Clamping device and battery piece surface foreign matter measuring system

By switching between three positions using a clamping device to hold the front, back, and side of the solar cell, and using a scanning electron microscope for morphology testing, the problem of not being able to accurately determine the location of defects in the solar cell in existing technologies is solved, thus improving production yield.

CN224500472UActive Publication Date: 2026-07-14TONGWEI SOLAR ENERGY (CHENGDU) CO LID

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
TONGWEI SOLAR ENERGY (CHENGDU) CO LID
Filing Date
2025-07-01
Publication Date
2026-07-14

AI Technical Summary

Technical Problem

Existing technologies struggle to accurately pinpoint the location of defects in solar cells, making it impossible to determine whether a defect is on the front or back of a sample, leading to reduced production yield.

Method used

A clamping device is provided, which can switch between three positions via a clamping module to clamp the front, back and side of the battery cell respectively. It can be used in conjunction with a scanning electron microscope for morphology testing to achieve perspective switching and accurately locate defective locations.

Benefits of technology

It improves the ability to accurately locate defects in solar cells, guides production process improvements, and increases product yield.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a kind of clamping device and battery piece surface foreign matter determination system. Clamping device includes installation body and clamping module. Clamping module is movably installed on installation body, and with first detection position, second detection position and third detection position. Clamping module is used to clamp detection sample. The application is moved between first detection position, second detection position and third detection position by driving clamping module to adjust the angle of clamping module relative to installation body, so that clamping module drives detection sample to switch view angle, i. e. realize the view angle switching of detection sample front face upward, back face upward and side face upward, without damaging the surface of detection sample, while cooperating with scanning electron microscope to test and analyze the morphology of the bad position of detection sample when detection sample is at different view angles, so as to accurately judge whether the bad position is on the front face or back face of detection sample, and to guide the production process improvement of product, improve product production yield.
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Description

Technical Field

[0001] This utility model relates to the field of battery cell testing technology, and in particular to a clamping device and a system for measuring foreign matter on the surface of battery cells. Background Technology

[0002] Photoluminescence (PL) detection is a solar cell detection technology that utilizes the principle of photoluminescence. It uses a laser of a specific wavelength as the excitation source, providing photons of a certain energy. This causes ground-state electrons in the silicon wafer to absorb these photons and enter an excited state, releasing near-infrared light with a peak wavelength around 1150 nm. A highly sensitive, high-resolution camera then captures the light and forms an image. The light intensity after imaging is proportional to the non-equilibrium minority carrier concentration at the corresponding location. Since defects reduce the minority carrier concentration in a region, thus weakening its fluorescence effect, the image appears as dark dots, lines, or areas. Therefore, photoluminescence can be used to detect the location of various defects and impurities (such as metal contamination, additive contamination, and foreign object obstruction) in a sample.

[0003] When PL detects obvious defect areas in the solar cell, existing detection methods (visual observation or the use of 3D laser microscopes) cannot accurately determine the defect location. Furthermore, when further observing the defect location, many micron and nanometer-sized defects cannot be observed under an optical microscope. It is also impossible to distinguish whether the defect is on the front or back of the sample, or to determine the process that caused the defect and make corresponding improvements, resulting in a decrease in production yield. Utility Model Content

[0004] Therefore, it is necessary to provide a clamping device and a foreign matter detection system for the surface of battery cells to address the problem that existing detection methods cannot distinguish whether the defect is on the front or back of the sample, nor can they determine the process in which the defect occurs and make corresponding improvements, which leads to a decrease in production yield.

[0005] The technical solution is as follows:

[0006] On the one hand, a clamping device is provided for use in a foreign matter detection system on the surface of a battery cell, the clamping device comprising:

[0007] Install the main unit;

[0008] The clamping module is movably mounted on the mounting body and has a first detection position, a second detection position and a third detection position. The clamping module is used to clamp the test sample.

[0009] Specifically, when the clamping module holding the test sample moves to the first detection position, the front of the test sample faces upward; when the clamping module holding the test sample moves to the second detection position, the back of the test sample faces upward; and when the clamping module holding the test sample moves to the third detection position, the side of the test sample faces upward.

[0010] The technical solution will be further explained below:

[0011] In one embodiment, the mounting body is provided with a semi-annular guide portion, and the clamping module is located inside the guide portion and cooperates with the guide portion to guide movement to the first detection position, the second detection position and the third detection position.

[0012] In one embodiment, the top of the mounting body is provided with a movable groove, and the guide portion is disposed on the inner wall of the movable groove and extends circumferentially along the movable groove.

[0013] In one embodiment, the inner wall of the movable groove is an arc surface, the guide part is configured as a slide rail, and the two ends of the slide rail and the axis of the arc surface are all located on the same horizontal plane.

[0014] In one embodiment, the inner wall of the movable groove is further provided with at least one marking portion, each of the marking portions being used to mark the position of the clamping module relative to the mounting body.

[0015] In one embodiment, the clamping module includes a movable component and a clamping mechanism mounted on the movable component, the movable component being movablely engaged with the mounting body.

[0016] In one embodiment, the clamping mechanism includes a first clamping member mounted on the movable member, a second clamping member located on one side of the first clamping member, and a locking assembly configured to fix the first clamping member and the second clamping member when the first clamping member and the second clamping member cooperate to clamp the test sample.

[0017] In one embodiment, the first clamping member is provided with a first mounting through hole, and the second clamping member is provided with a second mounting through hole corresponding to the first mounting through hole. The locking assembly includes a bolt, a nut, and an elastic member. The bolt passes through the first mounting through hole and the second mounting through hole and is threadedly connected to the nut. The elastic member is located on one side of the second clamping member and is sleeved on the bolt. The elastic member is used to apply an elastic force to the second clamping member.

[0018] And / or, one of the first clamping member and the second clamping member is provided with a guide hole, and the other is provided with a guide rod. The guide hole extends along the direction of the second clamping member toward or away from the first clamping member, and the guide rod passes through the guide hole and guides and cooperates with the inner wall of the guide hole.

[0019] On the other hand, a foreign matter measurement system for a battery cell surface is provided, including a stage, a scanning electron microscope (SEM), and the aforementioned clamping device. The SEM and the clamping device are both mounted on the stage. The SEM is configured to test and analyze the morphology of the defective location of the test sample when the clamping device clamps the test sample.

[0020] In one embodiment, when the clamping module holding the test sample moves to the first detection position, the second detection position, and the third detection position, the defective position of the test sample is located within the detection space of the scanning electron microscope.

[0021] In the clamping device and the foreign matter detection system on the surface of the battery cell described in the above embodiments, after the clamping module clamps the test sample, it is driven to move between the first detection position, the second detection position and the third detection position to adjust the angle of the clamping module relative to the mounting body. This allows the clamping module to switch the viewing angle of the test sample, that is, to switch the viewing angle of the test sample with the front facing up, the back facing up, and the side facing up, without damaging the surface of the test sample. At the same time, in conjunction with a scanning electron microscope, the morphology of the defective position of the test sample is tested and analyzed when the test sample is in different viewing angles, so as to accurately determine whether the defective position is on the front or the back of the test sample, and to guide the improvement of the product manufacturing process and improve the product yield. Attached Figure Description

[0022] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an undue limitation of this application.

[0023] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the clamping device according to one embodiment when the clamping module is in the first detection position.

[0025] Figure 2 for Figure 1A schematic diagram of the clamping device when the clamping module is in the second detection position.

[0026] Figure 3 for Figure 1 A schematic diagram of the clamping device when the clamping module is in the third detection position.

[0027] Figure 4 for Figure 1 A schematic diagram of the installation body.

[0028] Figure 5 This is a schematic diagram of the clamping module in one embodiment.

[0029] Explanation of reference numerals in the attached figures:

[0030] 10. Clamping device; 100. Mounting body; 110. Guide part; 120. Movable groove; 130. Marking part; 200. Clamping module; 210. Movable part; 220. Clamping mechanism; 221. First clamping member; 222. Second clamping member; 223. Bolt; 224. Nut; 225. Elastic member; 226. Guide rod; 20. Test sample; 21. Front; 22. Back; 23. Side. Detailed Implementation

[0031] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0032] In one embodiment, a foreign matter detection system for a solar cell surface includes a stage, a scanning electron microscope (SEM), and a clamping device 10. Both the SEM and the clamping device 10 are mounted on the stage. The SEM is configured to analyze the morphology of defective locations on the test sample 20 when the clamping device 10 clamps the test sample 20. Thus, the clamping device 10 can clamp the test sample 20 and observe it from the front (21), back (22), and side (23) of the test sample 20 using the SEM, identifying whether the defective location is specifically on the front (21) or back (22) of the test sample 20, and using this information to guide improvements in the product manufacturing process and increase product yield.

[0033] It should be noted that test sample 20 refers to a fragment of a battery cell with a defective location. Specifically, in this embodiment, a photoluminescence analyzer is used to photograph the battery cell or process wafer to locate the approximate location of the blackening defect in photoluminescence (PL). This location is then marked (e.g., by circling the defective area with a pencil). The battery cell is then broken up using a laser cutter or by breaking it with tweezers to obtain a fragment of the battery cell with the marked defective location (i.e., test sample 20). The side surface 23 of test sample 20 corresponds to the cross-section of the broken part of the battery cell.

[0034] Specifically, in this embodiment, the foreign matter detection system on the battery cell surface also includes an energy-dispersive X-ray spectrometer (EDXPS). The EDXPS is used to perform elemental analysis on the foreign matter at the defect location to determine its elemental composition. This facilitates tracing the process in which the defect occurred, allowing for targeted process optimization and improved product yield.

[0035] like Figure 1 , Figure 2 and Figure 3 As shown, in one embodiment, a clamping device 10 is provided for use in a foreign matter detection system on the surface of a battery cell. The clamping device 10 includes a mounting body 100 and a clamping module 200. The clamping module 200 is movably mounted on the mounting body 100 and has a first detection position, a second detection position, and a third detection position. The clamping module 200 is used to clamp a test sample 20. When the clamping module 200 holding the test sample 20 moves to the first detection position, the front side 21 of the test sample 20 faces upward. When the clamping module 200 holding the test sample 20 moves to the second detection position, the back side 22 of the test sample 20 faces upward. When the clamping module 200 holding the test sample 20 moves to the third detection position, the side side 23 of the test sample 20 faces upward.

[0036] In the above embodiment, the clamping device 10, after clamping the test sample 20, is driven to move between the first test position, the second test position, and the third test position to adjust the angle of the clamping module 200 relative to the mounting body 100. This allows the clamping module 200 to switch the viewing angle of the test sample 20, that is, to switch the viewing angle of the test sample 20 with the front 21 facing up, the back 22 facing up, and the side 23 facing up, without damaging the surface of the test sample 20. At the same time, in conjunction with a scanning electron microscope, the morphology of the defective position of the test sample 20 is tested and analyzed when the test sample 20 is in different viewing angles, so as to accurately determine whether the defective position is on the front 21 or the back 22 of the test sample 20, and to guide the improvement of the product manufacturing process and improve the product production yield.

[0037] like Figure 1 , Figure 2 and Figure 3As shown, furthermore, when the clamping module 200 holding the test sample 20 moves to the first detection position, the second detection position, and the third detection position, the defective position of the test sample 20 is always located within the detection space of the scanning electron microscope. Thus, by planning and designing the movement path of the clamping module 200, it can be ensured that when observing the front 21, back 22, and side 23 of the test sample 20, the defective position of the test sample 20 is always located within the detection space of the scanning electron microscope, eliminating the need for significant recalibration of the focal length or changes in the field of view, thereby improving the practicality of the clamping device 10.

[0038] like Figure 4 As shown, optionally, the mounting body 100 is provided with a semi-annular guide portion 110. The clamping module 200 is located inside the guide portion 110 and cooperates with the guide portion 110 to guide its movement to the first detection position, the second detection position, and the third detection position. In this way, the guide portion 110 can guide and limit the clamping module 200, ensuring that the clamping module 200 can stably and reliably switch between the first detection position, the second detection position, and the third detection position, thereby improving the reliability of the clamping device 10.

[0039] The guide portion 110 can be configured as a guide rail, guide groove, or other guiding structure. The number of guide portions 110 can be flexibly adjusted according to actual usage needs. Specifically, in this embodiment, the guide portion 110 can be configured as a semi-circular ring or a semi-square ring. There is one guide portion 110. When the clamping module 200 moves to one end of the guide portion 110, the position of the clamping module 200 is the first detection position. When the clamping module 200 moves to the other end of the guide portion 110, the position of the clamping module 200 is the second detection position. When the clamping module 200 moves to the center of the guide portion 110, the position of the clamping module 200 is the third detection position.

[0040] like Figure 4 As shown, in one embodiment, the top of the mounting body 100 is provided with a movable groove 120. A guide portion 110 is disposed on the inner wall of the movable groove 120 and extends circumferentially along the movable groove 120. In this way, the clamping module 200 is hidden inside the mounting body 100, so that the mounting body 100 can protect the clamping module 200, thereby reducing the risk of interference between the clamping module 200 and the test sample 20 clamped on the clamping module 200 and external objects, and improving the reliability of the clamping device 10.

[0041] like Figure 4As shown, optionally, the inner wall of the movable groove 120 is an arc surface. The guide portion 110 is configured as a slide rail. Both ends of the slide rail and the axis of the arc surface are located on the same horizontal plane. Thus, when the clamping module 200 moves to one end of the slide rail, the clamping module 200 is in the first detection position. When the clamping module 200 moves to the other end of the slide rail, the clamping module 200 is in the second detection position. When the clamping module 200 moves to the lowest point of the slide rail, the clamping module 200 is in the third detection position.

[0042] like Figure 1 and Figure 4 As shown, optionally, the inner wall of the movable groove 120 is also provided with at least one marking portion 130. Each marking portion 130 is used to mark the position of the clamping module 200 relative to the mounting body 100. In this way, the marking portion 130 can identify the position of the clamping module 200 relative to the mounting body 100, so that the clamping module 200 can be moved quickly and accurately to the designated position, improving the practicality of the clamping device 10.

[0043] The marking portion 130 can be configured as a marking scale, a marking protrusion, a marking groove, or other structure capable of marking the position of the clamping module 200 relative to the mounting body 100. Specifically, in this embodiment, the marking portion 130 is configured as a marking scale, with each marking scale spaced circumferentially along the movable groove 120.

[0044] like Figure 1 and Figure 5 As shown, in one embodiment, the clamping module 200 includes a movable member 210 and a clamping mechanism 220 mounted on the movable member 210. The movable member 210 is movably engaged with the mounting body 100. In this way, the edge of the test sample 20 is clamped by clamping, ensuring that the surface of the test sample 20 is not damaged, and improving the reliability of the clamping device 10.

[0045] The movable member 210 can be controlled to move on the guide portion 110 (e.g., the movable member 210 is configured as a slider that slides with the guide portion 110), or it can move on the guide portion 110 automatically (e.g., the movable member 210 is configured as a drive trolley mounted on the guide portion 110). The clamping mechanism 220 can be configured as any structure in the prior art capable of clamping the test sample 20.

[0046] like Figure 5As shown, the clamping mechanism 220 further includes a first clamping member 221 mounted on the movable member 210, a second clamping member 222 located on one side of the first clamping member 221, and a locking assembly. The locking assembly is configured to fix the first clamping member 221 and the second clamping member 222 when they cooperate to clamp the test sample 20. Thus, the second clamping member 222 can move relative to the first clamping member 221, making the distance between the second clamping member 222 and the first clamping member 221 adjustable to accommodate test samples 20 of different thicknesses, thereby improving the practicality of the clamping device 10.

[0047] like Figure 5 As shown, optionally, the first clamping member 221 has a first mounting through hole. The second clamping member 222 has a second mounting through hole corresponding to the first mounting through hole. The locking assembly includes a bolt 223, a nut 224, and an elastic member 225. The bolt 223 passes through the first mounting through hole and the second mounting through hole and is threadedly connected to the nut 224. The elastic member 225 is located on one side of the second clamping member 222 and is sleeved on the bolt 223. The elastic member 225 is used to apply an elastic force to the second clamping member 222. In this way, the elastic member 225 can buffer the clamping force applied by the second clamping member 222, ensuring that while the second clamping member 222 and the first clamping member 221 cooperate to clamp the test sample 20, the test sample 20 will not be damaged, thus improving the reliability of the clamping device 10.

[0048] The elastic element 225 can be configured as an elastic washer, spring, or other elastic structure. Specifically, in this embodiment, the first clamping element 221 is configured as a fixed clamping plate, the second clamping element 222 is configured as a movable clamping plate, and the elastic element 225 is configured as a spring, located between the movable clamping plate and the fixed clamping plate. In other embodiments, the elastic element 225 can also be located between the second clamping element 222 and the head of the bolt 223 (in which case the nut 224 is located on the side of the first clamping element 221 away from the second clamping element 222).

[0049] like Figure 5 As shown, optionally, one of the first clamping member 221 and the second clamping member 222 is provided with a guide hole, and the other is provided with a guide rod 226. The guide hole extends along the direction of the second clamping member 222 towards or away from the first clamping member 221. The guide rod 226 passes through the guide hole and is guided and engaged with the inner wall of the guide hole. In this way, the guide rod 226 can engage with the guide hole to guide the second clamping member 222, ensuring that the second clamping member 222 moves stably and reliably along the direction of approaching or away from the first clamping member 221, thereby improving the reliability of the clamping device 10.

[0050] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0051] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0052] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0053] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0054] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0055] It should also be understood that, in interpreting the connection or positional relationships of components, although not explicitly described, connection and positional relationships are interpreted to include a range of error, which should be within the acceptable deviation range of a specific value as determined by a person skilled in the art. For example, "approximately," "about," or "substantially" can mean within one or more standard deviations, without limitation herein.

[0056] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A clamping device, applied to a foreign matter detection system on the surface of a battery cell, characterized in that, include: Install the main body (100); The clamping module (200) is movably mounted on the mounting body (100) and has a first detection position, a second detection position and a third detection position. The clamping module (200) is used to clamp the test sample (20). When the clamping module (200) holding the test sample (20) moves to the first detection position, the front (21) of the test sample (20) faces upward; When the clamping module (200) holding the test sample (20) moves to the second detection position, the back (22) of the test sample (20) faces upward; when the clamping module (200) holding the test sample (20) moves to the third detection position, the side (23) of the test sample (20) faces upward.

2. The clamping device according to claim 1, characterized in that, The mounting body (100) is provided with a semi-circular guide portion (110), and the clamping module (200) is located inside the guide portion (110) and cooperates with the guide portion (110) to guide movement to the first detection position, the second detection position and the third detection position.

3. The clamping device according to claim 2, characterized in that, The top of the mounting body (100) is provided with a movable groove (120), and the guide part (110) is disposed on the inner wall of the movable groove (120) and extends circumferentially along the movable groove (120).

4. The clamping device according to claim 3, characterized in that, The inner wall of the movable groove (120) is an arc surface, and the guide part (110) is set as a slide rail. The two ends of the slide rail and the axis of the arc surface are all located on the same horizontal plane.

5. The clamping device according to claim 3, characterized in that, The inner wall of the movable groove (120) is also provided with at least one marking part (130), each of the marking parts (130) being used to mark the position of the clamping module (200) relative to the mounting body (100).

6. The clamping device according to any one of claims 1 to 5, characterized in that, The clamping module (200) includes a movable part (210) and a clamping mechanism (220) mounted on the movable part (210), wherein the movable part (210) is movablely engaged with the mounting body (100).

7. The clamping device according to claim 6, characterized in that, The clamping mechanism (220) includes a first clamping member (221) mounted on the movable member (210), a second clamping member (222) located on one side of the first clamping member (221), and a locking assembly configured to fix the first clamping member (221) and the second clamping member (222) when the first clamping member (221) and the second clamping member (222) cooperate to clamp the test sample (20).

8. The clamping device according to claim 7, characterized in that, The first clamping member (221) is provided with a first mounting through hole, and the second clamping member (222) is provided with a second mounting through hole corresponding to the first mounting through hole. The locking assembly includes a bolt (223), a nut (224), and an elastic member (225). The bolt (223) passes through the first mounting through hole and the second mounting through hole and is threadedly connected to the nut (224). The elastic member (225) is located on one side of the second clamping member (222) and is sleeved on the bolt (223). The elastic member (225) is used to apply an elastic force to the second clamping member (222). And / or, one of the first clamping member (221) and the second clamping member (222) is provided with a guide hole, and the other is provided with a guide rod (226). The guide hole extends along the direction of the second clamping member (222) toward or away from the first clamping member (221). The guide rod (226) passes through the guide hole and is guided and engaged with the inner wall of the guide hole.

9. A system for detecting foreign matter on the surface of a battery cell, characterized in that, The device includes a stage, a scanning electron microscope (SEM), and a clamping device (10) as described in any one of claims 1 to 8, wherein the SEM and the clamping device (10) are both mounted on the stage, and the SEM is configured to test and analyze the morphology of defective locations of the test sample (20) when the clamping device (10) clamps the test sample (20).

10. The foreign matter detection system for battery cell surface according to claim 9, characterized in that, When the clamping module (200) holding the test sample (20) moves to the first detection position, the second detection position and the third detection position respectively, the defective position of the test sample (20) is located within the detection space of the scanning electron microscope.