Substrate support apparatus and deposition system comprising the same

Abstract

A substrate support apparatus and a deposition system including the same are provided. The substrate support apparatus includes a substrate main support supporting three of four edges of a substrate and a substrate sub-support supporting the remaining one of the four edges of the substrate. The substrate sub-support includes a sub-support member contacting and supporting the remaining one of the four edges of the substrate, a sub-lift member moving the sub-support member in a vertical direction, and a rotation member rotating the sub-support member at a predetermined angle. The substrate support apparatus can prevent sagging of the substrate.

Description

Technical Field

[0001] Embodiments of this utility model relate to a substrate support device and a deposition system including the substrate support device. Background Technology

[0002] Typically, flat panel displays, such as organic light-emitting diode (OLED) displays, are manufactured by undergoing a series of processes, including, for example, deposition processes, in which thin metal films, organic films, etc., are deposited on a substrate in a predetermined pattern.

[0003] Typically, this deposition process can be performed by transferring the substrate into a vacuum chamber. However, as the area of ​​the substrate increases, its weight also increases, making the transfer and support of the substrate difficult.

[0004] Furthermore, the substrate support device supports the four ends of the four sides of the substrate, exposing the deposition surface. However, as the substrate size increases, sagging occurs at the center of the substrate when the four ends of the four sides are supported, leading to errors in the alignment between the substrate and the mask. This reduces deposition accuracy and lowers the manufacturing yield of the flat panel display device. Utility Model Content

[0005] The purpose of this utility model is to provide a substrate support device and a deposition system including the substrate support device. The substrate support device includes: a substrate main support supporting three of the four sides of the substrate; and a substrate sub support supporting the remaining four sides of the substrate. The substrate sub support includes: a sub support member contacting and supporting the remaining side; a sub lifting member for moving the sub support member in a vertical direction; and a rotating member for rotating the sub support member at a predetermined angle.

[0006] In an embodiment of this utility model, the three sides of the base supported by the base main support include a first short side, a second short side, and a first long side, wherein the first short side and the second short side face each other, the first long side connects the first short side and the second short side to each other, and the remaining side of the base supported by the base sub-support includes a second long side facing the first long side.

[0007] In an embodiment of this utility model, the sub-lifting component includes: a sub-lifting drive motor, which provides lifting driving force to move the sub-supporting component along the vertical direction; a sub-lifting drive shaft, which is connected to the sub-lifting drive motor; and a lifting connecting component, which connects the sub-supporting component and the sub-lifting drive shaft to each other.

[0008] In an embodiment of this utility model, the lifting connection component includes: a lifting connection body protruding from the sub-support component and having a rotating hole; and a lifting bearing mounted on the end of the lifting drive shaft and inserted into the rotating hole for rotation.

[0009] In an embodiment of this utility model, the rotating component includes: a rotary drive motor that provides a rotary driving force to rotate the sub-support component to a predetermined angle; a rotary drive shaft connected to the rotary drive motor; and a rotary connecting component that connects the sub-support component and the rotary drive shaft to each other.

[0010] In an embodiment of this utility model, the rotary connecting component includes: a rotary connecting body protruding from the sub-support component and having a sliding hole; and a rotary bearing mounted on the end of the rotary drive shaft and inserted into the sliding hole to slide within the sliding hole.

[0011] In an embodiment of this utility model, the base main support includes: a main support component having a rectangular or square annular shape and contacting the four sides of the base; and a main lifting component for moving the main support component in a vertical direction.

[0012] In an embodiment of this utility model, the main support component includes: a first main support frame and a second main support frame facing each other; a third main support frame, longer than the first main support frame, and connecting the first main support frame and the second main support frame to each other; and a fourth main support frame, facing the third main support frame, and having a cutting component in which a base sub-support is disposed.

[0013] In an embodiment of this utility model, the main lifting component includes: a first main lifting component for moving a first main support frame in a vertical direction; a second main lifting component for moving a second main support frame in a vertical direction; and a third main lifting component for moving a third main support frame in a vertical direction; and the first main lifting component and the second main lifting component are configured to face each other.

[0014] In an embodiment of this utility model, the deposition system includes: a deposition chamber for performing a deposition process on a substrate; a conveying device for conveying the substrate into the deposition chamber; and a substrate support device for supporting the substrate conveyed to the deposition chamber by the conveying device. The substrate support device includes: a main substrate support for supporting three of the four sides of the substrate; and a sub-sub-support for supporting the remaining four sides of the substrate. The sub-sub-support includes: a sub-support member that contacts and supports the remaining sides; a sub-lifting member for moving the sub-support member vertically; and a rotating member for rotating the sub-support member at a predetermined angle.

[0015] In an embodiment of this utility model, the three sides of the base supported by the base main support include a first short side, a second short side, and a first long side, wherein the first short side and the second short side face each other, and the first long side connects the first short side and the second short side to each other, and the remaining side of the base supported by the base sub support includes a second long side facing the first long side.

[0016] In an embodiment of this utility model, the sub-lifting component includes: a sub-lifting drive motor, which provides lifting driving force to move the sub-supporting component along the vertical direction; a sub-lifting drive shaft, which is connected to the sub-lifting drive motor; and a lifting connecting component, which connects the sub-supporting component and the sub-lifting drive shaft to each other.

[0017] In an embodiment of this utility model, the lifting connection component includes: a lifting connection body protruding from the sub-support component and having a rotating hole; and a lifting bearing mounted on the end of the lifting drive shaft and inserted into the rotating hole for rotation.

[0018] In an embodiment of this utility model, the rotating component includes: a rotary drive motor that provides a rotary driving force to rotate the sub-support component to a predetermined angle; a rotary drive shaft connected to the rotary drive motor; and a rotary connecting component that connects the sub-support component and the rotary drive shaft to each other.

[0019] In an embodiment of this utility model, the rotary connecting component includes: a rotary connecting body protruding from the sub-support component and having a sliding hole; and a rotary bearing mounted on the end of the rotary drive shaft and inserted into the sliding hole to slide within the sliding hole.

[0020] In an embodiment of this utility model, the base main support includes: a main support component having a rectangular or square annular shape and contacting the four sides of the base; and a main lifting component for moving the main support component in a vertical direction. The main support component includes: a first main support frame and a second main support frame facing each other; a third main support frame longer than the first main support frame and connecting the first and second main support frames to each other; and a fourth main support frame facing the third main support frame and having a cutting component in which a base sub-support is disposed.

[0021] In an embodiment of this utility model, the main lifting component includes: a first main lifting component for moving a first main support frame in a vertical direction; a second main lifting component for moving a second main support frame in a vertical direction; and a third main lifting component for moving a third main support frame in a vertical direction; and the first main lifting component and the second main lifting component are configured to face each other.

[0022] In an embodiment of this utility model, the first main lifting component includes a first main lifting drive motor and a first main lifting drive shaft, wherein the first main lifting drive motor provides lifting driving force to raise or lower the first main support frame, and wherein the first main lifting drive shaft is connected to the first main lifting drive motor. The second main lifting component includes a second main lifting drive motor and a second main lifting drive shaft, wherein the second main lifting drive motor provides lifting driving force to raise or lower the second main support frame, and wherein the second main lifting drive shaft is connected to the second main lifting drive motor.

[0023] In an embodiment of this utility model, the terminator of the conveying device conveys the substrate through the cutting component, the main support component supports the first short side, the second short side and the first long side of the substrate, and the main lifting component moves the substrate in the vertical direction, the sub-support component supports the second long side of the substrate, and the sub-lifting component and the rotating component move the sub-support component to contact the second long side of the substrate.

[0024] According to an embodiment of the present invention, a deposition system includes: a deposition chamber for performing a deposition process on a substrate; and a substrate support device for supporting the substrate within the deposition chamber, wherein the substrate support device includes: a main substrate support for supporting three of the four sides of the substrate; and a sub-sub-support for supporting the remaining four sides of the substrate, wherein the sub-sub-support includes: a sub-support member for supporting the remaining sides of the substrate; a sub-lifting member for moving the sub-support member vertically; and a rotating member connected to the sub-support member and for rotating the sub-support member, wherein the sub-lifting member includes: a sub-lifting drive motor for moving the sub-support member vertically; and a sub-lifting drive shaft connected to the sub-lifting drive motor and the sub-support member, wherein the rotating member includes: a rotary drive motor for providing rotary driving force to rotate the sub-support member to a predetermined angle; and a rotary drive shaft connected to the rotary drive motor and the sub-support member.

[0025] In this invention, by providing a substrate sub-support in the cutting component that passes through the transfer substrate of the main support component, substrate sagging can be prevented, thereby improving deposition accuracy and manufacturing yield of flat panel display devices. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of a deposition system according to an embodiment of the present invention.

[0027] Figure 2 yes Figure 1 A perspective view of the base support equipment.

[0028] Figure 3 yes Figure 2 A perspective view of the base sub-support.

[0029] Figure 4 yes Figure 3 A magnified perspective view of part A.

[0030] Figure 5 , Figure 6 , Figure 7 , Figure 8 and Figure 9 It is shown in sequence. Figure 1 A schematic side view of the operation of the substrate support equipment in the deposition system. Detailed Implementation

[0031] In the following, various embodiments of the present invention will be described in detail with reference to the accompanying drawings, enabling those skilled in the art to readily implement the present invention. The invention can be implemented in many different forms and is not limited to the embodiments described herein.

[0032] To clearly explain this utility model, the same or similar components are given the same reference numerals throughout the specification and drawings, and redundant descriptions may be omitted.

[0033] Various thicknesses, lengths, and angles are shown in the accompanying drawings. Although the arrangements shown do represent embodiments of the present invention, it will be understood that modifications to various thicknesses, lengths, and angles are possible within the spirit and scope of the present invention, and the present invention is not necessarily limited to the specific thicknesses, lengths, or angles shown.

[0034] Furthermore, when a portion of a layer, film, region, or plate is referred to as being "above" or "on" another portion, this includes not only cases where a portion of the layer, film, region, or plate is "directly above" another portion, but also cases where there are other portions in between. Conversely, when an element is referred to as being "directly on" another element, there is no intervening element. Additionally, "above" or "on" a reference component means positioned above or below the reference component, and does not necessarily mean positioned "above" or "on" it in a direction opposite to gravity.

[0035] Furthermore, throughout the instruction manual, when "in a plane" is mentioned, it means the situation of viewing the target part from above, and when "in a section" is mentioned, it means the situation of viewing the section of the target part cut vertically from the side.

[0036] Next, the substrate support device and the deposition system including the substrate support device according to embodiments of the present invention will be described in detail with reference to the accompanying drawings. Furthermore, the substrate support device according to embodiments of the present invention can prevent a substrate with a large area from sagging when placed into and within the deposition system.

[0037] Figure 1 This is a schematic diagram of a deposition system according to an embodiment of the present invention.

[0038] like Figure 1 As shown, the deposition system according to an embodiment of the present invention includes a deposition chamber 10, a conveying device 20, and a substrate support device 30.

[0039] The deposition chamber 10 can perform a deposition process on the substrate 1. The deposition chamber 10 may include an evaporation source 11, a chamber body 12, an electrostatic chuck 13, a magnetic plate 14, a fixture 15, and a mask 16.

[0040] Evaporation source 11 can be heated to spray gas-phase evaporation particles.

[0041] The chamber body 12 allows the evaporation source 11 to be installed therein and can maintain a vacuum environment for depositing evaporation particles. The substrate 1 can be introduced into and removed from the chamber body 12. An opening 12a can be installed on the side wall of the chamber body 12, and the substrate 1 can enter and exit the chamber body 12 through the opening 12a.

[0042] The electrostatic chuck 13 can lower the substrate 1 to the mask 16 by electrostatic adsorption and fixation of the substrate 1 in a vacuum environment.

[0043] The magnetic plate 14 can be disposed on the electrostatic chuck 13. The magnetic plate 14 can shorten the distance between itself and the electrostatic chuck 13, and use magnetic force to make the mask 16 in close contact with the substrate 1.

[0044] If the electrostatic chuck 13 fails to function properly during the deposition process, the fixture 15 can hold the substrate 1 and stably discharge it to the outside. Furthermore, if the electrostatic chuck 13 is closed and the substrate 1 is not separated from the electrostatic chuck 13, the fixture 15 can physically separate the substrate 1 from the electrostatic chuck 13.

[0045] The mask 16 has a predetermined mask pattern and a deposition pattern can be formed on the substrate 1 by using the mask pattern of the mask 16.

[0046] The transfer device 20 may be spaced apart from the deposition chamber 10. The transfer device 20 supports the substrate 1 and can transfer the substrate 1 into the deposition chamber 10. The transfer device 20 may include an end effector 21 that supports and contacts the substrate 1 and a robotic arm 22 for transferring the end effector 21 into the interior of the chamber body 12.

[0047] The substrate support device 30 can support the substrate 1, which is conveyed into the chamber body 12 by the conveying device 20. The substrate support device 30 can support the four ends of the four sides of the substrate 1, so that gaseous evaporation particles ejected from the evaporation source 11 are deposited on the substrate 1.

[0048] Due to the conveying device 20 that brings the base 1 into and out of the chamber body 12 and the main support component 110 of the base main support 100 of the base support device 30 (see... Figure 2 The main support member 110 interacts with a portion of the base 1, thus forming a cut in a portion therein to allow the conveying device 20 to pass through. At this time, since the main support member 110 cannot support any of the four sides of the base 1, the base 1 will sag. For example, when targeting the long side 1La of the four sides of the base 1 (see...) Figure 2 ) and 1Lb (see Figure 2 When the base 1 is inserted into the chamber body 12, the main support component 110 may not be able to support either of the long sides 1La and 1Lb of the base 1, and sagging is more likely to occur in the case of a large base area.

[0049] The base support device 30, which can prevent the base 1 from sagging, will now be described in more detail with reference to the accompanying drawings.

[0050] Figure 2 yes Figure 1 A perspective view of the base support equipment. Figure 3 yes Figure 2 A perspective view of the base sub-support. Figure 4 yes Figure 3 A magnified perspective view of part A.

[0051] like Figures 2 to 4 As shown, the base support device 30 includes a base main support 100 and a base sub support 200.

[0052] The base main support 100 can support three of the four sides of the base 1.

[0053] The base 1 may include a first short side 1Sa, a second short side 1Sb, a first long side 1La, and a second long side 1Lb. The first short side 1Sa and the second short side 1Sb face each other. The first long side 1La and the second long side 1Lb face each other and are connected to each other. Here, the base main support 100 can support the first short side 1Sa, the second short side 1Sb, and the first long side 1La.

[0054] The base main support 100 may include a main support component 110 and a main lifting component 120.

[0055] The main support component 110 has a rectangular or square ring shape and can contact the four sides of the base 1.

[0056] The main support component 110 may include a first main support frame 111, a second main support frame 112, a third main support frame 113, and a fourth main support frame 114.

[0057] The first main support frame 111 and the second main support frame 112 face each other and can extend in the Y-axis direction. The first short side 1Sa of the base 1 can be placed on the first main support frame 111, and the second short side 1Sb of the base 1 can be placed on the second main support frame 112.

[0058] The third main support frame 113 and the fourth main support frame 114 face each other and can extend in the X-axis direction. The first long side 1La of the base 1 can be placed on the third main support frame 113, and a portion of the second long side 1Lb of the base 1 can be placed on the fourth main support frame 114.

[0059] The length L2 of the third main support frame 113 (or the fourth main support frame 114) may be longer than the length L1 of the first main support frame 111 (or the second main support frame 112). The third main support frame 113 connects one end of the first main support frame 111 to one end of the second main support frame 112, and the fourth main support frame 114 connects the other end of the first main support frame 111 to the other end of the second main support frame 112.

[0060] Here, the fourth main support frame 114 has a cutting member 114a, and the sub-support member 210 of the base sub-support 200 can be disposed in or near the cutting member 114a.

[0061] The main lifting component 120 can lift the main support component 110. For example, the main lifting component 120 can move the main support component 110 along the Z-axis direction.

[0062] The main lifting component 120 may include a first main lifting component 121, a second main lifting component 122, and a third main lifting component 123. The first main lifting component 121 lifts and lowers the first main support frame 111. For example, the first main lifting component 121 can move the first main support frame 111 along the Z-axis direction. The second main lifting component 122 lifts and lowers the second main support frame 112, and the third main lifting component 123 lifts and lowers the third main support frame 113.

[0063] The first main lifting component 121 may include a first main lifting drive motor 1211 and a first main lifting drive shaft 1212. The first main lifting drive motor 1211 can provide lifting driving force to lift the first main support frame 111. The first main lifting drive shaft 1212 can be connected to the first main lifting drive motor 1211. The first main lifting drive motor 1211 can be set to a standby state, and the first main lifting drive shaft 1212 can be set to a vacuum state.

[0064] Similarly, the second main lifting component 122 may include a second main lifting drive motor 1221 and a second main lifting drive shaft 1222. The second main lifting drive motor 1221 can provide lifting driving force to lift the second main support frame 112. The second main lifting drive shaft 1222 can be connected to the second main lifting drive motor 1221. The second main lifting drive motor 1221 can be set to a standby state, and the second main lifting drive shaft 1222 can be set to a vacuum state.

[0065] Similarly, the third main lifting component 123 may include a third main lifting drive motor 1231 and a third main lifting drive shaft 1232. The third main lifting drive motor 1231 can provide lifting driving force to lift the third main support frame 113. The third main lifting drive shaft 1232 can be connected to the third main lifting drive motor 1231. The third main lifting drive motor 1231 can be set to a standby state, and the third main lifting drive shaft 1232 can be set to a vacuum state.

[0066] The base sub-support 200 can support the second long side 1Lb, which is the remaining side among the four sides of the base 1. That is, since the base 1 is inserted into the chamber body 12 along the Y-axis, the first long side 1La is supported by the third main support frame 113, and the second long side 1Lb can be supported by the sub-support member 210.

[0067] The base sub-support 200 may include a sub-support component 210, a sub-lifting component 220, and a rotating component 230.

[0068] The sub-support member 210 can contact and support the second long side 1Lb of the base 1. The sub-support member 210 can be disposed in the cutting member 114a of the fourth main support frame 114. The sub-support member 210 may include a plurality of contact members 211 and a sub-support member frame 212. The plurality of contact members 211 directly contact the second long side 1Lb of the base 1, and the sub-support member frame 212 is connected to the plurality of contact members 211 and extends parallel to the fourth main support frame 114.

[0069] The sub-lifting component 220 can lift the sub-support component 210. For example, the sub-lifting component 220 can move the sub-support component 210 in the Z-axis direction.

[0070] The sub-lifting component 220 may include a sub-lifting drive motor 221, a sub-lifting drive shaft 222, and a lifting connection component 223.

[0071] The sub-lift drive motor 221 can provide lifting driving force to lift the sub-support component 210.

[0072] The sub-lift drive shaft 222 is connected to the sub-lift drive motor 221 and can extend in the Z-axis direction. The sub-lift drive motor 221 can be set to a standby state, and the sub-lift drive shaft 222 can be set to a vacuum state.

[0073] The lifting connection component 223 can connect the sub-support component 210 and the sub-lifting drive shaft 222 to each other.

[0074] The lifting connection component 223 may include a lifting connection body 2231 and a lifting bearing 2232.

[0075] The lifting connector 2231 protrudes from the sub-support member frame 212 of the sub-support member 210 and may have a circular rotating hole 2231a.

[0076] The lifting bearing 2232 is mounted on the end of the sub-lifting drive shaft 222. Furthermore, the lifting bearing 2232 can be inserted into the rotating hole 2231a and rotated.

[0077] The rotating component 230 can rotate the sub-support component 210 at a predetermined angle.

[0078] The rotating component 230 may include a rotary drive motor 231, a rotary drive shaft 232, and a rotary connecting component 233.

[0079] The rotary drive motor 231 can provide a rotary driving force to rotate the sub-support member frame 212 of the sub-support member 210 at a predetermined angle.

[0080] The rotary drive shaft 232 is connected to the rotary drive motor 231 and can extend in the Z-axis direction.

[0081] The rotary connection component 233 can connect the sub-support component 210 and the rotary drive shaft 232 to each other.

[0082] The rotary connection component 233 may include a rotary connector 2331 and a rotary bearing 2332.

[0083] The rotating connector 2331 protrudes from the sub-support member frame 212 of the sub-support member 210 and may have a slit-shaped sliding hole 2331a.

[0084] The rotary bearing 2332 is mounted on the end of the rotary drive shaft 232 and can be inserted into the sliding hole 2331a to slide therein.

[0085] Therefore, the rotary bearing 2332 connected to the end of the rotary drive shaft 232 slides in the sliding hole 2331a, and the lifting bearing 2232 connected to the end of the sub-lift drive shaft 222 rotates in the rotary hole 2231a, so that the sub-support component frame 212 can be lifted and rotated in a limited narrow space.

[0086] Therefore, by installing the base sub-support 200 in the fourth main support frame 114 of the main support member 110, the conveying device 20, through which the base 1 is passed in and out, can support the second long side 1Lb of the base 1 that is not supported by the main support member 110, thereby preventing the base 1 from sagging.

[0087] Furthermore, substrate damage can be prevented by preventing substrate sagging and dispersing concentrated stress.

[0088] Furthermore, during the process of adsorbing the substrate using an electrostatic chuck, adsorption failure can be prevented by preventing the electrostatic chuck from separating from the substrate.

[0089] The operation of the substrate support device in the deposition system will now be described in detail with reference to the accompanying drawings.

[0090] Figures 5 to 9 It is shown in sequence. Figure 1 A schematic side view of the operation of the substrate support equipment in the deposition system. (Combined with...) Figures 1 to 4 describe Figures 5 to 9 .

[0091] like Figure 5 As shown, the substrate 1, mounted on the terminator 21 of the transfer device 20, is inserted into the deposition chamber 10 along the Y-axis and stops at a position corresponding to the main support member 110. At this time, the sub-support member 210 of the substrate sub-support 200 rises along the Z-axis, so it does not interact with the transfer device 20, and therefore the substrate 1 can be inserted into the deposition chamber 10 using the transfer device 20.

[0092] Next, as Figure 6 As shown, the sub-support component 210 of the base sub-support 200 is lowered by the sub-lifting component 220.

[0093] Next, as Figure 7 As shown, the main support member 110 of the base main support 100 is raised to support the first short side 1Sa, the second short side 1Sb, and the first long side 1La of the base 1. Then, the main lifting member 120 raises the base 1 while supporting the base 1 and separates the base 1 from the terminator 21, and removes the terminator 21 from the base support device 30.

[0094] Next, as Figure 8 As shown, the sub-support member 210 is rotated by using the rotating member 230 of the base sub-support 200, so that the sub-support member 210 contacts the second long side 1Lb of the base 1 to support the second long side 1Lb of the base 1.

[0095] In this way, by supporting the four sides of the base 1 (i.e., the first short side 1Sa, the second short side 1Sb, the first long side 1La and the second long side 1Lb), the base 1 can be prevented from sagging.

[0096] Next, as Figure 9 As shown, the terminator 21 of the conveying device 20 is brought out of the chamber body 12.

[0097] Although the present invention has been described with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the present invention.

[0098] [Explanation of the labels in the attached diagram]

[0099] 10: Deposition chamber; 20: Conveying device

[0100] 30: Base support equipment; 100: Main base support frame

[0101] 110: Main support component; 120: Main lifting component

[0102] 200: Sub-support base; 210: Sub-support component

[0103] 220: Sub-lifting component; 230: Rotating component.

Claims

1. A base support device, characterized in that, The base support device includes: The main support structure of the base supports three of the four sides of the base; and A base sub-support that supports the remaining sides of the four sides of the base. The base sub-support includes: The sub-support component contacts and supports the remaining edge; A sub-lifting component that moves the sub-support component vertically; and The rotating component causes the sub-support component to rotate at a predetermined angle.

2. The base support device according to claim 1, characterized in that: The three sides of the base, supported by the main support of the base, include a first short side, a second short side, and a first long side, wherein the first short side and the second short side face each other, and the first long side connects the first short side and the second short side to each other. The remaining side of the base, supported by the base sub-support, includes a second long side facing the first long side.

3. The base support device according to claim 2, characterized in that: The sub-lifting component includes: A sub-lifting drive motor provides lifting driving force to move the sub-support component along the vertical direction; Sub-lift drive shaft, connected to the sub-lift drive motor; and A lifting connection component connects the sub-support component and the sub-lifting drive shaft to each other.

4. The base support device according to claim 3, characterized in that: The lifting connection component includes: A lifting connector protrudes from the sub-support member and has a rotating hole; and A lifting bearing is installed at the end of the lifting drive shaft and inserted into the rotating hole for rotation.

5. The base support device according to claim 3, characterized in that: The rotating component includes: A rotary drive motor provides a rotary driving force to rotate the sub-support component to a predetermined angle; A rotary drive shaft is connected to the rotary drive motor; and A rotating connecting component connects the sub-support component and the rotating drive shaft to each other.

6. The base support device according to claim 5, characterized in that: The rotary connecting component includes: A rotating connector protrudes from the sub-support member and has a sliding hole; and A rotary bearing is mounted on the end of the rotary drive shaft and inserted into the sliding hole to slide within the sliding hole.

7. The base support device according to claim 6, characterized in that: The base main support includes: The main support component has a rectangular or square annular shape and contacts the four sides of the base; and The main lifting component causes the main support component to move along the vertical direction.

8. The base support device according to claim 7, characterized in that: The main support component includes: The first and second main support frames face each other. A third main support frame, longer than the first main support frame, connects the first and second main support frames to each other; and The fourth main support frame faces the third main support frame and has a cutting component in which the base sub-support is disposed.

9. The base support device according to claim 8, characterized in that: The main lifting component includes: The first main lifting component causes the first main support frame to move along the vertical direction; The second main lifting component causes the second main support frame to move along the vertical direction; and The third main lifting component causes the third main support frame to move along the vertical direction; and The first main lifting component and the second main lifting component are positioned to face each other.

10. A deposition system, characterized in that, The deposition system includes: Deposition chamber, used to perform deposition processes on the substrate; A conveying device conveys the substrate into the deposition chamber; and A substrate support device supports the substrate that has been conveyed to the deposition chamber by the conveying device. The base support device includes: The base main support supports three of the four sides of the base; and A base sub-support supports the remaining sides of the four sides of the base, and The base sub-support includes: The sub-support component contacts and supports the remaining edge; A sub-lifting component that moves the sub-support component vertically; and The rotating component causes the sub-support component to rotate at a predetermined angle.

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