Wafer incoming inspection microscope detection device

Abstract

This utility model discloses a microscope inspection device for incoming wafer inspection, relating to the field of incoming wafer inspection technology. The utility model includes a base, with a microscope body fixedly connected to one side of the base; a clamping assembly is provided on one side of the microscope body, the clamping assembly including a placement plate located at the top of the base, a clamping plate on one side of the placement plate, and a driving assembly at the top of the base, the driving assembly including a motor located on one side of the microscope body. This utility model uses the clamping plate and soft pads to clamp and limit the two sides of the incoming wafer. Simultaneously, when clamping the two sides of the incoming wafer, the clamping plate generates negative pressure at the bottom of the incoming wafer, adsorbing the bottom of the wafer. Combining these two fixing methods strengthens the fixation of the incoming wafer, preventing positional displacement during inspection due to operation, thereby ensuring the accuracy and reliability of the inspection.

Description

Technical Field

[0001] This utility model belongs to the field of wafer incoming material inspection technology, and in particular relates to a microscope inspection device for wafer incoming material inspection. Background Technology

[0002] Wafer materials refer to the raw materials used in the semiconductor manufacturing process. They are usually circular thin films made of silicon. In the semiconductor manufacturing process, wafers are the most basic carrier material. All circuits and chips need to be processed on their surface. In order to ensure that the quality of wafers meets the requirements of subsequent semiconductor manufacturing processes, they need to be inspected using microscope inspection equipment.

[0003] Existing microscope inspection equipment uses vacuum adsorption to fix incoming wafers to avoid surface damage and ensure proper fixation. However, since this method relies entirely on vacuum adsorption and lacks any limiting mechanisms on either side of the wafer, the wafer's position can easily shift during inspection due to manipulation, affecting the accuracy and reliability of the inspection. To address these issues, we provide a microscope inspection device for incoming wafers to solve the aforementioned problems. Utility Model Content

[0004] The purpose of this invention is to provide a microscope inspection device for inspecting incoming wafers. By combining the clamping component and the driving component, it solves the problem in the prior art where microscope inspection devices rely on a single vacuum adsorption method to fix incoming wafers, which causes the wafer position to easily shift due to operation and affects the inspection accuracy.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution.

[0006] This utility model relates to a microscope inspection device for incoming wafer inspection, comprising a base, with a microscope body fixedly connected to one side of the base; a clamping assembly is provided on one side of the microscope body, the clamping assembly including a placement plate located at the top of the base, a clamping plate provided on one side of the placement plate, a driving assembly including a motor located at one side of the microscope body, and a threaded rod fixedly connected to the output end of the motor; a protective assembly is provided at the bottom of the microscope body, the protective assembly including a cleaning pad located at the top of the base, and a housing fixedly connected to the bottom of the cleaning pad, the protective assembly protecting and cleaning the objective lens.

[0007] The present invention is further configured such that the clamping assembly includes a connecting plate, the connecting plate is fixedly connected to the microscope body, the top of the connecting plate has a groove, a partition is fixedly connected to one side of the groove, a piston plate is provided at the bottom of the partition, a spring is fixedly connected to one side of the groove, a connecting strap is fixedly connected to one side of the piston plate, and one side of the connecting strap passes through the partition and is fixedly connected to the clamping plate.

[0008] The present invention is further configured such that a through groove adapted to the connecting belt is opened on the top of the partition, and a guide roller is movably connected to one side of the through groove.

[0009] The present invention is further configured such that the driving assembly includes a threaded sleeve, the threaded sleeve is threadedly connected to the surface of the threaded rod, a connecting rod is fixedly connected to the front side of the threaded sleeve, the connecting rod is fixedly connected to the clamping plate, and a slider is fixedly connected to one side of the threaded sleeve.

[0010] The present invention is further configured such that the protective component includes a vertical rod, the top of which is fixedly connected to the microscope body, a ring is movably connected to the bottom of the vertical rod, and an anti-slip pad is fixedly connected to the top of the ring.

[0011] The present invention is further configured such that the cleaning pad is in contact with the microscope body, and a soft pad is fixedly connected to one side of the clamp.

[0012] The present invention is further configured such that the piston plate is in contact with the partition plate, and one side of the spring is fixedly connected to the piston plate.

[0013] This invention has the following advantages: the clamping plates and soft pads clamp and limit the two sides of the incoming wafer material. At the same time, when the clamping plates clamp the two sides of the incoming wafer material, they will generate negative pressure at the bottom of the incoming wafer material, adsorbing the bottom of the incoming wafer material. The combination of the two fixing methods strengthens the fixing of the incoming wafer material and prevents it from shifting in position due to operation during the inspection process, thereby ensuring the accuracy and reliability of the inspection. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0015] Figure 1 This is a three-dimensional view of a microscope inspection device for inspecting incoming wafers.

[0016] Figure 2 This is a cross-sectional view of the housing in a microscope inspection device for inspecting incoming wafers.

[0017] Figure 3 This is a cross-sectional view of a connecting plate in a microscope inspection device for incoming wafer inspection.

[0018] Figure 4 This is an exploded view of the internal structure of a groove in a microscope inspection device for incoming wafer inspection.

[0019] Figure 5 This is a left view of a microscope inspection device for inspecting incoming wafers.

[0020] In the attached diagram: 1. Base; 2. Microscope body; 3. Placement plate; 4. Clamping plate; 5. Motor; 6. Threaded rod; 7. Cleaning pad; 8. Housing; 9. Connecting plate; 10. Groove; 11. Partition; 12. Piston plate; 13. Spring; 14. Connecting strap; 15. Threaded sleeve; 16. Connecting rod; 17. Vertical rod; 18. Ring; 19. Anti-slip pad; 20. Soft pad. Detailed Implementation

[0021] The technical solutions of the present utility model will be described below with reference to the accompanying drawings. The described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Example 1

[0023] Please see Figure 1-5 This utility model is a microscope inspection device for incoming wafer inspection, including a base 1, a microscope body 2 fixedly connected to one side of the base 1; a clamping assembly is provided on one side of the microscope body 2, the clamping assembly includes a placement plate 3, the placement plate 3 is located on the top of the base 1, a clamping plate 4 is provided on one side of the placement plate 3, a driving assembly is provided on the top of the base 1, the driving assembly includes a motor 5, the motor 5 is located on one side of the microscope body 2, and a threaded rod 6 is fixedly connected to the output end of the motor 5; a protective assembly is provided at the bottom of the microscope body 2, the protective assembly includes a cleaning pad 7, the cleaning pad 7 is located on the top of the base 1, and a housing 8 is fixedly connected to the bottom of the cleaning pad 7, the protective assembly protects the objective lens and cleans it.

[0024] Specifically: The microscope body 2 is an optical instrument used to magnify and observe the details of objects, making tiny objects invisible to the naked eye visible. It is a mature existing technology. The placement plate 3, clamping plate 4, motor 5 and threaded rod 6 are all located inside the groove 10. The bottom of the placement plate 3 is fixedly connected to the partition plate 11. The top of the placement plate 3 and the partition plate 11 are both provided with adsorption holes. The two adsorption holes are connected to each other for vacuum adsorption of incoming wafer materials. The motor 5 is fixedly connected to one side inside the groove 10. The threads on both sides of the surface of the threaded rod 6 are in opposite directions. The cleaning pad 7 is in contact with the objective lens of the microscope body 2.

[0025] Example 2

[0026] Please see Figure 1-5Based on Embodiment 1, the clamping assembly further includes a connecting plate 9, which is fixedly connected to the microscope body 2. A groove 10 is formed on the top of the connecting plate 9, and a partition 11 is fixedly connected to one side of the groove 10. A piston plate 12 is provided at the bottom of the partition 11, and a spring 13 is fixedly connected to one side of the groove 10. A connecting belt 14 is fixedly connected to one side of the piston plate 12, and one side of the connecting belt 14 passes through the partition 11 and is fixedly connected to the clamping plate 4. A through groove adapted to the connecting belt 14 is formed on the top of the partition 11, and a guide roller is movably connected to one side of the through groove. The driving assembly also includes a threaded sleeve 1. 5. The threaded sleeve 15 is threaded onto the surface of the threaded rod 6. A connecting rod 16 is fixedly connected to the front side of the threaded sleeve 15. The connecting rod 16 is fixedly connected to the clamping plate 4. A slider is fixedly connected to one side of the threaded sleeve 15. The protective assembly also includes a vertical rod 17. The top of the vertical rod 17 is fixedly connected to the microscope body 2. A ring 18 is movably connected to the bottom of the vertical rod 17. An anti-slip pad 19 is fixedly connected to the top of the ring 18. The cleaning pad 7 is in contact with the microscope body 2. A soft pad 20 is fixedly connected to one side of the clamping plate 4. The piston plate 12 is in contact with the partition plate 11. One side of the spring 13 is fixedly connected to the piston plate 12.

[0027] Specifically: the piston plate 12 is in contact with the connecting plate 9, the connecting belt 14 will not be stretched due to pulling, it has no elasticity, and can ensure that the piston plate 12 can be moved normally when the clamping plate 4 moves. The guide roller is in contact with the connecting belt 14, and the guide roller is movably connected to one side of the through groove through a bearing. One side of the threaded rod 6 is movably connected to one side of the groove 10 through a bearing. One side of the groove 10 has a sliding groove adapted to the slider, which can limit the threaded sleeve 15 and prevent it from rotating. The ring 18 is movably connected to the vertical rod 17 through a bearing. The anti-slip pad 19 is also ring-shaped, and it and the ring 18 are both located on the surface of the cleaning pad 7. The housing 8 is threadedly connected to the ring 18. The ring 18 is limited by the friction between the anti-slip pad 19 and the objective lens. The cleaning pad 7 and the anti-slip pad 19 are on the same horizontal plane, which can ensure the cleaning effect of the cleaning pad 7 on the objective lens.

[0028] The working principle of this utility model is as follows: The wafer to be tested is placed on the top of the placement plate 3, and the motor 5 drives the threaded rod 6 to rotate. The threaded sleeve 15 and the connecting rod 16 drive the clamping plate 4 and the soft pad 20 to move. At this time, the connecting belt 14 drives the piston plate 12 to move, generating a negative pressure at the bottom of the wafer to adsorb the wafer. At the same time, the spring 13 is compressed. The moving clamping plate 4 and soft pad 20 can clamp and fix the wafer on both sides. The negative pressure generated by the movement of the piston plate 12 can adsorb the bottom of the wafer, thereby strengthening the fixation of the wafer and preventing it from shifting in position during the testing process, thus ensuring the accuracy and reliability of the testing.

[0029] Rotating the housing 8 allows the objective lens to be used to inspect incoming wafers. As the housing 8 rotates, the cleaning pad 7 wipes the objective lens to ensure its cleanliness during inspection. When not in use, the cleaning pad 7 and the anti-slip pad 19 protect the objective lens from damage and dust adhesion. To replace the cleaning pad 7, simply unscrew the housing 8. This ensures effective cleaning and makes the product convenient to use.

[0030] All standard parts used in this utility model can be purchased from the market, and can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art.

[0031] The preferred embodiments of the present utility model disclosed above are only used to help illustrate the present utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the present utility model to the specific implementation methods described. The present specification selects and specifically describes these embodiments in order to better explain the principle and practical application of the present utility model, so that those skilled in the art can better understand and utilize the present utility model.

Claims

1. A microscope inspection device for incoming wafer inspection, comprising a base (1), characterized in that: The microscope body (2) is fixedly connected to one side of the base (1); A clamping assembly is provided on one side of the microscope body (2). The clamping assembly includes a placement plate (3). The placement plate (3) is located on the top of the base (1). A clamping plate (4) is provided on one side of the placement plate (3). A driving assembly is provided on the top of the base (1). The driving assembly includes a motor (5). The motor (5) is located on one side of the microscope body (2). A threaded rod (6) is fixedly connected to the output end of the motor (5). The microscope body (2) is provided with a protective component at the bottom. The protective component includes a cleaning pad (7), which is located on the top of the base (1). The bottom of the cleaning pad (7) is fixedly connected to a housing (8). The protective component protects the objective lens and cleans it.

2. The microscope inspection equipment for incoming wafer inspection according to claim 1, characterized in that: The clamping assembly also includes a connecting plate (9), which is fixedly connected to the microscope body (2). The top of the connecting plate (9) has a groove (10), and a partition (11) is fixedly connected to one side inside the groove (10). A piston plate (12) is provided at the bottom of the partition (11), and a spring (13) is fixedly connected to one side inside the groove (10). A connecting strap (14) is fixedly connected to one side of the piston plate (12), and one side of the connecting strap (14) passes through the partition (11) and is fixedly connected to the clamping plate (4).

3. The microscope inspection equipment for incoming wafer inspection according to claim 2, characterized in that: The top of the partition (11) is provided with a through groove that is compatible with the connecting belt (14), and a guide roller is movably connected to one side of the through groove.

4. The microscope inspection equipment for incoming wafer inspection according to claim 1, characterized in that: The drive assembly also includes a threaded sleeve (15), which is threadedly connected to the surface of the threaded rod (6). A connecting rod (16) is fixedly connected to the front side of the threaded sleeve (15), and the connecting rod (16) is fixedly connected to the clamping plate (4). A slider is fixedly connected to one side of the threaded sleeve (15).

5. The microscope inspection equipment for incoming wafer inspection according to claim 1, characterized in that: The protective assembly also includes a vertical rod (17), the top of which is fixedly connected to the microscope body (2), and a ring (18) is movably connected to the bottom of the vertical rod (17), and an anti-slip pad (19) is fixedly connected to the top of the ring (18).

6. The microscope inspection equipment for incoming wafer inspection according to claim 1, characterized in that: The cleaning pad (7) is in contact with the microscope body (2), and a soft pad (20) is fixedly connected to one side of the clamp (4).

7. The microscope inspection equipment for incoming wafer inspection according to claim 2, characterized in that: The piston plate (12) is in contact with the partition plate (11), and one side of the spring (13) is fixedly connected to the piston plate (12).

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