Probe card connector

Abstract

The present disclosure provides a probe card connector for electrically connecting with a testing machine through a plurality of first electric connecting lines and electrically connecting with a probe card through a plurality of second electric connecting lines. The probe card connector includes a row pin, a testing machine interface and a device under test interface. The row pin includes a fixing member and a plurality of electric connecting members. A portion of each of the electric connecting members is disposed in the fixing member, and a first end and a second end of each of the electric connecting members extend outwardly from the fixing member in opposite directions. The testing machine interface includes a plurality of first slots for respectively detachably connecting with a plurality of the first ends of the electric connecting members. The device under test interface includes a plurality of second slots for respectively detachably connecting with a plurality of the second ends of the electric connecting members. The electric connecting members are respectively electrically coupled to the first electric connecting lines and respectively electrically coupled to the second electric connecting lines.

Description

Technical Field

[0001] This disclosure relates to a probe card connector. More particularly, it relates to a probe card connector with a pin header. Background Technology

[0002] When using probe cards to test devices under test (DUTs), probes and / or testing equipment may need to be frequently replaced depending on the DUT's specifications and testing requirements. Therefore, the connection between the probe card and the testing equipment may undergo multiple insertions and removals. With frequent replacement of multiple devices, the reliability of the interface between the testing equipment and the DUT may decrease over time. Therefore, maintaining the stability and reliability of multiple connections has become an important issue in this field.

[0003] The above "Background Art" description is merely to provide background information and does not constitute an admission that the above "Background Art" description discloses the subject matter of this disclosure. It does not constitute background information for this disclosure, and no description of the above "Background Art" description should be considered part of this case. Utility Model Content

[0004] In view of this, in order to solve the problems of the prior art, the purpose of this disclosure is to provide a probe card connector.

[0005] One embodiment of this disclosure provides a probe card connector for electrically connecting to a testing machine via a plurality of first electrical connection lines and electrically connecting to a probe card via a plurality of second electrical connection lines. The probe card connector includes a pin header, a testing machine interface, and a test object interface. The pin header includes a fixing member and a plurality of electrical connectors. A portion of each electrical connector is disposed in the fixing member, and a first end and a second end of each electrical connector extend outward from the fixing member in opposite directions. The testing machine interface includes a plurality of first slots, each for detachably connecting to a plurality of the first ends of the plurality of electrical connectors. The test object interface includes a plurality of second slots, each for detachably connecting to a plurality of the second ends of the plurality of electrical connectors. The plurality of electrical connectors are electrically coupled to a plurality of the first electrical connection lines and electrically coupled to a plurality of the second electrical connection lines.

[0006] One embodiment of this disclosure provides a probe card connector for electrical connection to a testing machine via a plurality of first electrical connection lines. The probe card connector includes a pin header and a testing machine interface. The pin header includes a retainer and a plurality of electrical connectors. A portion of each electrical connector is disposed in the retainer, and a first end and a second end of each electrical connector extend outward from the retainer in opposite directions. The testing machine interface includes a plurality of first slots, each for detachable connection to the first ends of the plurality of electrical connectors. The plurality of electrical connectors are electrically coupled to a plurality of the first electrical connection lines.

[0007] One embodiment of this disclosure provides a probe card connector for electrical connection to a probe card via a plurality of second electrical connection lines. The probe card connector includes a pin header and a test object interface. The pin header includes a retainer and a plurality of electrical connectors. A portion of each electrical connector is disposed within the retainer, and a first end and a second end of each electrical connector extend outward from the retainer in opposite directions. The test object interface includes a plurality of second slots, each for detachably connecting to a plurality of the first ends of the plurality of electrical connectors. The plurality of electrical connectors are electrically coupled to a plurality of the second electrical connection lines.

[0008] Accordingly, the reliability of the tester interface and / or the test object interface can be improved due to the probe card connector disclosed herein.

[0009] The foregoing has provided a fairly broad overview of the technical features and advantages of this disclosure, enabling a better understanding of the detailed description that follows. Other technical features and advantages constituting the subject matter of the claims will be described below. Those skilled in the art to which this disclosure pertains will understand that the concepts and specific embodiments disclosed below can be readily utilized to achieve the same purpose as this disclosure through modifications or design of other structures or processes. Those skilled in the art will also understand that such equivalent constructions cannot depart from the spirit and scope of this disclosure as defined by the appended claims. Attached Figure Description

[0010] A more complete understanding of the disclosure of this application can be obtained by referring to the accompanying drawings in conjunction with the embodiments and claims, wherein the same element symbols in the drawings refer to the same elements.

[0011] Figure 1 This is a schematic diagram of a probe card connector according to some embodiments of this disclosure.

[0012] Figure 2A and Figure 2B This is a schematic diagram of a probe card connector according to some embodiments of this disclosure.

[0013] Figure 3A and Figure 3B This is a schematic diagram of a probe card connector according to some embodiments of this disclosure.

[0014] Figure 4A This is a cross-sectional view of the test machine interface of some embodiments of this disclosure.

[0015] Figure 4B This is a cross-sectional view of the interface of the object under test according to some embodiments of this disclosure.

[0016] Figure 5A and Figure 5B This is a schematic diagram of the test machine interface of some embodiments of this disclosure.

[0017] Figure 6A and Figure 6B This is a schematic diagram of the interface of the device under test according to some embodiments of this disclosure.

[0018] Figure 7A , Figure 7B and Figure 7C This is a cross-sectional view of the pin header according to some embodiments of this disclosure.

[0019] Figure 8A and Figure 8B This is a schematic diagram of the pin header according to some embodiments of this disclosure.

[0020] The annotations in the attached figures are explained as follows:

[0021] 100: Testing Machine

[0022] 1000: Probe Card Connector

[0023] 2000: Probe Card Connector

[0024] 21: Test machine interface

[0025] 211: First electrical connection line

[0026] 2111: First signal line

[0027] 2113: First grounding wire

[0028] 213: First tank

[0029] 215: First Guide Component

[0030] 217: Clamping structure

[0031] 218: Shell

[0032] 219: Connection Interface

[0033] 23: Probe Card Interface

[0034] 231: Second electrical connection line

[0035] 2311: Second signal line

[0036] 2313: Second grounding wire

[0037] 233: Second tank

[0038] 235: Second guide

[0039] 237: Clamping structure

[0040] 238: Shell

[0041] 239: Connection Interface

[0042] 25: Pin header

[0043] 251: Fastener

[0044] 253: Electrical connectors

[0045] 2531: First End

[0046] 2532: Second End

[0047] 300: Probe Card

[0048] 3000: Probe Card Connector

[0049] 301: Probe

[0050] CA: Chamfer

[0051] D1: Depth

[0052] D2: Depth

[0053] L1: Length

[0054] L2: Length

[0055] RA: Arc-shaped end face

[0056] RT: Test Results

[0057] St: Test signal

[0058] Sr: Reaction signal

[0059] θ: Angle. Detailed Implementation

[0060] The following description of this disclosure, accompanied by the accompanying drawings which are incorporated in and form part of this specification, illustrates embodiments of the disclosure; however, the disclosure is not limited to these embodiments. Furthermore, the following embodiments may be appropriately integrated to complete another embodiment.

[0061] Terms such as "an embodiment," "an embodiment," "an exemplary embodiment," "another embodiment," and "another embodiment" refer to embodiments described in this disclosure that may include specific features, structures, or characteristics; however, not every embodiment must include the specific features, structures, or characteristics. Furthermore, repeated use of the phrase "in an embodiment" does not necessarily refer to the same embodiment, but may refer to the same embodiment.

[0062] To enable a full understanding of this disclosure, the following description provides detailed steps and structures. It is obvious that implementation of this disclosure does not limit the specific details known to those skilled in the art. Furthermore, known structures and steps are not detailed further to avoid unnecessarily limiting this disclosure. Preferred embodiments of this disclosure are detailed below. However, in addition to the detailed description, this disclosure can also be widely implemented in other embodiments. The scope of this disclosure is not limited to the detailed description, but is defined by the claims.

[0063] It should be understood that the following disclosure provides numerous different embodiments or examples for implementing various features of this disclosure. Specific embodiments or examples of components and arrangements are described below to simplify this disclosure. Of course, the following disclosure is merely illustrative and not intended to be limiting. For example, the dimensions of elements are not limited to the disclosed range or values, but may depend on process conditions and / or the desired properties of the apparatus. Furthermore, the description below of a first feature being formed "on" or "on" a second feature may include embodiments where the first and second features are formed in direct contact, and may also include embodiments where additional features may be formed between the first and second features, thereby potentially preventing direct contact between the first and second features. For simplicity and clarity, various features may be drawn at any scale. In the drawings, some layers / features may be omitted for simplicity.

[0064] Furthermore, for ease of explanation, spatial relative terms such as "beneath," "below," "lower," "above," and "upper" may be used herein to describe the relationship between one element or feature shown in the figures and another (other) element or feature. These spatial relative terms are intended to encompass not only the orientation shown in the figures but also different orientations of the elements during use or operation. The device may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein can be interpreted accordingly.

[0065] Figure 1 This is a schematic diagram of a probe card connector 1000 according to some embodiments of the present disclosure. The probe card connector 1000 is used to electrically connect the tester 100 and the probe card 300. The tester 100 generates a test signal St to the probe card 300, enabling the probe card 300 to transmit the test signal St to the device under test (DUT). The DUT responds to the test signal St by generating a reaction signal Sr, and the probe card 300 receives the reaction signal Sr and transmits it to the tester 100. The tester 100 receives and analyzes the reaction signal Sr to generate a test result RT.

[0066] The probe card connector 1000 includes a tester interface 21, a probe card interface 23, and a pin header 25. In some embodiments, the tester interface 21 is a connection interface on the tester 100, and the probe card interface 23 is a connection interface on the probe card 300. The probe card 300 has a plurality of probes 301. The pin header 25 is used to electrically connect the tester interface 21 and the probe card interface 23.

[0067] The tester interface 21 includes multiple first electrical connection lines 211. The probe card interface 23 includes multiple second electrical connection lines 231. The probe card connector 1000 is used to electrically connect to the tester 100 via the multiple first electrical connection lines 211 and to the multiple probes 301 via the multiple second electrical connection lines 231.

[0068] The pin header 25 includes a retainer 251 and a plurality of electrical connectors 253. A portion of each of the plurality of electrical connectors 253 is disposed within the retainer 251, and a first end 2531 and a second end 2532 of each of the plurality of electrical connectors 253 extend outward from the retainer 251 in opposite directions. For example... Figure 1 As shown, an electrical connector 253 is disposed through a retainer 251. In some embodiments, the retainer 251 is used to provide stress to the electrical connector 253, so that the electrical connector 253 can be secured in the retainer 251. In some embodiments, each electrical connector 253 can be individually detached from the retainer 251, so that each electrical connector 253 can be replaced individually in case of malfunction. In some embodiments, each of the plurality of electrical connectors 253 has the same shape. In some embodiments, the portion of each of the plurality of electrical connectors 253 protruding from the retainer 251 (i.e., the first end 2531 and the second end 2532) is of the same length. In other embodiments, the portion of each of the plurality of electrical connectors 253 protruding from the retainer 251 (i.e., the first end 2531 and the second end 2532) may be of different lengths. In some embodiments, the plurality of electrical connectors 253 are arranged in a matrix. In some embodiments, the plurality of electrical connectors 253 are arranged parallel to each other. In some embodiments, each of the plurality of electrical connectors 253 is of the same length.

[0069] The test interface 21 also includes a plurality of first slots 213. The plurality of first slots 213 are respectively used to be detachably connected to the plurality of electrical connectors 253. Specifically, the test interface 21 and the pin header 25 are detachably connected; when the test interface 21 and the pin header 25 are connected, the plurality of first slots 213 are respectively used to receive the plurality of first ends 2531 of the plurality of electrical connectors 253. Because the test interface 21 and the pin header 25 need to be assembled or disassembled to meet testing requirements, the connection between the test interface 21 and the pin header 25 needs to be easily plugged in and out.

[0070] The tester interface 21 also includes a connection interface 219. The connection interface 219 is used to electrically couple a plurality of the first electrical connection lines 211 to the tester 100.

[0071] The device under test (DUT) interface 23 also includes a plurality of second slots 233. The plurality of second slots 233 are respectively used for detachable connection with a plurality of electrical connectors 253. Specifically, the DUT interface 23 and the pin header 25 are detachably connected; when the DUT interface 23 is connected to the pin header 25, the plurality of second slots 233 are respectively used to receive a plurality of second ends 2532 of the plurality of electrical connectors 253. Because the DUT interface 23 and the pin header 25 need to be assembled or disassembled to meet testing requirements, the connection between the DUT interface 23 and the pin header 25 needs to be easily plugged in and out.

[0072] The test interface 23 also includes a connection interface 239. The connection interface 239 is used to electrically couple a plurality of the second electrical connection lines 231 to the probe card 300.

[0073] Through the connection of multiple electrical connectors 253 in the pin header 25, multiple first electrical connection lines 211 are electrically coupled to multiple second electrical connection lines 231 respectively.

[0074] It should be noted that because the multiple electrical connectors 253 of the pin header 25 each have a first end 2531 and a second end 2532 protruding from the fixing member 251, both the test machine interface 21 and the device under test interface 23 use recessed grooves (i.e., the first groove 213 and the second groove 233) to receive the multiple electrical connectors 253. In other words, the test machine interface 21 and the device under test interface 23 provide female terminals, and the pin header 25 provides a double male terminal for connecting the test machine interface 21 and the device under test interface 23.

[0075] In some embodiments, the test machine interface 21 and the test object interface 23 are made of the same material. In some embodiments, the test machine interface 21 and the test object interface 23 have the same structure. In some embodiments, the test machine interface 21 and the test object interface 23 have the same shape.

[0076] It should be understood that, Figure 1 The number of the first slot 213, the second slot 233, the first electrical connection line 211 and the second electrical connection line 231 shown are for illustrative purposes only, and this disclosure is not limited thereto.

[0077] Figure 2AThis is a schematic diagram of a probe card connector 2000 according to some embodiments of the present disclosure. The probe card connector 2000 and the probe card connector 1000 contain similar elements, and for ease of understanding, similar elements are referred to by the same reference numerals.

[0078] The probe card connector 2000 is used for electrical connection to the tester 100. The tester 100 is used to generate a test signal St and receive a response signal Sr. In some embodiments, the response signal Sr is generated by a test object based on the received test signal St. The tester 100 is used to analyze the response signal Sr to generate a test result RT.

[0079] The probe card connector 2000 includes a tester interface 21 and pin headers 25. In some embodiments, the tester interface 21 is a connection interface on the tester 100. The pin headers 25 are used for electrical connection to the tester interface 21.

[0080] The tester interface 21 includes multiple first electrical connection lines 211. The probe card connector 2000 is used to electrically connect to the tester 100 via the multiple first electrical connection lines 211.

[0081] The pin header 25 includes a retainer 251 and a plurality of electrical connectors 253. A portion of each of the plurality of electrical connectors 253 is disposed within the retainer 251, and a first end 2531 and a second end 2532 of each of the plurality of electrical connectors 253 extend outward from the retainer 251 in opposite directions. For example... Figure 2A As shown, an electrical connector 253 is disposed through a retainer 251. In some embodiments, the retainer 251 is used to provide stress to the electrical connector 253, so that the electrical connector 253 can be secured in the retainer 251. In some embodiments, each electrical connector 253 can be individually detached from the retainer 251, so that each electrical connector 253 can be replaced individually in case of malfunction. In some embodiments, each of the plurality of electrical connectors 253 has the same shape. In some embodiments, the portion of each of the plurality of electrical connectors 253 protruding from the retainer 251 (i.e., the first end 2531 and the second end 2532) is of the same length. In other embodiments, the portion of each of the plurality of electrical connectors 253 protruding from the retainer 251 (i.e., the first end 2531 and the second end 2532) may be of different lengths. In some embodiments, the plurality of electrical connectors 253 are arranged in a matrix. In some embodiments, the plurality of electrical connectors 253 are arranged parallel to each other. In some embodiments, each of the plurality of electrical connectors 253 is of the same length.

[0082] The test interface 21 also includes a plurality of first slots 213. The plurality of first slots 213 are respectively used to be detachably connected to the plurality of electrical connectors 253. Specifically, the test interface 21 and the pin header 25 are detachably connected; when the test interface 21 and the pin header 25 are connected, the plurality of first slots 213 are respectively used to receive the plurality of first ends 2531 of the plurality of electrical connectors 253. Because the test interface 21 and the pin header 25 need to be assembled or disassembled to meet testing requirements, the connection between the test interface 21 and the pin header 25 needs to be easily plugged in and out.

[0083] The tester interface 21 also includes a connection interface 219. The connection interface 219 is used to electrically couple a plurality of the first electrical connection lines 211 to the tester 100.

[0084] It should be understood that, Figure 2A The number of the first tank 213 and the first electrical connection line 211 shown is for illustrative purposes only, and this disclosure is not limited thereto.

[0085] Figure 2B A schematic diagram illustrating the connection between the test machine interface 21 and the pin header 25 is shown. When the test machine interface 21 is connected to the pin header 25, the plurality of first electrical connection lines 211 are electrically coupled to the plurality of electrical connectors 253 respectively.

[0086] In some embodiments, when the test interface 21 is connected to the pin header 25, the first slot 213 still retains a portion of space, that is, the depth D1 of the first slot 213 is greater than the length L1 of the first end 2531. In some embodiments, when the test interface 21 is connected to the pin header 25, there is a gap G1 between the test interface 21 and the pin header 25. In other embodiments, when the test interface 21 is connected to the pin header 25, there is no gap between the test interface 21 and the pin header 25.

[0087] Figure 3A This is a schematic diagram of a probe card connector 3000 according to some embodiments of the present disclosure. The probe card connector 3000 and the probe card connector 1000 contain similar elements, and for ease of understanding, similar elements are referred to by the same reference numerals.

[0088] The probe card connector 3000 is used for electrical connection to the probe card 300. The probe card 300 is used to transmit a test signal St to the device under test (DUT). The DUT responds to the test signal St by generating a reaction signal Sr, and the probe card 300 receives the reaction signal Sr. In some embodiments, the reaction signal Sr is transmitted to a testing machine, and a test result is generated accordingly.

[0089] The probe card connector 3000 includes a probe card interface 23 and pin headers 25. In some embodiments, the probe card interface 23 is a connection interface on the probe card 300. The probe card 300 has a plurality of probes 301. The pin headers 25 are used for electrical connection to the probe card interface 23.

[0090] The probe card interface 23 includes multiple second electrical connection lines 231. The probe card connector 3000 is used to electrically connect to multiple probes 301 via the multiple second electrical connection lines 231.

[0091] The pin header 25 includes a retainer 251 and a plurality of electrical connectors 253. A portion of each of the plurality of electrical connectors 253 is disposed within the retainer 251, and a first end 2531 and a second end 2532 of each of the plurality of electrical connectors 253 extend outward from the retainer 251 in opposite directions. For example... Figure 3A As shown, an electrical connector 253 is disposed through a retainer 251. In some embodiments, the retainer 251 is used to provide stress to the electrical connector 253, so that the electrical connector 253 can be secured in the retainer 251. In some embodiments, each electrical connector 253 can be individually detached from the retainer 251, so that each electrical connector 253 can be replaced individually in case of malfunction. In some embodiments, each of the plurality of electrical connectors 253 has the same shape. In some embodiments, the portion of each of the plurality of electrical connectors 253 protruding from the retainer 251 (i.e., the first end 2531 and the second end 2532) is of the same length. In other embodiments, the portion of each of the plurality of electrical connectors 253 protruding from the retainer 251 (i.e., the first end 2531 and the second end 2532) may be of different lengths. In some embodiments, the plurality of electrical connectors 253 are arranged in a matrix. In some embodiments, the plurality of electrical connectors 253 are arranged parallel to each other. In some embodiments, each of the plurality of electrical connectors 253 is of the same length.

[0092] The device under test (DUT) interface 23 also includes a plurality of second slots 233. The plurality of second slots 233 are respectively used for detachable connection with a plurality of electrical connectors 253. Specifically, the DUT interface 23 and the pin header 25 are detachably connected; when the DUT interface 23 is connected to the pin header 25, the plurality of second slots 233 are respectively used to receive a plurality of second ends 2532 of the plurality of electrical connectors 253. Because the DUT interface 23 and the pin header 25 need to be assembled or disassembled to meet testing requirements, the connection between the DUT interface 23 and the pin header 25 needs to be easily plugged in and out.

[0093] The test interface 23 also includes a connection interface 239. The connection interface 239 is used to electrically couple a plurality of the second electrical connection lines 231 to the probe card 300.

[0094] It should be understood that, Figure 3A The number of the second tank 233 and the second electrical connection line 231 shown is for illustrative purposes only, and this disclosure is not limited thereto.

[0095] Figure 3B A schematic diagram illustrating the connection between the test object interface 23 and the pin header 25 is shown. When the test object interface 23 is connected to the pin header 25, multiple second electrical connection lines 231 are electrically coupled to multiple electrical connectors 253 respectively.

[0096] In some embodiments, when the device under test (DUT) interface 23 is connected to the pin header 25, the second groove 233 still retains a portion of space, that is, the depth D2 of the second groove 233 is greater than the length L2 of the second end 2532. In some embodiments, when the DUT interface 23 is connected to the pin header 25, there is a gap G2 between the DUT interface 23 and the pin header 25. In other embodiments, when the DUT interface 23 is connected to the pin header 25, there is no gap between the DUT interface 23 and the pin header 25.

[0097] Figure 4A and Figure 4B Cross-sectional views of the test machine interface 21 and the test object interface 23 are shown respectively. In some embodiments, the first groove 213 and the second groove 233 are arranged in a matrix.

[0098] The plurality of first slots 213 of the test machine interface 21 are arranged in at least two columns. For example... Figure 4A As shown, the plurality of first grooves 213 are arranged in two columns and three rows. The plurality of second grooves 233 of the test interface 23 are arranged in at least two columns. Figure 4B As shown, multiple second grooves 233 are arranged in two columns and three rows.

[0099] In some embodiments, the first groove 213 of the first column of the at least two columns is correspondingly disposed with the first groove 213 of the second column of the at least two columns. In some embodiments, the second groove 233 of the first column of the at least two columns is correspondingly disposed with the second groove 233 of the second column of the at least two columns.

[0100] Figure 5A This is a schematic diagram of the test machine interface 21 according to some embodiments of this disclosure. For the sake of simplicity, Figure 5A Some components are omitted.

[0101] The tester interface 21 further includes a plurality of first guides 215 respectively disposed in a plurality of first slots 213. In some embodiments, the first guides 215 are conductors. When the tester interface 21 is connected to the pin header 25, the plurality of first guides 215 are used to electrically connect the plurality of electrical connectors 253. The plurality of first guides 215 are used to provide stress to the plurality of electrical connectors 253, so that when the plurality of electrical connectors 253 are disposed in the plurality of first slots 213, they can be stressed to abut against the plurality of first guides 215.

[0102] In some embodiments, the first guide 215 is a resilient clamping structure.

[0103] In some embodiments, the first electrical connection line 211 is a coaxial cable and includes a first signal line 2111 and a first ground line 2113. First guides 215 disposed in the first slots 213 of the first column are electrically connected to the plurality of first signal lines 2111 of the plurality of first electrical connection lines 211, and the plurality of first guides 215 disposed in the first slots 213 of the second column are electrically connected to the plurality of first ground lines 2113 of the plurality of first electrical connection lines 211. In some embodiments, the first guides 215 are electrically connected to the first signal lines 2111 or the first ground lines 2113 by crimping. In some embodiments, the first guides 215 are electrically connected to the first signal lines 2111 or the first ground lines 2113 by soldering.

[0104] In some embodiments, at least one first guide 215 is part of the housing 218 of the test interface 21. In some embodiments, at least one first guide 215 is integrally formed with the housing 218. In some embodiments, the housing 218 is made of a conductive material. In some embodiments, the housing 218 of the test interface 21 is electrically connected to at least one first guide 215, and the at least one first guide 215 is electrically connected to a first ground wire 2113. Therefore, in this embodiment, the housing 218 of the test interface 21 is used for grounding. In other words, the housing 218, at least one first guide 215, and the first ground wire 2113 form a grounding layer. In this embodiment, an electrical connector 253 is provided on the first guide 215 used for grounding, and the test interface 21 can be electrically connected to the grounding terminal of the device under test interface 23 through the electrical connector 253.

[0105] In some embodiments, the plurality of first guides 215 and the housing 218 are independent components. In some embodiments, the plurality of first guides 215 and the housing 218 are electrically insulated.

[0106] In some embodiments, a portion of the electrical connectors 253 are idle, meaning the number of electrical connectors 253 is greater than the sum of the number of the first signal line 2111 and the first ground line 2113. In some embodiments, a portion of the electrical connectors 253 is electrically connected to the first electrical connection line 211, while another portion of the electrical connectors 253 is used to connect to a power supply line (not shown).

[0107] In some embodiments, the housing 218 and the plurality of first grounding wires 2113 have the same potential. In some embodiments, the housing 218 and the plurality of first grounding wires 2113 have a grounding potential.

[0108] In some embodiments, a portion (one or more) of a plurality of first guides 215 is used to electrically connect to a housing 218 and to connect a plurality of first ground wires 2113 through the housing 218; specifically, the plurality of first ground wires 2113 are directly contacted and connected to the housing 218, and the portion of the plurality of first guides 215 used for grounding is part of the housing 218 or integrally formed with the housing 218, and is electrically connected to the plurality of first ground wires 2113 through the housing 218. In some embodiments, the plurality of first grounding wires 2113 are only partially in direct contact with the housing 218. However, since all the first grounding wires 2113 have the same potential (e.g., the first grounding wires 2113 are short-circuited to each other in the circuit inside the tester), even if only a portion of the plurality of first grounding wires 2113 are in direct contact with the housing 218, all the first grounding wires 2113 and the housing 218 can still be grounded. In this embodiment, a portion (one or more) of the plurality of first guides 215 is used to electrically connect to the housing 218, and the plurality of first grounding wires 2113 are electrically connected through the housing 218. In this embodiment, the first guides 215 used for grounding are provided with electrical connectors 253, and the tester interface 21 can be electrically connected to the grounding terminal of the test object interface 23 through the electrical connectors 253.

[0109] In some embodiments, a portion (one or more) of a plurality of first guides 215 is used to electrically connect at least one first ground wire 2113. In this embodiment, an electrical connector 253 is provided on the first guide 215 used for grounding, and the test machine interface 21 can be electrically connected to the grounding terminal of the test device interface 23 through the electrical connector 253. In some embodiments, a portion (one or more) of a plurality of first guides 215 is used to electrically connect the housing 218 and to electrically connect at least one first ground wire 2113. One first guide 215 used to electrically connect the housing 218 can simultaneously contact and connect one or more first ground wires 2113, so that the first ground wire 2113 is electrically connected to the housing 218 through the first guide 215, and the housing 218, the first guide 215, and the first ground wire 2113 all have a grounding potential. In this embodiment, an electrical connector 253 is provided on the first guide 215 used for grounding, and the test machine interface 21 can be electrically connected to the grounding terminal of the test device interface 23 through the electrical connector 253.

[0110] In some embodiments, the first signal line 2111 and the first ground line 2113 are two independent conductors, meaning they are not implemented as coaxial cables. In other words, a portion of the first electrical connection line 211 is the first signal line 2111, and another portion is the first ground line 2113. In this embodiment, the signal of the first electrical connection line 211 is transmitted in an interpolated signal manner; that is, the first signal line 2111 of the first electrical connection line 211 includes two signal lines transmitting the P and N portions of the interpolated signal, and these two corresponding signal lines are arranged in relation to each other. In some embodiments, one first signal line 2111 can correspond to multiple first ground lines 2113 to shield the first signal line 2111.

[0111] Figure 5B This is a schematic diagram of the test machine interface 21 according to some embodiments of this disclosure. For the sake of simplicity, Figure 5B Some components are omitted.

[0112] The test interface 21 also includes multiple clamping structures 217, each disposed within one of the first slots 213. The clamping structures 217 provide stress to the electrical connector 253, allowing it to abut against the first guide 215 when positioned within the first slot 213. When the test interface 21 includes the clamping structures 217, the pin header 25 is less likely to detach from the test interface 21. For example, Figure 5B As shown, the clamping structure 217 provides downward stress to the electrical connector 253, causing the electrical connector 253 to contact the first guide 215 downward.

[0113] In some embodiments, the clamping structure 217 includes an insulating material.

[0114] Figure 6A This is a schematic diagram of the device-under-test interface 23 according to some embodiments of this disclosure. For the sake of brevity, Figure 6A Some components are omitted.

[0115] The test interface 23 further includes a plurality of second guides 235 respectively disposed in a plurality of second grooves 233. In some embodiments, the second guides 235 are conductors. When the test interface 23 is connected to the pin header 25, the plurality of second guides 235 are used to electrically connect the plurality of electrical connectors 253. The plurality of second guides 235 are used to provide stress to the plurality of electrical connectors 253, so that when the plurality of electrical connectors 253 are disposed in the plurality of second grooves 233, they can be stressed to abut the plurality of second guides 235.

[0116] In some embodiments, the second guide 235 is a resilient clamping structure.

[0117] In some embodiments, the second electrical connection line 231 is a coaxial cable and includes a second signal line 2311 and a second ground line 2313. Second guides 235 disposed in the second groove 233 of the first column are electrically connected to the plurality of second signal lines 2311 of the plurality of second electrical connection lines 231, and the plurality of second guides 235 disposed in the second groove 233 of the second column are electrically connected to the plurality of second ground lines 2313 of the plurality of second electrical connection lines 231. In some embodiments, the second guides 235 are electrically connected to the second signal lines 2311 or the second ground lines 2313 by crimping. In some embodiments, the second guides 235 are electrically connected to the second signal lines 2311 or the second ground lines 2313 by soldering.

[0118] In some embodiments, at least one second guide 235 is part of the housing 238 of the device under test (DUT) interface 23. In some embodiments, the at least one second guide 235 is integrally formed with the housing 238. In some embodiments, the housing 238 is made of a conductive material. In some embodiments, the housing 238 of the DUT interface 23 is electrically connected to at least one second guide 235, and the at least one second guide 235 is electrically connected to a second ground wire 2313. Therefore, in this embodiment, the housing 238 of the DUT interface 23 is used for grounding. In other words, the housing 238, at least one second guide 235, and the second ground wire 2313 form a grounding layer. In this embodiment, an electrical connector 253 is provided on the second guide 235 used for grounding, and the DUT interface 23 can be electrically connected to the grounding terminal of the test machine interface 21 through the electrical connector 253.

[0119] In some embodiments, the plurality of second guides 235 and the housing 238 are independent components. In some embodiments, the plurality of second guides 235 and the housing 238 are electrically insulated.

[0120] In some embodiments, a portion of the electrical connectors 253 are idle, meaning the number of electrical connectors 253 is greater than the sum of the number of the second signal lines 2311 and the second ground lines 2313. In some embodiments, a portion of the electrical connectors 253 is electrically connected to the second electrical connection line 231, while another portion of the electrical connectors 253 is used to connect to a power supply line (not shown).

[0121] In some embodiments, the housing 238 and the plurality of second grounding wires 2313 have the same potential. In some embodiments, the housing 238 and the plurality of second grounding wires 2313 have a grounding potential.

[0122] In some embodiments, a portion (one or more) of the plurality of second guides 235 is used to electrically connect to the housing 238 and to connect a plurality of second grounding wires 2313 through the housing 238; specifically, the plurality of second grounding wires 2313 are directly contacted and connected to the housing 238, and the portion of the plurality of second guides 235 used for grounding is part of the housing 238 or integrally formed with the housing 238, and is electrically connected to the plurality of second grounding wires 2313 through the housing 238. In some embodiments, the plurality of second grounding wires 2313 are only partially in direct contact with the housing 238. However, since all the second grounding wires 2313 have the same potential (e.g., the second grounding wires 2313 are short-circuited to each other in the circuitry inside the probe card or the device under test), even if only a portion of the plurality of second grounding wires 2313 are in direct contact with the housing 238, all the second grounding wires 2313 and the housing 238 can still be grounded. In this embodiment, a portion (one or more) of the plurality of second guides 235 is used to electrically connect to the housing 238, and the plurality of second grounding wires 2313 are connected through the housing 238. In this embodiment, the second guides 235 used for grounding are provided with electrical connectors 253, and the device under test interface 23 can be electrically connected to the grounding terminal of the test machine interface 21 through the electrical connectors 253.

[0123] In some embodiments, a portion (one or more) of a plurality of second guides 235 is used to electrically connect at least one second grounding wire 2313. In this embodiment, an electrical connector 253 is provided on the second guide 235 used for grounding, and the device under test interface 23 can be electrically connected to the grounding terminal of the test machine interface 21 through the electrical connector 253. In some embodiments, a portion (one or more) of a plurality of second guides 235 is used to electrically connect the housing 238 and at least one second grounding wire 2313. One second guide 235 used to electrically connect the housing 238 can simultaneously contact and connect one or more second grounding wires 2313, so that the second grounding wires 2313 are electrically connected to the housing 238 through the second guide 235, and the housing 238, the second guide 235 and the second grounding wires 2313 all have a grounding potential. In this embodiment, an electrical connector 253 is provided on the second guide 235 used for grounding, and the device under test interface 23 can be electrically connected to the grounding terminal of the test machine interface 21 through the electrical connector 253.

[0124] In some embodiments, the second signal line 2311 and the second ground line 2313 are two independent conductors, meaning they are not implemented as coaxial cables. In other words, a portion of the second electrical connection line 231 is a second signal line 2311, and another portion is a second ground line 2313. In this embodiment, the signal of the second electrical connection line 231 is transmitted in an interpolated signal manner; that is, the second signal line 2311 of the second electrical connection line 231 includes two signal lines transmitting the P and N portions of the interpolated signal, and these two corresponding signal lines are arranged in relation to each other. In some embodiments, one second signal line 2311 can correspond to multiple second ground lines 2113 to shield the second signal line 2311.

[0125] Figure 6B This is a schematic diagram of the device-under-test interface 23 according to some embodiments of this disclosure. For the sake of brevity, Figure 6B Some components are omitted.

[0126] The test interface 23 also includes multiple clamping structures 237, each disposed in one of the multiple second grooves 233. The clamping structures 237 provide stress to the electrical connector 253, allowing the electrical connector 253, when disposed in the second groove 233, to abut against the second guide 235 under said stress. When the test interface 23 includes the clamping structures 237, the pin header 25 is less likely to detach from the test interface 23. For example, Figure 6B As shown, the clamping structure 237 provides downward stress to the electrical connector 253, causing the electrical connector 253 to contact the second guide 235 downward.

[0127] In some embodiments, the clamping structure 237 includes an insulating material.

[0128] Figure 7A , Figure 7B and Figure 7C This is a cross-sectional view of the pin header 25 according to some embodiments of this disclosure. For example... Figure 7A As shown, in some embodiments, each of the electrical connectors 253 has a rectangular cross-sectional shape. For example... Figure 7B As shown, in some embodiments, each of the electrical connectors 253 has a circular cross-sectional shape. For example... Figure 7C As shown, in some embodiments, each of the electrical connectors 253 has an elliptical cross-sectional shape. In other embodiments, the electrical connectors 253 have a polygonal cross-sectional shape.

[0129] Figure 8A This is a schematic diagram of the pin header 25 according to some embodiments of this disclosure. In some embodiments, the endpoints of the first end 2531 and the second end 2532 of the electrical connector 253 have a chamfer CA. The angle θ of the chamfer CA is greater than 0 and less than 90 degrees. Because the first end 2531 and the second end 2532 have a chamfer CA, the electrical connector 253 has greater tolerance for alignment when inserted into the first slot 213 and / or the second slot 233, and thus it is easier to insert into the first slot 213 and / or the second slot 233.

[0130] Figure 8B This is a schematic diagram of the pin header 25 according to some embodiments of this disclosure. In some embodiments, the first end 2531 and the second end 2532 of the electrical connector 253 have arc-shaped end faces RA. Because the first end 2531 and the second end 2532 have arc-shaped end faces RA, the electrical connector 253 has greater tolerance for alignment when inserted into the first slot 213 and / or the second slot 233, and thus it is easier to insert into the first slot 213 and / or the second slot 233.

[0131] Compared to some existing technologies, the probe card interface and the test machine interface use a male connector paired with a female connector. The male connector's end is prone to puncturing / damaging the female connector's insulation layer during each insertion and removal, and is also easily deformed, leading to a decrease in the quality of the electrical connection. However, the probe card connectors 1000, 2000, and 3000 of this disclosure, having dual male connectors 25, can reduce the frequency of insertion and removal between the test machine interface 21 and the test object interface 23, thus reducing the risk of interface damage. Furthermore, if any of the electrical connectors 253 of the connector 25 is damaged, the damaged connector 253 can be replaced individually, extending the service life of the probe card connectors 1000, 2000, and 3000.

[0132] While this disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions, and alternatives can be made without departing from the spirit and scope of this disclosure as defined in the claims. For example, many of the processes described above can be implemented using different methods, and other processes or combinations thereof can be substituted for many of the processes described above.

[0133] Furthermore, the scope of this application is not limited to the specific embodiments of the processes, machinery, manufacturing, material composition, means, methods, and steps described in the specification. Those skilled in the art will understand from the disclosure of this publication that existing or future processes, machinery, manufacturing, material composition, means, methods, or steps that have the same function or achieve substantially the same results as the corresponding embodiments described herein can be used according to this publication. Accordingly, such processes, machinery, manufacturing, material composition, means, methods, or steps are included within the scope of the claims of this application.

Claims

1. A probe card connector for electrically connecting to a tester via a plurality of first electrical connection lines and electrically connecting to a probe card via a plurality of second electrical connection lines, characterized in that, The probe card connector mentioned above includes: A row of pins, including a fixing member; and a plurality of electrical connectors, wherein a portion of each of the electrical connectors is disposed in the fixing member, and a first end and a second end of each of the electrical connectors extend outward from the fixing member in opposite directions; A test machine interface includes a plurality of first slots, wherein the plurality of first slots are respectively used for detachably connecting to a plurality of first ends of a plurality of electrical connectors; and A test interface includes a plurality of second slots, wherein the plurality of second slots are respectively used to detachably connect to a plurality of second ends of a plurality of electrical connectors. The plurality of electrical connectors are electrically coupled to a plurality of first electrical connection lines and electrically coupled to a plurality of second electrical connection lines, respectively.

2. The probe card connector as described in claim 1, characterized in that, The test machine interface and the test object interface are made of the same material, structure and shape.

3. The probe card connector as described in claim 1, characterized in that, The plurality of first slots are arranged in at least two columns, and the plurality of first slots in one of the at least two columns are correspondingly arranged with the plurality of first slots in one of the at least two columns in a second column. The plurality of second slots are arranged in at least two columns, and the plurality of second slots in one of the at least two columns are correspondingly arranged with the plurality of second slots in one of the at least two columns in a second column.

4. The probe card connector as described in claim 1, characterized in that, The plurality of first electrical connection lines are coaxial cables and each includes a first signal line and a first ground line. The test machine interface also includes a plurality of first guides, which are respectively disposed in a plurality of first slots. One of the plurality of first guides is used to electrically connect to one of the plurality of electrical connection lines and one of the plurality of first signal lines, and another of the plurality of first guides is used to connect to another of the plurality of electrical connection lines and another of the plurality of first ground lines.

5. The probe card connector as described in claim 4, characterized in that, The plurality of first guides are respectively used to provide a stress to the plurality of electrical connectors, so that when the plurality of electrical connectors are disposed in the plurality of first grooves, they can be adjacent to the plurality of first guides by the stress.

6. The probe card connector as described in claim 4, characterized in that, The testing machine interface further includes multiple clamping structures, which are respectively disposed in multiple first grooves and are used to provide stress to multiple electrical connectors, so that when multiple electrical connectors are disposed in multiple first grooves, they can be adjacent to multiple first guides by the stress.

7. The probe card connector as described in claim 1, characterized in that, The plurality of second electrical connection lines are coaxial cables and each includes a second signal line and a second ground line. The interface under test further includes a plurality of second guides, which are respectively disposed in a plurality of second slots. One of the plurality of second guides is used to electrically connect to one of the plurality of electrical connection lines and one of the plurality of second signal lines, and another of the plurality of second guides is used to connect to another of the plurality of electrical connection lines and another of the plurality of second ground lines.

8. The probe card connector as described in claim 7, characterized in that, The interface of the object under test further includes multiple clamping structures, which are respectively disposed in multiple second grooves and are used to provide a stress to multiple electrical connectors, so that when multiple electrical connectors are disposed in multiple second grooves, they can be adjacent to multiple second guides by the stress.

9. A probe card connector for electrically connecting to a test machine via a plurality of first electrical connection wires, characterized in that, The probe card connector mentioned above includes: A row of pins includes a fixing member and a plurality of electrical connectors, wherein a portion of each of the electrical connectors is disposed in the fixing member, and a first end and a second end of each of the electrical connectors extend outward from the fixing member in opposite directions; as well as A test machine interface includes a plurality of first slots, wherein the plurality of first slots are respectively used to be detachably connected to a plurality of first ends of a plurality of electrical connectors. The plurality of electrical connectors are respectively electrically coupled to the plurality of the first electrical connection lines.

10. The probe card connector as described in claim 9, characterized in that, Each of the plurality of first electrical connection lines includes a first signal line and a first ground line, and the test machine interface further includes a plurality of first guides, wherein the plurality of first guides are respectively disposed in a plurality of first slots. One of the plurality of first guides is electrically connected to one of the plurality of electrical connectors and one of the plurality of first signal lines, and another of the plurality of first guides is connected to another of the plurality of electrical connectors and another of the plurality of first ground lines.

11. The probe card connector as described in claim 10, characterized in that, The plurality of first guides are respectively used to provide a stress to the plurality of electrical connectors, so that when the plurality of electrical connectors are disposed in the plurality of first grooves, they can be adjacent to the plurality of first guides by the stress.

12. The probe card connector as described in claim 10, characterized in that, The testing machine interface further includes multiple clamping structures, which are respectively disposed in multiple first grooves and are used to provide stress to multiple electrical connectors, so that when multiple electrical connectors are disposed in multiple first grooves, they can be adjacent to multiple first guides by the stress.

13. The probe card connector as described in claim 10, characterized in that, The first guide connecting multiple first grounding wires is electrically coupled to a housing of the test machine interface.

14. The probe card connector as described in claim 10, characterized in that, The housing of the test machine interface is used for grounding.

15. A probe card connector for electrically connecting to a plurality of second electrical connection wires, characterized in that, The probe card connector mentioned above includes: A row of pins includes a fixing member and a plurality of electrical connectors, wherein a portion of each of the electrical connectors is disposed in the fixing member, and a first end and a second end of each of the electrical connectors extend outward from the fixing member in opposite directions; as well as A test interface includes a plurality of second slots, wherein the plurality of second slots are respectively used to detachably connect to a plurality of second ends of a plurality of electrical connectors. The plurality of the electrical connectors are respectively electrically coupled to the plurality of the second electrical connection lines.

16. The probe card connector as described in claim 15, characterized in that, The plurality of second electrical connection lines each include a second signal line and a second ground line. The interface under test further includes a plurality of second guides, wherein the plurality of second guides are respectively disposed in a plurality of second slots. One of the plurality of second guides is used to electrically connect to one of the plurality of electrical connection lines and one of the plurality of second signal lines, and another of the plurality of second guides is used to connect to another of the plurality of electrical connection lines and another of the plurality of second ground lines.

17. The probe card connector as described in claim 16, characterized in that, The plurality of second guides are respectively used to provide a stress to the plurality of electrical connectors, such that when the plurality of electrical connectors are disposed in the plurality of second grooves, they can be adjacent to the plurality of second guides by the stress.

18. The probe card connector as described in claim 17, characterized in that, The interface of the object under test further includes multiple clamping structures, which are respectively disposed in multiple second grooves and are used to provide a stress to multiple electrical connectors, so that when multiple electrical connectors are disposed in multiple second grooves, they can be adjacent to multiple second guides by the stress.

19. The probe card connector as described in claim 15, characterized in that, The housing of the interface of the object under test is used for grounding.

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