A gold-silver alloy plating device for preventing oxidation of nickel material
By using a gold-silver alloy coating device, silver prevents nickel diffusion and gold prevents oxygen diffusion, thus solving the problem of instability of single metal coatings and alloy coatings under high temperature environments and achieving effective protection of nickel materials.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHONGHUI SEMICON (JIANGMEN) CO LTD
- Filing Date
- 2025-09-01
- Publication Date
- 2026-07-24
Smart Images

Figure CN224548524U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of metal material surface treatment technology, and in particular relates to a gold and silver alloy coating device for preventing nickel material oxidation. Background Technology
[0002] In the field of metal surface treatment, preventing metal oxidation is an important research direction. Nickel, due to its excellent mechanical properties and corrosion resistance, is widely used in electronics, aerospace, and chemical industries. However, nickel is prone to oxidation in high-temperature or high-oxygen environments, leading to performance degradation. Currently, researchers are using various methods to prevent nickel oxidation, such as surface coatings and alloying.
[0003] Currently, existing technologies for preventing nickel oxidation typically employ single-metal coatings, such as silver or gold coatings. However, single-metal coatings cannot simultaneously prevent nickel from diffusing outwards and oxygen from diffusing inwards. Furthermore, alloy coatings exhibit unstable performance at high temperatures. Therefore, a gold-silver alloy coating device for preventing nickel oxidation is proposed to address these issues. Utility Model Content
[0004] To address the shortcomings of existing technologies, this application provides a gold-silver alloy coating device for preventing nickel oxidation. This device combines the advantages of gold-silver alloy coating, which enhances the protection of nickel, thereby improving the stability of the coating and effectively preventing the oxidation of nickel. It solves the problems mentioned above, such as the inability of a single metal coating to simultaneously prevent nickel from diffusing outward and oxygen from diffusing inward, and the unstable performance of alloy coatings under high-temperature environments.
[0005] To achieve the above objectives, this application provides the following technical solution: a gold-silver alloy coating apparatus for preventing nickel oxidation, comprising a coating mechanism, a vacuum device disposed on the outer surface of the coating mechanism, a power supply device disposed inside the coating mechanism, a target support disposed on the outer surface of the power supply device, a positioning mechanism rotatably connected to the bottom inside the coating mechanism, a gas control device disposed on the top of the coating mechanism, a driving device disposed on the top of the coating mechanism, a transmission mechanism fixedly mounted on the output end of the driving device, and a substrate clamping device threadedly connected to the output end of the transmission mechanism.
[0006] The above scheme involves mounting a gold-silver alloy target onto a target support, fixing a nickel substrate to a substrate clamping device, and then using a vacuum pump to evacuate the coating mechanism to the required vacuum level. Argon gas is then introduced as the sputtering gas using a gas control device. The power supply is turned on, and the drive mechanism rotates the substrate clamping device by a specific angle. This causes the substrate to rotate, and the gold-silver alloy target sputters gold and silver alloy atoms under the bombardment of argon ions, uniformly depositing them on the nickel substrate surface to form a coating. Since silver and nickel are not solid-soluble, silver prevents nickel from diffusing outwards, while gold prevents oxygen from diffusing inwards. The combined effect of the gold-silver alloy coating enhances the protection of nickel, thereby increasing the stability of the coating and effectively preventing the oxidation of the nickel material.
[0007] Furthermore, the coating mechanism includes a coating machine body, the interior of which is provided with a coating cavity, and the inner wall of the coating machine body is hinged with a sealing door.
[0008] The above solution provides a vacuum environment for substrate coating by setting a coating chamber inside the coating machine body, and the coating machine body can be sealed with a sealing door, thus providing a sealed vacuum coating space for nickel substrate coating.
[0009] Furthermore, the vacuum pumping device includes a vacuum pump, one end of which is provided with an input pipe that extends into the interior of the coating chamber. The gas control device includes an air pump, the top of which is provided with a gas delivery pipe, and one end of which is provided with an air inlet valve.
[0010] With the above scheme, by coordinating the vacuum pump with the input pipe, when it is necessary to coat the substrate, starting the vacuum pump can generate a suction force inside it to work with the input pipe to evacuate the inside of the coating chamber into a vacuum. At the same time, with the air pump and air inlet valve at the top, the gas atmosphere inside the coating chamber can be adjusted.
[0011] Furthermore, the power supply device includes a power generator located inside the coating chamber, and a power controller is provided on the outer surface of the coating machine body, the power controller being electrically connected to the power generator.
[0012] The above scheme provides power to the power generator by activating the power controller, which in turn provides the energy required for sputtering the gold and silver alloy target on the target support. The power generator is symmetrically arranged inside the coating chamber wall so that the target sputtering and coating can be performed simultaneously.
[0013] Furthermore, the positioning mechanism includes a positioning seat, on the top of which a clamping seat is fixedly installed, and the positioning seat is rotatably connected to the bottom of the coating machine body.
[0014] The above solution allows for the positioning of the substrate by rotatably connecting the positioning seat to the inside of the coating machine body. It also works with the clamping seat to hold the bottom of the substrate. When the substrate clamping device rotates, it can rotate together with the substrate itself, thus providing a flexible positioning and clamping effect for substrate coating.
[0015] Furthermore, the driving device includes a drive motor, the output end of which is fixedly mounted with a first bevel gear, and a second bevel gear meshing with one side of the first bevel gear. The transmission mechanism includes a transmission bevel gear, the output end of which is fixedly connected to the second bevel gear, and a second transmission gear meshing with one side of the transmission bevel gear. An internally threaded shaft is fixedly mounted on the output end of the second transmission gear.
[0016] The above scheme involves starting a drive motor to drive the first bevel gear to rotate the second bevel gear, thereby providing a driving force for the transmission bevel gear. This allows the transmission bevel gear to drive the second transmission gear to rotate a certain angle in a single operation. The second transmission gear then provides a driving force for the internal thread shaft, which in turn drives the substrate clamping device to rotate. This allows the substrate clamping device to drive the substrate to rotate intermittently by a certain angle in a single operation, resulting in the uniform sputtering of gold and silver alloy atoms onto the substrate to form a film.
[0017] Furthermore, the substrate clamping device includes a substrate clamping frame, the substrate clamping frame having a clamping groove inside, and a spring clamping block being provided inside the substrate clamping frame.
[0018] The above solution connects the top of the substrate holder to the internal threaded shaft, so that when the internal threaded shaft rotates, it can drive the substrate holder and the substrate to rotate together. The spring clamping blocks are symmetrically arranged inside the clamping groove. After the substrate is inserted into the clamping groove, it is clamped inside by the spring clamping blocks on both sides, thus providing a convenient clamping effect for the substrate.
[0019] Furthermore, a protective cover is provided on the top of the coating machine body.
[0020] The above solution provides external protection for transmission components such as the second transmission gear, preventing dust from entering the gap and affecting transmission efficiency.
[0021] Compared with the prior art, the technical solution of this application has the following beneficial effects: This gold-silver alloy coating device for preventing nickel oxidation involves mounting a gold-silver alloy target on a target support, fixing a nickel substrate to a substrate clamping device, and then using a vacuum pump to evacuate the coating mechanism to the required vacuum level. Argon gas is then introduced as the sputtering gas using a gas control device. The power supply is turned on, and the drive mechanism rotates the substrate clamping device by a specific angle. The substrate is rotated, and the gold-silver alloy target sputters gold and silver alloy atoms under the bombardment of argon ions, uniformly depositing them on the surface of the nickel substrate to form a coating. Since silver and nickel are not solid-soluble, silver prevents nickel from diffusing outwards, and gold prevents oxygen from diffusing inwards. The combined effect of the gold-silver alloy coating enhances the protection of nickel, thereby increasing the stability of the coating and effectively preventing the oxidation of the nickel material. Attached Figure Description
[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the coating machine body of this utility model; Figure 3 This is a schematic diagram of the positioning seat of this utility model; Figure 4 This is a schematic diagram of the drive motor of this utility model; Figure 5 This is a schematic diagram of the substrate clamping frame of this utility model.
[0023] Explanation of markings in the diagram: 1. Coating mechanism; 2. Vacuum pump; 3. Power supply; 4. Target support; 5. Positioning mechanism; 6. Gas control device; 7. Drive device; 8. Transmission mechanism; 9. Substrate clamping device; 101. Coating machine body; 102. Coating chamber; 103. Sealing door; 201. Vacuum pump; 202. Input pipe; 601. Air pump; 602. Delivery pipe; 603. Inlet valve; 301. Power generator; 302. Power controller; 501. Positioning seat; 502. Clamping seat; 701. Drive motor; 702. First bevel gear; 703. Second bevel gear; 801. Transmission bevel gear; 802. Second transmission gear; 803. Internal threaded shaft; 901. Substrate clamping frame; 902. Clamping groove; 903. Spring clamping block; 104. Protective cover. Detailed Implementation
[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0025] Please see Figure 1 and Figure 2 This embodiment discloses a gold-silver alloy coating apparatus for preventing nickel oxidation, comprising a coating mechanism 1, a vacuum device 2 on the outer surface of the coating mechanism 1, a power supply device 3 inside the coating mechanism 1, a target support 4 on the outer surface of the power supply device 3, a positioning mechanism 5 rotatably connected to the bottom inside the coating mechanism 1, a gas control device 6 on the top of the coating mechanism 1, a drive device 7 on the top of the coating mechanism 1, a transmission mechanism 8 fixedly mounted on the output end of the drive device 7, and a substrate clamping device 9 threadedly connected to the output end of the transmission mechanism 8. By mounting the gold-silver alloy target onto the target support 4, the nickel substrate is fixed onto the substrate clamping device 9. After the vacuum device 2 is used to evacuate the coating mechanism 1 to the required vacuum level, argon gas is introduced as the sputtering gas in conjunction with the gas control device 6. The power supply device 3 is turned on, and the drive device 7 is started, which drives the transmission mechanism 8 to rotate the substrate clamping device 9 by a certain angle. This causes the substrate to rotate by a certain angle, and the gold and silver alloy target sputters gold and silver alloy atoms under the bombardment of argon ions, which are uniformly deposited on the surface of the nickel substrate to form a coating. Since silver and nickel are not solid soluble, silver can prevent nickel from diffusing outward, and gold can prevent oxygen from diffusing inward. The combined effect of the gold and silver alloy coating can enhance the protection of nickel, thereby enhancing the stability of the coating and effectively preventing the oxidation of nickel materials.
[0026] Please see Figure 2 and Figure 3 The positioning mechanism 5 includes a positioning seat 501, and a clamping seat 502 is fixedly installed on the top of the positioning seat 501. The positioning seat 501 is rotatably connected to the bottom inside the coating machine body 101. By rotatably connecting the positioning seat 501 to the inside of the coating machine body 101, the support position of the substrate can be positioned. At the same time, it can clamp the bottom of the substrate in conjunction with the clamping seat 502. When the substrate clamping device 9 rotates, it can drive the clamping seat 502 to rotate together with the substrate itself, so as to provide a flexible positioning and clamping effect for substrate coating.
[0027] Please see Figure 4 and Figure 5The driving device 7 includes a drive motor 701, with a first bevel gear 702 fixedly mounted on the output end of the drive motor 701. A second bevel gear 703 meshes with one side of the first bevel gear 702. The transmission mechanism 8 includes a transmission bevel gear 801, with the output end of the transmission bevel gear 801 fixedly connected to the output end of the second bevel gear 703. A second transmission gear 802 meshes with one side of the transmission bevel gear 801. An internal threaded shaft 803 is fixedly mounted on the output end of the second transmission gear 802. By starting the drive motor 701, the first bevel gear 702 is driven to rotate, thereby providing a driving force for the transmission bevel gear 801. This allows the transmission bevel gear 801 to drive the second transmission gear 802 to rotate a certain angle in a single operation. The second transmission gear 802 then provides a driving force for the internal threaded shaft 803, which in turn drives the substrate clamping device 9 to rotate. This allows the substrate clamping device 9 to rotate the substrate intermittently by a certain angle, resulting in the uniform sputtering of gold and silver alloy atoms onto the substrate for film deposition.
[0028] Please see Figure 3 and Figure 5 The substrate clamping device 9 includes a substrate clamping frame 901, with a clamping groove 902 inside the substrate clamping frame 901 and a spring clamping block 903 inside the substrate clamping frame 901. By connecting the top of the substrate clamping frame 901 to the internal threaded shaft 803, the substrate clamping frame 901 and the substrate can rotate together when the internal threaded shaft 803 rotates. The spring clamping blocks 903 are symmetrically arranged inside the clamping groove 902. After the substrate is inserted into the clamping groove 902, it is clamped inside by the spring clamping blocks 903 on both sides, so as to provide a convenient clamping effect for the substrate.
[0029] This embodiment provides a gold-silver alloy coating device for preventing nickel oxidation. Through the coordinated arrangement of a vacuum pump 201 and an input pipe 202, when coating a substrate is required, activating the vacuum pump 201 generates internal suction to create a vacuum inside the coating chamber 102, working in conjunction with the input pipe 202. Simultaneously, the top-mounted air pump 601 and air inlet valve 603 regulate the gas atmosphere within the coating chamber 102. Activating the power controller 302 provides power to the power generator 301, thus providing the energy required for sputtering the gold-silver alloy target on the target support 4. The power generators 301 are symmetrically arranged inside the walls of the coating chamber 102, allowing simultaneous target sputtering and coating. The positioning seat 501 is rotatably connected to the inside of the coating machine body 101 to facilitate positioning the substrate. The substrate clamping device 9, in conjunction with the clamping seat 502, can clamp the bottom of the substrate. When the substrate clamping device 9 rotates, it can rotate together with the substrate itself, thus providing a flexible positioning and clamping effect for substrate coating. By starting the drive motor 701, the first bevel gear 702 drives the second bevel gear 703 to rotate, which provides the driving force for the transmission bevel gear 801. This allows the transmission bevel gear 801 to drive the second transmission gear 802 to rotate a certain angle at a time, thereby driving the substrate clamping device 9 to rotate intermittently at a certain angle. This allows the gold and silver alloy atoms to be uniformly sputtered onto the substrate for coating. After the substrate is inserted into the clamping groove 902, it is rebounded by the spring clamping blocks 903 on both sides and clamped on the inside, thus providing a convenient clamping effect for the substrate.
[0030] The working principle of the above embodiments is as follows: The gold and silver alloy target is placed on the target holder 4. After the nickel substrate is inserted into the clamping groove 902, it is held in place by the spring clamping blocks 903 on both sides. The bottom of the substrate is inserted into the clamping seat 502. The sealing door 103 is closed. The vacuum pump 201 is started to generate suction force to work with the input pipe 202 to evacuate the coating chamber 102. The top air pump 601 is started and the air inlet valve 603 is opened, allowing argon gas to be delivered into the coating chamber 102 through the delivery pipe 602. The power controller 302 is started to provide power to the power generator 301 to power the target. The material provides sputtering energy, and the gold and silver alloy target sputters gold and silver alloy atoms under the bombardment of argon ions. At the same time, the drive motor 701 is started to drive the first bevel gear 702 to drive the second bevel gear 703 to rotate, which in turn drives the transmission bevel gear 801 to rotate. After that, the second transmission gear 802 is rotated by a certain angle at one time. The second transmission gear 802 provides the driving force for the internal thread shaft 803, which indirectly drives the substrate holder 901 to intermittently operate with the substrate held on the inner side, so that the gold and silver alloy atoms are uniformly sputtered onto the surface of the nickel substrate and uniformly deposited on the surface of the nickel substrate to form a coating.
[0031] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.
[0032] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application.
Claims
1. A gold-silver alloy coating device for preventing nickel material oxidation, comprising a coating mechanism (1), characterized in that: The coating mechanism (1) is provided with a vacuum device (2) on its outer surface, a power supply device (3) is provided inside the coating mechanism (1), a target support (4) is provided on the outer surface of the power supply device (3), a positioning mechanism (5) is rotatably connected to the bottom inside the coating mechanism (1), a gas control device (6) is provided on the top of the coating mechanism (1), a driving device (7) is provided on the top of the coating mechanism (1), a transmission mechanism (8) is fixedly installed at the output end of the driving device (7), and a substrate clamping device (9) is threadedly connected to the output end of the transmission mechanism (8).
2. The gold-silver alloy coating device for preventing nickel material oxidation according to claim 1, characterized in that: The coating mechanism (1) includes a coating machine body (101), the coating machine body (101) has a coating cavity (102) inside, and a sealing door (103) is hinged to the inner wall of the coating machine body (101).
3. The gold-silver alloy coating device for preventing nickel material oxidation according to claim 2, characterized in that: The vacuum pumping device (2) includes a vacuum pump (201), one end of which is provided with an input pipe (202) extending into the interior of the coating chamber (102). The gas control device (6) includes an air pump (601), the top of which is provided with a gas delivery pipe (602), and one end of which is provided with an air inlet valve (603).
4. The gold-silver alloy coating device for preventing nickel material oxidation according to claim 2, characterized in that: The power supply device (3) includes a power generator (301), which is located inside the coating chamber (102). A power controller (302) is provided on the outer surface of the coating machine body (101), and the power controller (302) is electrically connected to the power generator (301).
5. The gold-silver alloy coating device for preventing nickel material oxidation according to claim 2, characterized in that: The positioning mechanism (5) includes a positioning seat (501), and a clamping seat (502) is fixedly installed on the top of the positioning seat (501). The positioning seat (501) is rotatably connected to the bottom of the coating machine body (101).
6. The gold-silver alloy coating device for preventing nickel material oxidation according to claim 1, characterized in that: The driving device (7) includes a drive motor (701), the output end of which is fixedly mounted with a first bevel gear (702), and a second bevel gear (703) meshes with one side of the first bevel gear (702). The transmission mechanism (8) includes a transmission bevel gear (801), the output end of which is fixedly connected to the second bevel gear (703), and a second transmission gear (802) meshes with one side of the transmission bevel gear (801). An internal threaded shaft (803) is fixedly mounted on the output end of the second transmission gear (802).
7. The gold-silver alloy coating device for preventing nickel material oxidation according to claim 1, characterized in that: The substrate clamping device (9) includes a substrate clamping frame (901), the substrate clamping frame (901) has a clamping groove (902) inside, and a spring clamping block (903) is provided inside the substrate clamping frame (901).
8. The gold-silver alloy coating device for preventing nickel material oxidation according to claim 2, characterized in that: The top of the coating machine body (101) is provided with a protective cover (104).