Wafer inspection apparatus with artificial detection function

Abstract

The utility model discloses a wafer detection equipment with manual detection function, including detection machine, first lift link of sliding connection in detection machine, first connecting rod of rotation connection in first lift link upper end, support seat of rotation connection in first connecting rod and rotation connection in support seat center chuck, first connecting rod support seat center chuck's rotation axis two two vertical, be provided with rotary motor on support seat, detection machine front end swing joint has hand lever, hand lever with first connecting rod and support seat transmission connection. Manual through hand lever and rotary motor drive wafer horizontal rotation and overturn, all -round to wafer and check, wafer detection process, need not to hold wafer and take out wafer from detection machine, prevent wafer from being damaged, prevent wafer from being contaminated by external dust impurity etc. simultaneously, guarantee wafer's cleanliness.

Description

Technical Field

[0001] This utility model belongs to the field of wafer inspection technology, and in particular relates to a wafer inspection device with manual inspection function. Background Technology

[0002] Wafer inspection is a crucial step in semiconductor manufacturing. The quality of the wafer directly impacts the performance and reliability of the chip. In semiconductor manufacturing, even a tiny surface scratch can cause a short circuit in the chip's circuitry, affecting overall functionality. Any problem in the production process can leave defects on the wafer. Wafer inspection allows for the timely detection of problems during the process, ensuring the smooth progress of subsequent steps and the quality of the final product. Wafer inspection is generally divided into automated inspection and visual inspection. Automated inspection mainly includes optical inspection, radiographic inspection, and visual inspection using automated equipment. However, mechanical automated inspection lacks flexibility. Visual inspection complements automated inspection, allowing inspectors to flexibly adjust the focus and angle of observation according to the actual situation. For some special, irregular, or algorithmically difficult-to-identify defects, they can rely on their experience and judgment to detect and analyze them. Therefore, visual inspection is mainly used to supplement automated inspection, for re-inspection of defective products, random checks of automated inspections, and manual judgment of special defects.

[0003] Chinese patent document CN218482201U discloses a manual inspection device for a wafer visual inspection machine. It includes an inspection table, a carrier mounted on the inspection table, and a high-intensity light above the carrier. The carrier has multiple support ends, forming a positioning area that matches the outer diameter of the wafer. The carrier rotates around the center line of the positioning area. The manual inspection device also includes a clamping component and a driving component. The clamping component is freely mounted on the inspection table and has multiple clamping wheels distributed around the center line of the positioning area, as well as a handheld part. On one hand, by providing a clamping component for the operator to hold and place under the high-intensity light for inspection, the angle of light illumination on the wafer surface can be flexibly adjusted for comprehensive observation and inspection. On the other hand, the rotation of the carrier adjusts the clamping position of the clamping component on the wafer, effectively eliminating inspection obstacles and preventing the wafer from falling off.

[0004] In the aforementioned patented solution, a fixture is used to remove the wafer for inspection. If the clamping force is too weak, the wafer is prone to falling; if the clamping force is too strong, it can cause clamp marks and cracks, or even warping and deformation of the wafer. The clamping force is also difficult to control. Furthermore, edge damage may occur during wafer handling, which could affect wafer quality and subsequent processing. Simultaneously, the wafer is exposed to air during handling, increasing the risk of contamination. Dust or other particulate matter in the air can adhere to the wafer surface, resulting in incomplete patterns and affecting the chip's electrical characteristics. Utility Model Content

[0005] To overcome the technical problems of existing wafer inspection technologies that use clamps for visual inspection, where the clamping force on the wafer is difficult to control, easily causing wafer damage, and the wafer handling process also poses risks of edge damage and contamination, this invention aims to provide a wafer inspection device with manual inspection capabilities. By incorporating a central suction cup for adsorbing the wafer, a rotary motor for driving the wafer's rotation, and a hand crank for rotating the wafer in multiple directions within the inspection machine, this device eliminates the need for clamping and removing the wafer. It allows for non-contact manual inspection of the wafer within an environment isolated from the external environment, preventing contamination and damage.

[0006] To achieve the above objectives, this utility model adopts the following technical solution: a wafer inspection device with manual inspection function, comprising an inspection machine, a first lifting rod slidably connected longitudinally to the inspection machine, a first connecting rod rotatably connected to the upper end of the first lifting rod, a support base rotatably connected to the first connecting rod, and a central suction cup rotatably connected to the support base; the rotation axes of the first connecting rod, the support base, and the central suction cup are perpendicular to each other; wherein, a rotary motor is provided on the support base and is pulsatorically connected to the central suction cup; a hand crank is movably connected to the front end of the inspection machine, and the hand crank is pulsatorically connected to the first connecting rod and the support base.

[0007] Specifically, the testing machine is rotatably connected to an L-shaped connecting rod, the rotation axis of which is parallel to the rotation axis of the first connecting rod; a movable slider is rotatably connected to the L-shaped connecting rod, the rotation axis of which is parallel to the rotation axis of the support base; a second lifting rod is slidably connected to the movable slider; a first universal joint is provided at the upper end of the second lifting rod; wherein, one movable end of the first universal joint is provided on the second lifting rod, and the other movable end is rotatably connected to the lower end of the support base; the rotation axis between the first universal joint and the support base coincides with the rotation axis of the central suction cup.

[0008] Specifically, the testing machine is rotatably connected to a transmission rod, which can slide along its rotation axis; the lower end of the hand crank is rotatably connected to one end of the transmission rod; the other end of the transmission rod is rotatably connected to a support rod; the rotation axis of the support rod is parallel to the rotation axis of the hand crank and perpendicular to the rotation axis of the transmission rod; a second universal joint is provided between the support rod and the movable slider.

[0009] Specifically, the second universal joint includes two rotatably connected joints, one of which is rotatably connected to the support rod, and the other of which is rotatably connected to the movable slider; the rotation axis between the two joints, the rotation axis between the corresponding joint and the support rod, and the rotation axis between the corresponding joint and the movable slider are all perpendicular to each other.

[0010] Specifically, a synchronous connecting rod is provided between the support rod and the hand crank; the two ends of the synchronous connecting rod are respectively rotatably connected to the support connecting rod; two support connecting rods are respectively provided on the support rod and the hand crank; the rotation axis of the two support connecting rods is parallel to and does not coincide with the rotation axis between the support rod and the transmission rod; the two support connecting rods, the transmission rod, and the synchronous connecting rod form a parallelogram structure.

[0011] Furthermore, the upper end of the central suction cup is provided with a plurality of evenly distributed adsorption grooves; the upper center of the support base is provided with a connecting pipe that is rotatably connected to the central suction cup, and the connecting pipe is connected to the adsorption grooves; the side wall of the support base is provided with a negative pressure pipe that is connected to the connecting pipe.

[0012] Furthermore, a hemispherical surface is provided in the middle of the hand crank; a circular groove is provided on the testing machine; the outer wall of the hemispherical surface abuts against the inner wall of the circular groove.

[0013] Furthermore, a horizontal groove is provided on the first lifting rod; a lifting motor is provided on the testing machine; an eccentric column is eccentrically provided on the output shaft of the lifting motor; the eccentric column is slidably connected in the horizontal groove.

[0014] Furthermore, the inspection machine is equipped with a wafer carrier stage; the inspection machine is equipped with inspection equipment; an automatic inspection unit for transporting wafers is provided on the inspection machine between the wafer carrier stage and the inspection equipment; and a central chuck is provided between the wafer carrier stage and the inspection equipment.

[0015] Furthermore, the inspection machine is longitudinally slidably connected to a lifting plate; a semi-circular bracket is rotatably connected to the upper end of the lifting plate; multiple evenly distributed edge suction cups are provided on the semi-circular bracket; and the central suction cup is located at the center of the semi-circular bracket.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] 1. This utility model can perform automated inspection of wafers through inspection equipment, and can also perform manual inspection; the operator drives the wafer to rotate and flip horizontally using a hand crank and rotary motor to inspect the wafer from all angles; and a semi-circular support is also provided to flip the wafer, thereby realizing the inspection of the front and back of the wafer.

[0018] 2. During the wafer inspection process, there is no need to clamp the wafer or remove it from the inspection machine, which prevents the wafer from being damaged and also prevents the wafer from being contaminated by external dust and impurities, ensuring the cleanliness of the wafer and thus ensuring the quality and stability of the chip.

[0019] 3. This utility model has a compact and small structure, making it easy to transport and store, and can be placed on a desktop for use. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model;

[0021] Figure 2 This is an exploded view of the components of this utility model;

[0022] Figure 3 This is a schematic diagram of the structure of the manual inspection part of this utility model;

[0023] Figure 4 This is an exploded structural diagram of the manual detection part of this utility model;

[0024] Figure 5 This is a schematic diagram of the structure of the first lifting rod, the second lifting rod, and the central suction cup of this utility model.

[0025] Figure 6 This is a schematic diagram of the hand crank and transmission rod of this utility model.

[0026] In the diagram: 11. Inspection machine; 12. Wafer tray stage; 2. Automatic inspection unit; 31. Lifting plate; 32. Semicircular bracket; 33. Edge suction cup; 4. Manual inspection unit; 41. Center suction cup; 411. Adsorption tank; 42. Rotary motor; 43. Support base; 431. Negative pressure pipe; 44. First lifting rod; 441. Horizontal groove; 45. Lifting motor; 451. Eccentric column; 46. First connecting rod; 47. Second lifting rod; 48. First universal joint; 49. Second connecting rod; 51. Fixed base; 52. L-shaped connecting rod; 53. Movable slider; 54. Fixed slider; 55. Second universal joint; 61. Hand crank; 611. Hemispherical surface; 62. Transmission rod; 63. Support rod; 64. Synchronous connecting rod; 65. Support connecting rod. Detailed Implementation

[0027] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0028] In the description of this utility model, it should be noted that the directional terms such as "center", "lateral", "longitudinal", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. They should not be construed as limiting the specific protection scope of this utility model.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. Thus, the use of "first" and "second" to define a feature may explicitly or implicitly include one or more of that feature. In this description of the utility model, "a number" means two or more, unless otherwise explicitly specified.

[0030] In this utility model, unless otherwise explicitly specified and limited, terms such as "set" and "install" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can also refer to a mechanical connection; they can refer to a direct connection or a connection through an intermediate medium; or they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0031] See Figures 1-6 A wafer inspection device with manual inspection function includes an inspection machine 11, a wafer carrier stage 12 disposed on one side of the inspection machine 11, an inspection device (not shown in the figure) disposed on the other side of the inspection machine 11, an automatic inspection unit 2 disposed on the inspection machine 11 between the wafer carrier stage 12 and the inspection device for transporting wafers, and a manual inspection unit 4 disposed on the inspection machine 11 between the wafer carrier stage 12 and the inspection device.

[0032] The manual inspection unit 4 includes a first lifting rod 44 slidably connected longitudinally to the inspection machine 11, a first connecting rod 46 rotatably connected to the upper end of the first lifting rod 44, a support base 43 rotatably connected to the first connecting rod 46, a central suction cup 41 rotatably connected to the support base 43, and a rotary motor 42 mounted on the support base 43 and drivenly connected to the central suction cup 41. The rotation axes of the first connecting rod 46, the support base 43, and the central suction cup 41 are perpendicular to each other. The upper end of the central suction cup 41 is provided with a plurality of evenly distributed adsorption grooves 411. A connecting pipe rotatably connected to the central suction cup 41 is provided at the center of the upper end of the support base 43, and the connecting pipe communicates with the adsorption grooves 411. A negative pressure pipe 431 communicating with the connecting pipe is provided on the side wall of the support base 43.

[0033] The testing machine 11 is provided with a fixed slider 54 that is slidably connected to the first lifting rod 44; the testing machine 11 is provided with a fixed base 51; an L-shaped connecting rod 52 is rotatably connected to the fixed base 51, and the rotation axis of the L-shaped connecting rod 52 is parallel to the rotation axis of the first connecting rod 46; a movable slider 53 is rotatably connected to the L-shaped connecting rod 52, and the rotation axis of the movable slider 53 is parallel to the rotation axis of the support base 43; a second lifting rod 47 is slidably connected to the movable slider 53; a first universal joint 48 is provided at the upper end of the second lifting rod 47.

[0034] The first universal joint 48 includes a cross connector and two movable ends rotatably connected to the cross connector; the rotation axes of the two movable ends are perpendicular to each other; wherein, one movable end is disposed on the second lifting rod 47, and the other movable end is rotatably connected to the lower end of the support base 43, i.e., attached to... Figure 5 The second connecting rod 49 in the middle; the rotation axis between the first universal joint 48 and the support base 43 coincides with the rotation axis of the central suction cup 41.

[0035] The front end of the testing machine 11 is movably connected to a hand crank 61, and a hemispherical surface 611 is provided in the middle of the hand crank 61; a circular groove is provided on the testing machine 11; the outer wall of the hemispherical surface 611 abuts against the inner wall of the circular groove.

[0036] A transmission rod 62 is rotatably connected to the testing machine 11, and the transmission rod 62 can slide along its rotation axis; the lower end of the hand crank 61 is rotatably connected to one end of the transmission rod 62; the other end of the transmission rod 62 is rotatably connected to a support rod 63; the rotation axis of the support rod 63 is parallel to the rotation axis of the hand crank 61 and perpendicular to the rotation axis of the transmission rod 62; a second universal joint 55 is provided between the support rod 63 and the movable slider 53.

[0037] The second universal joint 55 includes two joints that are rotatably connected to each other. One joint is rotatably connected to the support rod 63, and the other joint is rotatably connected to the movable slider 53. The rotation axis between the two joints, the rotation axis between the corresponding joint and the support rod 63, and the rotation axis between the corresponding joint and the movable slider 53 are all perpendicular to each other.

[0038] A synchronizing link 64 is provided between the support rod 63 and the hand crank 61; the two ends of the synchronizing link 64 are respectively rotatably connected to the supporting link 65; the two supporting links 65 are respectively provided on the support rod 63 and the hand crank 61; the rotation axis of the two supporting links 65 is parallel to and does not coincide with the rotation axis between the support rod 63 and the transmission rod 62; the two supporting links 65, the transmission rod 62, and the synchronizing link 64 form a parallelogram structure.

[0039] The first lifting rod 44 is horizontally provided with a transverse groove 441; the inspection machine 11 is provided with a lifting motor 45; the output shaft of the lifting motor 45 is eccentrically provided with an eccentric column 451; the eccentric column 451 is slidably connected in the transverse groove 441.

[0040] The inspection machine 11 is longitudinally slidably connected to a lifting plate 31; a semi-circular bracket 32 ​​is rotatably connected to the upper end of the lifting plate 31; a plurality of evenly distributed edge suction cups 33 are provided on the semi-circular bracket 32; and the central suction cup 41 is located at the center of the semi-circular bracket 32.

[0041] The automatic inspection unit 2 includes a horizontal sliding plate slidably connected to the inspection machine 11, a longitudinal sliding plate slidably connected to the horizontal sliding plate, a rotating plate rotatably connected to the longitudinal sliding plate with a rotating shaft arranged longitudinally, and two pairs of insert plates arranged on the rotating plate. The insert plates are used to extend into the wafer cassette to remove the wafer and move the wafer to the inspection equipment for automated inspection. Similarly, they are also used to move the wafer to the semi-circular support 32 for flipping or to the central suction cup 41 for manual inspection.

[0042] Usage process: When manual inspection is required, the automatic inspection unit 2 places the wafer on the central suction cup 41. The wafer is attracted by the central suction cup 41. At this time, the rotary motor 42 drives the central suction cup 41 to rotate, thereby realizing the rotation of the wafer for manual inspection.

[0043] The lifting motor 45 drives the eccentric column 451 to rotate, and the eccentric column 451 drives the horizontal groove 441 to slide, thereby causing the first lifting rod 44 to slide longitudinally. The first lifting rod 44 slides along the fixed slider 54, and the second lifting rod 47 slides along the movable slider 53, which drives the central suction cup 41 to slide upward and raise the wafer.

[0044] Pushing the hand crank 61 forward causes it to rotate around the central hemisphere 611. Pulling the transmission rod 62 backward causes the support rod 63 to rotate forward. The rotation of the support rod 63, through the second universal joint 55, drives the movable slider 53 to rotate. The movable slider 53 drives the second lifting rod 47 to rotate. The second lifting rod 47, through the first universal joint, drives the support base 43 to rotate forward, thus tilting and flipping the wafer 43 forward. Similarly, pulling the hand crank 61 backward tilts and flips the wafer 43 backward.

[0045] Turning the hand crank 61 to the left causes it to rotate around the central hemisphere 611, which in turn rotates the transmission rod 62 to the left. This, in turn, rotates the support rod 63 to the left. The support rod 63, through the second universal joint 55, drives the L-shaped connecting rod 52 to the left. The L-shaped connecting rod 52, through the movable slider 53, drives the second lifting rod 47 to the left, which in turn causes the central suction cup 41 to rotate to the left, thus tilting and flipping the wafer 43 to the left. Similarly, turning the hand crank 61 to the right tilts and flips the wafer 43 to the right.

[0046] The above description is only a specific embodiment of the present utility model, but the technical features of the present utility model are not limited thereto. Any changes or modifications made by those skilled in the art within the scope of the present utility model are covered by the patent scope of the present utility model.

Claims

1. A wafer inspection device with manual inspection function, characterized in that: The device includes an inspection machine, a first lifting rod slidably connected longitudinally to the inspection machine, a first connecting rod rotatably connected to the upper end of the first lifting rod, a support base rotatably connected to the first connecting rod, and a central suction cup rotatably connected to the support base; the rotation axes of the first connecting rod, the support base, and the central suction cup are perpendicular to each other; wherein, a rotary motor is provided on the support base and is throttle-connected to the central suction cup; a hand crank is movably connected to the front end of the inspection machine, and the hand crank is throttle-connected to the first connecting rod and the support base.

2. The detection device as described in claim 1, characterized in that: An L-shaped connecting rod is rotatably connected to the testing machine, and the rotation axis of the L-shaped connecting rod is parallel to the rotation axis of the first connecting rod. A movable slider is rotatably connected to the L-shaped connecting rod, and the rotation axis of the movable slider is parallel to the rotation axis of the support base. A second lifting rod is slidably connected to the movable slider. A first universal joint is provided at the upper end of the second lifting rod. One movable end of the first universal joint is located on the second lifting rod, and the other movable end is rotatably connected to the lower end of the support base. The rotation axis between the first universal joint and the support base coincides with the rotation axis of the central suction cup.

3. The detection device as described in claim 2, characterized in that: The testing machine is rotatably connected to a transmission rod, which can slide along its rotation axis; the lower end of the hand crank is rotatably connected to one end of the transmission rod; the other end of the transmission rod is rotatably connected to a support rod; the rotation axis of the support rod is parallel to the rotation axis of the hand crank and perpendicular to the rotation axis of the transmission rod; a second universal joint is provided between the support rod and the movable slider.

4. The detection device as described in claim 3, characterized in that: The second universal joint includes two rotatably connected joints, one of which is rotatably connected to the support rod, and the other of which is rotatably connected to the movable slider; the rotation axis between the two joints, the rotation axis between the corresponding joint and the support rod, and the rotation axis between the corresponding joint and the movable slider are all perpendicular to each other.

5. The detection device as described in claim 3, characterized in that: A synchronizing link is provided between the support rod and the hand crank; the two ends of the synchronizing link are respectively rotatably connected to the supporting link; two supporting links are respectively provided on the support rod and the hand crank; the rotation axis of the two supporting links is parallel to and does not coincide with the rotation axis between the support rod and the transmission rod; the two supporting links, the transmission rod, and the synchronizing link form a parallelogram structure.

6. The detection device as described in any one of claims 1-5, characterized in that: The upper end of the central suction cup is provided with multiple evenly distributed adsorption grooves; the upper center of the support base is provided with a connecting pipe that is rotatably connected to the central suction cup, and the connecting pipe is connected to the adsorption grooves; the side wall of the support base is provided with a negative pressure pipe that is connected to the connecting pipe.

7. The detection device as described in any one of claims 1-5, characterized in that: The hand crank has a hemispherical surface in the middle; the testing machine has a circular groove; the outer wall of the hemispherical surface abuts against the inner wall of the circular groove.

8. The detection device as described in any one of claims 1-5, characterized in that: The first lifting rod has a horizontal groove; the testing machine is equipped with a lifting motor; the output shaft of the lifting motor has an eccentric column; the eccentric column is slidably connected in the horizontal groove.

9. The detection device as described in any one of claims 1-5, characterized in that: The inspection machine is equipped with a wafer carrier stage; the inspection machine is equipped with inspection equipment; an automatic inspection unit for transporting wafers is provided on the inspection machine between the wafer carrier stage and the inspection equipment; the central chuck is provided between the wafer carrier stage and the inspection equipment.

10. The detection device as described in any one of claims 1-5, characterized in that: The testing machine is longitudinally slidably connected to a lifting plate; a semi-circular bracket is rotatably connected to the upper end of the lifting plate; multiple evenly distributed edge suction cups are provided on the semi-circular bracket; the central suction cup is located at the center of the semi-circular bracket.

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