Ceramic finger thermal shock deterioration experiment device

Abstract

The utility model discloses a kind of ceramic finger thermal shock deterioration experimental device, comprising: first box, heating unit is arranged, for heating target product;Second box, linear guide is arranged, for moving target product;Wherein, the target product end is detachably connected with the linear guide by connecting block. In the utility model, box is divided into cold and hot two groups of closed cavities, heating is carried out by heating unit arranged in the heating cavity of first box, and linear guide in the cooling cavity of second box is used to transfer target finger during testing, various operating conditions in actual working process can be simulated, whether fracture occurs is monitored by connected sensor, and then whether product is truly in line with actual service life requirement is accurately evaluated.

Description

Technical Field

[0001] This utility model relates to the field of experimental testing equipment technology, specifically to an experimental device for thermal shock deterioration of ceramic fingers. Background Technology

[0002] Ceramic fingers are made of high-performance ceramic materials such as zirconium oxide and alumina, possessing excellent wear resistance, chemical stability, and insulation. They can adapt to the harsh environments of high temperature, cleanrooms, and various corrosive gases in semiconductor manufacturing, stably adhering to wafers and avoiding scratches or debris during repeated contact with wafers. This ensures stability and accuracy during handling and prevents contamination or damage to the wafers.

[0003] Ceramic fingers need to withstand various temperature conditions, including rapid switching between high and low temperatures during the production process, sustained constant high temperatures in specific processes, and extreme conditions such as prolonged baking in high-temperature areas after machine shutdown. Therefore, it is necessary to test whether the ceramic fingers produced in the current batch meet actual service life requirements. Existing testing methods involve placing the ceramic fingers in an oven, which only examines the product's temperature resistance in a static high-temperature environment. This cannot simulate the rapid temperature changes and heat accumulation effects of continuous high-temperature baking in actual applications, and therefore cannot accurately assess whether they truly meet actual service life requirements. Utility Model Content

[0004] The purpose of this invention is to provide an experimental device for thermal shock deterioration of ceramic fingers in order to solve the above problems.

[0005] To achieve the above objectives, this utility model specifically adopts the following technical solution, including:

[0006] The first box is equipped with a heating unit for heating the target product;

[0007] The second box is equipped with linear guide rails for moving the target product;

[0008] The end of the target product is detachably connected to the linear guide rail via a connecting block.

[0009] As a further description of the above technical solution, a heating cavity is provided inside the first box.

[0010] As a further description of the above technical solution, the heating cavity is symmetrically provided with heating units, and the heating unit includes a first heating bar and a second heating bar.

[0011] As a further description of the above technical solution, the heating unit is provided in 4-8 groups.

[0012] As a further description of the above technical solution, the first heating strip is equidistantly disposed at the top of the heating cavity.

[0013] As a further description of the above technical solution, the second heating strip is equidistantly disposed at the bottom of the heating chamber.

[0014] As a further description of the above technical solution, an inlet / outlet groove is provided on one side of the heating chamber.

[0015] As a further description of the above technical solution, a cooling cavity is provided inside the second box, and the linear guide rail is disposed at the bottom of the cooling cavity.

[0016] As a further description of the above technical solution, a test seat is detachably mounted on the top of the linear guide rail, and the connecting block is detachably mounted on the top of the test seat.

[0017] As a further description of the above technical solution, a plug-in groove is provided on one side of the connecting block, and the end of the target product is inserted into the plug-in groove of the connecting block.

[0018] The beneficial effects of this utility model are as follows:

[0019] In this invention, the box body is divided into two closed cavities, one for heating and one for cooling. The heating unit in the first box body is used for heating, and the target finger is transferred through a linear guide rail in the second box body for cooling during testing. This can simulate various operating conditions in actual work. The connected sensors monitor whether a breakage occurs, thereby accurately assessing whether the product truly meets the actual service life requirements.

[0020] To more clearly illustrate the structural features and functions of this utility model, the following detailed description of this utility model is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the experimental device for thermal shock deterioration of ceramic fingers according to this utility model. Figure 1 ;

[0022] Figure 2 This is a schematic diagram of the structure of the experimental device for thermal shock deterioration of ceramic fingers according to this utility model. Figure 2 ;

[0023] Figure 3 This is a front view of the experimental device for thermal shock deterioration of ceramic fingers according to this utility model;

[0024] Figure 4 This is a side view of the experimental device for thermal shock deterioration of ceramic fingers according to this utility model;

[0025] Figure 5 This is a top view of the experimental device for thermal shock deterioration of ceramic fingers according to this utility model;

[0026] Figure 6 yes Figure 4 Schematic diagram of cross-section at point AA.

[0027] Figure label:

[0028] 1. First housing; 11. Heating chamber; 12. Inlet / outlet slot; 2. Heating unit; 21. First heating bar; 22. Second heating bar; 3. Target product; 4. Second housing; 41. Cooling chamber; 5. Linear guide rail; 6. Connecting block; 61. Insertion slot; 7. Test socket. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings.

[0030] like Figures 1-6 As shown, in one embodiment, a ceramic finger thermal shock deterioration experimental device includes: a first housing 1 and a second housing 4.

[0031] The first box 1 is equipped with a heating unit 2 for heating the target product 3; while the second box 4 is equipped with a linear guide rail 5 for moving the target product 3 (i.e., the target ceramic finger produced in the current batch).

[0032] The target product 3 is detachably connected to the linear guide rail 5 via the connecting block 6, which facilitates quick replacement and installation of ceramic mechanical fingers of different specifications. This effectively improves the versatility and ease of operation of the testing device and ensures the stability of the connection between the target product 3 and the linear guide rail 5 during movement. This allows the target product 3 to move flexibly and smoothly to the high-temperature environment of the first box 1 or the normal-temperature testing environment of the second box 4 under the drive of the linear guide rail 5, thereby completing performance testing under different working conditions.

[0033] For example, a heating chamber 11 is provided inside the first box body 1, and heating units 2 are symmetrically arranged inside the heating chamber 11, which can rapidly raise the ambient temperature inside the heating chamber 11 to a preset temperature value in a short time and maintain this constant temperature state for a long time.

[0034] Specifically, the heating unit 2 includes a first heating strip 21 and a second heating strip 22. The heating unit 2 is provided with 4-8 groups, and the number of groups to be started and the corresponding heating temperature can be flexibly adjusted according to the actual test conditions. Correspondingly, the first heating strip 21 is equidistantly arranged at the top of the heating cavity 11, while the second heating strip 22 is equidistantly arranged at the bottom of the heating cavity 11.

[0035] Furthermore, an inlet / outlet slot 12 is provided on one side of the heating chamber 11, and the position of the inlet / outlet slot 12 is directly opposite the target product 3, so that the target product 3 can enter and exit through the inlet / outlet slot 12, realizing reciprocating movement test between the high temperature environment of the first box 1 and other test environments of the second box 4.

[0036] Please continue reading. Figures 1-6 In this embodiment, a cooling cavity 41 is provided inside the second box 4, and the linear guide rail 5 is provided at the bottom of the cooling cavity 41.

[0037] For example, a test seat 7 is detachably mounted on the top of the linear guide rail 5, and a connecting block 6 is detachably mounted on the top of the test seat, which facilitates the maintenance, replacement or upgrading of the test seat 7 to meet the testing needs of different types of target products 3; correspondingly, a plug-in groove 61 is provided on one side of the connecting block 6, and the end of the target product 3 is inserted into the plug-in groove 61 of the connecting block 6, which ensures the stability of the target product 3 installation, reduces the additional stress on the product itself during the test, and ensures the authenticity of the test results.

[0038] It should be noted that the connecting block 6 is equipped with a detection sensor (such as a pressure sensor or a gravity sensor, which is not shown in the figure as it is prior art). During the thermal shock deterioration test, when the ceramic finger breaks due to extreme temperature changes, the impact force or weight change generated by the break will immediately trigger the detection sensor, thereby recording the test life data of the target product 3 in a timely manner.

[0039] Test principle:

[0040] (1) Deterioration process one (continuous high temperature working condition temperature test): The heating chamber 11 of the first box 1 is continuously heated to 700℃ and maintained at a constant temperature by multiple heating units 2. The target product 3 in the second box 4 is transferred into the heating chamber 11 by the linear guide rail 5 and placed for 4-6 hours to confirm whether the target product 3 has broken.

[0041] (2) Deterioration process two (temperature test of different areas under high temperature): The heating chamber 11 of the first box 1 is continuously heated and kept at a constant temperature by multiple heating units 2. Each heating unit 2 is set with a different heating temperature (e.g., 650℃ for the left area, 350℃ for the middle area, and 50℃ for the right area). The target product 3 in the second box 4 is transferred into the heating chamber 11 by the linear guide rail 5 and placed for 4-6 hours to confirm whether the target product 3 has broken.

[0042] (3) Deterioration process three (high and low temperature alternating working condition temperature test): The heating chamber 11 of the first box 1 is continuously heated to 700℃ and maintained at a constant temperature by multiple heating units 2. The target product 3 in the second box 4 is transferred into the heating chamber 11 by the linear guide rail 5. After being placed for 1 minute, the target product 3 is transferred back to the cooling chamber 41 (room temperature). This process is repeated 800-1000 times to confirm whether the target product 3 has broken.

[0043] Through the above technical solution, this application can simulate various operating conditions in actual working processes, monitor whether a breakage occurs through connected sensors, and thus accurately assess whether the product truly meets the actual service life requirements.

[0044] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An experimental apparatus for thermal shock degradation of ceramic fingers, characterized in that, include: The first box (1) is equipped with a heating unit (2) for heating the target product (3); The second box (4) is equipped with a linear guide rail (5) for moving the target product (3); The target product (3) is detachably connected to the linear guide rail (5) via a connecting block (6) at its end.

2. The experimental apparatus for thermal shock deterioration of ceramic fingers according to claim 1, characterized in that, The first box (1) has a heating cavity (11) inside.

3. The experimental apparatus for thermal shock deterioration of ceramic fingers according to claim 2, characterized in that, The heating chamber (11) is symmetrically provided with heating units (2), and the heating unit (2) includes a first heating bar (21) and a second heating bar (22).

4. The experimental apparatus for thermal shock deterioration of ceramic fingers according to claim 3, characterized in that, The heating unit (2) is provided with 4-8 groups.

5. The experimental apparatus for thermal shock deterioration of ceramic fingers according to claim 3, characterized in that, The first heating strip (21) is equidistantly disposed on the top of the heating chamber (11).

6. The experimental apparatus for thermal shock degradation of ceramic fingers according to claim 3, characterized in that, The second heating strip (22) is equidistantly disposed at the bottom of the heating chamber (11).

7. The experimental apparatus for thermal shock deterioration of ceramic fingers according to claim 3, characterized in that, An inlet / outlet groove (12) is provided on one side of the heating chamber (11).

8. The experimental apparatus for thermal shock deterioration of ceramic fingers according to claim 1, characterized in that, The second box (4) has a cooling cavity (41) inside, and the linear guide rail (5) is located at the bottom of the cooling cavity (41).

9. The experimental apparatus for thermal shock deterioration of ceramic fingers according to claim 8, characterized in that, The test seat (7) is detachably mounted on the top of the linear guide (5), and the connecting block (6) is detachably mounted on the top of the test seat (7).

10. The experimental apparatus for thermal shock deterioration of ceramic fingers according to claim 9, characterized in that, The connecting block (6) has a plug slot (61) on one side, and the end of the target product (3) is inserted into the plug slot (61) of the connecting block (6).

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