Exhaust gas filter tank and gas scrubbing apparatus

Abstract

The utility model relates to gas purification equipment technical field especially relates to a waste gas filter tank and gas washing equipment, and the device contains: fixedly arranged on the air inlet pipe of jar body, the air outlet end of air inlet pipe communicates with the inner chamber top of jar body for transmission toxic waste gas, the air outlet pipe is fixedly arranged on jar body, and the air inlet end of air outlet pipe communicates with the inner chamber top of jar body, the water supply pipe is fixedly arranged on jar body, and the output end of water supply pipe communicates with the inner chamber of jar body for transmission cooling water to the inner chamber of jar body, the shunt pipe is arranged in the air outlet end of air inlet pipe for the shunting of toxic waste gas that air inlet pipe output has carried out. The utility model discloses by adopting shunt pipe and shunt formation multiple small air current with toxic waste gas, to increase the contact area of toxic waste gas and cooling water, and then enhance the heat exchange efficiency of cooling water to toxic waste gas and the capture effect of solid phase particulate impurities, solved the low problem of cooling efficiency in the prior art.

Description

Technical Field

[0001] This utility model relates to the field of gas purification equipment technology, and in particular to a waste gas filter tank and a gas scrubbing device. Background Technology

[0002] Toxic waste gases are generated during the production and processing of semiconductor components. Direct emission of these gases can cause environmental pollution and harm human health. Therefore, it is often necessary to purify the toxic waste gases before they are emitted.

[0003] In the prior art, Korean Patent No. KR1020100003561A proposes a gas scrubber for purifying the aforementioned toxic waste gas. In the process of treating toxic waste gas using the above-mentioned equipment, the toxic waste gas treated by the combustion chamber flows into the inner cavity of the connecting part through the inlet hole, and then flows through the connecting part and the gas conduit in sequence to be output to the inner cavity of the cooling chamber. During the process of the toxic waste gas flowing through the connecting part, cooling water enters the inner cavity of the connecting part through the cooling water inlet to cool the toxic waste gas.

[0004] However, since the toxic exhaust gas flowing into the inner cavity of the connection part through the inlet is a large flow, its contact area with the cooling water inside the connection part is limited, resulting in low cooling efficiency. Utility Model Content

[0005] To address the technical problem of low cooling efficiency in existing technologies, this utility model provides an exhaust gas filter canister, comprising:

[0006] Tank body;

[0007] An air inlet pipe is fixedly installed on the tank body, and the outlet end of the air inlet pipe is connected to the top of the inner cavity of the tank body for transmitting toxic waste gas.

[0008] The vent pipe is fixedly installed on the tank body, and the inlet end of the vent pipe is connected to the top of the inner cavity of the tank body;

[0009] A water supply pipe is fixedly installed on the tank body. The output end of the water supply pipe is connected to the inner cavity of the tank body and is used to transfer cooling water into the inner cavity of the tank body.

[0010] A diversion pipe is installed at the outlet end of the inlet pipe to divert toxic waste gas output from the inlet pipe.

[0011] Furthermore, the device also includes a filter module, which is installed inside the tank and is used to filter the toxic waste gas output through the diversion pipe.

[0012] Furthermore, the filtering module includes:

[0013] The first sieve disc is arranged radially in the inner cavity of the tank body. The first sieve disc matches the radial cross-sectional shape of the inner cavity of the tank body. The first solid phase adsorbent is pre-placed in the inner cavity of the first sieve disc.

[0014] The second sieve disc is arranged radially in the inner cavity of the tank body. The radial cross-sectional shape of the second sieve disc matches that of the inner cavity of the tank body. The second sieve disc is located between the first sieve disc and the bottom of the inner cavity of the tank body. The inner cavity of the second sieve disc is pre-filled with a second solid phase adsorbent. The output end of the diversion pipe is connected to the cavity between the first sieve disc and the second sieve disc.

[0015] An assembly assembly is installed on the tank body and is connected to the first screen plate and the second screen plate, used to fix the first screen plate and the second screen plate in the inner cavity of the tank body.

[0016] Furthermore, the output end of the water supply pipe is connected to the cavity between the first screen plate and the top of the inner cavity of the tank, and the output end of the water supply pipe is set along the circumference of the tank.

[0017] Furthermore, the assembly components include:

[0018] A threaded hole is provided at the bottom of the tank, and the threaded hole communicates with the bottom of the inner cavity of the tank.

[0019] An end cap is placed over a threaded hole and is threadedly connected to the threaded hole to seal it.

[0020] An assembly bracket is installed in the inner cavity of the tank. The assembly bracket is fixedly connected to the first screen plate and the second screen plate, and is fixedly connected to the diversion pipe. It is used to fix the first screen plate, the second screen plate and the diversion pipe into the inner cavity of the tank.

[0021] Furthermore, the mounting bracket includes:

[0022] The base plate is movably set in the inner cavity of the threaded hole, and the bottom surface of the base plate abuts against the top surface of the end cap.

[0023] Several connectors are fixedly installed on the top of the base plate, and any one connector is fixedly connected to the first screen plate, the second screen plate, and the diversion pipe.

[0024] Furthermore, a sealing ring is provided on the outer circumferential edge of the bottom plate. The sealing ring is located between the end cover and the inner wall of the threaded hole, and is used to seal the connection between the end cover and the tank body.

[0025] Furthermore, the shunt tube includes:

[0026] The assembly section is covered at the air outlet end of the air inlet pipe, and the assembly section is located between the first screen plate and the inner cavity top wall of the tank.

[0027] Several branch pipe sections are fixedly installed on the assembly part. The air inlet end of each branch pipe section is connected to the air outlet end of the air inlet pipe. The air outlet end of each branch pipe section is connected to the cavity between the first screen plate and the second screen plate. The branch pipe sections are fixedly connected to the first screen plate.

[0028] Furthermore, this device also includes:

[0029] The drain pipe is fixedly installed on the tank body. The inlet end of the drain pipe is connected to the bottom of the inner cavity of the tank body and is used to drain the cooling water accumulated in the inner cavity of the tank body.

[0030] An electrically controlled valve, installed on the drain pipe, is used to regulate the flow rate of the drain pipe.

[0031] Another embodiment of this utility model provides a gas scrubbing device, which includes the above-mentioned exhaust gas filter tank.

[0032] The waste gas filter tank and gas scrubbing equipment according to the embodiments of this utility model have the following beneficial effects: This device uses a diversion pipe to divert toxic waste gas into multiple small airflows, thereby increasing the contact area between the toxic waste gas and the cooling water, thus enhancing the heat exchange efficiency of the cooling water on the toxic waste gas and the capture effect of solid particulate impurities mixed in the toxic waste gas; at the same time, it also increases the contact area between the part of the diversion pipe immersed in the cooling water and the cooling water, thereby enhancing the heat exchange efficiency of the cooling water on the diversion pipe, so as to solve the problem of low cooling efficiency in the prior art.

[0033] It should be understood that both the foregoing general description and the following detailed description are exemplary and intended to provide further illustration of the claimed technology. Attached Figure Description

[0034] Figure 1 This is an assembly diagram according to Embodiment 1 of the present invention (the tank body is shown in perspective).

[0035] Figure 2 This is a cross-sectional view of the tank body according to Embodiment 1 of the present invention;

[0036] Figure 3 This is an exploded view of the structure according to Embodiment 1 of the present invention;

[0037] Figure 4 This is a connection diagram according to Embodiment 2 of the present invention;

[0038] Figure 5 This is a schematic diagram of the internal structure of the combustion purification device according to Embodiment 2 of this utility model;

[0039] Figure 6 This is a partial cross-sectional view of the cooling device according to Embodiment 2 of the present invention.

[0040] Explanation of reference numerals in the attached diagram:

[0041] 1-Tank body, 11-Inlet pipe, 12-Outlet pipe, 13-Water supply pipe, 14-Diverter pipe, 141-Assembly section, 142-Branch pipe section, 15-Drain pipe, 151-Electrically controlled valve, 21-First screen plate, 22-Second screen plate, 231-Threaded hole, 232-End cover, 233-Assembly bracket, 2331-Base plate, 2332-Sealing ring, 2333-Connector, 31-Combustion chamber, 32-Gas guide pipe, 33-Heater, 34-Burner, 41-Auxiliary cooling chamber, 42-Input pipe, 43-Output pipe, 44-Cooling pipe, 45-Connecting pipe, 46-Return pipe, 5-Water tank, 51-Water level sensor, 6-Water pump. Detailed Implementation

[0042] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, further illustrating the present invention.

[0043] The foregoing and other technical contents, features, and effects of this utility model will be clearly presented in the following detailed description of the embodiments with reference to the accompanying drawings. The directional terms mentioned in the following embodiments, such as up, down, left, right, front, or back, are only for reference to the directions in the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the present utility model. Furthermore, in all embodiments, the same reference numerals denote the same elements.

[0044] Example 1

[0045] First, this embodiment will combine Figures 1-6 The exhaust gas filter canister according to the embodiments of the present utility model is used to purify and treat toxic exhaust gas, and has a wide range of applications.

[0046] Specifically, such as Figure 1 As shown, the exhaust gas filter tank of this embodiment includes: a tank body 1; an inlet pipe 11, fixedly installed on the tank body 1, with the outlet end of the inlet pipe 11 connected to the top of the inner cavity of the tank body 1, for transmitting toxic exhaust gas; an outlet pipe 12, fixedly installed on the tank body 1, with the inlet end of the outlet pipe 12 connected to the top of the inner cavity of the tank body 1; a water supply pipe 13, fixedly installed on the tank body 1, with the outlet end of the water supply pipe 13 connected to the inner cavity of the tank body 1, for transmitting cooling water into the inner cavity of the tank body 1; and a diversion pipe 14, installed at the outlet end of the inlet pipe 11, for diverting the toxic exhaust gas output from the inlet pipe 11.

[0047] Furthermore, such as Figures 1-3 As shown, the device also includes a filter module, which is installed inside the tank 1, for filtering toxic waste gas output through the diversion pipe 14.

[0048] Furthermore, such as Figures 1-3 As shown, the filtration module includes: a first sieve disc 21, which is radially disposed in the inner cavity of the tank 1, and the first sieve disc 21 matches the radial cross-sectional shape of the inner cavity of the tank 1; a first solid-phase adsorbent is pre-placed in the inner cavity of the first sieve disc 21; a second sieve disc 22, which is radially disposed in the inner cavity of the tank 1, and the second sieve disc 22 matches the radial cross-sectional shape of the inner cavity of the tank 1; the second sieve disc 22 is located between the first sieve disc 21 and the bottom of the inner cavity of the tank 1; a second solid-phase adsorbent is pre-placed in the inner cavity of the second sieve disc 22; and an assembly assembly, which is disposed on the tank 1 and connected to the first sieve disc 21 and the second sieve disc 22, for fixing the first sieve disc 21 and the second sieve disc 22 in the inner cavity of the tank 1.

[0049] Furthermore, such as Figures 1-3 As shown, the output end of the water supply pipe 13 is connected to the cavity between the first screen plate 21 and the top of the inner cavity of the tank body 1, and the output end of the water supply pipe 13 is arranged along the circumference of the tank body 1.

[0050] Furthermore, such as Figures 1-3 As shown, the assembly includes: a threaded hole 231, which is opened at the bottom of the tank body 1 and communicates with the bottom of the inner cavity of the tank body 1; an end cap 232, which is covered on the threaded hole 231 and threadedly connected to the threaded hole 231, for sealing the threaded hole 231; and an assembly bracket 233, which is disposed in the inner cavity of the tank body 1, and the assembly bracket 233 is fixedly connected to the first screen plate 21 and the second screen plate 22, and is fixedly connected to the diversion pipe 14, for fixing the first screen plate 21, the second screen plate 22 and the diversion pipe 14 into the inner cavity of the tank body 1.

[0051] Furthermore, such as Figures 1-3 As shown, the threaded hole 231 includes: a connecting section with its bottom port exposed on the bottom surface of the tank body 1, the connecting section having a thread fixedly provided on its circumferential inner wall, the connecting section being threadedly connected to the end cap 232 for fixing the end cap 232 to the bottom of the tank body 1; and an assembly section with its top port exposed on the inner wall surface of the tank body 1, the bottom port of the assembly section communicating with the top port of the connecting section, the inner diameter of the assembly section being equal to the inner diameter of the tank body 1, the inner diameter of the assembly section being smaller than the inner diameter of the connecting section, and the central axes of the assembly section and the connecting section being the same.

[0052] Furthermore, such as Figures 1-3As shown, the assembly bracket 233 includes: a base plate 2331, which is movably disposed in the inner cavity of the connecting section of the threaded hole 231, and the bottom surface of the base plate 2331 abuts against the top surface of the end cover 232; and a plurality of connectors 2333, which are fixedly disposed on the top of the base plate 2331, and any connector 2333 is fixedly connected to the first screen plate 21, the second screen plate 22 and the diversion pipe 14.

[0053] Furthermore, such as Figures 1-3 As shown, a sealing ring 2332 is fixedly provided on the circumferential outer edge of the bottom plate 2331. The sealing ring 2332 is located between the end cover 232 and the inner cavity top wall of the threaded hole 231, and is used to seal the connection between the end cover 232 and the tank body 1.

[0054] Furthermore, such as Figures 1-3 As shown, the diversion pipe 14 includes: an assembly part 141, which covers the outlet end of the inlet pipe 11, and the assembly part 141 is located between the first screen plate 21 and the top wall of the inner cavity of the tank body 1; a plurality of branch pipe sections 142 fixedly disposed on the assembly part 141, the inlet ends of the plurality of branch pipe sections 142 being connected to the outlet end of the inlet pipe 11, the outlet ends of the plurality of branch pipe sections 142 being connected to the cavity between the first screen plate 21 and the second screen plate 22, and the plurality of branch pipe sections 142 being fixedly connected to the first screen plate 21; in this embodiment, The purpose of the diversion pipe 14 in diverting toxic waste gas by using several branch pipe sections 142 is that after the toxic waste gas is output to the cooling water through the branch pipe sections 142, it can directly form multiple small airflows to increase the contact area between the toxic waste gas and the cooling water, thereby enhancing the heat exchange efficiency of the cooling water for the toxic waste gas and the capture effect of solid particulate impurities mixed in the toxic waste gas; at the same time, it also increases the contact area between the part of the diversion pipe 14 immersed in the cooling water and the cooling water, thereby enhancing the heat exchange efficiency of the cooling water for the diversion pipe 14.

[0055] The device also includes: a drain pipe 15, which is fixedly installed on the tank 1, with the inlet end of the drain pipe 15 connected to the bottom of the inner cavity of the tank 1, for draining the cooling water stored in the inner cavity of the tank 1; and an electrically controlled valve 151, which is installed on the drain pipe 15, for regulating the flow rate of the drain pipe 15.

[0056] During equipment operation, toxic waste gas is input into the cavity between the first screen plate 21 and the second screen plate 22 inside the tank 1 through the inlet pipe 11 and the diversion pipe 14. Simultaneously, cooling water is input into the cavity between the first screen plate 21 and the top wall of the inner cavity of the tank 1 through the outlet end of the water supply pipe 13. Subsequently, the cooling water seeps through the first and second solid-phase adsorbents into the cavity between the second screen plate 22 and the tank 1, and finally flows out of the inner cavity of the tank 1 through the drain pipe 15. The user can adjust the flow rate of the drain pipe 15 by controlling the electrically controlled valve 151 to ensure that the water in the cavity between the first screen plate 21 and the top wall of the inner cavity of the tank 1 is adequately supplied. A certain amount of cooling water is stored in the cavity between the second screen plate 22 and the first screen plate 21. This allows the toxic waste gas, after being output through the outlets of several branch pipe sections 142 of the diversion pipe 14, to directly contact the cooling water stored in the cavity between the first screen plate 21 and the second screen plate 22. The cooling water cools the gas and captures solid particles in the toxic waste gas. After being output through the outlets of the branch pipe sections 142, the toxic waste gas flows through the pores of the first solid adsorbent laid in the first screen plate 21 and enters the cavity between the first screen plate 21 and the top wall of the inner cavity of the tank 1. During this process, the pores of the first solid adsorbent disperse the toxic waste gas. The toxic waste gas is formed into small bubbles to enhance the capture effect of the coolant stored between the first sieve plate 21 and the top wall of the inner cavity of the tank 1 on solid particles in the toxic waste gas, and to further enhance the cooling efficiency of the toxic waste gas. After the toxic waste gas emerges from the coolant stored between the first sieve plate 21 and the top wall of the inner cavity of the tank 1, it flows out of the inner cavity of the tank 1 through the gas outlet pipe 12. Secondly, driven by the coolant output through the water supply pipe 13, a vortex is formed in the coolant stored between the first sieve plate 21 and the top wall of the inner cavity of the tank 1, thereby further tearing the small bubbles of toxic waste gas emerging from the gaps of the first solid adsorbent into smaller microbubbles, further enhancing the cooling efficiency of the gas stored between the first sieve plate 21 and the top wall of the inner cavity of the tank 1. The coolant between the first screen plate 21 and the top wall of the inner cavity of the tank 1 effectively captures solid particles in the toxic exhaust gas and cools the toxic exhaust gas. Furthermore, after the coolant accumulated between the first screen plate 21 and the top wall of the inner cavity of the tank 1 forms a vortex, its fluidity is significantly improved, thereby effectively enhancing the heat exchange efficiency of the cooling water on several branch pipe sections 142 of the diversion pipe 14. Moreover, the solid particles captured by the cooling water in the cavity between the first screen plate 21 and the second screen plate 22 will be prevented from being discharged from the inner cavity of the tank 1 by the second solid adsorbent as the cooling water flows through the drain pipe 15.

[0057] Example 2

[0058] This embodiment proposes a gas scrubbing device, which includes an exhaust gas filter canister as described in Embodiment 1.

[0059] Specifically, such as Figure 1 ,4 As shown, it includes: a combustion purification device for treating toxic waste gas by combustion; a waste gas filter canister with its inlet end connected to the output end of the combustion purification device; a cooling device with its input end connected to the outlet end of the waste gas filter canister for cooling the filtered toxic waste gas; a water tank 5, located on one side of the waste gas filter canister, connected to the drain pipe 15 of the waste gas filter canister, and connected to the cooling device; several water level sensors 51, located on the water tank 5, for detecting the liquid level inside the water tank 5; and a water pump 6, fixedly located on the water tank 5, with its input end connected to the inner cavity of the water tank 5, for discharging the cooling water stored inside the water tank 5.

[0060] Furthermore, such as Figure 1 , 4 As shown in Figure 5, the combustion purification device includes: a combustion chamber 31, fixedly installed on the top of the tank body 1 of the exhaust gas filter tank; a gas guide pipe 32, fixedly installed inside the combustion chamber 31 along the axial direction of the combustion chamber 31, with the bottom end of the gas guide pipe 32 connected to the top port of the air inlet pipe 11 of the exhaust gas filter tank, for transmitting toxic exhaust gas; a heater 33, fixedly installed in the inner cavity of the combustion chamber 31, located outside the gas guide pipe 32, for heating the toxic exhaust gas flowing through the gas guide pipe 32; and a burner 34, fixedly installed on the top of the combustion chamber 31, with the output end of the burner 34 connected to the top port of the gas guide pipe 32. The burner 34 uses combustible gas as fuel, including but not limited to liquefied natural gas, liquefied petroleum gas, and hydrogen. During the process of the toxic exhaust gas flowing through the burner 34, the burner 34 mixes the toxic exhaust gas with the combustible gas and ignites it before spraying it into the inner cavity of the gas guide pipe 32, thereby achieving combustion purification treatment of the toxic exhaust gas.

[0061] Furthermore, such as Figure 1 , 4As shown in Figure 6, the cooling device includes: an auxiliary cooling chamber 41, fixedly installed on the outside of the tank body 1 of the exhaust gas filter tank; an input pipe 42, fixedly installed on the outside of the auxiliary cooling chamber 41, with its output end connected to the bottom of the inner cavity of the auxiliary cooling chamber 41 and its input end connected to an external device for injecting cooling water into the auxiliary cooling chamber 41; an output pipe 43, fixedly installed on the outside of the auxiliary cooling chamber 41, with its input end connected to the top of the inner cavity of the auxiliary cooling chamber 41 and its output end connected to an external device for discharging the cooling water from the inner cavity of the auxiliary cooling chamber 41; and a cooling pipe 44, fixedly installed in the inner cavity of the auxiliary cooling chamber 41, with its outlet end connected to the auxiliary cooling chamber 44. For the external connection of 41, the cooling pipe 44 preferably uses a serpentine coil to increase the heat exchange efficiency of the cooling water to the cooling pipe 44 by increasing the contact area between the cooling pipe 44 and the cooling water in the auxiliary cooling chamber 41; the connecting pipe 45 is fixedly installed on the outside of the auxiliary cooling chamber 41, the input end of the connecting pipe 45 is connected to the outlet pipe 12 of the exhaust gas filter tank 1, and the output end of the connecting pipe 45 is connected to the inlet end of the cooling pipe 44; the return pipe 46 is fixedly installed on the auxiliary cooling chamber 41, the return pipe 46 is a multi-port pipe, the output end of the return pipe 46 is connected to the water tank 5, and several input ends of the return pipe 46 are respectively connected to several bends of the cooling pipe 44 located at the bottom of the inner cavity of the auxiliary cooling chamber 41, for discharging the condensate formed inside the cooling pipe 44.

[0062] When the equipment is running, the toxic waste gas passes through the burner 34 and then enters the gas guide pipe 32. During its flow through the gas guide pipe 32, the heat generated by the heater 33 heats the gas, thereby achieving the purpose of combustion purification of the toxic waste gas. The toxic waste gas, after combustion purification, forms a first intermediate mixed gas. The first intermediate mixed gas exits the combustion chamber 31 from the bottom port of the gas guide pipe 32, and then enters the waste gas filter tank through the inlet pipe 11. The waste gas filter tank filters and purifies the gas, and the first intermediate mixed gas, after filtration and purification, forms a second intermediate mixed gas. The intermediate mixed gas is output from the exhaust gas filter canister through the exhaust pipe 12, and then input to the cooling pipe 44 through the connecting pipe 45. During the process of the second intermediate mixed gas flowing through the cooling pipe 44, it exchanges heat with the cooling water in the auxiliary cooling chamber 41 and is transformed into clean air, which is finally output from the auxiliary cooling chamber 41 through the exhaust end of the cooling pipe 44. During the process of the second intermediate mixed gas flowing through the cooling pipe 44, the generated condensate flows back to the water tank 5 through the return pipe 46. After the water level sensor 51 detects that the water level in the water tank 5 has reached a certain height, the water pump 6 starts to discharge the aqueous solution in the water tank 5.

[0063] Above, refer to Figures 1-6The present invention describes an exhaust gas filter tank and a gas scrubbing device according to an embodiment of the present invention, which have the following beneficial effects: The device uses a diversion pipe 14 to divert toxic exhaust gas. After the toxic exhaust gas is output to the cooling water through the branch pipe section 142, it can directly form multiple small airflows to increase the contact area between the toxic exhaust gas and the cooling water, thereby enhancing the heat exchange efficiency of the cooling water for the toxic exhaust gas and the capture effect of solid particulate impurities mixed in the toxic exhaust gas; at the same time, it also increases the contact area between the part of the diversion pipe 14 immersed in the cooling water and the cooling water, thereby enhancing the heat exchange efficiency of the cooling water for the diversion pipe 14, so as to solve the problem of low cooling efficiency in the prior art.

[0064] It should be noted that, in this specification, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0065] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A waste gas filter canister, characterized in that, Include: Tank body; An air inlet pipe is fixedly installed on the tank body, and the air outlet end of the air inlet pipe is connected to the top of the inner cavity of the tank body for transmitting toxic waste gas. An air outlet pipe is fixedly installed on the tank body, and the air inlet end of the air outlet pipe is connected to the top of the inner cavity of the tank body; A water supply pipe is fixedly installed on the tank body, and the output end of the water supply pipe is connected to the inner cavity of the tank body for transmitting cooling water into the inner cavity of the tank body; A diversion pipe is installed at the outlet end of the air inlet pipe to divert the toxic waste gas output from the air inlet pipe. A filter module is installed inside the tank and is used to filter toxic waste gas output through the diversion pipe; The filtering module includes: A first sieve disc is arranged radially in the inner cavity of the tank body. The first sieve disc matches the radial cross-sectional shape of the inner cavity of the tank body. A first solid-phase adsorbent is pre-placed in the inner cavity of the first sieve disc. The second sieve disc is arranged radially in the inner cavity of the tank body. The radial cross-sectional shape of the second sieve disc matches that of the inner cavity of the tank body. The second sieve disc is located between the first sieve disc and the bottom of the inner cavity of the tank body. A second solid-phase adsorbent is pre-placed in the inner cavity of the second sieve disc. The output end of the diversion pipe is connected to the cavity between the first sieve disc and the second sieve disc. An assembly assembly is provided on the tank body. The assembly assembly is connected to the first screen plate and the second screen plate and is used to fix the first screen plate and the second screen plate in the inner cavity of the tank body. The shunt tube comprises: An assembly part is provided on the air outlet end of the air inlet pipe, and the assembly part is located between the first screen plate and the inner cavity top wall of the tank body; Several branch pipe sections are fixedly installed on the assembly part. The air inlet end of each branch pipe section is connected to the air outlet end of the air inlet pipe. The air outlet end of each branch pipe section is connected to the cavity between the first screen plate and the second screen plate. The branch pipe sections are fixedly connected to the first screen plate.

2. The exhaust gas filter tank as described in claim 1, characterized in that, The output end of the water supply pipe is connected to the cavity between the first screen plate and the top of the inner cavity of the tank, and the output end of the water supply pipe is arranged along the circumference of the tank.

3. The exhaust gas filter tank as described in claim 1, characterized in that, The assembly component includes: A threaded hole is formed at the bottom of the tank body, and the threaded hole communicates with the bottom of the inner cavity of the tank body; An end cap is provided on the threaded hole, and the end cap is threadedly connected to the threaded hole to seal the threaded hole; An assembly bracket is disposed in the inner cavity of the tank body. The assembly bracket is fixedly connected to the first screen plate and the second screen plate, and is fixedly connected to the diversion pipe. It is used to fix the first screen plate, the second screen plate and the diversion pipe into the inner cavity of the tank body.

4. The exhaust gas filter tank as described in claim 3, characterized in that, The assembly bracket includes: A base plate is movably disposed in the inner cavity of the threaded hole, and the bottom surface of the base plate abuts against the top surface of the end cap. Several connectors are fixedly installed on the top of the base plate, and any one of the connectors is fixedly connected to the first screen plate, the second screen plate, and the diversion pipe.

5. The exhaust gas filter tank as described in claim 4, characterized in that, A sealing ring is provided on the outer circumferential edge of the base plate. The sealing ring is located between the end cap and the inner top wall of the threaded hole, and is used to seal the connection between the end cap and the tank body.

6. The exhaust gas filter tank as described in claim 1, characterized in that, Also includes: A drain pipe is fixedly installed on the tank body, and the inlet end of the drain pipe is connected to the bottom of the inner cavity of the tank body for draining the cooling water accumulated in the inner cavity of the tank body; An electrically controlled valve is installed on the drain pipe to regulate the flow rate of the drain pipe.

7. A gas scrubbing device, characterized in that, It includes an exhaust gas filter canister as described in any one of claims 1 to 6.

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