum source, ensuring that the pipelines are free of air and moisture, preventing contamination or reactions of alkyl gallium during transport. Furthermore, upon incoming material, the storage exhaust gas pipeline 39, connected to the storage gas distribution platform 12, can discharge the displaced gas, maintaining pressure balance within the storage tank 11.

[0076] In this embodiment, the return process can utilize the storage inlet pipe 32 to introduce inert gas to pressurize the storage tank 11, and push the unqualified material back to the production system through the return pipe 320. No additional pumping equipment is required, thus avoiding the risk of particulate contamination and leakage caused by pumping.

[0077] In some embodiments, continue to refer to Figure 2 As shown, the pipeline assembly 3 includes a filter 330 and a bypass valve 340, with the filter 330 disposed in the main distribution pipe 311.

[0078] In this embodiment, the filter 330 is installed on the main distribution pipe 311. All alkyl gallium flowing from the storage tank 11 to the dispensing bottle 21 passes through the filter 330, which can effectively remove solid particles (such as metal particles, polymers, dust, etc.) in the fluid, ensuring that the cleanliness of the product entering the dispensing bottle 21 meets the semiconductor grade requirements.

[0079] For example, the filter 330 can be configured with a pore size of 20 μm or smaller, and can be flexibly configured according to product specifications.

[0080] In some embodiments, continue to refer to Figure 2 As shown, the distribution pipeline 31 includes a bypass pipe 313, which is connected to the upstream and downstream of the filter 330, and a bypass valve 340 is disposed in the bypass pipe 313.

[0081] In this embodiment, when the filter 330 needs to be replaced due to blockage by impurities, simply open the bypass valve 340 to allow the material to bypass the filter 330 via the bypass pipe 313, and simultaneously close the inlet and outlet valves of the filter 330 (or directly replace the filter 330, such as using a quick-connect fitting). This allows the filter 330 to be replaced without interrupting production. The system does not need to be shut down, and the filling operations of other dispensing bottles 21 can continue, significantly improving production continuity and equipment utilization.

[0082] In this embodiment, if the filter 330 becomes completely clogged, causing a sharp drop in flow, the bypass valve 340 can be temporarily opened to maintain production while the filter 330 is replaced. The bypass pipe 313 serves as an emergency path, ensuring the high availability of the filling system. For some dispensing tasks that do not require ultra-high purity, the bypass pipe 313 can even be used directly, skipping the filtration step.

[0083] In some embodiments, continue to refer to Figure 2 As shown, the storage device 1 includes a second weighing element 13, which is configured to weigh the storage tank 11.

[0084] In some embodiments, the filling system is configured to close the first valve 33 when the weighing value of the second weighing element 13 is lower than a second preset value.

[0085] In this embodiment, the second weighing device 13 (electronic scale) continuously monitors the weight of the storage tank 11. When the weight is lower than the second preset value (e.g., the remaining material is only enough for a small amount of dispensing or the tank is almost empty), the first valve 33 on the main dispensing pipe 311 is automatically closed, stopping the supply of material to the dispensing bottle 21. This prevents the first valve 33 from remaining open when there is no material, which could cause inert gas to directly enter the dispensing bottle 21, resulting in pressure fluctuations or product contamination.

[0086] In this embodiment, the first weighing element 22 on the dispensing bottle 21 side is responsible for accurately controlling the filling amount of each bottle. If the first weighing element 22 malfunctions (such as signal loss or drift), it may cause the dispensing bottle 21 to continue feeding until overfilling and bottle explosion. The second weighing element 13 serves as a global monitor. When the weight of the storage tank 11 decreases abnormally (exceeding the normal filling amount), it can trigger an alarm or close the first valve 33 to achieve redundant protection. For example, the second preset value is set to the weight of the empty storage tank 11 plus a safety margin. If the weight of the storage tank 11 decreases more than expected during the filling process, the system can intervene in time.

[0087] In some embodiments, the filling system is configured to disconnect the connection between the storage tank 11 and the production system when the weighing value of the second weighing element 13 is lower than a third preset value.

[0088] In this embodiment, when it is necessary to return unqualified materials to the production system, the weight change of the storage tank 11 can be monitored in real time by the second weighing element 13. The return valve is only closed after the material is completely emptied (i.e., when the weighing value of the second weighing element 13 is lower than the third preset value) to avoid residue. After emptying, the stable value fed back by the second weighing element 13 can be used as a confirmation signal that the storage tank 11 is empty, which facilitates the next step of cleaning or replacement operation.

[0089] Of course, when the production system delivers materials to the storage tank 11, the second weighing device 13 can detect the upper limit (full tank) and automatically close the inlet valve to prevent overflow. This can be achieved, for example, by setting different preset values ​​(such as the fourth preset value).

[0090] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0091] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0092] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.

[0093] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.

Claims

1. A filling system, characterized in that, The filling system is used for filling alkyl gallium and includes: Storage devices, including storage tanks; Multiple dispensing devices, each dispensing device including dispensing bottles; The piping assembly includes a distributing pipeline that connects the storage device to the dispensing device. The distributing pipeline includes a main distributing pipe and multiple branch distributing pipes. Each branch distributing pipe is connected to the main distributing pipe. Each branch distributing pipe corresponds to a dispensing device. The main distributing pipe is connected to the storage tank, and each branch distributing pipe is connected to the dispensing bottle. The pipeline assembly includes a storage air inlet pipeline, which is connected to the storage device. The storage air inlet pipeline is configured to introduce inert gas into the storage tank to transfer the fluid in the storage tank to the dispensing bottle through the dispensing pipeline. The dispensing device includes a first weighing element configured to weigh the dispensing bottles, and the storage device includes a second weighing element configured to weigh the storage tank.

2. The filling system as described in claim 1, characterized in that, The pipeline assembly includes a first valve and a plurality of second valves, each of which corresponds to a dispensing device. The first valve is located on the main dispensing pipe, and the second valves are located on the branch dispensing pipes.

3. The filling system as described in claim 2, characterized in that, The filling system is configured to: close the second valve corresponding to any of the dispensing bottles after filling is completed; and close the first valve after all the second valves are closed.

4. The filling system as described in claim 2, characterized in that, The filling system is configured to close the second valve corresponding to the dispensing bottle when the weighing value of any of the first weighing components reaches a first preset value.

5. The filling system as described in claim 2, characterized in that, The filling system includes an inert gas source, a vacuum source, and an exhaust device. The dispensing device includes a dispensing gas filling platform connected to the dispensing branch pipe. The pipeline assembly includes a dispensing inlet pipeline, a dispensing vacuum pipeline, and a dispensing exhaust pipeline. The dispensing inlet pipeline connects each dispensing gas filling platform to the inert gas source, the dispensing vacuum pipeline connects each dispensing gas filling platform to the vacuum source, and the dispensing exhaust pipeline connects each dispensing gas filling platform to the exhaust device.

6. The filling system as described in claim 5, characterized in that, The dispensing device includes a connecting valve and a connecting pipe. The connecting valve is disposed on the dispensing bottle, and the connecting pipe connects the connecting valve to the dispensing and gasification platform. The filling system has a replacement mode. In the replacement mode, the second valve disconnects the main dispensing pipe from the dispensing and gasification platform, and the connecting valve disconnects the connecting pipe from the dispensing bottle.

7. The filling system as described in claim 5, characterized in that, The storage device includes a storage gas distribution platform, which is connected to the storage tank. The pipeline assembly includes a storage vacuum pipeline and a storage exhaust gas pipeline. The storage inlet pipeline connects the storage gas distribution platform to the inert gas source, the storage vacuum pipeline connects the storage gas distribution platform to the vacuum source, and the storage exhaust gas pipeline connects the storage gas distribution platform to the exhaust equipment.

8. The filling system as described in claim 7, characterized in that, The pipeline assembly includes an incoming material pipeline and a return material pipeline. The incoming material pipeline connects the material storage and gas distribution station to the production system, and the return material pipeline connects the material storage and gas distribution station to the production system.

9. The filling system as described in claim 1, characterized in that, The pipeline assembly includes a filter and a bypass valve. The filter is disposed in the main distribution pipe. The distribution pipeline includes a bypass pipe that is connected upstream and downstream of the filter. The bypass valve is disposed in the bypass pipe.

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