Reticle clamping device and reticle measuring apparatus

Abstract

The utility model mainly relates to the mask technology field especially, and particularly to mask clamping device and mask measuring equipment, wherein, mask clamping device includes installation base, clamping subassembly includes four clamping subassembly, four clamping subassembly jointly enclose and form the accommodation space, clamping subassembly can move up and down relative to installation base, clamping subassembly includes telescopic structural member, clamping structural member and elastic buffer, clamping structural member still includes the clamping part for abutting mask side and the horizontal setting and is used for the support of mask's support plate, the elastic buffer is located between the movable end with clamping structural member, detection subassembly is used for detecting whether mask is in horizontal state. Based on the structure design of the utility model, this mask clamping device can clamp the mask of non-standard size, and let mask measuring equipment can also measure the mask of non-standard size.

Description

Technical Field

[0001] This utility model mainly relates to the field of mask technology, and in particular to a mask clamping device and a mask measuring equipment. Background Technology

[0002] Currently, for the positioning and measurement of photomasks, the photomask needs to be placed on a photomask measuring device (the photomask measuring device is used to measure the mask image on the photomask). However, the photomask clamping devices currently available for photomask measuring devices are only suitable for fixed standard-sized photomasks, and lack clamping for non-standard-sized photomasks, making the measurement of non-standard-sized photomasks quite inconvenient. Utility Model Content

[0003] The purpose of this invention is to address the shortcomings of existing technologies by providing a mask clamping device and a mask measuring device.

[0004] This utility model provides a mask clamping device, comprising:

[0005] Mounting base;

[0006] The clamping assembly includes four clamping components arranged in a circular array and centrally symmetrically positioned. The four clamping components together enclose a placement space. The clamping components are capable of moving up and down relative to the mounting base. Each clamping assembly includes a telescopic structural member, a clamping structural member, and an elastic buffer member. The telescopic structural member is telescopic and has a fixed end and a movable end. The fixed end is fixed to the mounting base. The telescopic structural member is used to drive the clamping structural member to reciprocate towards the placement space. The clamping structural member is capable of sliding relative to the movable end. The clamping structural member also includes a clamping abutment for abutting against the periphery of the mask and a horizontally arranged support plate for supporting the mask. The elastic buffer member is located between the movable end and the clamping structural member and drives the clamping structural member to move towards the placement space under the action of elastic restoring force.

[0007] A detection component is mounted on the mounting base and is used to detect whether the mask is in a horizontal position.

[0008] Optionally, the clamping part includes a transverse clamping strip and a longitudinal clamping strip arranged perpendicularly to each other and connected to each other. The transverse clamping strip is used to clamp and push one side of the mask, and the longitudinal clamping strip is used to clamp and push the other side of the mask.

[0009] Optionally, the transverse clamping bar and the longitudinal clamping bar are provided with the support plate.

[0010] Optionally, the support plate and the clamping part are integrally formed.

[0011] Optionally, the support plate can move up and down relative to the clamping part.

[0012] Optionally, the clamping structure and the movable end are slidably engaged via a slide rail slider structure;

[0013] The elastic buffer is a spring, with its two ends connected to the movable end and the clamping structure, respectively.

[0014] Optionally, the horizontal detection component includes a first laser detection structure and a second laser detection structure. The first laser detection structure includes a first infrared laser emitter and a first infrared laser receiver. The laser emitted by the first infrared laser emitter can reach the first infrared laser receiver through the placement space. The second laser detection structure includes a second infrared laser emitter and a second infrared laser receiver. The laser emitted by the second infrared laser emitter can reach the second infrared laser receiver through the placement space. The lasers emitted by the first infrared laser emitter and the lasers emitted by the second infrared laser emitter are arranged alternately.

[0015] Optionally, the laser emitted by the first infrared laser emitter and the laser emitted by the second infrared laser emitter are arranged perpendicular to each other.

[0016] This utility model also provides a mask measuring device, including the mask clamping device described above.

[0017] In use, firstly, the mask is placed in the placement space. Secondly, all four telescopic structural components extend, driving the corresponding clamping structural components to move into the placement space until each clamping structural component clamps the mask and gradually adjusts the mask's posture to the preset posture. During this process, the travel range of the clamping structural components is the adjustable range of the placement space, achieving non-standard compatibility. The elastic buffer provides flexible compensation to prevent damage to the mask during clamping. Thirdly, the clamping components move up and down relative to the mounting base to adjust the horizontal position of the mask so that the upper surface of the mask reaches the preset position. Finally, the detection component checks whether the mask is in a horizontal state to ensure that the mask is placed horizontally on the mask measuring device along with the mask clamping device.

[0018] Based on the structural design of this utility model, the mask clamping device can clamp non-standard sized masks, and also allows mask measuring equipment to measure non-standard sized masks. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a perspective view of the mask clamping device provided in an embodiment of the present invention;

[0021] Figure 2 yes Figure 1 A magnified structural diagram of A in the diagram.

[0022] Explanation of icon numbers:

[0023] label name label name 100 Mounting base 210 Clamping components 211 Scalable structural components 212 Clamping structure 2121 lateral clamping bar 2122 Longitudinal clamping bar 213 support plate Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining this utility model and are not intended to limit this utility model.

[0025] It should also be noted that, in the embodiments of the present invention, according to Figure 1 The XYZ rectangular coordinate system established in the system is defined as follows: the side located in the positive direction of the X-axis is defined as the front, and the side located in the negative direction of the X-axis is defined as the back; the side located in the positive direction of the Y-axis is defined as the left, and the side located in the negative direction of the Y-axis is defined as the right; the side located in the positive direction of the Z-axis is defined as the top, and the side located in the negative direction of the Z-axis is defined as the bottom.

[0026] This utility model embodiment provides a mask clamping device.

[0027] Please see Figure 1 and Figure 2 The mask clamping device includes a mounting base 100 and a clamping assembly 210.

[0028] The mounting base 100 can be made of mold steel, which has high mechanical strength and is not easily damaged.

[0029] The clamping assembly 210 includes four clamping assemblies 210 arranged in a circular array and centrally symmetrically. The four clamping assemblies 210 together enclose a placement space. The clamping assemblies 210 can move up and down relative to the mounting base 100. The clamping assembly 210 includes a telescopic structural member 211, a clamping structural member 212, and an elastic buffer member. The telescopic structural member 211 can extend and retract, and has a fixed end and a movable end. The fixed end is fixed to the mounting base 100. The telescopic structural member 211 is used to drive the clamping structural member 212 to reciprocate to the placement space. The clamping structural member 212 can slide relative to the movable end. The clamping structural member 212 also includes a clamping part for abutting against the periphery of the mask and a horizontally arranged support plate 213 for supporting the mask. The elastic buffer member is disposed between the movable end and the clamping structural member 212, and drives the clamping structural member 212 to move to the placement space under the action of elastic restoring force.

[0030] The detection component is mounted on the mounting base 100 and is used to detect the horizontal position of the mask and whether it is in a horizontal state.

[0031] In use, firstly, the mask is placed in the placement space. Secondly, all four telescopic structural members 211 extend, driving the corresponding clamping structural members 212 to move into the placement space until each clamping structural member 212 clamps the mask and gradually adjusts the mask's posture to a preset posture. During this process, the travel range of the clamping structural members 212 is the adjustable range of the placement space, achieving non-standard compatibility. The elastic buffer provides flexible compensation to prevent damage to the mask during clamping. Thirdly, the clamping assembly 210 moves up and down relative to the mounting base 100 to adjust the horizontal position of the mask so that the upper surface of the mask reaches a preset position. Finally, the detection component checks whether the mask is in a horizontal state to ensure that the mask is placed horizontally on the mask measuring device along with the mask clamping device.

[0032] Based on the structural design of this utility model, the mask clamping device can clamp non-standard sized masks, and also allows mask measuring equipment to measure non-standard sized masks.

[0033] Please see Figure 1 and Figure 2 In this embodiment of the utility model, the clamping part includes a transverse clamping bar 2121 and a longitudinal clamping bar 2122 that are perpendicularly arranged and connected to each other. The transverse clamping bar 2121 is used to clamp and push one side of the mask, and the longitudinal clamping bar 2122 is used to clamp and push the other side of the mask.

[0034] Based on this, firstly, the transverse clamping strip 2121 and the longitudinal clamping strip 2122 are arranged perpendicularly to each other to form a right-angle limiting frame, which enables the mask to achieve precise positioning in two orthogonal directions in the horizontal plane. This decomposes the thrust from the telescopic structural member 211 into a closed force system that completely constrains the mask's degrees of freedom, preventing rotation or slippage. Secondly, this structure also helps to simplify the structure and reduce space occupation.

[0035] Please see Figure 1 and Figure 2 In this embodiment of the invention, the transverse clamping bar 2121 and the longitudinal clamping bar 2122 are provided with a support plate 213. Based on this, during the clamping process, the support plate 213 and the clamping bar move forward and backward synchronously, and their movement relationship is consistent.

[0036] In this embodiment of the invention, the support plate 213 and the clamping part are integrally formed. This integrated design reduces the number of parts, shrinks the overall size, and improves structural rigidity.

[0037] In other embodiments of this utility model, the support plate 213 can move up and down relative to the clamping part. The support plate 213 can be raised and lowered independently, decoupled from the horizontal clamping action of the clamping part. For non-standard masks of different thicknesses or with warping, the support plate 213 can first flatten the bottom surface of the mask, and then the clamping part can complete the lateral clamping, avoiding local stress concentration caused by one-time clamping.

[0038] Please see Figure 1 In this embodiment of the utility model, the horizontal detection component includes a first laser detection structure and a second laser detection structure. The first laser detection structure includes a first infrared laser emitter and a first infrared laser receiver. The laser emitted by the first infrared laser emitter can reach the first infrared laser receiver through the placement space. The second laser detection structure includes a second infrared laser emitter and a second infrared laser receiver. The laser emitted by the second infrared laser emitter can reach the second infrared laser receiver through the placement space. The lasers emitted by the first infrared laser emitter and the lasers emitted by the second infrared laser emitter are arranged alternately.

[0039] Based on this, when the mask is clamped, if the surface is tilted or shifted, it will block the first infrared laser receiver and / or the second infrared laser receiver from receiving the laser, thus allowing for quick detection of whether the mask is placed horizontally.

[0040] Specifically, in this embodiment of the invention, the laser emitted by the first infrared laser emitter and the laser emitted by the second infrared laser emitter are arranged perpendicularly to each other. The orthogonal beams form a cross-shaped reference line on the surface of the mask, visually reflecting the center and rotational error of the mask.

[0041] This utility model also proposes a mask measuring device, which includes a mask clamping device. The specific structure of the mask clamping device is as described in the above embodiments. Since this mask measuring device adopts all the technical solutions of all the above embodiments, it also has all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0042] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions or improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A mask clamping device, characterized in that, include: Mounting base; The clamping assembly includes four clamping components arranged in a circular array and centrally symmetrically positioned. The four clamping components together enclose a placement space. The clamping components are capable of moving up and down relative to the mounting base. Each clamping assembly includes a telescopic structural member, a clamping structural member, and an elastic buffer member. The telescopic structural member is telescopic and has a fixed end and a movable end. The fixed end is fixed to the mounting base. The telescopic structural member is used to drive the clamping structural member to reciprocate towards the placement space. The clamping structural member is capable of sliding relative to the movable end. The clamping structural member also includes a clamping abutment for abutting against the periphery of the mask and a horizontally arranged support plate for supporting the mask. The elastic buffer member is located between the movable end and the clamping structural member and drives the clamping structural member to move towards the placement space under the action of elastic restoring force. A detection component is mounted on the mounting base and is used to detect whether the mask is in a horizontal position.

2. The mask clamping device as described in claim 1, characterized in that, The clamping part includes a transverse clamping bar and a longitudinal clamping bar that are perpendicular to each other and connected to each other. The transverse clamping bar is used to clamp and push one side of the mask, and the longitudinal clamping bar is used to clamp and push the other side of the mask.

3. The mask clamping device as described in claim 1, characterized in that, The transverse clamping strip and the longitudinal clamping strip are provided with the support plate.

4. The mask clamping device as described in claim 1, characterized in that, The support plate and the clamping part are integrally formed.

5. The mask clamping device as described in claim 1, characterized in that, The support plate can move up and down relative to the clamping part.

6. The mask clamping device as described in claim 1, characterized in that, The clamping structure and the movable end are slidably engaged by a slide rail slider structure. The elastic buffer is a spring, with its two ends connected to the movable end and the clamping structure, respectively.

7. The mask clamping device as described in claim 1, characterized in that, The horizontal detection component includes a first laser detection structure and a second laser detection structure. The first laser detection structure includes a first infrared laser emitter and a first infrared laser receiver. The laser emitted by the first infrared laser emitter can reach the first infrared laser receiver through the placement space. The second laser detection structure includes a second infrared laser emitter and a second infrared laser receiver. The laser emitted by the second infrared laser emitter can reach the second infrared laser receiver through the placement space. The lasers emitted by the first infrared laser emitter and the lasers emitted by the second infrared laser emitter are arranged alternately.

8. The mask clamping device as described in claim 7, characterized in that, The laser emitted by the first infrared laser emitter and the laser emitted by the second infrared laser emitter are set perpendicular to each other.

9. A mask measuring device, characterized in that, Includes the mask clamping device according to any one of claims 1-8.

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