An insulating ring

Abstract

The utility model discloses an insulating ring, including insulating ring main part, the material of insulating ring main part is silicon nitride, the utility model provides an insulating ring, uses silicon nitride as the insulating material of insulating ring can effectively reduce the background of sodium, aluminium, calcium and other elements under the condition of guaranteeing element test accuracy.

Description

Technical Field

[0001] This utility model belongs to the field of GDMS testing technology, and specifically relates to an insulating ring. Background Technology

[0002] GDMS testing typically refers to glow discharge mass spectrometry. Glow discharge mass spectrometry is a highly sensitive analytical technique used to analyze trace elements and impurities in solid materials. When the device performs a glow discharge, argon ions are generated and bombard the sample surface. Most of the bombarded sample is sputtered out in atomic form. When these atoms encounter metastable argon atoms, the Penning effect occurs, causing the sample atoms to absorb energy and ionize. This results in the generation of neutral plasma in the insulating region between the cathode and anode.

[0003] The insulating rings in the existing technology are generally aluminum nitride insulating rings. However, when testing high-purity silicon and high-purity silicon carbide, the test results for elements such as sodium, aluminum, and calcium are not good, and the background is quite obvious. Utility Model Content

[0004] The purpose of this invention is to propose an insulating ring that solves the problem of poor testing results and obvious background in the testing of elements such as sodium, aluminum, and calcium when testing high-purity silicon and high-purity silicon carbide.

[0005] Therefore, this utility model provides an insulating ring, including an insulating ring body, wherein the insulating ring body is made of silicon nitride.

[0006] Preferably, the shape of the insulating ring body is either circular or rectangular.

[0007] Preferably, when the shape of the insulating ring body is rectangular, the ratio of the length of the long side to the short side of the insulating ring body is in the range of 1:1 to 1:2.

[0008] Preferably, the four corners of the insulating ring body are rounded.

[0009] Preferably, the ratio of the radius of the rounded corner to the length of the short side of the insulating ring body is in the range of 1:5 to 1:4.

[0010] Preferably, the insulating ring body has a central hole inside.

[0011] Preferably, the central hole is located at the center of the insulating ring body.

[0012] Preferably, the ratio of the diameter of the central hole to the length of the short side of the insulating ring body is in the range of 1:4 to 1:2.

[0013] Preferably, the thickness of the insulating ring is in the range of 0.5mm-1mm.

[0014] Preferably, the insulating ring body is disposed between the cathode and anode of the GDMS sheet sample cell.

[0015] Beneficial effects:

[0016] 1. This utility model provides an insulating ring. Using silicon nitride as the insulating material of the insulating ring can effectively reduce the background of elements such as sodium, aluminum, and calcium while ensuring the accuracy of elemental testing. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of an insulating ring according to Embodiment 1 of the present invention.

[0019] In the figure, 1-the main body of the insulating ring, 2-the center hole. Detailed Implementation

[0020] The following detailed description of preferred embodiments of the present invention, along with the included examples, will make the content of the present invention more readily understood. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. In case of any conflict, the definitions in this specification shall prevail.

[0021] Example 1:

[0022] Provided such as Figure 1 An insulating ring is shown, comprising an insulating ring body 1 made of silicon nitride. The insulating ring body 1 is disposed between the cathode and anode of a GDMS sheet sample cell.

[0023] The insulating ring body 1 is rectangular in shape, and the ratio of the length of the long side to the short side of the insulating ring body 1 is in the range of 1:1 to 1:2. In this embodiment, the length of the long side of the insulating ring body 1 is 42.4 mm, the length of the short side is 42.4 mm, and the ratio of the length of the long side to the short side of the insulating ring body 1 is 1:1.

[0024] The four corners of the insulating ring body 1 are rounded. The ratio of the radius of the rounded corner to the length of the short side of the insulating ring body 1 is in the range of 1:5 to 1:4. In this embodiment, the radius of the rounded corner is 9.8 mm.

[0025] A central hole 2 is provided inside the insulating ring body 1. The central hole 2 is located at the center of the insulating ring body 1. The ratio of the diameter of the central hole 2 to the length of the short side of the insulating ring body 1 is in the range of 1:4 to 1:2. In this embodiment, the diameter of the central hole 2 is 12 mm. In another embodiment, the diameter of the central hole 2 is 20 mm.

[0026] The thickness of the insulating ring ranges from 0.5mm to 1mm. In this embodiment, the thickness of the insulating ring body 1 is 0.65mm.

[0027] Using silicon nitride as the insulating material for insulating rings can effectively reduce the background of elements such as sodium, aluminum, and calcium while ensuring the accuracy of elemental testing.

[0028] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. An insulating ring, characterized in that, Includes an insulating ring body, the material of which is silicon nitride; The shape of the insulating ring body is either circular or rectangular; When the shape of the insulating ring body is rectangular, the ratio of the length of the long side to the short side of the insulating ring body is in the range of 1:1 to 1:2; The four corners of the insulating ring body are rounded. The ratio of the radius of the fillet to the length of the short side of the insulating ring body is in the range of 1:5 to 1:4; the insulating ring body is disposed between the cathode and anode of the GDMS sheet sample cell.

2. An insulating ring according to claim 1, characterized in that, The insulating ring body has a central hole inside.

3. An insulating ring according to claim 2, characterized in that, The central hole is located at the center of the insulating ring body.

4. An insulating ring according to claim 2, characterized in that, The ratio of the diameter of the central hole to the length of the short side of the insulating ring body is in the range of 1:4 to 1:

2.

5. An insulating ring according to claim 1, characterized in that, The thickness of the insulating ring ranges from 0.5mm to 1mm.

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