A multi-stage vacuum pumping device

Abstract

The utility model discloses a multistage vacuumizing device, including the device body, be equipped with workstation in the device body, be equipped with the rotary -vane vacuum pump, roots vacuum pump, turbine molecular pump and vacuum chamber on the workstation, be connected pipeline no.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum equipment technology, specifically relating to a multi-stage vacuum pumping device. Background Technology

[0002] In modern industrial production and scientific research, many processes and experiments need to be carried out under different vacuum conditions. For example, processes such as photolithography, etching, and thin film deposition in semiconductor manufacturing require extremely high vacuum levels; experiments such as vacuum heat treatment and vacuum coating in materials science also rely on a stable and adjustable vacuum environment.

[0003] Existing vacuum pumping devices often fail to meet the demands of multi-stage high vacuum, making it difficult to precisely control the vacuum level at different stages and reducing their applicability. Furthermore, some devices have fixed structures, hindering flexible repositioning to suit various application scenarios and making them inconvenient to connect to the vacuuming equipment, further reducing flexibility. Therefore, we need to upgrade and modify existing technologies. Utility Model Content

[0004] The purpose of this invention is to provide a multi-stage vacuum pumping device to solve the problems mentioned in the background art.

[0005] To solve the above problems, the following technical solutions are provided:

[0006] Design a multi-stage vacuum pumping device, including a device body. The device body contains a worktable, on which a rotary vane vacuum pump, a Roots vacuum pump, a turbomolecular pump, and a vacuum chamber are mounted. The rotary vane vacuum pump is connected to pipe one; the Roots vacuum pump is connected to pipes two and three; and the turbomolecular pump is connected to pipe four. A connecting pipe is provided between pipes one and two, with a connecting pipe at one end. The connecting pipe and pipe four are connected to the vacuum chamber. A vacuum measuring instrument is connected to the vacuum chamber, and a solenoid valve is mounted on the vacuum chamber. A base is located below the worktable, with a mounting groove inside the base. A lead screw is located in the mounting groove, with a collar screwed onto the lead screw, and one end of the lead screw is connected to a motor. The worktable is connected to the collar.

[0007] Furthermore, valve one is installed above pipe one, valve two is installed on pipe two, valve three is installed on pipe three, and valve four is installed on pipe four.

[0008] Furthermore, a connector and a pressure gauge are installed on one side of the vacuum measuring instrument, and a measuring line is provided inside the vacuum measuring instrument.

[0009] Furthermore, adjustable support legs are installed below the base, and four sets of adjustable support legs are respectively installed around the base.

[0010] Furthermore, a guide groove is provided in the base, a slide rod is fixedly provided in the guide groove, a slide ring is slidably sleeved on the slide rod, and one end of the slide ring is fixedly connected to the worktable.

[0011] Furthermore, the rotary vane vacuum pump, the Roots vacuum pump, and the turbomolecular pump are each driven by an independent power system.

[0012] Furthermore, the vacuum chamber is made of a high-strength material with a low gas outflow rate and has a good sealing structure.

[0013] Furthermore, a mounting base is fixedly installed below the motor, and one end of the mounting base is fixedly connected to the base.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0015] 1. This utility model, by setting up a combination of rotary vane vacuum pump, Roots vacuum pump and turbomolecular pump, can achieve low, medium and high vacuum levels at different stages, meeting the strict requirements of various industrial production and scientific research for different vacuum levels.

[0016] 2. This utility model sets up multiple valves between the rotary vane vacuum pump, the Roots vacuum pump and the turbomolecular pump, which can flexibly open or close the valves according to the vacuum requirements at different stages, accurately control the gas flow direction and flow rate, and thus precisely adjust the vacuum level in the vacuum chamber.

[0017] 3. This utility model uses a motor-driven lead screw to realize the horizontal movement and adjustment of the worktable and the entire device, which facilitates flexible adjustment of the device position according to actual usage scenarios and layout requirements, improves the applicability of the device, and avoids the trouble of inconvenient connection between the device and external equipment.

[0018] Specific embodiments of the present invention are disclosed in detail with reference to the following description and accompanying drawings, indicating how the principles of the present invention can be employed. It should be understood that the embodiments of the present invention are not limited in scope. Within the spirit and scope of the appended claims, the embodiments of the present invention include many changes, modifications, and equivalents. Attached Figure Description

[0019] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0020] Figure 1 This is a perspective view of the overall structure of a multi-stage vacuum device according to the present invention;

[0021] Figure 2 This is a working diagram of the overall structure of a multi-stage vacuum device according to the present invention;

[0022] Figure 3 This is a schematic diagram of a multi-stage vacuuming structure for a multi-stage vacuuming device according to the present invention;

[0023] Figure 4 This is a perspective view of a multi-stage vacuuming structure of a multi-stage vacuuming device according to the present invention;

[0024] Figure 5 This is an exploded view of the horizontal adjustment structure of a multi-stage vacuum device according to the present invention.

[0025] In the diagram: 1. Device body; 2. Workbench; 3. Rotary vane vacuum pump; 4. Pipeline 1; 5. Valve 1; 6. Connecting pipe; 7. Pipeline 2; 8. Valve 2; 9. Roots vacuum pump; 10. Connecting pipe; 11. Pipeline 3; 12. Turbomolecular pump; 13. Valve 3; 14. Pipeline 4; 15. Valve 4; 16. Vacuum chamber; 17. Solenoid valve; 18. Vacuum measuring instrument; 19. Measuring line; 20. Connector; 21. Pressure gauge; 22. Base; 23. Adjustable support leg; 24. Mounting groove; 25. Guide groove; 26. Lead screw; 27. Collar; 28. Motor; 29. ​​Fixed base; 30. Slide rod; 31. Slip ring. Detailed Implementation

[0026] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0027] like Figure 1As shown in Figure 5, this embodiment provides a multi-stage vacuum pumping device, including a device body 1. The device body 1 has a worktable 2 inside, and a rotary vane vacuum pump 3, a Roots vacuum pump 9, a turbomolecular pump 12, and a vacuum chamber 16 are provided on the worktable 2. The rotary vane vacuum pump 3 is connected to pipe 1 4, the Roots vacuum pump 9 is connected to pipe 2 7 and pipe 3 11, and the turbomolecular pump 12 is connected to pipe 4 14. A connecting pipe 6 is provided between pipe 1 4 and pipe 2 7. One end of the connecting pipe 6 is provided with a connecting pipe 10. The connecting pipe 10 and pipe 4 14 are connected to the vacuum chamber 16. A vacuum measuring instrument 18 is connected to the vacuum chamber 16, and a solenoid valve 17 is provided on the vacuum chamber 16. A base 22 is provided below the worktable 2. An installation groove 24 is opened in the base 22. A lead screw 26 is provided in the installation groove 24. A collar 27 is screwed onto the lead screw 26, and one end of the lead screw 26 is connected to a motor 28. The worktable 2 is connected to the collar 27.

[0028] Preferably, valve 5 is installed above pipe 1 4, valve 2 8 is installed on pipe 2 7, valve 3 13 is installed on pipe 3 11, and valve 4 15 is installed on pipe 4 14. The valves on each pipe allow for flexible control of gas flow direction and flow rate during vacuuming, improving vacuuming efficiency and accuracy. A connector 20 and a pressure gauge 21 are installed on one side of the vacuum measuring instrument 18. The vacuum measuring instrument 18 has a measuring line 19 inside. The connector 20 facilitates connection with external equipment. The pressure gauge 21 provides a direct display of the pressure inside the vacuum chamber 16. The measuring line 19 allows operators to monitor the vacuum level inside the vacuum chamber 16 in real time.

[0029] Preferably, adjustable support legs 23 are installed under the base 22. Four sets of adjustable support legs 23 are installed around the base 22 respectively. They can be adjusted according to the actual ground conditions to keep the device horizontal and stable, avoid shaking and vibration caused by uneven ground, ensure the stability and reliability of the device operation, and thus ensure the vacuuming effect. The base 22 has a guide groove 25, and a slide rod 30 is fixedly installed in the guide groove 25. A slide ring 31 is slidably sleeved on the slide rod 30. One end of the slide ring 31 is fixedly connected to the worktable 2, which can accurately and smoothly realize the horizontal movement of the worktable 2 and the device, enhancing the convenience and flexibility of the device's position adjustment in different usage scenarios.

[0030] Preferably, the rotary vane vacuum pump 3, the Roots vacuum pump 9, and the turbomolecular pump 12 are each driven by an independent power system. The working status of each pump can be flexibly adjusted according to the needs of different vacuuming stages. It also facilitates individual maintenance and repair when a vacuum pump fails, without affecting the normal operation of other pumps. The vacuum chamber 16 is made of high-strength, low-exhaust-rate material and has a good sealing structure to ensure that it is not easily deformed or damaged in a vacuum environment, thus ensuring the vacuuming performance and effect of the device. A fixed base 29 is fixedly installed below the motor 28. One end of the fixed base 29 is fixedly connected to the base 22 to provide stable support for the motor 28, reduce the vibration and displacement of the motor 28 during operation, and ensure the stable operation of the motor 28.

[0031] The operating principle and process of this utility model are as follows: During operation, the rotary vane vacuum pump 3 is started, valves 5 and 8 are opened, and other valves connected to the Roots vacuum pump 9 and turbomolecular pump 12, such as valve 13 and valve 15, are closed. Gas in the vacuum chamber 16 enters the rotary vane vacuum pump 3 through connecting pipe 10, pipe 4, and pipe 7. The rotary vane vacuum pump 3 compresses and discharges the gas through its own mechanical motion, reducing the pressure in the vacuum chamber 16 to a low vacuum state. During this process, the vacuum measuring instrument 18 monitors the vacuum level in the vacuum chamber 16 in real time and provides data feedback through the measuring line 19. When the low vacuum reaches a certain level, the Roots vacuum pump 9 is started, and valve 13 is opened. At this time, the rotary vane vacuum pump 3 continues to operate as a backing pump for the Roots vacuum pump 9. Gas enters the Roots vacuum pump 9 through pipe 11. The Roots vacuum pump 9 further compresses and discharges the gas at a higher pumping rate, further reducing the pressure in the vacuum chamber 16 to a medium vacuum state. Once the vacuum reaches the preset value, the turbomolecular pump 12 is started, valve 15 is opened, and the Roots vacuum pump 9 and rotary vane vacuum pump 3 continue to operate, providing a pre-vacuum condition for the turbomolecular pump 12. The turbomolecular pump 12 transfers momentum to gas molecules through high-speed rotating vanes, expelling the gas and achieving a high vacuum state in the vacuum chamber 16. When the device needs to be horizontally adjusted during connection with the object being evacuated, the motor 28 is started. The motor 28 drives the lead screw 26 to rotate, and the collar 27 moves on the lead screw 26. Due to the engagement of the slip ring 31 with the collar 27 and the engagement of the slide rod 30 with the guide groove 25, the worktable 2 moves horizontally on the base 22 along the direction of the guide groove 25, thereby adjusting the horizontal position of the device until the device connector 20 moves to a suitable docking position.

[0032] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," and "the other end," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] The present invention has been described above with reference to specific embodiments. However, those skilled in the art should understand that these descriptions are exemplary and not intended to limit the scope of protection of the present invention. Those skilled in the art can make various modifications and variations to the present invention based on its spirit and principles, and these modifications and variations are also within the scope of the present invention.

Claims

1. A multi-stage vacuum pumping device, characterized in that, The device includes a main body (1), a workbench (2) inside the main body (1), a rotary vane vacuum pump (3), a Roots vacuum pump (9), a turbomolecular pump (12) and a vacuum chamber (16) on the workbench (2). The rotary vane vacuum pump (3) is connected to pipe one (4), the Roots vacuum pump (9) is connected to pipe two (7) and pipe three (11), and the turbomolecular pump (12) is connected to pipe four (14). A connecting pipe (6) is provided between pipe one (4) and pipe two (7), and one end of the connecting pipe (6) is connected to... Pipe (10), the connecting pipe (10) and the pipe four (14) are connected to the vacuum chamber (16), the vacuum chamber (16) is connected to the vacuum measuring instrument (18) and the vacuum chamber (16) is provided with a solenoid valve (17), the workbench (2) is provided with a base (22) below it, the base (22) is provided with an installation groove (24), the installation groove (24) is provided with a screw (26), the screw (26) is screwed with a collar (27) and one end of the screw (26) is connected to a motor (28), and the collar (27) is connected to the workbench (2).

2. The multi-stage vacuum pumping device according to claim 1, characterized in that: A valve is installed above the first pipe (4), a valve is installed on the second pipe (7), a valve is installed on the third pipe (11), and a valve is installed on the fourth pipe (14).

3. The multi-stage vacuum pumping device according to claim 1, characterized in that: The vacuum measuring instrument (18) is equipped with a connector (20) and a pressure gauge (21) on one side, and a measuring line (19) is provided inside the vacuum measuring instrument (18).

4. The multi-stage vacuum pumping device according to claim 1, characterized in that: An adjustable support leg (23) is installed below the base (22), and four sets of the adjustable support leg (23) are respectively installed around the base (22).

5. The multi-stage vacuum pumping device according to claim 1, characterized in that: The base (22) has a guide groove (25) inside, and a slide rod (30) is fixedly installed in the guide groove (25). A slide ring (31) is slidably sleeved on the slide rod (30), and one end of the slide ring (31) is fixedly connected to the worktable (2).

6. The multi-stage vacuum pumping device according to claim 1, characterized in that: The rotary vane vacuum pump (3), the Roots vacuum pump (9), and the turbomolecular pump (12) are each driven by an independent power system.

7. The multi-stage vacuum pumping device according to claim 1, characterized in that: The vacuum chamber (16) is made of a high-strength, low-exhaust-rate material and has a good sealing structure.

8. The multi-stage vacuum pumping device according to claim 1, characterized in that: A fixed base (29) is fixedly installed below the motor (28), and one end of the fixed base (29) is fixedly connected to the base (22).

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