Multi-adaptive polishing liquid supply device

Abstract

The application relates to the technical field of abrasive liquid supply, and particularly discloses a multi-adaptive abrasive liquid supply device which comprises a cabinet, a main tank and a main pipeline connected with the main tank, a sub-tank is arranged in the cabinet, a liquid pumping pump is connected with the sub-tank, a sub-pipeline is connected with the liquid pumping pump, and a mounting plate is fixedly connected to the bottom of the liquid pumping pump and the sub-tank; the device further comprises a liquid distribution mechanism for detachably connecting the sub-pipeline with the main pipeline, and a connecting mechanism for detachably connecting the mounting plate with the cabinet. The application has the effect of reducing the test cost by not completely replacing the original abrasive liquid in one main tank during the test of the to-be-tested abrasive liquid.

Description

Technical Field

[0001] This application relates to the field of polishing slurry supply technology, and in particular to a multi-adapter polishing slurry supply device. Background Technology

[0002] The slurry supply system is a crucial component in surface finishing processes such as precision grinding. Its core function is to continuously, stably, and controllably deliver the slurry to the processing area.

[0003] In the wafer fabrication process, a workshop typically has multiple polishing tables, each with several polishing pads, and each pad has a corresponding slurry supply pipe. The polishing slurry for each supply pipe is supplied by a centralized slurry supply system, which can typically supply three different polishing slurries.

[0004] Regarding the aforementioned technologies, the inventors believe that the following drawbacks exist: when it is necessary to evaluate a new type of polishing fluid separately, it is usually necessary to replace one of the original polishing fluids with the polishing fluid to be tested. This would result in all polishing discs corresponding to the replaced polishing fluids being replaced with the polishing fluid to be tested, leading to higher testing costs. Utility Model Content

[0005] To address the issue of needing to completely replace one of the existing grinding fluids when evaluating the grinding fluid to be tested, this application provides a multi-adaptive grinding fluid supply device.

[0006] The multi-adaptive grinding fluid supply device provided in this application adopts the following technical solution: A multi-adaptive grinding fluid supply device includes a cabinet, a main tank, and a main pipeline connected to the main tank. A secondary tank is disposed within the cabinet and connected to a pump. A secondary pipeline is connected to the pump. The secondary tank and the pump are both fixedly connected to a mounting plate at their bottoms. The device also includes: A liquid separation mechanism is used to detachably connect the secondary pipe to the main pipe; A connecting mechanism is used to detachably connect the mounting plate to the cabinet body.

[0007] Optionally, the liquid distribution mechanism includes a three-way valve disposed on the main pipeline, a female connector connected to the three-way valve, a male connector connected to the auxiliary pipeline, and a sealing assembly for connecting the male connector and the female connector. The three-way valve divides the main pipeline into two parts, and the three ports of the three-way valve are respectively connected to the connector and the two parts of the main pipeline. The male connector is adapted to the female connector.

[0008] Optionally, a retaining ring is fixedly connected inside the male connector, and a first retaining block in the shape of a frustum is also elastically disposed inside the male connector. The thicker end of the first retaining block points towards the female connector. When the first retaining block is in a free state, the first retaining block abuts against the retaining ring.

[0009] Optionally, a blocking ring is also fixedly connected inside the female head, and a second blocking block is elastically provided inside the female head. A top rod is fixedly connected to one end of the first blocking block near the second blocking block. The second blocking block is also frustum-shaped, and the thinner end of the second blocking block points towards the male head. When the second blocking block is in a free state, the second blocking block abuts against the blocking ring.

[0010] Optionally, the sealing assembly includes a ferrule rotatably connected to the male head and a sealing gasket disposed at the end of the male head, the ferrule extending to the female head, and the inner wall of the ferrule being threaded, and the outer wall of the female head also being threaded to match the ferrule.

[0011] Optionally, the connecting mechanism includes multiple support columns fixed to the bottom of the mounting plate, a mounting cylinder fixed to the bottom wall of the cabinet, a clamp sleeved on the mounting cylinder, and a control component for locking the clamp. The mounting cylinder has several clearance grooves at the clamp.

[0012] Optionally, the control component includes a locking rod extending through both ends of the clamp, a locking block fixed to one end of the locking rod, a cam rotatably connected to the locking rod, and a lever fixed to the cam, wherein the locking block and the cam clamp the two sides of the free end of the clamp.

[0013] Optionally, the mounting cylinder is flared near the top.

[0014] In summary, this application includes at least one of the following beneficial technical effects: 1. When it is necessary to replace the grinding fluid supply of the corresponding main pipeline, first place the mounting plate in the corresponding cabinet and fix the mounting plate through the connecting mechanism. Then, connect the auxiliary pipeline to the main pipeline through the liquid distribution mechanism, and control the main pipeline to stop receiving the grinding fluid from the main tank and connect the auxiliary pipeline. After adding the grinding fluid to be tested into the auxiliary tank, the grinding fluid to be tested can be sprayed out of the corresponding main pipeline by starting the liquid pump. This way, it is not necessary to completely replace the original grinding fluid in the main tank during the test of the grinding fluid. The detachable setting of the liquid distribution mechanism and the connecting mechanism also facilitates the quick replacement of the liquid supply source of any main pipeline. 2. Align the ferrule with the female connector and tighten the ferrule until the sealing gasket on the male connector is pressed against the female connector. This completes the tight connection between the male and female connectors. Then, the liquid supply source of the main pipeline can be adjusted by controlling the state of the three-way valve. The operation is relatively simple and the sealing performance is high. 3. When the male and female connectors are initially connected and the three-way valve is adjusted to connect the main pipe to the female connector, the first and second blocking blocks prevent the grinding fluid remaining in the main pipe from entering the secondary pipe, thus avoiding contamination of the grinding fluid to be tested in the secondary tank by the grinding fluid remaining in the main pipe. In the event of an accident that causes the connection between the female and male connectors to be disconnected first, and the three-way valve is forgotten to be adjusted to interrupt the connection between the main pipe and the female connector, the second blocking block further prevents the grinding fluid remaining in the main pipe from flowing back from the female connector, thus preventing a large amount of grinding fluid from flowing into the cabinet and becoming difficult to clean. 4. Move the mounting plate to the position where the support column is aligned with the mounting cylinder, so that the support column is inserted into the mounting cylinder. By turning the lever, rotate the cam until the cam presses against the elastic pad. At this time, the clamp locks the mounting cylinder, and the clearance groove also becomes smaller due to the contraction of the end of the mounting cylinder, thus making the mounting cylinder firmly lock the support column. The process of locking / unlocking the support column is relatively simple, and the structure is also relatively simple and has high stability, effectively reducing the shaking amplitude of the pump. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application; Figure 2 It is along Figure 1 Schematic diagram of the cross-sectional structure along line AA; Figure 3 This is a cross-sectional structural diagram of the liquid dispensing mechanism, the barrier ring, the first barrier block, the second barrier block, the fixing frame, the spring, and the push rod, as shown in the embodiments of this application. Figure 4 yes Figure 2 An enlarged schematic diagram of part A in the middle.

[0016] Reference numerals: 1. Cabinet; 11. Main tank; 12. Main pipe; 21. Auxiliary tank; 22. Auxiliary pipe; 23. Liquid pump; 3. Mounting plate; 4. Liquid distribution mechanism; 41. Three-way valve; 42. Female connector; 43. Male connector; 44. Sealing assembly; 441. Sleeve; 442. Sealing gasket; 5. Connecting mechanism; 51. Support column; 52. Mounting cylinder; 521. Clearance groove; 53. Clamp; 54. Control assembly; 541. Locking rod; 542. Locking block; 543. Cam; 544. Lever; 545. Elastic pad; 61. Barrier ring; 62. First barrier block; 63. Second barrier block; 64. Fixing frame; 65. Spring; 66. Top rod. Detailed Implementation

[0017] The following is in conjunction with the appendix Figure 1-4 This application will be described in further detail.

[0018] This application discloses a multi-adapter type grinding fluid supply device. (Refer to...) Figure 1 and Figure 2The multi-adaptive grinding fluid supply device includes a cabinet 1, a main tank 11, and a main pipe 12 connected to the main tank 11. The main tank 11 is connected to a distribution pipe, and each outlet of the distribution pipe is connected to a main pipe 12, meaning that one main tank 11 corresponds to multiple main pipes 12. Each main pipe 12 supplies fluid to its corresponding grinding disc. A secondary tank 21 is installed inside the cabinet 1, and a pump 23 is connected to the secondary tank 21. A secondary pipe 22 is connected to the pump 23 (the distribution pipe is omitted in the attached drawings for simplicity and ease of viewing). The secondary pipe 22 is a flexible hose. A mounting plate 3 is fixedly connected to the bottom of both the secondary tank 21 and the pump 23. The cabinet 1 also includes: a dispensing mechanism 4 for detachably connecting the secondary pipe 22 to the main pipe 12; and a connecting mechanism 5 for detachably connecting the mounting plate 3 to the cabinet 1.

[0019] When the grinding fluid supply to the corresponding main pipe 12 needs to be replaced, first place the mounting plate 3 in the corresponding cabinet 1, fix the mounting plate 3 through the connecting mechanism 5, then connect the auxiliary pipe 22 to the main pipe 12 through the dispensing mechanism 4, and control the main pipe 12 to stop receiving grinding fluid from the main tank 11 and connect the auxiliary pipe 22. After adding the grinding fluid to be tested into the auxiliary tank 21, the grinding fluid to be tested can be sprayed out of the corresponding main pipe 12 by starting the pump 23. When the grinding fluid to be tested does not need to be tested, simply disconnect the main pipe 12 and the auxiliary pipe 22 through the dispensing mechanism 4 and separate the mounting plate 3 through the connecting mechanism 5. That is, it is not necessary to completely replace the original grinding fluid in the main tank 11 during the testing of the grinding fluid to be tested, thereby reducing the testing cost. Moreover, the detachable setting of the dispensing mechanism 4 and the connecting mechanism 5 also facilitates the quick replacement of the liquid supply source of any main pipe 12.

[0020] Reference Figure 2 and Figure 3 The liquid distribution mechanism 4 includes a three-way valve 41 mounted on the main pipeline 12, a female connector 42 connected to the three-way valve 41, a male connector 43 connected to the auxiliary pipeline 22, and a sealing assembly 44 for connecting the male connector 43 and the female connector 42. The three-way valve 41 divides the main pipeline 12 into two parts, and the three ports of the three-way valve 41 are respectively connected to the connector and the two parts of the main pipeline 12. The male connector 43 is adapted to the female connector 42. The sealing assembly 44 includes a retainer 441 rotatably connected to the male connector 43 and a sealing gasket 442 disposed at the end of the male connector 43. The retainer 441 extends to the female connector 42, and the inner wall of the retainer 441 is threaded. The outer wall of the female connector 42 is also threaded to match the retainer 441.

[0021] Align the ferrule 441 with the female connector 42 and tighten the ferrule 441 until the sealing gasket 442 on the male connector 43 is pressed against the female connector 42, thus completing the tight connection between the male connector 43 and the female connector 42. Then, the liquid supply source of the main pipeline 12 can be adjusted by controlling the state of the three-way valve 41. The operation is relatively simple.

[0022] The ferrule 441 and threaded structure can be replaced with a snap-fit ​​structure. Specifically, a fixed sleeve is fixed to the male head 43 to be compatible with the female head 42. An elastic locking block 542 is embedded in the fixed sleeve, and both ends of the elastic locking block 542 can extend beyond the inner or outer wall of the fixed sleeve. A push-pull sleeve is slidably connected to the fixed sleeve. The female head 42 has a slot that is compatible with the elastic locking block 542. The push-pull sleeve has a wedge-shaped surface that abuts against the elastic locking block 542. The distance of the elastic locking block 542 extending into the slot can be adjusted by pulling the push-pull sleeve. That is, the insertion / separation of the elastic locking block 542 and the slot is completed by pulling the push-pull sleeve. The adjustment steps of this method are simpler, but the stability, sealing performance, and pressure resistance are all lower than those of the ferrule 441 structure described above.

[0023] Reference Figure 2 and Figure 3 Both the male connector 43 and the female connector 42 have a stop ring 61 fixedly connected inside. The male connector 43 has a first stop block 62 in the shape of a frustum elastically disposed inside, with the thicker end of the first stop block 62 pointing towards the female connector 42. The female connector 42 has a second stop block 63 in the shape of a frustum elastically disposed inside, with the thinner end of the second stop block 63 pointing towards the male connector 43. Furthermore, both the male connector 43 and the female connector 42 have a fixing frame 64 slidably connected inside, and the fixing frame 64 is located at the end of the corresponding stop ring 61 away from the three-way valve 41. A spring 65 connects the stop ring 61 and the fixing frame 64. When the first stop block 62 is in a free state, it abuts against the stop ring 61; when the second stop block 63 is in a free state, it abuts against the stop ring 61. A push rod 66 is fixedly connected to the end of the first stop block 62 near the second stop block 63. Furthermore, a barrier ring 61, a first barrier block 62, a fixing frame 64, and a spring 65 can be installed in the main pipe 12 located between the main tank 11 and the three-way valve 41 to prevent the liquid in the main pipe 12 from flowing back into the main tank 11.

[0024] When the pump 23 starts and the secondary pipeline 22 begins supplying liquid, the grinding fluid pushes the first blocking block 62, creating a gap between the first blocking block 62 and the blocking ring 61. Simultaneously, the push rod 66 pushes the second blocking block 63, creating a gap between the second blocking block 63 and the blocking ring 61, allowing the grinding fluid to flow smoothly into the main pipeline 12. However, when the male connector 43 and female connector 42 are initially connected and the three-way valve 41 is adjusted to connect the main pipeline 12 to the female connector 42, the first blocking block 62 and the second blocking block 63 prevent the grinding fluid remaining in the main pipeline 12 from entering the secondary pipeline 22, thus avoiding contamination of the grinding fluid in the secondary tank 21 by the grinding fluid remaining in the main pipeline 12. Furthermore, since the male connector 43 needs to be disassembled and reassembled with various female connectors 42, the additional first blocking block 62 further prevents contamination of the grinding fluid in the secondary tank 21. Furthermore, if the connection between the female connector 42 and the male connector 43 is accidentally disconnected first, and the three-way valve 41 is not adjusted to interrupt the connection between the main pipe 12 and the female connector 42, the second blocking block 63 further prevents the grinding fluid remaining in the main pipe 12 from flowing back from the female connector 42, thus avoiding a large amount of grinding fluid flowing into the cabinet 1 and becoming difficult to clean.

[0025] In some embodiments, the first blocking block 62 and the second blocking block 63 can both be replaced with an elastic pad 545 fixed at one end to the blocking ring 61, and the flexible deformation direction of the elastic pad 545 is also towards the side of the three-way valve 41. That is, when the secondary pipe 22 starts to supply liquid, the grinding liquid squeezes open the elastic pad 545 in the male head 43 and the female head 42 to smoothly enter the main pipe 12. This structure is simpler, but its pressure resistance and sealing performance are not as good as the first blocking block 62 and the second blocking block 63.

[0026] Reference Figure 4 The connecting mechanism 5 includes multiple support columns 51 fixed to the bottom of the mounting plate 3, a mounting cylinder 52 fixed to the inner bottom wall of the cabinet 1, a clamp 53 sleeved on the mounting cylinder 52, and a control component 54 for controlling the clamp 53. The mounting cylinder 52 has several clearance grooves 521 at the clamp 53, and the mounting cylinder 52 is flared near the top to facilitate the insertion of the support columns 51. The control component 54 includes a locking rod 541 passing through both ends of the clamp 53, a locking block 542 fixed to one end of the locking rod 541, a cam 543 rotatably connected to the locking rod 541, and a lever 544 fixed to the cam 543. The locking block 542 and the cam 543 are clamped on both sides of the free end of the clamp 53, and an elastic pad 545 is also fixed between the clamp 53 and the cam 543.

[0027] Move the mounting plate 3 to the position where the support column 51 is aligned with the mounting cylinder 52, so that the support column 51 is inserted into the mounting cylinder 52. By turning the lever 544, the cam 543 is rotated until the cam 543 presses against the elastic pad 545. At this time, the clamp 53 locks the mounting cylinder 52, and the clearance groove 521 also becomes smaller due to the contraction of the end of the mounting cylinder 52, thereby making the mounting cylinder 52 firmly lock the support column 51. The process of locking / unlocking the support column 51 is relatively simple, and the structure is also relatively simple and has high stability, effectively reducing the shaking amplitude of the liquid pump 23. Moreover, this structure is simpler than the traditional threaded connection fixing method, and has higher stability than the method of locking the mounting plate 3 through the slide rail.

[0028] In other feasible implementations, the control component 54 can be a bolt and a nut, i.e., the bolt passes through both ends of the clamp 53, and the head of the bolt and the nut respectively clamp both ends of the clamp 53. When it is necessary to tighten the clamp 53, the bolt and nut can be tightened. The stability after locking is relatively high, but the convenience is not as good as the above-mentioned cam 543 and lever 544 structure.

[0029] The implementation principle of a multi-adaptive grinding fluid supply device in this application embodiment is as follows: When it is necessary to replace the grinding fluid supply of the corresponding main pipeline 12, the mounting plate 3 is first placed in the corresponding cabinet 1, so that the support column 51 is inserted into the mounting cylinder 52. By turning the lever 544, the cam 543 is rotated until the cam 543 presses against the elastic pad 545. At this time, the clamp 53 locks the mounting cylinder 52, and the clearance groove 521 also becomes smaller due to the contraction of the end of the mounting cylinder 52, thereby making the mounting cylinder 52 firmly lock the support column 51. Then align the ferrule 441 with the female head 42 and tighten the ferrule 441 until the sealing gasket 442 on the male head 43 is pressed against the female head 42, thus completing the tight connection between the male head 43 and the female head 42. The liquid supply source of the main pipeline 12 can be adjusted by controlling the state of the three-way valve 41. After adding the grinding fluid to be tested into the auxiliary tank 21, the grinding fluid to be tested can be sprayed out from the corresponding main pipeline 12 by starting the pump 23.

[0030] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A multi-adaptive grinding fluid supply device, comprising a cabinet (1), a main tank (11), and a main pipeline (12) connected to the main tank (11), characterized in that: The cabinet (1) is equipped with a secondary tank (21), which is connected to a liquid pump (23). The liquid pump (23) is connected to a secondary pipe (22). The bottom of the secondary tank (21) and the liquid pump (23) are both fixedly connected to a mounting plate (3); it also includes: The liquid separation mechanism (4) is used to detachably connect the secondary pipe (22) to the main pipe (12); The connecting mechanism (5) is used to detachably connect the mounting plate (3) to the cabinet (1).

2. The multi-adaptive grinding fluid supply device according to claim 1, characterized in that: The liquid distribution mechanism (4) includes a three-way valve (41) disposed on the main pipe (12), a female connector (42) connected to the three-way valve (41), a male connector (43) connected to the auxiliary pipe (22), and a sealing assembly (44) for connecting the male connector (43) and the female connector (42). The three-way valve (41) divides the main pipe (12) into two parts, and the three ports of the three-way valve (41) are respectively connected to the connector and the two parts of the main pipe (12). The male connector (43) is adapted to the female connector (42).

3. The multi-adaptive grinding fluid supply device according to claim 2, characterized in that: The male connector (43) is fixedly connected to a blocking ring (61), and a first blocking block (62) in the shape of a frustum is also elastically provided inside the male connector (43). The thicker end of the first blocking block (62) points towards the female connector (42). When the first blocking block (62) is in a free state, the first blocking block (62) abuts against the blocking ring (61).

4. The multi-adaptive grinding fluid supply device according to claim 3, characterized in that: A blocking ring (61) is also fixedly connected inside the female head (42). A second blocking block (63) is elastically provided inside the female head (42). A top rod (66) is fixedly connected to one end of the first blocking block (62) near the second blocking block (63). The second blocking block (63) is also frustum-shaped, and the thinner end of the second blocking block (63) points to the male head (43). When the second blocking block (63) is in a free state, the second blocking block (63) abuts against the blocking ring (61).

5. The multi-adaptive grinding fluid supply device according to claim 2, characterized in that: The sealing assembly (44) includes a ferrule (441) rotatably connected to the male head (43) and a sealing gasket (442) disposed at the end of the male head (43). The ferrule (441) extends to the female head (42), and the inner wall of the ferrule (441) is threaded, and the outer wall of the female head (42) is also threaded to match the ferrule (441).

6. The multi-adaptive grinding fluid supply device according to claim 1, characterized in that: The connecting mechanism (5) includes multiple support columns (51) fixed to the bottom of the mounting plate (3), a mounting cylinder (52) fixed to the inner bottom wall of the cabinet (1), a clamp (53) sleeved on the mounting cylinder (52), and a control component (54) for locking the clamp (53). The mounting cylinder (52) has several clearance grooves (521) at the clamp (53).

7. The multi-adaptive grinding fluid supply device according to claim 6, characterized in that: The control component (54) includes a locking rod (541) extending through both ends of the clamp (53), a locking block (542) fixed to one end of the locking rod (541), a cam (543) rotatably connected to the locking rod (541), and a lever (544) fixed to the cam (543). The locking block (542) and the cam (543) are clamped on both sides of the free end of the clamp (53).

8. The multi-adaptive grinding fluid supply device according to claim 6, characterized in that: The mounting cylinder (52) is flared near the top.

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